Memory cell and process for manufacturing the same
    11.
    发明授权
    Memory cell and process for manufacturing the same 有权
    记忆体及其制造方法相同

    公开(公告)号:US08722469B2

    公开(公告)日:2014-05-13

    申请号:US11867000

    申请日:2007-10-04

    IPC分类号: H01L29/788

    摘要: A memory cell and a process for manufacturing the same are provided. In the process, a first electrode layer is formed on a conductive layer over a substrate, and then a transition metal layer is formed on the first electrode layer. After that, the transition metal layer is subjected to a plasma oxidation step to form a transition metal oxide layer as a precursor of a data storage layer, and a second electrode layer is formed on the transition metal oxide layer. A memory cell is formed after the second electrode layer, the transition metal oxide layer and the first electrode layer are patterned into a second electrode, a data storage layer and a first electrode, respectively.

    摘要翻译: 提供了一种存储单元及其制造方法。 在该工艺中,在衬底上的导电层上形成第一电极层,然后在第一电极层上形成过渡金属层。 之后,对过渡金属层进行等离子体氧化工序,形成作为数据存储层的前体的过渡金属氧化物层,在过渡金属氧化物层上形成第二电极层。 在第二电极层,过渡金属氧化物层和第一电极层分别形成第二电极,数据存储层和第一电极之后形成存储单元。

    Resistive random access memory and method for manufacturing the same
    12.
    发明授权
    Resistive random access memory and method for manufacturing the same 有权
    电阻随机存取存储器及其制造方法

    公开(公告)号:US08642398B2

    公开(公告)日:2014-02-04

    申请号:US13346935

    申请日:2012-01-10

    IPC分类号: H01L21/82

    摘要: A resistive random access memory including, an insulating layer, a hard mask layer, a bottom electrode, a memory cell and a top electrode is provided. The insulating layer is disposed on the bottom electrode. The insulating layer has a contact hole having a first width. The hard mask layer has an opening. A portion of the memory cell is exposed from the opening and has a second width smaller than the first width. The top electrode is disposed on the insulating layer and is coupled with the memory cell.

    摘要翻译: 提供了包括绝缘层,硬掩模层,底电极,存储单元和顶电极的电阻随机存取存储器。 绝缘层设置在底部电极上。 绝缘层具有第一宽度的接触孔。 硬掩模层具有开口。 存储单元的一部分从开口露出并且具有小于第一宽度的第二宽度。 顶部电极设置在绝缘层上并与存储单元耦合。

    Resistive random access memory and method for manufacturing the same
    13.
    发明授权
    Resistive random access memory and method for manufacturing the same 有权
    电阻随机存取存储器及其制造方法

    公开(公告)号:US07667293B2

    公开(公告)日:2010-02-23

    申请号:US11898529

    申请日:2007-09-13

    IPC分类号: H01L29/02

    摘要: A resistive random access memory including, an insulating layer, a hard mask layer, a bottom electrode, a memory cell and a top electrode is provided. The insulating layer is disposed on the bottom electrode. The insulating layer has a contact hole having a first width. The hard mask layer has an opening. A portion of the memory cell is exposed from the opening and has a second width smaller than the first width. The top electrode is disposed on the insulating layer and is coupled with the memory cell.

    摘要翻译: 提供了包括绝缘层,硬掩模层,底电极,存储单元和顶电极的电阻随机存取存储器。 绝缘层设置在底部电极上。 绝缘层具有第一宽度的接触孔。 硬掩模层具有开口。 存储单元的一部分从开口露出并且具有小于第一宽度的第二宽度。 顶部电极设置在绝缘层上并与存储单元耦合。

    OPERATION METHOD FOR MULTI-LEVEL SWITCHING OF METAL-OXIDE BASED RRAM
    16.
    发明申请
    OPERATION METHOD FOR MULTI-LEVEL SWITCHING OF METAL-OXIDE BASED RRAM 有权
    基于金属氧化物的RRAM的多级开关操作方法

    公开(公告)号:US20090154222A1

    公开(公告)日:2009-06-18

    申请号:US12388655

    申请日:2009-02-19

    IPC分类号: G11C11/00 G11C7/00

    摘要: Memory devices and methods for operating such devices are described herein. A method as described herein for operating a memory device includes applying a sequence of bias arrangements across a selected metal-oxide memory element to change the resistance state from a first resistance state in a plurality of resistance states to a second resistance state in the plurality of resistance states. The sequence of bias arrangements comprise a first set of one or more pulses to change the resistance state of the selected metal-oxide memory element from the first resistance state to a third resistance state, and a second set of one or more pulses to change the resistance state of the selected metal-oxide memory element from the third resistance state to the second resistance state.

    摘要翻译: 这里描述了用于操作这样的设备的存储器件和方法。 本文描述的用于操作存储器件的方法包括:在所选择的金属氧化物存储元件上施加偏置布置序列,以将电阻状态从多个电阻状态中的第一电阻状态改变为多个电阻状态中的第二电阻状态 阻力状态。 偏置装置的顺序包括一个或多个脉冲的第一组,以将所选择的金属氧化物存储元件的电阻状态从第一电阻状态改变到第三电阻状态;以及第二组一个或多个脉冲,以改变 所选择的金属氧化物存储元件从第三电阻状态到第二电阻状态的电阻状态。