公开(公告)号：US5034647A

公开(公告)日：1991-07-23

申请号：US412104

申请日：1989-09-25

申请人： Masaru Ohtsuka

发明人： Masaru Ohtsuka

IPC分类号： H02N2/00 ,  B23Q1/28 ,  B23Q1/34 ,  B23Q5/50 ,  H01L21/68 ,  H01L41/09

CPC分类号： H02N2/101 ,  B23Q1/28 ,  B23Q1/34 ,  B23Q5/50 ,  H01L21/68

摘要： An inchworm type driving mechanism usable as a fine positioning device is disclosed. The mechanism includes at least two clamps for clamping a movable member, and an expansible/contractable device for driving the movable member. Each clamp includes a plurality of levers each having a pivot provided by a resilient hinge and an electrostrictive device disposed between end portions of the levers. Through the actuation of the electrostrictive device, the other end portions of the levers sandwich the opposite sides of the movable member to clamp the same. In one preferred form, each clamp is supported by a support, with low rigidity in the clamping direction, but with high rigidity in a direction perpendicular to the clamping direction. Thus, undesirable deformation or distortion of the movable member can be avoided and, therefore, high-precision positioning of the movable member is assured.

摘要翻译： 公开了一种可用作精细定位装置的蚯蚓型驱动机构。 该机构包括用于夹持可移动部件的至少两个夹具和用于驱动可移动部件的可膨胀/收缩装置。 每个夹具包括多个杠杆，每个杠杆具有由弹性铰链提供的枢轴和设置在杠杆的端部之间的电致伸缩装置。 通过致动电致伸缩装置，杆的另一端部将活动件的相对侧夹在其上。 在一个优选形式中，每个夹具由支撑件支撑，在夹紧方向上具有低刚性，但在垂直于夹紧方向的方向上具有高刚性。 因此，可以避免可动件的不期望的变形或变形，因此确保了可动部件的高精度定位。

公开(公告)号：US07341249B2

公开(公告)日：2008-03-11

申请号：US10961433

申请日：2004-10-07

申请人： Masaru Ohtsuka ,  Tomoya Motoyoshi ,  Tomohiro Kiriyama

发明人： Masaru Ohtsuka ,  Tomoya Motoyoshi ,  Tomohiro Kiriyama

IPC分类号： B65H31/24

CPC分类号： G03G15/6552 ,  G03G2215/00421

摘要： A sheet holding apparatus having: a feeding mechanism to feed a sheet on which an image is formed by an image forming apparatus, from a predetermined feeding position; a tray section having a tray to contain the sheet fed through the feeding mechanism; an initialization mechanism to initialize the tray section; and a control section to make a determination about necessity or unnecessity of an initialization of the tray section and/or a content of the initialization on the basis of information about a position of the tray, which is notified from the image forming apparatus, and to control the initialization of the tray section through the initialization mechanism according to the determination.

摘要翻译： 一种片材保持装置，具有：进给机构，用于从预定的进给位置向图像形成装置供给形成有图像的片材; 托盘部分，具有用于容纳通过进给机构馈送的片材的托盘; 用于初始化托盘部分的初始化机构; 以及控制部，其基于从图像形成装置通知的关于托盘的位置的信息，作出关于托盘部的初始化的必要性或不必要性的确定和/或初始化的内容，以及 根据确定，通过初始化机制控制托盘部分的初始化。

公开(公告)号：US07221460B2

公开(公告)日：2007-05-22

申请号：US10779213

申请日：2004-02-13

申请人： Masaru Ohtsuka

发明人： Masaru Ohtsuka

IPC分类号： G01B9/02

CPC分类号： G03F7/7085 ,  G03B27/68 ,  G03F7/70258

摘要： Disclosed is an optical system having a plurality of optical elements, for use in an optical instrument or a projection exposure apparatus, arranged to maintain a best optical performance by controlling a relative position of the plurality of optical elements. The optical system includes a reference mirror, a first measuring system for measuring a relative position, with respect to the reference mirror, of a first optical element among the plurality of optical elements and/or a first target mirror disposed so that a relative position thereof with respect to the first optical element is kept substantially unchanged, and a second measuring system for measuring a relative position, with respect to the reference mirror, of a second optical element among the plurality of optical elements and/or a second target mirror disposed so that a relative position thereof with respect to the second optical element is kept substantially unchanged. At least one of the first and second optical elements is moved on the basis of the measurement so that a relative positional relationship between the first and second optical elements is placed in predetermined positional relationship.

摘要翻译： 公开了一种具有多个光学元件的光学系统，用于光学仪器或投影曝光设备，被布置为通过控制多个光学元件的相对位置来保持最佳光学性能。 光学系统包括参考镜，用于测量多个光学元件中的第一光学元件相对于参考镜的相对位置的第一测量系统和/或布置成使得其相对位置的第一目标镜 相对于第一光学元件保持基本不变，以及用于测量多个光学元件中的第二光学元件相对于参考镜的相对位置和/或第二光学元件的第二目标镜的第二测量系统 其相对于第二光学元件的相对位置保持基本不变。 基于测量移动第一和第二光学元件中的至少一个，使得第一和第二光学元件之间的相对位置关系被放置在预定的位置关系中。

公开(公告)号：US6008901A

公开(公告)日：1999-12-28

申请号：US132772

申请日：1998-08-12

申请人： Masaru Ohtsuka

发明人： Masaru Ohtsuka

IPC分类号： G01B11/24 ,  G01B11/255 ,  G01B9/02

CPC分类号： G01B11/2441 ,  G01B11/255

摘要： A shape measuring apparatus of this invention includes a light source for generating light beams including two different frequency components, a first optical system for extracting a reference signal from the light beams including the two frequency components, a second optical system for reflecting one of the light beams including the two frequency components by a reference surface, reflecting the other light beam by a measuring region of a surface to be measured, and causing the two reflected light beams to interfere with each other, a photodetector having a plurality of photodetecting elements to detect the interference light beam from the optical system, a housing for holding at least a part of the optical system and the photodetector, an actuator for changing a relative position of the housing and the surface to be measured, and a length measuring device for detecting position information of the housing. An element corresponding to a light beam vertically reflected by the surface to be measured is selected from the photodetector. A measured signal is detected by adding output signals from the selected element and neighboring elements thereof. A distance between the housing and the surface to be measured is controlled in an optical axis direction such that a phase difference between the reference signal and the measured signal is held constant. A shape of the surface to be measured is measured from position information of the housing when the relative position of the housing and the surface to be measured is changed in a direction perpendicular to the optical axis.

摘要翻译： 本发明的形状测量装置包括用于产生包括两个不同频率分量的光束的光源，用于从包括两个频率分量的光束中提取参考信号的第一光学系统，用于反射光的一个的第二光学系统 将包括两个频率分量的光束通过参考表面反射，通过待测表面的测量区域反射另一个光束，并使两个反射光束彼此干涉;具有多个光电检测元件的光电检测器，用于检测 来自光学系统的干涉光束，用于保持光学系统的至少一部分的壳体和光电检测器，用于改变壳体和被测量表面的相对位置的致动器以及用于检测位置的长度测量装置 住房信息。 从光电检测器中选择与被测表面垂直反射的光束对应的元件。 通过从所选择的元件及其相邻元件添加输出信号来检测测量信号。 壳体与要测量的表面之间的距离在光轴方向上被控制，使得参考信号和测量信号之间的相位差保持恒定。 当壳体和被测量表面的相对位置在垂直于光轴的方向上改变时，从壳体的位置信息测量待测表面的形状。

公开(公告)号：US5991034A

公开(公告)日：1999-11-23

申请号：US997483

申请日：1997-12-23

申请人： Masaru Ohtsuka

发明人： Masaru Ohtsuka

IPC分类号： G01B11/24 ,  G01B11/26 ,  G01B9/02

CPC分类号： G01B11/2441 ,  G01B11/26 ,  G01B9/02003 ,  G01B9/02061 ,  G01B9/02068

摘要： An interferometer which can vary a direction of an incident beam and which enables more accurate measurement while avoiding eclipse includes an optical system adapted to form an interference beam from a beam from a surface to be measured, and a detected position varying member for varying a position to be detected of the interference beam in accordance with information on inclination of the surface to be measured.

摘要翻译： 可以改变入射光束的方向并且能够更准确地测量同时避免日蚀的干涉仪包括适于从待测表面的光束形成干涉光束的光学系统和用于改变位置的检测位置变化部件 根据关于被测量表面的倾斜度的信息来检测干涉光束。

公开(公告)号：US5066131A

公开(公告)日：1991-11-19

申请号：US388484

申请日：1989-08-02

申请人： Mikio Iwata ,  Takao Kariya ,  Masaru Ohtsuka

发明人： Mikio Iwata ,  Takao Kariya ,  Masaru Ohtsuka

IPC分类号： G12B5/00 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30

CPC分类号： G03F7/707 ,  G03F7/70716

摘要： Disclosed is a stage device suitably usable in a semiconductor microcircuit device manufacturing exposure apparatus for printing a pattern of a mask on a semiconductor wafer, for supporting and positioning the wafer with respect to plurality of directions. The device includes two plate members coupled to each other with a predetermined distance maintained therebetween. Each plate member has formed therein X, Y and .theta. stages defined by plural cutout grooves. Each stage is resiliently supported by a leaf spring functioning portion formed in the plate member. A Z stage for displacing the wafer in the Z direction is mounted to an outer circumferential part of one plate member, and a measuring mirror operable in combination with a laser interferometer is provided as a unit with the Z stage. Any motion of each stage can be controlled on the basis of the measurement made by using this mirror. The structure of the stage device ensures high precision and high rigidity and, therefore, the Z axis can be set substantially horizontally. Consequently the stage device is suitably applicable to an exposure apparatus to be used with an SOR ring.

摘要翻译： 公开了适用于半导体微电路器件制造曝光装置中的阶段装置，用于在半导体晶片上印刷掩模图案，用于相对于多个方向支撑和定位晶片。 该装置包括彼此联接并以其间保持预定距离的两个板构件。 每个板构件都形成有由多个切口槽限定的X，Y和θ台。 每个阶段由形成在板构件中的片簧功能部分弹性地支撑。 在Z方向上移动晶片的Z级安装在一个板状构件的外周部，与Z级一体地设置与激光干涉仪一起操作的测量镜。 可以根据使用该反射镜进行的测量来控制每个阶段的任何运动。 舞台装置的结构确保了高精度和高刚性，因此，Z轴可以基本上水平设置。 因此，平台装置适用于与SOR环一起使用的曝光装置。

公开(公告)号：US4993696A

公开(公告)日：1991-02-19

申请号：US125566

申请日：1987-11-25

申请人： Motomu Furukawa ,  Makoto Higomura ,  Masaru Ohtsuka ,  Hironori Yamamoto ,  Shinkichi Ohkawa ,  Koichi Matsushita ,  Yasuo Kawai ,  Takao Kariya ,  Haruyuki Kusunoki ,  Toshihiko Yamaura

发明人： Motomu Furukawa ,  Makoto Higomura ,  Masaru Ohtsuka ,  Hironori Yamamoto ,  Shinkichi Ohkawa ,  Koichi Matsushita ,  Yasuo Kawai ,  Takao Kariya ,  Haruyuki Kusunoki ,  Toshihiko Yamaura

IPC分类号： G03F7/20

CPC分类号： G03F7/70766 ,  G03F7/70358 ,  G03F7/70716 ,  G03F7/70991

摘要： A stage device usable, e.g., in an X-ray exposure apparatus, for moving a semiconductor wafer placed in a vacuum ambience and held by a wafer chuck, is disclosed. In the stage device, the wafer chuck holds the wafer so that the surface of the wafer onto which a circuit pattern is to be transferred is placed in a vertical plane, and the wafer chuck is moved vertically and horizontally for step-and-repeat exposure of the wafer. The device includes a guide mechanism, locking mechanism and a constant-tension spring mechanism, to thereby ensure high-accuracy movement of the wafer chuck in the vertical direction as well as high-precision positioning of the wafer. Further, in the stage device, a drive source producing a drive to move the wafer chuck is disposed in a vacuum ambience while, on the other hand, the supply of operating fluids to air bearing assemblies, for guiding the movement of the wafer chuck, is achieved by use of metal pipes coupled by rotary joints. The wafer chuck is resiliently supported by one of the air bearing assemblies, such that the wafer chuck can be moved in the vacuum ambience very accurately and without difficulties.

摘要翻译： 公开了一种用于移动放置在真空环境中并由晶片卡盘保持的半导体晶片的X射线曝光设备中的舞台装置。 在平台装置中，晶片卡盘保持晶片，使得将要传输电路图案的晶片的表面放置在垂直平面中，并且晶片卡盘垂直和水平移动以进行步进和重复曝光 的晶片。 该装置包括引导机构，锁定机构和恒定张力弹簧机构，从而确保晶片卡盘在垂直方向上的高精度移动以及晶片的高精度定位。 此外，在平台装置中，在真空环境中设置产生移动晶片卡盘的驱动器的驱动源，而另一方面，向空气轴承组件供应工作流体，用于引导晶片卡盘的运动， 通过使用通过旋转接头联接的金属管实现。 晶片卡盘由空气轴承组件中的一个弹性地支撑，使得晶片卡盘可以非常准确且无困难地在真空环境中移动。

公开(公告)号：US20130021650A1

公开(公告)日：2013-01-24

申请号：US13552363

申请日：2012-07-18

申请人： Masaru Ohtsuka ,  Susumu Kurihara

发明人： Masaru Ohtsuka ,  Susumu Kurihara

IPC分类号： G06K15/02

CPC分类号： G06F3/1217 ,  G06F3/121 ,  G06F3/1234 ,  G06F3/1282 ,  G06K15/403 ,  G06K15/408

摘要： An image forming apparatus that sets an output unit configured by a plurality of pages of which the order is determined as one copy and outputs the a plurality of copies of output units as a JOB includes an image forming unit that sequentially forms images corresponding to the plurality of pages on a plurality of sheets, a control unit that performs a calculation process of image eigenvalues based on the images for each of output units, a first storage unit storing a result of the calculation process performed for a reference copy of the output unit that is a specific one copy out of the plurality of copies of the output units, and a second storage unit storing a result of the calculation process performed for a copy of the output unit other than the reference copy out of the plurality of copies of the output units.

摘要翻译： 一种图像形成装置，其将由所述顺序确定为多个页面的多个页面构成的输出单元设置为一个副本，并输出作为作业的输出单元的多个副本，所述图像形成装置包括顺序地形成与所述多个图像相对应的图像的图像形成单元 多个页面上的页面的控制单元，基于每个输出单元的图像执行图像特征值的计算处理的控制单元，存储针对输出单元的参考副本执行的计算处理的结果的第一存储单元， 是输出单元的多个副本中的特定一个副本，以及第二存储单元，存储对于输出的多个副本中的除了参考副本之外的输出单元的副本执行的计算处理的结果的结果 单位。

公开(公告)号：US06972850B2

公开(公告)日：2005-12-06

申请号：US10374142

申请日：2003-02-27

申请人： Masaru Ohtsuka ,  Seiichi Kamiya ,  Hitoshi Iijima

发明人： Masaru Ohtsuka ,  Seiichi Kamiya ,  Hitoshi Iijima

IPC分类号： G01B11/24 ,  G01B9/02

CPC分类号： G01B11/2441

摘要： There is provided a shape measuring apparatus using an interferometer comprising a lens for condensing temporarily light waves from a light source, and a light wave shaping plate having a pinhole with suitable size adapted to convert the condensed light waves into an ideal spherical wave and a window provided in the vicinity of the pinhole and having enough size to pass therethrough light wave surface information, in which at least one lens having a reference surface and a surface to be measured the optical axes of which are slightly decentered in an optical path of the light waves passed through the pinhole is arranged in a position where the light waves which are made incident perpendicularly to the reference surface to be reflected therefrom pass through the pinhole again, and the light reflected from the surface to be measured pass through the window, and the reflected light reflected by the reference surface to pass through the pinhole again and the reflected light reflected by the surface to be measured to pass through the window are made to interfere with each other to measure a shape of the surface to be measured.

摘要翻译： 提供了一种使用干涉仪的形状测量装置，该干涉仪包括用于临时聚光来自光源的光的透镜，以及具有适于将冷凝的光波转换成理想球面波的适当尺寸的针孔的光波整形板和窗口 设置在针孔附近并且具有足够的尺寸以通过其中的光波表面信息，其中至少一个透镜具有参考表面和待测量的表面，其光轴在光的光路中稍微偏心 穿过针孔的波浪被布置在垂直于参考表面入射以被反射的光波再次穿过针孔的位置，并且从被测量表面反射的光通过窗口，并且 由参考面反射的反射光再次穿过针孔，反射的光线被反射 被测量的通过窗口的表面彼此干涉以测量待测表面的形状。

公开(公告)号：US06575446B2

公开(公告)日：2003-06-10

申请号：US09411915

申请日：1999-10-04

申请人： Hiroyuki Wakabayashi ,  Masato Hattori ,  Teruhiko Toyoizumi ,  Masaru Ohtsuka ,  Tetsuhiro Kodera ,  Kohji Yoshie

发明人： Hiroyuki Wakabayashi ,  Masato Hattori ,  Teruhiko Toyoizumi ,  Masaru Ohtsuka ,  Tetsuhiro Kodera ,  Kohji Yoshie

IPC分类号： B65H3304

CPC分类号： B42C1/12 ,  B65H45/18 ,  B65H2301/1635 ,  B65H2301/164 ,  B65H2408/1222 ,  B65H2408/125 ,  B65H2701/1829

摘要： An apparatus for finishing sheets is provided with a sheet conveyor to convey a sheet in a predetermined sheet conveyance direction on a sheet conveyance path; and a stapling device to conduct an edge stapling processing to put staple pins into an edge portion of sheets and a center stapling processing to put staple pins at a central portion of sheets, the stapling device having a plurality of staplers arranged in a direction perpendicular to the sheet conveyance direction, each of the plurality of staplers constructed in a two-divided piece structure including a driving mechanism provided one side of the sheet conveyance passage so as to put the staple pins into the sheets and a receiving mechanism provided the other side of the sheet conveyance passage so as to clinch the staple pins, and at least one of the plurality of staplers movable in a direction perpendicular to the sheet conveyance direction.

摘要翻译： 一种用于整理纸张的设备设置有片材输送机，用于在纸张传送路径上以预定的纸张传送方向传送纸张; 以及缝合装置，用于进行边缘装订处理以将钉销放入片材的边缘部分，以及中心装订处理以将钉销放置在片材的中心部分，所述装订装置具有沿垂直于所述片材的方向布置的多个订书机 所述片材输送方向，所述多个订书机中的每一个被构造成两分片片结构，所述两分片片结构包括设置在所述片材传送通道的一侧的驱动机构，以便将所述缝合钉放入片材中;以及接收机构， 片材输送通道，以便紧固订书针销，并且多个订书机中的至少一个可沿与纸张输送方向垂直的方向移动。