摘要:
In the chromium-containing material film of the present invention, an element is added thereto and is capable of bringing a mixture of the element and the chromium into a liquid phase at a temperature of 400° C. or lower. The use of such a chromium-containing material film as an optical film (e.g., a light-shielding film, an etching mask film, or an etching stopper film) of a photo mask blank can achieve an improvement in chlorine-dry etching while retaining the same optical characteristics and the like as those of the conventional chromium-containing material film, thereby increasing the patterning precision.
摘要:
A uniform thin phase-shifting photomask blank can be formed by depositing a thin film on a substrate by a reactive sputtering technique while passing, at least four times, the substrate over a sputtering target. In the formation of the blank, NO gas is used as the reactive gas, a target composed of a mixture of molybdenum and silicon is used as the sputtering target and a transparent substrate is used as the thin film-forming substrate to form, on the transparent substrate, a light-transmitting film capable of transmitting light rays having an intensity, which cannot substantially contribute to the exposure. In addition, the film is formed, on the substrate, through an opening having a sufficiently enlarged length along the substrate-conveying direction so that even regions whose deposition rate of the target component is not more than 90% of the maximum level thereof also contribute to the film-formation. The phase-shifting photomask blank thus prepared is subjected to a patterning treatment to form a phase-shifting photomask.
摘要:
A phase-shifting photomask blank is made by sputtering a target of molybdenum suicide with a sputtering gas to which nitric monoxide is added in a ratio of 2.65-6.47% by volume. A nitrided-oxide film of molybdenum silicide as a phase-shifting film is formed on a transparent substrate. A base phase-shifting film may be formed on a transparent substrate and then a nitrided-oxide film of molybdenum silicide as a surface layer may be formed on top of the base phase-shifting film by sputtering a target of molybdenum silicide with a sputtering gas to which nitric monoxide is added in a ratio of 0.59-6.47% by volume. The transparent substrate on which the nitrided-oxide film of molybdenum slicide is formed may be subjected to a heat treatment at a temperature of 200.degree. C. or more.
摘要:
A phase-shifting photomask blank is made by sputtering a target of molybdenum silicide with a sputtering gas to which nitric monoxide is added in a ratio of 2.65-6.47% by volume. A nitrided-oxide film of molybdenum silicide as a phase-shifting film is formed on a transparent substrate. A base phase-shifting film may be formed on a transparent substrate and then a nitrided-oxide film of molybdenum silicide as a surface layer may be formed on top of the base phase-shifting film by sputtering a target of molybdenum silicide with a sputtering gas to which nitric monoxide is added in a ratio of 0.59-6.47% by volume. The transparent substrate on which the nitrided-oxide film of molybdenum slicide is formed may be subjected to a heat treatment at a temperature of 200.degree. C. or more.
摘要:
A polyamide acid composition for preparing a polyimide which is improved in the stability in a form of solution and can extend the pot life of the composition comprising a solution of a polyamide acid in an organic solvent, the polyamide acid being a precursor of the polyimide, and an N-substituted heterocyclic compound as a chemical treating agent which can lower a rate of conversion of the polyamide acid to the polyimide. The pot life can be extremely extended to give the composition an enough flowability for a long time without reducing the excellent properties such as a heat resistance of the obtained polyimide.
摘要:
To record data in a flash memory, upon detecting that a current destination memory block is full, a control apparatus records data in a destination memory block one block by one block, with “in-advance” data erasure of the next memory block and by determining if data erasure of the next memory block is successful. When data erasure of the next memory block fails, such memory block is designated as broken, and such memory block is excluded from a group of blocks to be used as recording destination. After determining the data erasure result of a yet-next memory block is successful, the required data is copied to the yet-next memory block. Therefore, even when one of the blocks is broken, a sequential data recording in the flash memory is performed without increasing the number of data copy operations between blocks.
摘要:
In an air conditioning apparatus for a vehicle, plural electrical heating members are integrated with a heater core for heating air. The air conditioning apparatus includes a first control unit for determining number of the electrical heating members to be operated, and a second control unit for controlling electrical power supplied to each of the electrical heating members based on the number determined by the first control unit. The second control unit preferentially supplies electrical power to an electrical heating member plated at a side of a foot opening through which air blown toward a lower side of a passenger compartment. Thus, the lower side of the passenger compartment can be preferentially quickly heated by heat generated from the electrical heating members.
摘要:
In a collapsible bed structure for bed-ridden invalids, a bed section is provided on an upper open end of a bathtub, the bed section having at least first, second and third bed plates each pivotably connected at their neighboring side. A link structure is provided to change the bed section between a rest position in which the first, second and third bed plates are horizontally supported and an operative position in which the first, second and third bed plates are supported in a chair-shaped configuration within the bathtub. A pedestal plate is pivotably placed at one end by a hinge to the first plate of the bed section, the pedestal plate having a rack operative to move the pedestal plate upward around the hinge so as to raise the haunches of an occupant lying on the bed section to expedite the occupant's divestiture. A slide plate is slidably mounted on each of the first and second bed plates of the bed section to slightly slide along a lengthwise direction of the occupant so as to prevent a slippage between the occupant lying on the bed section and the first and second bed plates when changing the bed section from the rest position to the operative position.
摘要:
There is provided a method for plastic film surface treatment for improving printability and adhesion properties which comprises feeding a plastic film and a wiping web in the opposite direction to each other in a ratio of the film running speed to the wiping web running speed being 1/1 to 100/1 and bringing them into contact with each other between knip rolls under a proper pressure, whereby a weak layer containing oligomers and additives is wiped off from the plastic film surface. The treatment improves the printability and adhesion of film inexpensively in a stable manner without being affected by the varied properties of film to be treated and also without deteriorating the physical properties of the film.
摘要:
A new polyimide film which contains 30 to 800 ppm of titanium based on the weight of the film, and a process for producing a new polyimide film which comprises introducing an organic titanium compound substance into the film-forming polyimide resin prior to the casting step. This process enables one to control the film surface forming process and improve directly the adhesive properties of the film.