公开(公告)号：US06352050B2

公开(公告)日：2002-03-05

申请号：US09747822

申请日：2000-12-22

申请人： Mohammad Kamarehi ,  Gerald M. Cox

发明人： Mohammad Kamarehi ,  Gerald M. Cox

IPC分类号： C23C1600

CPC分类号： H01J37/32357 ,  H01J37/32192 ,  H01J37/32256 ,  H05H1/46 ,  H05H2001/4622

摘要： A remote plasma generator, coupling microwave frequency energy to a gas and delivering radicals to a downstream process chamber, includes several features which, in conjunction, enable highly efficient radical generation. In the illustrated embodiments, more efficient delivery of oxygen and fluorine radicals translates to more rapid photoresist etch or ash rates. A single-crystal, one-piece sapphire applicator and transport tube minimizes recombination of radicals in route to the process chamber and includes a bend to avoid direct line of sight from the glow discharge to the downstream process chamber. Microwave transparent cooling fluid within a cooling jacket around the applicator enables high power, high temperature plasma production. Additionally, dynamic impedance matching via a sliding short at the terminus of the microwave cavity reduces power loss through reflected energy. At the same time, a low profile microwave trap produces a more dense plasma to increase radical production. In one embodiment, fluorine and oxygen radicals are separately generated and mixed just upstream of the process chamber, enabling individually optimized radical generation of the two species.

摘要翻译： 远程等离子体发生器，将微波频率能量耦合到气体并将自由基递送到下游处理室，其包括若干特征，其结合使得能够实现高效率的自由基产生。 在所示实施例中，氧和氟自由基的更有效的递送转化为更快速的光致抗蚀剂蚀刻或灰分速率。 单晶，单件蓝宝石涂布器和输送管使路线中的自由基的复合最小化到处理室，并且包括弯曲以避免从辉光放电到下游处理室的直接视线。 涂布器周围的冷却套管内的微波透明冷却液可实现高功率，高温等离子体生产。 另外，通过在微波空腔末端的滑动短路的动态阻抗匹配通过反射能减少功率损耗。 同时，低调的微波阱产生更密集的等离子体以增加激进产生。 在一个实施方案中，分别产生氟和氧自由基，并刚刚混合在处理室的上游，从而能够单独优化两种物质的自由基产生。

公开(公告)号：US5594303A

公开(公告)日：1997-01-14

申请号：US402065

申请日：1995-03-09

申请人： James Simpson ,  Mohammad Kamarehi ,  Michael Ury ,  Brian Turner

发明人： James Simpson ,  Mohammad Kamarehi ,  Michael Ury ,  Brian Turner

IPC分类号： F21S2/00 ,  H01J65/04 ,  H05B41/24

CPC分类号： H01J65/044

摘要： Apparatus for efficiently exciting an electrodeless lamp to produce visible light. A source of microwave energy is coupled to a cylindrical cavity which encloses an electrodeless lamp. The cylindrical cavity includes a sidewall and end wall which is made from a metallic mesh which passes light produced from the electrodeless lamp. The electric field intensity within the cylindrical cavity is increased in the region above the lamp center. The increased electric field intensity produces a more uniform temperature across the bulb service, increasing the rate of plasma heating of gas molecules in the lamp.

摘要翻译： 用于有效地激发无电极灯以产生可见光的装置。 微波能量源耦合到包围无电极灯的圆柱形空腔。 圆柱形腔包括侧壁和端壁，其由通过无电极灯产生的光的金属网制成。 圆柱形腔内的电场强度在灯中心以上的区域增加。 增加的电场强度在灯管服务之间产生更均匀的温度，增加了灯中气体分子的等离子体加热速率。

公开(公告)号：US07679024B2

公开(公告)日：2010-03-16

申请号：US11317961

申请日：2005-12-23

申请人： Ing-Yann Albert Wang ,  Mohammad Kamarehi

发明人： Ing-Yann Albert Wang ,  Mohammad Kamarehi

IPC分类号： B23K10/00

CPC分类号： H01J37/32449 ,  H01J37/3244

摘要： A gas distribution arrangement configured to provide a process gas downstream to a plasma tube of a plasma processing chamber. The plasma tube has a top end. The arrangement includes a body having a first end. The first end has a width larger than the plasma tube and a protrusion end adapted to be inserted into the top end. The arrangement also includes a gas inlet vertically disposed in the body. The gas inlet extends from the first end toward the protrusion end and the gas inlet terminates before extending through the protrusion end. The arrangement further includes a plurality of directional inlet channels extending from a lower end of the gas inlet through the protrusion end.

摘要翻译： 气体分配装置，被配置为在等离子体处理室的等离子体管的下游提供处理气体。 等离子体管具有顶端。 该装置包括具有第一端的主体。 第一端具有比等离子体管大的宽度和适于插入顶端的突出端。 该装置还包括垂直设置在主体中的气体入口。 气体入口从第一端朝向突出端延伸，并且气体入口在延伸穿过突出端之前终止。 该装置还包括从气体入口的下端通过突出端延伸的多个定向入口通道。

公开(公告)号：US20070145020A1

公开(公告)日：2007-06-28

申请号：US11317874

申请日：2005-12-23

申请人： Mohammad Kamarehi ,  Ing-Yann Wang

发明人： Mohammad Kamarehi ,  Ing-Yann Wang

IPC分类号： B23K9/00

CPC分类号： H05H1/46 ,  H01J37/32229 ,  H01J37/32266 ,  H01J37/32357

摘要： A plasma generation arrangement configured to provide plasma downstream to a plasma processing chamber. The arrangement includes a microwave waveguide assembly having a longitudinal axis parallel with a first axis. The arrangement also includes a plasma tube assembly intersecting the microwave waveguide assembly. The plasma tube assembly has a longitudinal axis parallel with a second axis that is substantially orthogonal with the first axis. The plasma tube assembly also has a plasma-sustaining region defined by an upstream plurality of plasma traps and a downstream plurality of plasma traps.

摘要翻译： 等离子体产生装置，其被配置为向等离子体处理室的下游提供等离子体。 该装置包括具有与第一轴平行的纵轴的微波波导组件。 该布置还包括与微波波导组件相交的等离子体管组件。 等离子体管组件具有与第二轴线平行的纵向轴线，该第二轴线基本上与第一轴线正交。 等离子体管组件还具有由上游多个等离子体捕集器和下游多个等离子体捕集器限定的等离子体维持区域。

公开(公告)号：US06412438B2

公开(公告)日：2002-07-02

申请号：US09748060

申请日：2000-12-22

申请人： Mohammad Kamarehi ,  Gerald M. Cox

发明人： Mohammad Kamarehi ,  Gerald M. Cox

IPC分类号： C23C1600

CPC分类号： H01J37/32357 ,  H01J37/32192 ,  H01J37/32256 ,  H05H1/46 ,  H05H2001/4622

摘要： A remote plasma generator, coupling microwave frequency energy to a gas and delivering radicals to a downstream process chamber, includes several features which, in conjunction, enable highly efficient radical generation. In the illustrated embodiments, more efficient delivery of oxygen and fluorine radicals translates to more rapid photoresist etch or ash rates. A single-crystal, one-piece sapphire applicator and transport tube minimizes recombination of radicals in route to the process chamber and includes a bend to avoid direct line of sight from the glow discharge to the downstream process chamber. Microwave transparent cooling fluid within a cooling jacket around the applicator enables high power, high temperature plasma production. Additionally, dynamic impedance matching via a sliding short at the terminus of the microwave cavity reduces power loss through reflected energy. At the same time, a low profile microwave trap produces a more dense plasma to increase radical production. In one embodiment, fluorine and oxygen radicals are separately generated and mixed just upstream of the process chamber, enabling individually optimized radical generation of the two species.

摘要翻译： 远程等离子体发生器，将微波频率能量耦合到气体并将自由基递送到下游处理室，其包括若干特征，其结合使得能够实现高效率的自由基产生。 在所示实施例中，氧和氟自由基的更有效的递送转化为更快速的光致抗蚀剂蚀刻或灰分速率。 单晶，单件蓝宝石涂布器和输送管使路线中的自由基的复合最小化到处理室，并且包括弯曲以避免从辉光放电到下游处理室的直接视线。 涂布器周围的冷却套管内的微波透明冷却液可实现高功率，高温等离子体生产。 另外，通过在微波空腔末端的滑动短路的动态阻抗匹配通过反射能减少功率损耗。 同时，低调的微波阱产生更密集的等离子体以增加激进产生。 在一个实施方案中，分别产生氟和氧自由基，并刚刚混合在处理室的上游，从而能够单独优化两种物质的自由基产生。

公开(公告)号：US5831386A

公开(公告)日：1998-11-03

申请号：US324475

申请日：1994-10-17

申请人： Brian Turner ,  Mohammad Kamarehi ,  Leslie Levine ,  Michael G. Ury

发明人： Brian Turner ,  Mohammad Kamarehi ,  Leslie Levine ,  Michael G. Ury

IPC分类号： H01J61/18 ,  G03F7/20 ,  H01J17/16 ,  H01J17/20 ,  H01J61/12 ,  H01J61/16 ,  H01J61/30 ,  H01J61/38 ,  H01J65/04

CPC分类号： H01J65/044 ,  H01J61/12 ,  H01J61/16 ,  H01J61/30 ,  H01J61/38

摘要： A sulfur, selenium, and/or tellurium based lamp for providing visible light. The lamp is operated in a regime for providing high efficacy wherein the ratio of the volume to surface area of the bulb is greater than 0.45 cm, the concentration of the sulfur, selenium, or tellurium is less than 1.75 mg/cc, and the power density is between about 100 watts/cc and 5 watts/cc.

摘要翻译： 用于提供可见光的硫，硒和/或碲基灯。 该灯以提供高效率的方式操作，其中灯泡的体积与表面积的比例大于0.45cm，硫，硒或碲的浓度小于1.75mg / cc，功率 密度在约100瓦特/立方厘米至5瓦/厘米3之间。

公开(公告)号：US4954755A

公开(公告)日：1990-09-04

申请号：US177434

申请日：1988-04-04

申请人： Donald Lynch ,  Mohammad Kamarehi ,  Michael G. Ury ,  Charles H. Wood

发明人： Donald Lynch ,  Mohammad Kamarehi ,  Michael G. Ury ,  Charles H. Wood

IPC分类号： H01J65/04

CPC分类号： H01J65/044

摘要： A microwave powered electrodeless lamp which employs a hybrid cylindrical cavity which is part mesh and part solid. The cylindrical mesh portion permits the lamp to be used with an external reflector while the cylindrical solid portion enables a plurality of waveguides to be coupled to the cavity for high power operation.

摘要翻译： 一种微波供电的无电极灯，其采用混合圆柱形腔，其为网状部分和部分固体。 圆筒形网部分允许灯与外部反射器一起使用，而圆柱形实心部分使得多个波导能够耦合到空腔用于高功率操作。

公开(公告)号：US07562638B2

公开(公告)日：2009-07-21

申请号：US11318360

申请日：2005-12-23

申请人： Mohammad Kamarehi ,  Ing-Yann Albert Wang

发明人： Mohammad Kamarehi ,  Ing-Yann Albert Wang

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306

CPC分类号： H05H1/46 ,  H01J37/32211 ,  H01J37/32357

摘要： An arrangement configured to contain plasma within plasma tube assembly of downstream microwave plasma system. Downstream microwave plasma system is configured to generate plasma within plasma-sustaining region of plasma tube assembly and channeling at least portion of plasma downstream to plasma processing chamber of downstream microwave plasma system. Arrangement includes a first hollow center electrically conductive disk surrounding a cylindrical structure that defines plasma passage of plasma tube assembly. Arrangement also includes a second hollow center electrically conductive disk also surrounding the cylindrical structure. Second hollow center electrically conductive disk is configured to be disposed in a spaced-apart relationship relative to first hollow center electrically conductive disk so as to form a first hollow center disk-shape interstitial region between first hollow center electrically conductive disc and second hollow center electrically conductive disc.

摘要翻译： 配置成在下游微波等离子体系统的等离子体管组件内容纳等离子体的装置。 下游微波等离子体系统被配置为在等离子体管组件的等离子体维持区域内产生等离子体，并且将下游的等离子体处理室的等离子体下游的至少部分通道化。 布置包括围绕限定等离子体管组件的等离子体通道的圆柱形结构的第一空心中心导电盘。 布置还包括也围绕圆柱形结构的第二空心中心导电盘。 第二空心中心导电盘构造成相对于第一中空中心导电盘以间隔的关系设置，以便在第一中空中心导电盘和第二空心中心之间形成第一中空圆盘状间隙区域 导电盘。

公开(公告)号：US20070145021A1

公开(公告)日：2007-06-28

申请号：US11317961

申请日：2005-12-23

申请人： Ing-Yann Wang ,  Mohammad Kamarehi

发明人： Ing-Yann Wang ,  Mohammad Kamarehi

IPC分类号： B23K9/00

CPC分类号： H01J37/32449 ,  H01J37/3244

摘要： A gas distribution arrangement configured to provide a process gas downstream to a plasma tube of a plasma processing chamber. The plasma tube has a top end. The arrangement includes a body having a first end. The first end has a width larger than the plasma tube and a protrusion end adapted to be inserted into the top end. The arrangement also includes a gas inlet vertically disposed in the body. The gas inlet extends from the first end toward the protrusion end and the gas inlet terminates before extending through the protrusion end. The arrangement further includes a plurality of directional inlet channels extending from a lower end of the gas inlet through the protrusion end.

摘要翻译： 气体分配装置，被配置为在等离子体处理室的等离子体管的下游提供处理气体。 等离子体管具有顶端。 该装置包括具有第一端的主体。 第一端具有比等离子体管大的宽度和适于插入顶端的突出端。 该装置还包括垂直设置在主体中的气体入口。 气体入口从第一端朝向突出端延伸，并且气体入口在延伸穿过突出端之前终止。 该装置还包括从气体入口的下端通过突出端延伸的多个定向入口通道。

公开(公告)号：US20070144441A1

公开(公告)日：2007-06-28

申请号：US11318360

申请日：2005-12-23

申请人： Mohammad Kamarehi ,  Ing-Yann Wang

发明人： Mohammad Kamarehi ,  Ing-Yann Wang

IPC分类号： C23F1/00 ,  C23C16/00

CPC分类号： H05H1/46 ,  H01J37/32211 ,  H01J37/32357

摘要： An arrangement configured to contain plasma within plasma tube assembly of downstream microwave plasma system. Downstream microwave plasma system is configured to generate plasma within plasma-sustaining region of plasma tube assembly and channeling at least portion of plasma downstream to plasma processing chamber of downstream microwave plasma system. Arrangement includes a first hollow center electrically conductive disk surrounding a cylindrical structure that defines plasma passage of plasma tube assembly. Arrangement also includes a second hollow center electrically conductive disk also surrounding the cylindrical structure. Second hollow center electrically conductive disk is configured to be disposed in a spaced-apart relationship relative to first hollow center electrically conductive disk so as to form a first hollow center disk-shape interstitial region between first hollow center electrically conductive disc and second hollow center electrically conductive disc.

摘要翻译： 配置成在下游微波等离子体系统的等离子体管组件内容纳等离子体的装置。 下游微波等离子体系统被配置为在等离子体管组件的等离子体维持区域内产生等离子体，并且将下游的等离子体处理室的等离子体下游的至少部分通道化。 布置包括围绕限定等离子体管组件的等离子体通道的圆柱形结构的第一空心中心导电盘。 布置还包括也围绕圆柱形结构的第二空心中心导电盘。 第二空心中心导电盘被配置为相对于第一中空中心导电盘以间隔的关系设置，以便在第一中空中心导电盘和第二空心中心之间形成第一中空圆盘状间隙区域 导电盘。