公开(公告)号：US20070209400A1

公开(公告)日：2007-09-13

申请号：US10593508

申请日：2005-03-16

申请人： Achim Hofmann ,  Clemens Schmitt ,  Jan Vydra

发明人： Achim Hofmann ,  Clemens Schmitt ,  Jan Vydra

IPC分类号： C03B37/012

CPC分类号： C03B37/01211 ,  C03B37/0126 ,  C03B2201/04

摘要： According to a previously known method for producing an optical component from synthetic quartz glass, a coaxial arrangement comprising an outer jacket tube, an inner jacket tube that is provided with an internal bore, and a core rod whose bottom face rests on a thrust bearing within the internal bore, is fed into a heating zone in a vertical orientation, is softened therein zone by zone, and is elongated so as to obtain the quartz glass component. In order to create a simple and inexpensive method that is based on said method and makes it possible to reproducibly manufacture a high-quality optical component, the thrust bearing is embodied as a constriction of the internal bore of the inner jacket tube.

摘要翻译： 根据用于从合成石英玻璃制造光学部件的以前已知的方法，一种同轴装置，包括外护套管，设置有内孔的内护套和底面搁置在推力轴承内的芯棒 将内孔以垂直取向供给到加热区域中，逐渐被软化，并且被拉长以获得石英玻璃部件。 为了创建基于所述方法的简单且便宜的方法，并且使得可以可重复地制造高质量的光学部件，推力轴承被实施为内护套管的内孔的收缩。

公开(公告)号：US07080527B2

公开(公告)日：2006-07-25

申请号：US10310349

申请日：2002-12-05

申请人： Bodo Kühn ,  Bruno Uebbing ,  Martin Trommer ,  Stefan Ochs ,  Stephan Thomas ,  Steffen Kaiser ,  Jan Vydra

发明人： Bodo Kühn ,  Bruno Uebbing ,  Martin Trommer ,  Stefan Ochs ,  Stephan Thomas ,  Steffen Kaiser ,  Jan Vydra

IPC分类号： C03B8/04

CPC分类号： C03C4/0071 ,  C03B19/1453 ,  C03B19/1469 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/52 ,  C03C2203/54 ,  Y02P40/57

摘要： The present invention relates to a quartz glass blank for an optical component for transmission of ultraviolet radiation of a wavelength of 250 nm or shorter, and to a use of the quartz glass blank in microlithography in combination with ultraviolet radiation of a wavelength of 250 nm or shorter. Moreover, the invention relates to a procedure for manufacture of the quartz glass blank. A quartz glass blank of the described type should show little induced absorption and be optimized with respect to compaction and decompaction. The quartz glass blank according to the invention is characterized by the following properties: a glass structure essentially free of oxygen defect sites, an H2-content in the range of 0.1×1016 molecules/cm3 to 4.0×1016 molecules/cm3, an OH-content in the range of 125 wt-ppm to 450 wt-ppm, an SiH group-content of less than 5×1016 molecules/cm3, a refractive index inhomogeneity, Δn, of less than 2 ppm, and a stress birefringence of less than 2 nm/cm. In the use according to the invention, the quartz glass blank complies with dimensioning rules (2), (3), and (4) in terms of its minimal and maximal hydrogen contents and OH-content, CH2min, CH2max, and COH, respectively, with P being the pulse number and ε being the energy density (in mJ/cm2): CH2min [molecules/cm3]=1×106ε2P,  (2) CH2max [molecules/cm3]=2×1018ε,  (3) COH [wt-ppm]=1,700×ε[mJ/cm2]0.4±50.  (4) The procedure according to the invention is characterized in that a mixed quartz glass is generated from a first and a second quartz glass by mixing the two quartz glasses in the course of a homogenization treatment.

公开(公告)号：US08544299B2

公开(公告)日：2013-10-01

申请号：US12448998

申请日：2008-01-15

申请人： Gerhard Schoetz ,  Karsten Braeuer ,  Jan Vydra

发明人： Gerhard Schoetz ,  Karsten Braeuer ,  Jan Vydra

IPC分类号： C03B37/018

CPC分类号： C03B37/01426 ,  C03B37/01211 ,  C03B37/01466 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2203/42 ,  C03C3/06

摘要： To improve a known method for making a quartz glass tube as a semifinished product for the manufacture of optical fibers, the tube comprising an inner fluorine-doped quartz glass layer and an outer quartz glass layer, so as to achieve inexpensive manufacture and improved dimensional stability of the quartz glass tube, it is suggested according to the invention that the quartz glass of the inner layer should be produced in a first plasma deposition process with formation of an inner layer having a wall thickness of at least 1.5 mm, with a fluorine content of at least 1.5% by wt. being set in the quartz glass, and that the quartz glass of the outer layer should be produced in a second plasma deposition process and deposited directly or indirectly on the inner layer with formation of a composite tube, and that the composite tube should be elongated into the quartz glass tube.

摘要翻译： 为了改进用于制造石英玻璃管作为制造光纤的半成品的已知方法，该管包括内部掺氟石英玻璃层和外部石英玻璃层，以便实现便宜的制造和改善的尺寸稳定性 的石英玻璃管，根据本发明提出，内层的石英玻璃应该在第一等离子体沉积工艺中生产，形成壁厚至少为1.5mm的内层，氟含量 至少1.5重量％。 设置在石英玻璃中，并且外层的石英玻璃应该在第二等离子体沉积工艺中生产并直接或间接沉积在内层上，形成复合管，并且复合管应该被拉长成 石英玻璃管。

公开(公告)号：US20100034998A1

公开(公告)日：2010-02-11

申请号：US12448998

申请日：2008-01-15

申请人： Gerhard Schoetz ,  Karsten Braeuer ,  Jan Vydra

发明人： Gerhard Schoetz ,  Karsten Braeuer ,  Jan Vydra

IPC分类号： C03C13/04 ,  C03B37/018 ,  B28B23/08

CPC分类号： C03B37/01426 ,  C03B37/01211 ,  C03B37/01466 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2203/42 ,  C03C3/06

摘要： To improve a known method for making a quartz glass tube as a semifinished product for the manufacture of optical fibers, the tube comprising an inner fluorine-doped quartz glass layer and an outer quartz glass layer, so as to achieve inexpensive manufacture and improved dimensional stability of the quartz glass tube, it is suggested according to the invention that the quartz glass of the inner layer should be produced in a first plasma deposition process with formation of an inner layer having a wall thickness of at least 1.5 mm, with a fluorine content of at least 1.5% by wt. being set in the quartz glass, and that the quartz glass of the outer layer should be produced in a second plasma deposition process and deposited directly or indirectly on the inner layer with formation of a composite tube, and that the composite tube should be elongated into the quartz glass tube.

摘要翻译： 为了改进用于制造石英玻璃管作为制造光纤的半成品的已知方法，该管包括内部掺氟石英玻璃层和外部石英玻璃层，以便实现便宜的制造和改善的尺寸稳定性 的石英玻璃管，根据本发明提出，内层的石英玻璃应该在第一等离子体沉积工艺中生产，形成壁厚至少为1.5mm的内层，氟含量 至少1.5重量％。 设置在石英玻璃中，并且外层的石英玻璃应该在第二等离子体沉积工艺中生产并直接或间接沉积在内层上，形成复合管，并且复合管应该被拉长成 石英玻璃管。

公开(公告)号：US06550277B1

公开(公告)日：2003-04-22

申请号：US09709168

申请日：2000-11-10

申请人： Bruno Uebbing ,  Jan Vydra

发明人： Bruno Uebbing ,  Jan Vydra

IPC分类号： C03B1906

CPC分类号： C03C4/0085 ,  C03B19/1453 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/075 ,  C03C3/06 ,  C03C2201/06 ,  C03C2201/08 ,  C03C2201/23 ,  C03C2203/40 ,  Y10S65/08 ,  Y10S65/16 ,  Y10S501/905

摘要： The invention concerns a quartz glass body for an optical component for the transmission of UV radiation with a wavelength of 250 nm and less, especially for a wavelength of 157 nm, as well as a process for the manufacture of the quartz glass body where fine quartz glass particles are formed by flame hydrolysis of a silicon compound, deposited and vitrified. Suitability of a quartz glass as represented by high base transmission and radiation resistance depends on structural properties caused by local stoichiometric deviations, and on the chemical composition. The quartz glass body according to the inventions is distinguished by a uniform base transmission (relative change of base transmission ≦1%) in the wavelength range from 155 nm to 250 nm (radiation penetration depth of 10 mm) of at least 80%, a low OH content (less than 10 ppm by weight) and a glass structure substantially free from oxygen defect centers. A quartz glass body of this kind is manufactured by a process which allows bulk embedding of hydrogen or oxygen into the glass network in that at least a two stage heat treatment takes place at temperatures ranging from 850° C. to 1600° C. before the vitrification, the last stage comprising sintering at a temperature between 1300° C. and 1600° C. in an atmosphere containing hydrogen or oxygen, or a nonflammable mixture of these substances.

摘要翻译： 本发明涉及一种用于传输波长为250nm以下，特别是波长为157nm的紫外线的光学部件的石英玻璃体，以及用于制造石英玻璃体的方法，其中精细的石英 通过硅化合物的火焰水解形成玻璃颗粒，沉积并玻璃化。 由高碱性透射和耐辐射性表示的石英玻璃的适用性取决于由局部化学计量偏差引起的结构特性以及化学成分。 根据本发明的石英玻璃体的特征在于在155nm至250nm（辐射穿透深度为10mm）的波长范围内的均匀的基底透射率（基底透射率的相对变化<= 1％）为至少80％ 低OH含量（小于10ppm重量）和基本上不含氧缺陷中心的玻璃结构。 这种石英玻璃体是通过允许将氢气或氧气大量嵌入玻璃网络的方法来制造的，因为至少在两个阶段之间的热处理在850℃至1600℃之间的温度下进行 玻璃化，最后阶段包括在含有氢气或氧气的气氛中在1300℃和1600℃之间的温度下烧结，或这些物质的不可燃混合物。

公开(公告)号：US08635889B2

公开(公告)日：2014-01-28

申请号：US12737371

申请日：2009-07-01

申请人： Jan Vydra ,  Peter Bauer ,  Karsten Braeuer ,  Michael Huenermann

发明人： Jan Vydra ,  Peter Bauer ,  Karsten Braeuer ,  Michael Huenermann

IPC分类号： C03B37/018

CPC分类号： C03B37/01823 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/31 ,  C03B2203/22 ,  G02B6/036 ,  Y02P40/57

摘要： A known refraction-sensitive optical fiber comprises a core zone with an index of refraction nK, a jacket zone surrounding the core zone, said jacket zone having an index of refraction nM, and an annular zone made of quartz glass doped with fluorine, said annular zone surrounding the jacket zone and having an index of refraction nF, where nF

摘要翻译： 已知的折射敏感光纤包括具有折射率nK的核心区域，围绕核心区域的护套区域，所述护套区域具有折射率nM，以及由掺杂氟的石英玻璃制成的环形区域，所述环形 并且具有折射率nF，其中nF

公开(公告)号：US06289161B1

公开(公告)日：2001-09-11

申请号：US09198883

申请日：1998-11-23

申请人： Gerhard Schötz ,  Jan Vydra

发明人： Gerhard Schötz ,  Jan Vydra

IPC分类号： G02B600

CPC分类号： C03C13/045 ,  C03B37/01446 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/07 ,  C03B2201/08 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/23 ,  C03C2201/11 ,  C03C2201/23 ,  G02B6/02 ,  G02B6/02395 ,  G02B6/443

摘要： In a known optical component a cylindrical glass core of synthetic quartz glass contains hydroxyl groups, a maximum 200 wt.-ppm of chlorine, and no dopant in the form of a metal oxide. The glass core is axially enveloped by a glass mantle of doped quartz glass which has a lower refractive index than the glass core. Setting out from this, in order to offer an optical component of quartz glass for broad-band transmission, especially for broad-band spectroscopy, which is characterized by low attenuation over a broad range of wavelengths, it is proposed by the invention that the core glass contain less than 5 wt.-ppm of hydroxyl groups.

摘要翻译： 在已知的光学组件中，合成石英玻璃的圆柱形玻璃芯包含羟基，最大为200重量ppm的氯，并且不含金属氧化物形式的掺杂剂。 玻璃芯由掺杂石英玻璃的玻璃罩轴向包围，折射率比玻璃芯低。 从此出发，为了提供用于宽带传输的石英玻璃的光学部件，特别是对于在宽波长范围内具有低衰减特征的宽带光谱，本发明提出了核心 玻璃含有小于5重量ppm的羟基。