Semiconductor device having D mode JFET and E mode JFET and method for manufacturing the same
    11.
    发明授权
    Semiconductor device having D mode JFET and E mode JFET and method for manufacturing the same 有权
    具有D型JFET和E型JFET的半导体器件及其制造方法

    公开(公告)号:US08373209B2

    公开(公告)日:2013-02-12

    申请号:US12974516

    申请日:2010-12-21

    Abstract: A semiconductor device includes: a substrate; and depletion and enhancement mode JFETs. The depletion mode JFET includes: a concavity on the substrate; a channel layer in the concavity; a first gate region on the channel layer; first source and drain regions on respective sides of the first gate region in the channel layer; first gate, source and drain electrodes. The enhancement mode JFET includes: a convexity on the substrate; the channel layer on the convexity; a second gate region on the channel layer; second source and drain regions on respective sides of the second gate region in the channel layer; second gate, source and drain electrodes. A thickness of the channel layer in the concavity is larger than a thickness of the channel layer on the convexity.

    Abstract translation: 半导体器件包括:衬底; 以及耗尽和增强型JFET。 耗尽型JFET包括:衬底上的凹面; 凹陷中的沟道层; 沟道层上的第一栅极区; 在沟道层中的第一栅极区域的相应侧上的第一源极和漏极区域; 第一栅极,源极和漏极。 增强模式JFET包括:在衬底上的凸起; 沟道层上凸; 沟道层上的第二栅极区; 在沟道层中的第二栅极区的相应侧上的第二源极和漏极区; 第二栅极,源极和漏极。 凹槽中的沟道层的厚度大于沟槽层的厚度。

    SEMICONDUCTOR DEVICE HAVING D MODE JFET AND E MODE JFET AND METHOD FOR MANUFACTURING THE SAME
    12.
    发明申请
    SEMICONDUCTOR DEVICE HAVING D MODE JFET AND E MODE JFET AND METHOD FOR MANUFACTURING THE SAME 有权
    具有D模式JFET和E模式JFET的半导体器件及其制造方法

    公开(公告)号:US20110156053A1

    公开(公告)日:2011-06-30

    申请号:US12974516

    申请日:2010-12-21

    Abstract: A semiconductor device includes: a substrate; and depletion and enhancement mode JFETs. The depletion mode JFET includes: a concavity on the substrate; a channel layer in the concavity; a first gate region on the channel layer; first source and drain regions on respective sides of the first gate region in the channel layer; first gate, source and drain electrodes. The enhancement mode JFET includes: a convexity on the substrate; the channel layer on the convexity; a second gate region on the channel layer; second source and drain regions on respective sides of the second gate region in the channel layer; second gate, source and drain electrodes. A thickness of the channel layer in the concavity is larger than a thickness of the channel layer on the convexity.

    Abstract translation: 半导体器件包括:衬底; 以及耗尽和增强型JFET。 耗尽型JFET包括:衬底上的凹面; 凹陷中的沟道层; 沟道层上的第一栅极区; 在沟道层中的第一栅极区域的相应侧上的第一源极和漏极区域; 第一栅极,源极和漏极。 增强模式JFET包括:在衬底上的凸起; 沟道层上凸; 沟道层上的第二栅极区; 在沟道层中的第二栅极区的相应侧上的第二源极和漏极区; 第二栅极,源极和漏极。 凹槽中的沟道层的厚度大于沟槽层的厚度。

    SiC semiconductor device having CJFET and method for manufacturing the same
    14.
    发明授权
    SiC semiconductor device having CJFET and method for manufacturing the same 有权
    具有CJFET的SiC半导体器件及其制造方法

    公开(公告)号:US08748948B2

    公开(公告)日:2014-06-10

    申请号:US13012123

    申请日:2011-01-24

    Abstract: A SiC semiconductor device includes: a SiC substrate made of intrinsic SiC having semi-insulating property; first and second conductive type SiC layers disposed in the substrate; an insulation separation layer made of intrinsic SiC for isolating the first conductive type SiC layer from the second conductive type SiC layer; first and second conductive type channel JFETs disposed in the first and second conductive type SiC layers, respectively. The first and second conductive type channel JFETs provide a complementary junction field effect transistor. Since an electric element is formed on a flat surface, a manufacturing method is simplified. Further, noise propagation at high frequency and current leakage at high temperature are restricted.

    Abstract translation: SiC半导体器件包括:由具有半绝缘性的本征SiC制成的SiC衬底; 设置在基板中的第一和第二导电型SiC层; 由本征SiC制成的绝缘分离层,用于将第一导电型SiC层与第二导电型SiC层隔离; 分别设置在第一和第二导电型SiC层中的第一和第二导电型沟道JFET。 第一和第二导电型沟道JFET提供互补结型场效应晶体管。 由于电气元件形成在平坦表面上,所以制造方法简单。 此外,高频下的噪声传播和高温下的电流泄漏受到限制。

    Semiconductor device with junction field-effect transistor and manufacturing method of the same
    15.
    发明授权
    Semiconductor device with junction field-effect transistor and manufacturing method of the same 有权
    具有结型场效应晶体管的半导体器件及其制造方法

    公开(公告)号:US08519452B2

    公开(公告)日:2013-08-27

    申请号:US13248173

    申请日:2011-09-29

    Abstract: A semiconductor device with a JFET is disclosed. The semiconductor device includes a trench and a contact embedded layer formed in the trench. A gate wire is connected to the contact embedded layer, so that the gate wire is connected to an embedded gate layer via the contact embedded layer. In this configuration, it is possible to downsize a contact structure between the embedded gate layer and the gate wire.

    Abstract translation: 公开了一种具有JFET的半导体器件。 半导体器件包括形成在沟槽中的沟槽和接触嵌入层。 栅极线连接到触点嵌入层,使得栅极线经由接触嵌入层连接到嵌入式栅极层。 在这种结构中,可以减小嵌入式栅极层与栅极线之间的接触结构。

    Wide band gap semiconductor device including junction field effect transistor
    16.
    发明授权
    Wide band gap semiconductor device including junction field effect transistor 有权
    宽带隙半导体器件包括结场效应晶体管

    公开(公告)号:US08274086B2

    公开(公告)日:2012-09-25

    申请号:US12458968

    申请日:2009-07-28

    Abstract: A wide band gap semiconductor device has a transistor cell region, a diode forming region, an electric field relaxation region located between the transistor cell region and the diode forming region, and an outer peripheral region surrounding the transistor cell region and the diode forming region. In the transistor cell region, a junction field effect transistor is disposed. In the diode forming region, a diode is disposed. In the electric field relaxation region, an isolating part is provided. The isolating part includes a trench dividing the transistor cell region and the diode forming region, a first conductivity-type layer disposed on an inner wall of the trench, and a second conductivity-type layer disposed on a surface of the first conductivity-type layer so as to fill the trench. The first conductivity-type layer and the second conductivity-type layer provide a PN junction.

    Abstract translation: 宽带隙半导体器件具有晶体管单元区域,二极管形成区域,位于晶体管单元区域和二极管形成区域之间的电场弛豫区域以及围绕晶体管单元区域和二极管形成区域的外围区域。 在晶体管单元区域中,设置结型场效应晶体管。 在二极管形成区域中,设置二极管。 在电场弛豫区域中,设置隔离部。 隔离部分包括分隔晶体管单元区域和二极管形成区域的沟槽,设置在沟槽的内壁上的第一导电类型层和设置在第一导电类型层的表面上的第二导电类型层 以填补沟槽。 第一导电型层和第二导电型层提供PN结。

    SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
    19.
    发明申请
    SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
    硅碳化硅半导体器件及其制造方法

    公开(公告)号:US20110156054A1

    公开(公告)日:2011-06-30

    申请号:US12976116

    申请日:2010-12-22

    Abstract: A silicon carbide semiconductor device having a JFET or a MOSFET includes a semiconductor substrate and a trench. The semiconductor substrate has a silicon carbide substrate, a drift layer on the silicon carbide substrate, a first gate region on the drift layer, and a source region on the first gate region. The trench has a strip shape with a longitudinal direction and reaches the drift layer by penetrating the source region and the first gate region. The trench is filled with a channel layer and a second gate region on the channel layer. The source region is not located at an end portion of the trench in the longitudinal direction.

    Abstract translation: 具有JFET或MOSFET的碳化硅半导体器件包括半导体衬底和沟槽。 半导体衬底具有碳化硅衬底,碳化硅衬底上的漂移层,漂移层上的第一栅极区域和第一栅极区域上的源极区域。 沟槽具有纵向方向的带状,并通过穿透源极区域和第一栅极区域而到达漂移层。 在沟道层上填充沟道层和第二栅极区域。 源极区域不位于沟槽的纵向方向的端部。

    Semiconductor device having JFET and method for manufacturing the same
    20.
    发明申请
    Semiconductor device having JFET and method for manufacturing the same 审中-公开
    具有JFET的半导体器件及其制造方法

    公开(公告)号:US20110156052A1

    公开(公告)日:2011-06-30

    申请号:US12926894

    申请日:2010-12-16

    Abstract: A semiconductor device having a JFET includes: a substrate made of semi-insulating semiconductor material; a gate region in a surface portion of the substrate; a channel region disposed on and contacting the gate region; a source region and a drain region disposed on both sides of the gate region so as to sandwich the channel region, respectively; a source electrode electrically coupled with the source region; a drain electrode electrically coupled with the drain region; and a gate electrode electrically coupled with the gate region. An impurity concentration of each of the source region and the drain region is higher than an impurity concentration of the channel region.

    Abstract translation: 具有JFET的半导体器件包括:由半绝缘半导体材料制成的衬底; 在所述基板的表面部分中的栅极区域; 设置在栅区上并与其接触的沟道区; 源极区域和漏极区域,分别设置在栅极区域的两侧,以夹持沟道区域; 源极,与源极电耦合; 漏极,与漏极区电耦合; 以及与栅极区域电耦合的栅电极。 源极区域和漏极区域中的每一个的杂质浓度高于沟道区域的杂质浓度。

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