公开(公告)号：US20060071161A1

公开(公告)日：2006-04-06

申请号：US10522638

申请日：2003-07-29

Applicant: Richard Syms

Inventor： Richard Syms

IPC: B01D59/44

CPC classification number: H01J49/4215 ,  H01J49/0018

Abstract: A method of constructing a micro-engineered mass spectrometer from bonded silicon-on-insulator (BSOI) wafers is described with reference to a quadrupole spectrometer. The quadrupole geometry is achieved using two BSOI wafers (200), which are bonded together to form a monolithic block (410). Deep etched features and springs formed in the outer silicon layers are used to locate cylindrical metallic electrode rods (300). The precision of the assembly is determined by a combination of lithography and deep etching, and by the mechanical definition of the bonded silicon layers. Deep etched features formed in the inner silicon layers are used to define ion entrance and ion collection optics. Other features such as fluidic channels may be incorporated.

Abstract translation: 参考四极谱仪描述从粘合的绝缘体上硅（BSOI）晶片构建微型工程质谱仪的方法。 使用两个BSOI晶片（200）实现四极几何形状，其结合在一起以形成整体块（410）。 形成在外硅层中的深蚀刻特征和弹簧用于定位圆柱形金属电极棒（300）。 组件的精度通过光刻和深蚀刻的组合以及粘合硅层的机械定义来确定。 内部硅层中形成的深蚀刻特征用于限定离子入射和离子收集光学。 可并入其它特征如流体通道。

公开(公告)号：US6025591A

公开(公告)日：2000-02-15

申请号：US939725

申请日：1997-10-03

Applicant: Stephen Taylor ,  Thomas Tate ,  Richard Syms ,  Howard Dorey

Inventor： Stephen Taylor ,  Thomas Tate ,  Richard Syms ,  Howard Dorey

IPC: H01J49/42

CPC classification number: H01J49/4215 ,  B82Y10/00 ,  H01J49/0018

Abstract: A quadrupole mass spectrometer comprises an ion source (20), a mass filter (22) and an ion collector (24). The ion source comprises an array (30) of quantum wires. The mass filter comprises four glass fibres (32) coated with nickel and the ion collector is an a electrode connected to an integrated complementary metal oxide semiconductor temperature compensated integrated amplifier.

Abstract translation: PCT No.PCT / GB96 / 00810 Sec。 371日期1998年2月17日 102（e）日期1998年2月17日PCT 1996年4月3日PCT PCT。 公开号WO96 / 31901 日期：1996年10月10日四极质谱仪包括离子源（20），质量过滤器（22）和离子收集器（24）。 离子源包括量子线阵列（30）。 质量过滤器包括涂覆有镍的四个玻璃纤维（32），离子收集器是连接到集成的互补金属氧化物半导体温度补偿集成放大器的电极。

公开(公告)号：US08148681B2

公开(公告)日：2012-04-03

申请号：US12837100

申请日：2010-07-15

Applicant: Richard Syms ,  Richard William Moseley

Inventor： Richard Syms ,  Richard William Moseley

IPC: H01J49/00 ,  B01D59/44

CPC classification number: H01J49/067 ,  H01J49/0018 ,  Y10T408/03

Abstract: A planar component for interfacing an atmospheric pressure ionizer to a vacuum system is described. The component combines electrostatic optics and skimmers with an internal chamber that can be filled with a gas at a prescribed pressure and is fabricated by lithography, etching and bonding of silicon.

Abstract translation: 描述了用于将大气压离子发生器连接到真空系统的平面部件。 该组件将静电光学元件和撇渣器与内部腔室相结合，内部腔室可以以规定的压力填充气体，并通过光刻，蚀刻和粘结硅制造。

公开(公告)号：US20110101220A1

公开(公告)日：2011-05-05

申请号：US12987321

申请日：2011-01-10

Applicant: Richard Syms

Inventor： Richard Syms

IPC: H01J49/42

CPC classification number: H01J49/0018 ,  H01J49/4215

Abstract: This invention provides a method of aligning sets of cylindrical electrodes in the geometry of a miniature quadrupole electrostatic lens, which can act as a mass filter in a quadrupole mass spectrometer. The electrodes are mounted in pairs on microfabricated supports, which are formed from conducting parts on an insulating substrate. Complete segmentation of the conducting parts provides low capacitative coupling between co-planar cylindrical electrodes, and allows incorporation of a Brubaker prefilter to improve sensitivity at a given mass resolution. A complete quadrupole is constructed from two such supports, which are spaced apart by further conducting spacers. The spacers are continued around the electrodes to provide a conducting screen.

Abstract translation: 本发明提供了一种在四极质谱仪中作为质量过滤器的微型四极静电透镜的几何形状中对齐圆柱形电极组的方法。 电极成对地安装在由绝缘基板上的导电部件形成的微细支撑件上。 导电部件的完全分割提供了共面圆柱形电极之间的低电容耦合，并且允许并入Brubaker预滤器以在给定的质量分辨率下提高灵敏度。 完整的四极杆由两个这样的支撑件构成，其通过另外的导电间隔件间隔开。 间隔件围绕电极继续以提供导电屏。

公开(公告)号：US20080001082A1

公开(公告)日：2008-01-03

申请号：US11810052

申请日：2007-06-04

Applicant: Richard Syms ,  Richard Moseley

Inventor： Richard Syms ,  Richard Moseley

IPC: H01J49/04

CPC classification number: H01J49/067 ,  H01J49/0018 ,  Y10T408/03

Abstract: The invention provides a planar component for interfacing an atmospheric pressure ionizer to a vacuum system. The component combines electrostatic optics and skimmers with an internal chamber that can be filled with a gas at a prescribed pressure and is fabricated by lithography, etching and bonding of silicon.

Abstract translation: 本发明提供了一种用于将大气压力离子发生器与真空系统连接的平面部件。 该组件将静电光学元件和撇渣器与内部腔室相结合，内部腔室可以以规定的压力填充气体，并通过光刻，蚀刻和粘结硅制造。

公开(公告)号：US20050189204A1

公开(公告)日：2005-09-01

申请号：US11038619

申请日：2005-01-18

Applicant: Eric Yeatman ,  Richard Syms

Inventor： Eric Yeatman ,  Richard Syms

IPC: H01H1/00 ,  H01H37/00 ,  H01H57/00 ,  H01H59/00

CPC classification number: H01H1/0036 ,  H01H37/00 ,  H01H2001/0047 ,  H01H2037/008

Abstract: A MEMS switching device including a first and second actuator and a switching member is described, the switching member being adapted to selectively provide a signal path between a first and second signal line. The selective provision of the signal path is effected by movement of a switching member from a first position to a second position, the movement of the switching member being effected by action of the first and second actuators thereon, such action resulting from a deformation of the actuators. In one embodiment of the invention, catch mechanisms link the switching member to the substrate in a first position, such that the switching member is maintained in this position when the actuation force is removed, and can be released by deformation of one actuator. In another embodiment of the invention, catch mechanisms are provided to maintain the switching member in each of two positions, and single actuators for each of the two positions provide both release of the catch mechanism for that position and translation of the switching member to the other position. In each embodiment, actuators are electrically disconnected from the switching elements other than during change of the switch position, so that interference between the switched signal path and the control circuits is avoided.

Abstract translation: 描述了包括第一和第二致动器和开关构件的MEMS开关装置，所述开关构件适于选择性地在第一和第二信号线之间提供信号路径。 信号路径的选择性提供通过切换构件从第一位置移动到第二位置来实现，切换构件的运动通过第一和第二致动器在其上的作用而产生，这种动作是由于 执行器。 在本发明的一个实施例中，止动机构将切换部件与基板连接在第一位置，使得当致动力被移除时切换部件保持在该位置，并且可以通过一个致动器的变形而被释放。 在本发明的另一个实施例中，提供了夹紧机构以将切换构件保持在两个位置中的每一个位置，并且两个位置中的每一个位置的单个致动器提供用于该位置的捕捉机构的释放和切换构件向另一个的平移 位置。 在每个实施例中，除了在开关位置的改变之外，致动器与开关元件电气断开，从而避免了开关信号路径和控制电路之间的干扰。

公开(公告)号：US20050151054A1

公开(公告)日：2005-07-14

申请号：US11032546

申请日：2005-01-10

Applicant: Richard Syms

Inventor： Richard Syms

IPC: H01J9/12 ,  H01J40/14 ,  H01J43/22

CPC classification number: H01J43/246 ,  H01J9/125 ,  H01J43/22

Abstract: This invention provides for a simple method of fabricating miniature electron multipliers, in an in-plane configuration suitable for use with miniature analytic instruments such as mass filters. The materials involved are predominantly silicon and compatible oxides, allowing the possibility of integration with a mass filter formed in a similar materials system. The materials are selected simultaneously to withstand high voltages and to. enhance secondary electron emission. Fabrication is based on standard planar processing methods. These methods also allow the construction of an integrated set of bias resistors in a multi-electrode device, so that the device may be operated from a single high-voltage source.

Abstract translation: 本发明提供了一种简单的制造微型电子倍增器的方法，该平面配置适用于微型分析仪器如质量过滤器。 所涉及的材料主要是硅和相容的氧化物，允许与在类似材料体系中形成的质量过滤器集成的可能性。 材料被同时选择以承受高电压和。 增强二次电子发射。 制造是基于标准的平面加工方法。 这些方法还允许在多电极器件中构建一组集成的偏置电阻器，使得器件可以从单个高压源操作。

公开(公告)号：US20050077897A1

公开(公告)日：2005-04-14

申请号：US10503516

申请日：2003-01-27

Applicant: Richard Syms

Inventor： Richard Syms

IPC: H01J49/10 ,  G01V3/00

CPC classification number: H01J49/147 ,  H01J49/0018 ,  H01J49/08 ,  H01J49/4215

Abstract: A method of fabricating miniature quadrupole electrostatic mass filter has been previously described. The electrodes are metallised cylinders, mounted in grooves etched in oxidised silicon substrates, which are held apart at the correct spacing by cylindrical spacer rods. This invention concerns an ion source mounted on extensions of the spacer rods, which project beyond the mass filter. The ion source consists of a cold-cathode electron emitter, which emits electrons with energies sufficient to cause impact ionisation, and electrostatic optics suitable for coupling the ion flux into the mass filter. Methods of constructing a single self-aligned electron source and a similar dual source are described. Arrangements for mounting the electron source and the ion coupling lens so that the electron and ion beams travel at right angles to one another for efficient separation are described. A method of fabricating a self-aligned one-dimensional einzel electrostatic lens from metallised cylinders mounted in the silicon substrates using etched grooves is described. A method of fabricating a-self-aligned two-dimensional einzel lens from metal plates is also described.

公开(公告)号：US08389950B2

公开(公告)日：2013-03-05

申请号：US12987321

申请日：2011-01-10

Applicant: Richard Syms

Inventor： Richard Syms

IPC: H01J49/00

CPC classification number: H01J49/0018 ,  H01J49/4215

Abstract: This invention provides a method of aligning sets of cylindrical electrodes in the geometry of a miniature quadrupole electrostatic lens, which can act as a mass filter in a quadrupole mass spectrometer. The electrodes are mounted in pairs on microfabricated supports, which are formed from conducting parts on an insulating substrate. Complete segmentation of the conducting parts provides low capacitative coupling between co-planar cylindrical electrodes, and allows incorporation of a Brubaker prefilter to improve sensitivity at a given mass resolution. A complete quadrupole is constructed from two such supports, which are spaced apart by further conducting spacers. The spacers are continued around the electrodes to provide a conducting screen.

Abstract translation: 本发明提供了一种在四极质谱仪中作为质量过滤器的微型四极静电透镜的几何形状中对齐圆柱形电极组的方法。 电极成对地安装在由绝缘基板上的导电部件形成的微细支撑件上。 导电部件的完全分割提供了共面圆柱形电极之间的低电容耦合，并且允许并入Brubaker预滤器以在给定的质量分辨率下提高灵敏度。 完整的四极杆由两个这样的支撑件构成，其通过另外的导电间隔件间隔开。 间隔件围绕电极继续以提供导电屏。

公开(公告)号：US07973278B2

公开(公告)日：2011-07-05

申请号：US12001796

申请日：2007-12-12

Applicant: Richard Syms

Inventor： Richard Syms

IPC: H01J49/04 ,  H01J49/10 ,  G21K5/04

CPC classification number: G01N27/62 ,  H01J49/0018 ,  H01J49/165

Abstract: This invention provides a method of aligning a capillary needle, a set of electrodes, and an input to a mass spectrometer. The electrode system is formed as an assembly of two separate chips and forms an ionization device. Each chip is formed on an insulating plastic substrate. The first chip carries mechanical alignment features for the capillary electrospray needle together with a set of partial electrodes. The second chip carries a set of partial electrodes. The complete electrode system is formed when the chips are assembled in a stacked configuration.

Abstract translation: 本发明提供了一种将毛细针，一组电极和一个输入对准到质谱仪的方法。 电极系统形成为两个分开的芯片的组件，并形成电离装置。 每个芯片形成在绝缘塑料基板上。 第一芯片与一组部分电极一起携带用于毛细管电喷针的机械对准特征。 第二芯片承载一组部分电极。 当芯片以堆叠构造组装时，形成完整的电极系统。