公开(公告)号：US07687276B2

公开(公告)日：2010-03-30

申请号：US10443141

申请日：2003-05-22

Applicant: Roderick R. Kunz

Inventor： Roderick R. Kunz

IPC: G01N21/00

CPC classification number: G01N1/2273 ,  G01N1/2208 ,  G01N1/24 ,  G01N1/44 ,  G01N2001/022 ,  G01N2001/2276 ,  G01N2015/0088 ,  G01N2015/0261 ,  G01N2030/0085 ,  G01N2030/128

Abstract: A method for collecting and concentrating trace chemicals for subsequent analysis by virtually any type of chemical detector includes providing directed radiation to a sample, or a portion of a sample. An apparatus can include a sampling body for providing radiation.

Abstract translation: 通过几乎任何类型的化学检测器收集和浓缩痕量化学物质进行后续分析的方法包括向样品或样本的一部分提供定向辐射。 装置可以包括用于提供辐射的采样体。

公开(公告)号：US06833234B1

公开(公告)日：2004-12-21

申请号：US09922973

申请日：2001-08-06

Applicant: Theodore M. Bloomstein ,  Roderick R. Kunz ,  Stephen T. Palmacci

Inventor： Theodore M. Bloomstein ,  Roderick R. Kunz ,  Stephen T. Palmacci

IPC: G03F700

CPC classification number: G03F7/00 ,  B29C64/40 ,  B29K2995/0073 ,  G03F7/0037

Abstract: Methods for the preparation of multilayered resists are described. To efficiently pattern large contiguous areas rapidly, a procedure has been developed using spot-size modulation of the focused laser beam to more efficiently pattern interior portions. Critical portions at the perimeter are patterned at high resolutions. The spot-size is progressively increased towards the interior allowing a controlled transition to coarser spot-sizes without impacting the exposure dose in critical portions. Patterning times are significantly reduced since in effect shells are patterned. An algorithm is defined to subdivide a layer into different zones, determine the appropriate focused spot-sizes used for each zone, and define the laser scan trace within a zone to enable efficient patterning of broad areas in positive tone resists.

Abstract translation: 描述制备多层抗蚀剂的方法。 为了有效地模拟大的连续区域，已经开发了使用聚焦激光束的聚焦尺寸调制以更有效地模制内部部分的程序。 周边的临界部分以高分辨率图案化。 斑点尺寸逐渐增加到内部，允许可控过渡到较粗的斑点尺寸，而不影响临界部分中的曝光剂量。 图案化时间显着减少，因为实际上壳被图案化。 定义一种算法来将图层细分为不同的区域，确定用于每个区域的合适的聚焦点尺寸，并在区域内定义激光扫描轨迹，以实现正色调抗蚀剂中广泛区域的有效图案化。

公开(公告)号：US06413781B1

公开(公告)日：2002-07-02

申请号：US09287591

申请日：1999-04-06

Applicant: Michael W. Geis ,  Roderick R. Kunz ,  Margaret B. Stern

Inventor： Michael W. Geis ,  Roderick R. Kunz ,  Margaret B. Stern

IPC: G01N2500

CPC classification number: G01N1/40 ,  G01N30/30 ,  G01N2001/022 ,  Y10T436/25375 ,  Y10T436/255 ,  G01N2030/3015 ,  G01N2030/3076

Abstract: The method and apparatus of the invention create a dynamic Soret effect for propelling a target chemical constituent along a pathway. A moving temperature profile impressed upon the pathway produces consecutive alternating warmer and cooler zones along the path which transport components of a mixture down the path according to their respective diffusivities. In one embodiment, the invention provides a dynamic thermophoretic concentrator for separating a target chemical constituent from a mixture of components on the basis of diffusion coefficient by using alternate forward and backward motion of a temperature profile along the pathway, thereby accumulating an ultimate concentration of the target constituent greater than its initial concentration in the mixture.

Abstract translation: 本发明的方法和装置产生用于沿着途径推进目标化学成分的动态Soret效应。 沿路径移动的移动温度曲线沿着路径产生连续交替的加热器和冷却器区域，根据它们各自的扩散率将混合物的组分沿着路径输送。 在一个实施方案中，本发明提供了一种动态热解聚焦器，用于通过使用沿着路径的温度分布的交替的向前和向后运动，基于扩散系数从组分混合物中分离目标化学成分，从而累积最终浓度 目标成分大于其混合物中的初始浓度。

公开(公告)号：US5597868A

公开(公告)日：1997-01-28

申请号：US206595

申请日：1994-03-04

Applicant: Roderick R. Kunz

Inventor： Roderick R. Kunz

IPC: C08L61/06 ,  C08L61/10 ,  C09D133/12 ,  G03F7/038 ,  G03F7/09 ,  C08L33/12

CPC classification number: G03F7/091 ,  C09D133/12 ,  G03F7/038 ,  C08L61/06

Abstract: Anti-reflective coatings and methods for forming these anti-reflective coatings are disclosed that have a polymer chemistry and optical characteristics suitable for suppressing the light that reflects off a circuit substrate during a photolithographic process. These anti-reflective coatings include a phenolic polymer material and an epoxide-containing polymer material that can be combined in a select proportion to form a thermally curable polymeric anti-reflective coating. The select proportions of the combined materials tailors the optical characteristic of the anti-reflective coating to attenuate energy about a select range of wavelengths.

Abstract translation: 公开了用于形成这些抗反射涂层的抗反射涂层和方法，其具有适合于抑制在光刻工艺期间从电路基板反射的光的聚合物化学性质和光学特性。 这些抗反射涂层包括酚醛聚合物材料和含环氧化物的聚合物材料，其可以以选择的比例组合以形成可热固化的聚合物抗反射涂层。 组合材料的选择比例调整了抗反射涂层的光学特性，以在选择的波长范围内衰减能量。