公开(公告)号：US06794109B2

公开(公告)日：2004-09-21

申请号：US09791252

申请日：2001-02-23

Applicant: Theodore H. Fedynyshyn ,  Roderick R. Kunz ,  Michael Sworin ,  Roger Sinta

Inventor： Theodore H. Fedynyshyn ,  Roderick R. Kunz ,  Michael Sworin ,  Roger Sinta

IPC: G03F7004

CPC classification number: G03F7/0392 ,  G03F7/0046 ,  Y10S430/108 ,  Y10S430/115

Abstract: The present invention provides photoresist materials for use in photolithography at wavelengths less than about 248 nm. More particularly, the photoresists of the invention are particularly suited for use in 157 nm lithography. A photoresist composition of the invention includes a polymer having at least one monomeric unit having an aromatic moiety. The monomeric unit further includes at least a group, such as an electron withdrawing group, attached to the aromatic moiety. The attached group includes at least one CF bond. The polymer further includes an acidic hydroxyl group. A photoresist composition of the invention can have an absorbance in a range of 1-5 &mgr;m−1 at 157 nm, rendering it particularly suitable for use as a single layer resist in 157 nm lithography.

Abstract translation: 本发明提供了在波长小于约248nm的光刻中使用的光刻胶材料。 更具体地说，本发明的光致抗蚀剂特别适用于157nm光刻。 本发明的光致抗蚀剂组合物包括具有至少一个具有芳族部分的单体单元的聚合物。 单体单元还包括至少一个与芳族部分连接的基团，例如吸电子基团。 所附组包括至少一个CF键。 聚合物还包括酸性羟基。 本发明的光致抗蚀剂组合物可以在157nm处具有在1-5mum -1的范围内的吸光度，使其特别适合用作157nm光刻中的单层抗蚀剂。

公开(公告)号：US06777170B1

公开(公告)日：2004-08-17

申请号：US09922974

申请日：2001-08-06

Applicant: Theodore M. Bloomstein ,  Roderick R. Kunz ,  Stephen T. Palmacci

Inventor： Theodore M. Bloomstein ,  Roderick R. Kunz ,  Stephen T. Palmacci

IPC: G03F700

CPC classification number: G03F7/00 ,  B29C64/40 ,  B29K2995/0073 ,  G03F7/0037 ,  G03F7/70416

Abstract: Methods for the preparation of multilayered resists are described. A first layer of photoresist is deposited onto a substrate. First portions of the first layer are exposed to a first dose of radiant energy. A second layer of photoresist is deposited at atop the first layer and second portions of the second layer are exposed to a second varied dose of radiant energy. The dose is modulated over different portions of a layer to preferentially enhance development within the interior of the structure to reduce total development times.

Abstract translation: 描述制备多层抗蚀剂的方法。 第一层光致抗蚀剂沉积在基底上。 第一层的第一部分暴露于第一剂量的辐射能。 第二层光致抗蚀剂沉积在第一层的顶部，第二层的第二部分暴露于第二变化量的辐射能。 剂量在层的不同部分进行调节，以优先增强结构内部的发育，以减少总开发时间。

公开(公告)号：US20100089443A1

公开(公告)日：2010-04-15

申请号：US12566278

申请日：2009-09-24

Applicant: Theodore M. Bloomstein ,  Roderick R. Kunz ,  Theodore M. Lyszczarz ,  Vladimir Bulovic

Inventor： Theodore M. Bloomstein ,  Roderick R. Kunz ,  Theodore M. Lyszczarz ,  Vladimir Bulovic

IPC: H01L31/0256 ,  H01L31/0236 ,  H01L31/0216 ,  H01L31/18

CPC classification number: H01L51/447 ,  H01L31/0236 ,  H01L51/0096 ,  H01L51/4246 ,  Y02E10/549

Abstract: Methods, devices, and compositions related to organic solar cells, sensors, and other photon processing devices are disclosed. In some aspects, an organic semiconducting composition is formed with nano-sized features, e.g., a layer conforming to a shape exhibiting nano-sized tapered features. Such structures can be formulated as an organic n-type and/or an organic p-type layer incorporated in a device that exhibits enhanced conductor mobility relative to conventional structures such as planar layered formed organic semiconductors. The nanofeatures can be formed on an exciton blocking layer (“EBL”) surface, with an organic semiconducting layer deposited thereon to conform with the EBL's surface features. A variety of material possibilities are disclosed, as well as a number of different configurations. Such organic structures can be used to form flexible solar cells in a roll-out format.

Abstract translation: 公开了与有机太阳能电池，传感器和其他光子处理装置有关的方法，装置和组合物。 在一些方面，有机半导体组合物形成有纳米尺寸的特征，例如符合呈纳米尺寸锥形特征的形状的层。 这种结构可以配制成结合在相对于常规结构如平面层状形成的有机半导体的表现出增强的导体迁移率的器件中的有机n型和/或有机p型层。 纳米尺度可以在激子阻挡层（“EBL”）表面上形成，其上沉积有机半导体层以符合EBL的表面特征。 公开了各种材料的可能性，以及许多不同的配置。 这种有机结构可用于以滚出格式形成柔性太阳能电池。

公开(公告)号：US06730256B1

公开(公告)日：2004-05-04

申请号：US09923164

申请日：2001-08-06

Applicant: Theodore M. Bloomstein ,  Roderick R. Kunz ,  Stephen T. Palmacci

Inventor： Theodore M. Bloomstein ,  Roderick R. Kunz ,  Stephen T. Palmacci

IPC: B29C3508

CPC classification number: G03F7/70416 ,  B29C64/40 ,  B29C71/0009 ,  B29C2035/0838 ,  B29C2791/005 ,  B29K2105/0073 ,  B29K2995/0073 ,  B29K2995/0092 ,  B33Y10/00 ,  G03F7/0037

Abstract: Methods for the preparation of multilayered resists include exposure of the a first layer to radiation followed by exposure to an oxidizing agent. The oxidizing agent alters the surface characteristics of the first resist layer such that it is rendered more hydrophilic than the original resist layer. A second layer of resist is then applied to the oxidized surface of the first resist layer and exposed to radiation. This process can be repeated for thousands of coating layers, thereby permitting stereolithographic patterning of parts and construction of micromachines. A final treatment with a dissolution solution will dissolve unwanted resist material. Dependent upon the type of resist material used in the multilayered resist, the dissolution solution can remove the radiation exposed areas, e.g., a positive resist, or remove unexposed areas, e.g., a negative resist.

Abstract translation: 制备多层抗蚀剂的方法包括将第一层暴露于辐射，然后暴露于氧化剂。 氧化剂改变第一抗蚀剂层的表面特性，使其比原始抗蚀剂层变得更亲水。 然后将第二层抗蚀剂施加到第一抗蚀剂层的氧化表面并暴露于辐射。 该过程可以重复数千个涂层，从而允许部件的立体光刻图案和微机械的构造。 用溶解溶液的最终处理将溶解不需要的抗蚀剂材料。 取决于在多层抗蚀剂中使用的抗蚀剂材料的类型，溶解溶液可以去除辐射暴露区域，例如正性抗蚀剂，或去除未曝光的区域，例如负性抗蚀剂。

公开(公告)号：US06239428B1

公开(公告)日：2001-05-29

申请号：US09517041

申请日：2000-03-02

Applicant: Roderick R. Kunz

Inventor： Roderick R. Kunz

IPC: H01J4940

CPC classification number: G01N27/622

Abstract: Ion mobility spectrometer systems and methods of using such systems are disclosed. The systems and methods can combine two different ionization techniques (e.g., proton affinity ionization and electron transfer ionization) to provide enhanced detection sensitivity and/or detection selectivity of certain target compounds.

Abstract translation: 公开了离子迁移谱仪系统和使用这种系统的方法。 系统和方法可以组合两种不同的电离技术（例如，质子亲和电离和电子转移电离）以提供某些目标化合物的增强的检测灵敏度和/或检测选择性。

公开(公告)号：US08198095B2

公开(公告)日：2012-06-12

申请号：US13152622

申请日：2011-06-03

Applicant: John J. Zayhowski ,  Mordechai Rothschild ,  Charles M. Wynn ,  Roderick R. Kunz

Inventor： John J. Zayhowski ,  Mordechai Rothschild ,  Charles M. Wynn ,  Roderick R. Kunz

IPC: G01N21/64 ,  G01N21/00 ,  G21K5/00

CPC classification number: G01N21/75 ,  G01J3/10 ,  G01N21/6402 ,  Y10T436/147777 ,  Y10T436/173076 ,  Y10T436/177692

Abstract: Methods and devices for detecting the presence of a NO forming material (e.g., a material that can form, or is, a nitrogen monoxide molecule) are disclosed based on detection of fluorescence exhibited by NO molecules in a first vibrationally excited state of a ground electronic state. Such excited NO molecules can be formed, for example, when small amounts of explosives are photodissociated. By inducing fluorescence of the material, a distinct signature of the explosive can be detected. Such techniques can be performed quickly and with a significant standoff distance, which can add to the invention's utility. In another aspection of the invention, methods and apparatus for generating electromagnetic radiation are disclosed. Such methods and apparatus can be used in conjunction with any detection method disclosed herein.

Abstract translation: 基于在地面电子学的第一振动激发状态中NO分子的荧光的检测来公开用于检测NO形成材料（例如，可以形成或是一氧化氮分子的材料）的存在的方法和装置 州。 例如当少量的爆炸物被光分解时，可以形成这样的激发的NO分子。 通过诱导材料的荧光，可以检测到爆炸物的不同标志。 这样的技术可以快速执行并具有显着的间隔距离，这可以增加本发明的效用。 在本发明的另一个方面，公开了用于产生电磁辐射的方法和装置。 这些方法和装置可以结合本文公开的任何检测方法使用。

公开(公告)号：US07955855B2

公开(公告)日：2011-06-07

申请号：US12500880

申请日：2009-07-10

Applicant: Mordechai Rothschild ,  Charles M. Wynn ,  John J. Zayhowski ,  Roderick R. Kunz

Inventor： Mordechai Rothschild ,  Charles M. Wynn ,  John J. Zayhowski ,  Roderick R. Kunz

IPC: G01N21/64 ,  G01N21/00 ,  G01T1/20 ,  G21G4/00

CPC classification number: G01N21/75 ,  G01J3/10 ,  G01N21/6402 ,  Y10T436/147777 ,  Y10T436/173076 ,  Y10T436/177692

Abstract: Methods and devices for detecting the presence of a NO forming material (e.g., a material that can form, or is, a nitrogen monoxide molecule) are disclosed based on detection of fluorescence exhibited by NO molecules in a first vibrationally excited state of a ground electronic state. Such excited NO molecules can be formed, for example, when small amounts of explosives are photodissociated. By inducing fluorescence of the material, a distinct signature of the explosive can be detected. Such techniques can be performed quickly and with a significant standoff distance, which can add to the invention's utility. In another aspection of the invention, methods and apparatus for generating electromagnetic radiation are disclosed. Such methods and apparatus can be used in conjunction with any detection method disclosed herein.

Abstract translation: 基于在地面电子学的第一振动激发状态中NO分子的荧光的检测来公开用于检测NO形成材料（例如，可以形成或是一氧化氮分子的材料）的存在的方法和装置 州。 例如当少量的爆炸物被光分解时，可以形成这样的激发的NO分子。 通过诱导材料的荧光，可以检测到爆炸物的不同标志。 这样的技术可以快速执行并具有显着的间隔距离，这可以增加本发明的实用性。 在本发明的另一个方面，公开了用于产生电磁辐射的方法和装置。 这些方法和装置可以结合本文公开的任何检测方法使用。

公开(公告)号：US20100047916A1

公开(公告)日：2010-02-25

申请号：US12500880

申请日：2009-07-10

Applicant: Mordechai Rothschild ,  Charles M. Wynn ,  John J. Zayhowski ,  Roderick R. Kunz

Inventor： Mordechai Rothschild ,  Charles M. Wynn ,  John J. Zayhowski ,  Roderick R. Kunz

IPC: G01N21/64 ,  G21G4/00 ,  G01T1/20

CPC classification number: G01N21/75 ,  G01J3/10 ,  G01N21/6402 ,  Y10T436/147777 ,  Y10T436/173076 ,  Y10T436/177692

Abstract: Methods and devices for detecting the presence of a NO forming material (e.g., a material that can form, or is, a nitrogen monoxide molecule) are disclosed based on detection of fluorescence exhibited by NO molecules in a first vibrationally excited state of a ground electronic state. Such excited NO molecules can be formed, for example, when small amounts of explosives are photodissociated. By inducing fluorescence of the material, a distinct signature of the explosive can be detected. Such techniques can be performed quickly and with a significant standoff distance, which can add to the invention's utility. In another aspection of the invention, methods and apparatus for generating electromagnetic radiation are disclosed. Such methods and apparatus can be used in conjunction with any detection method disclosed herein.

Abstract translation: 基于在地面电子学的第一振动激发状态中NO分子的荧光的检测来公开用于检测NO形成材料（例如，可以形成或是一氧化氮分子的材料）的存在的方法和装置 州。 例如当少量的爆炸物被光分解时，可以形成这样的激发的NO分子。 通过诱导材料的荧光，可以检测到爆炸物的不同标志。 这样的技术可以快速执行并具有显着的间隔距离，这可以增加本发明的效用。 在本发明的另一个方面，公开了用于产生电磁辐射的方法和装置。 这些方法和装置可以结合本文公开的任何检测方法使用。

公开(公告)号：US5891959A

公开(公告)日：1999-04-06

申请号：US788211

申请日：1997-01-27

Applicant: Roderick R. Kunz

Inventor： Roderick R. Kunz

IPC: C08L61/06 ,  C08L61/10 ,  C09D133/12 ,  G03F7/038 ,  G03F7/09 ,  C08L25/16 ,  C08L63/00

CPC classification number: G03F7/091 ,  C09D133/12 ,  G03F7/038 ,  C08L61/06

Abstract: Anti-reflective coatings and methods for forming these anti-reflective coatings are disclosed that have a polymer chemistry and optical characteristics suitable for suppressing the light that reflects off a circuit substrate during a photo-lithographic process. These anti-reflective coatings include a phenolic polymer material and an epoxide-containing polymer material that can be combined in a select proportion to form a thermally curable polymeric anti-reflective coating. The select proportions of the combined materials tailors the optical characteristic of the anti-reflective coating to attenuate energy about a select range of wavelengths.

Abstract translation: 公开了用于形成这些抗反射涂层的抗反射涂层和方法，其具有适合于抑制在光刻工艺期间从电路基板反射的光的聚合物化学性质和光学特性。 这些抗反射涂层包括酚醛聚合物材料和含环氧化物的聚合物材料，其可以以选择的比例组合以形成可热固化的聚合物抗反射涂层。 组合材料的选择比例调整了抗反射涂层的光学特性，以在选择的波长范围内衰减能量。

公开(公告)号：US20110233428A1

公开(公告)日：2011-09-29

申请号：US13152622

申请日：2011-06-03

Applicant: Mordechai Rothschild ,  Charles M. Wynn ,  John J. Zayhowski ,  Roderick R. Kunz

Inventor： Mordechai Rothschild ,  Charles M. Wynn ,  John J. Zayhowski ,  Roderick R. Kunz

IPC: G01N21/64 ,  G21K5/00

CPC classification number: G01N21/75 ,  G01J3/10 ,  G01N21/6402 ,  Y10T436/147777 ,  Y10T436/173076 ,  Y10T436/177692

Abstract: Methods and devices for detecting the presence of a NO forming material (e.g., a material that can form, or is, a nitrogen monoxide molecule) are disclosed based on detection of fluorescence exhibited by NO molecules in a first vibrationally excited state of a ground electronic state. Such excited NO molecules can be formed, for example, when small amounts of explosives are photodissociated. By inducing fluorescence of the material, a distinct signature of the explosive can be detected. Such techniques can be performed quickly and with a significant standoff distance, which can add to the invention's utility. In another aspection of the invention, methods and apparatus for generating electromagnetic radiation are disclosed. Such methods and apparatus can be used in conjunction with any detection method disclosed herein.

Abstract translation: 基于在地面电子学的第一振动激发状态中NO分子的荧光的检测来公开用于检测NO形成材料（例如，可以形成或是一氧化氮分子的材料）的存在的方法和装置 州。 例如当少量的爆炸物被光分解时，可以形成这样的激发的NO分子。 通过诱导材料的荧光，可以检测到爆炸物的不同标志。 这样的技术可以快速执行并具有显着的间隔距离，这可以增加本发明的效用。 在本发明的另一个方面，公开了用于产生电磁辐射的方法和装置。 这些方法和装置可以结合本文公开的任何检测方法使用。