公开(公告)号：US10696597B2

公开(公告)日：2020-06-30

申请号：US15192648

申请日：2016-06-24

Applicant: STMicroelectronics S.R.L.

Inventor： Angela Cimmino ,  Giovanna Salzillo ,  Valeria Casuscelli ,  Andrea Di Matteo

IPC: C04B35/49 ,  C04B35/622 ,  C04B35/624 ,  C04B35/626 ,  C04B35/64 ,  C04B35/468 ,  C09D1/00 ,  C04B35/634 ,  C04B35/632 ,  C04B35/465 ,  C09D7/61 ,  C09D5/03

Abstract: The present disclosure relates to a precursor solution for the preparation of a ceramic of the BZT-αBXT type, where X is selected from Ca, Sn, Mn, and Nb, and α is a molar fraction selected in the range between 0.10 and 0.90, said solution comprising: 1) at least one barium precursor compound; 2) a precursor compound selected from the group consisting of at least one calcium compound, at least one tin compound, at least one manganese compound, and at least one niobium compound; 3) at least one anhydrous precursor compound of zirconium; 4) at least one anhydrous precursor compound of titanium; 5) a solvent selected from the group consisting of a polyol and mixtures of a polyol and a secondary solvent selected from the group consisting of alcohols, carboxylic acids, esters, ketones, ethers, and mixtures thereof; and 6) a chelating agent, as well as method of using the same.

公开(公告)号：US10186654B2

公开(公告)日：2019-01-22

申请号：US15163230

申请日：2016-05-24

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna Bevilacqua ,  Flavio Francesco Villa ,  Rossana Scaldaferri ,  Valeria Casuscelli ,  Andrea Di Matteo ,  Dino Faralli

IPC: H01L41/09 ,  H01L41/053 ,  H01L41/22 ,  H01L41/113 ,  H01L41/047 ,  H02N2/18 ,  H01L41/187 ,  H01L41/25 ,  H01L41/29 ,  H01L41/332

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

公开(公告)号：US09823210B2

公开(公告)日：2017-11-21

申请号：US14951094

申请日：2015-11-24

Applicant: STMicroelectronics S.R.L.

Inventor： Andrea Di Matteo ,  Vincenza Di Palma ,  Maria Fortuna Bevilacqua ,  Angela Cimmino

IPC: G01N33/543 ,  G01N27/28 ,  C12Q1/00 ,  G01N27/327 ,  G01N27/403 ,  G03F7/00 ,  G03F7/16 ,  G03F7/20 ,  G03F7/26

CPC classification number: G01N27/28 ,  C12Q1/001 ,  G01N27/327 ,  G01N27/403 ,  G01N33/54386 ,  G03F7/0035 ,  G03F7/16 ,  G03F7/20 ,  G03F7/26

Abstract: A method for manufacturing a biosensor includes forming an electrode layer on a flexible foil. An adhesive layer is positioned on the foil layer, and a first photo-definable hydrogel membrane is positioned over the electrode layer and the adhesive layer. A second photo-definable hydrogel membrane with an immobilized bio-recognition element is positioned over the first hydrogel membrane in contact with the electrode layer through an opening in the first hydrogel membrane.

公开(公告)号：US20170186940A1

公开(公告)日：2017-06-29

申请号：US15163230

申请日：2016-05-24

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna Bevilacqua ,  Flavio Francesco Villa ,  Rossana Scaldaferri ,  Valeria Casuscelli ,  Andrea Di Matteo ,  Dino Faralli

IPC: H01L41/113 ,  H01L41/053 ,  H01L41/332 ,  H01L41/25 ,  H01L41/29 ,  H01L41/047 ,  H01L41/187

CPC classification number: H01L41/1138 ,  H01L41/047 ,  H01L41/053 ,  H01L41/1134 ,  H01L41/1876 ,  H01L41/22 ,  H01L41/25 ,  H01L41/29 ,  H01L41/332 ,  H02N2/186

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

公开(公告)号：US20170152186A1

公开(公告)日：2017-06-01

申请号：US15192648

申请日：2016-06-24

Applicant: STMicroelectronics S.R.L.

Inventor： Angela Cimmino ,  Giovanna Salzillo ,  Valeria Casuscelli ,  Andrea Di Matteo

IPC: C04B35/468 ,  B05D3/00 ,  C04B35/64 ,  C09D1/00 ,  C04B35/622

CPC classification number: C04B35/4682 ,  C04B35/465 ,  C04B35/49 ,  C04B35/62222 ,  C04B35/624 ,  C04B35/6264 ,  C04B35/62675 ,  C04B35/62685 ,  C04B35/6325 ,  C04B35/63444 ,  C04B35/63488 ,  C04B2235/3208 ,  C04B2235/3215 ,  C04B2235/3232 ,  C04B2235/3234 ,  C04B2235/3244 ,  C04B2235/3251 ,  C04B2235/3262 ,  C04B2235/3293 ,  C04B2235/441 ,  C04B2235/449 ,  C04B2235/72 ,  C04B2235/768 ,  C04B2235/81 ,  C09D1/00 ,  C09D5/03 ,  C09D7/61

Abstract: The present disclosure relates to a precursor solution for the preparation of a ceramic of the BZT-αBXT type, where X is selected from Ca, Sn, Mn, and Nb, and a is a molar fraction selected in the range between 0.10 and 0.90, said solution comprising: 1) at least one barium precursor compound; 2) a precursor compound selected from the group consisting of at least one calcium compound, at least one tin compound, at least one manganese compound, and at least one niobium compound; 3) at least one anhydrous precursor compound of zirconium; 4) at least one anhydrous precursor compound of titanium; 5) a solvent selected from the group consisting of a polyol and mixtures of a polyol and a secondary solvent selected from the group consisting of alcohols, carboxylic acids, esters, ketones, ethers, and mixtures thereof; and 6) a chelating agent, as well as method of using the same.

公开(公告)号：US20160077034A1

公开(公告)日：2016-03-17

申请号：US14951136

申请日：2015-11-24

Applicant: STMicroelectronics S.R.L.

Inventor： Andrea Di Matteo ,  Vincenza Di Palma ,  Maria Fortuna Bevilacqua ,  Angela Cimmino

IPC: G01N27/28 ,  G01N27/327

CPC classification number: G01N27/28 ,  C12Q1/001 ,  G01N27/327 ,  G01N27/403 ,  G01N33/54386 ,  G03F7/0035 ,  G03F7/16 ,  G03F7/20 ,  G03F7/26

Abstract: A biosensor includes a flexible foil with an electrode layer positioned on the foil. An adhesive layer is positioned on the foil layer, and a first photo-definable hydrogel membrane is positioned over the electrode layer and the adhesive layer. A second photo-definable hydrogel membrane with an immobilized bio-recognition element is positioned over the first hydrogel membrane in contact with the electrode layer through an opening in the first hydrogel membrane.

Abstract translation: 生物传感器包括具有位于箔上的电极层的柔性箔。 粘合剂层位于箔层上，并且第一可光定影的水凝胶膜位于电极层和粘合剂层之上。 具有固定化生物识别元件的第二光可定义水凝胶膜通过第一水凝胶膜中的开口定位在与电极层接触的第一水凝胶膜的上方。

公开(公告)号：US09244067B2

公开(公告)日：2016-01-26

申请号：US13929654

申请日：2013-06-27

Applicant: STMicroelectronics S.r.l.

Inventor： Andrea Di Matteo ,  Vincenza Di Palma ,  Maria Fortuna Bevilacqua ,  Angela Cimmino

IPC: G01N33/543 ,  C12Q1/00

CPC classification number: G01N27/28 ,  C12Q1/001 ,  G01N27/327 ,  G01N27/403 ,  G01N33/54386 ,  G03F7/0035 ,  G03F7/16 ,  G03F7/20 ,  G03F7/26

Abstract: A biosensor includes a flexible foil with an electrode layer positioned on the foil. An adhesive layer is positioned on the foil layer, and a first photo-definable hydrogel membrane is positioned over the electrode layer and the adhesive layer. A second photo-definable hydrogel membrane with an immobilized bio-recognition element is positioned over the first hydrogel membrane in contact with the electrode layer through an opening in the first hydrogel membrane.

Abstract translation: 生物传感器包括具有位于箔上的电极层的柔性箔。 粘合剂层位于箔层上，并且第一可光定影的水凝胶膜位于电极层和粘合剂层之上。 具有固定化生物识别元件的第二光可定义水凝胶膜通过第一水凝胶膜中的开口定位在与电极层接触的第一水凝胶膜的上方。

公开(公告)号：US20140084519A1

公开(公告)日：2014-03-27

申请号：US14030888

申请日：2013-09-18

Applicant: Fondazione Istituto Italiano di Tecnologia ,  STMicroelectronics S.r.l.

Inventor： Fabrizio Porro ,  Antonio Scognamiglio ,  Raffaele Vecchione ,  Valeria Casuscelli ,  Andrea Di Matteo ,  Luigi Giuseppe Occhipinti ,  Paolo Netti

IPC: B29C59/02 ,  B29C59/00

CPC classification number: B29C59/02 ,  B29C35/0888 ,  B29C37/0003 ,  B29C37/0053 ,  B29C59/002 ,  B29C59/14 ,  B29C2035/0827 ,  B29C2059/145 ,  B29K2995/0093 ,  G03F7/0002

Abstract: The present disclosure relates to mold components and imprint lithography techniques applied on the basis of organic mold materials in order to form polymer microstructure elements. It has been recognized that adapting surface characteristics of at least one mold component may significantly enhance performance of the lithography process, in particular with respect to suppressing residual polymer material, which in conventional strategies may have to be removed on the basis of an additional etch process.

Abstract translation: 本公开涉及基于有机模具材料应用的模具部件和压印光刻技术，以形成聚合物微结构元件。 已经认识到，适应至少一个模具部件的表面特性可以显着提高光刻工艺的性能，特别是关于抑制残余聚合物材料的性能，其在常规策略中可能必须基于额外的蚀刻工艺去除 。