公开(公告)号：US20150368828A1

公开(公告)日：2015-12-24

申请号：US14841564

申请日：2015-08-31

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Hiroshi KISHI ,  Eriko SUZUKI

IPC分类号： C30B15/10 ,  C30B29/06 ,  C03B19/09

CPC分类号： C30B15/10 ,  C03B19/095 ,  C30B29/06 ,  C30B35/002 ,  Y10T117/1032

摘要： A method of manufacturing of a vitreous silica crucible includes: fusing silica powder under a reduced pressure of −50 kPa or more and less than −95 kPa to form a transparent vitreous silica layer as an inner layer; fusing silica powder under a reduced pressure of 0 kPa or more and less than −10 kPa to form a bubble-containing vitreous silica layer as an intermediate layer; and fusing silica powder under a reduced pressure of −10 kPa or more and less than −50 kPa to form a semi-transparent vitreous silica layer as an outer layer.

摘要翻译： 一种石英玻璃坩埚的制造方法，其特征在于，在-50kPa以上且小于-95kPa的压力下使二氧化硅粉末熔融，形成作为内层的透明氧化硅玻璃层; 在0kPa以上且小于-10kPa的减压下熔融二氧化硅粉末以形成含气泡的玻璃状二氧化硅层作为中间层; 并在-10kPa以上且小于-50kPa的减压下熔融二氧化硅粉末，形成作为外层的半透明氧化硅玻璃层。

公开(公告)号：US20170066686A1

公开(公告)日：2017-03-09

申请号：US15354924

申请日：2016-11-17

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Taira SATO ,  Shuichi IKEHATA ,  Manabu SHONAI ,  Takuji NISHI ,  Takaya SATOU ,  Shinsuke YAMAZAKI

IPC分类号： C03C23/00 ,  C30B15/10 ,  C30B35/00 ,  C03B19/09

CPC分类号： C03C23/0025 ,  C03B19/095 ,  C30B15/00 ,  C30B15/10 ,  C30B35/002 ,  Y10T117/10

摘要： A method of manufacturing a vitreous silica crucible includes: a taking-out process of taking out the vitreous silica crucible from the mold, a honing process of removing the unfused silica powder layer on the outer surface of the vitreous silica crucible, and further comprising, after the taking-out process and before the honing process, a marking process of marking an identifier comprised of one or more groove line on the outer surface of the vitreous silica crucible, wherein the groove line after the honing process has a cross-sectional shape of an inverse trapezoid and a depth of 0.2 to 0.5 mm, and a width of 0.8 mm or more at the opening of the groove line. The groove line is formed by repeating shifting a focal point of a laser.

摘要翻译： 一种石英玻璃坩埚的制造方法，其特征在于，包括从所述模具取出所述二氧化硅玻璃坩埚的取出工序，除去所述石英玻璃坩埚的外表面的未熔融二氧化硅粉末层的珩磨处理， 在掏取处理之后并且在珩磨处理之前，对在石英玻璃坩埚的外表面上由一条或多条槽线组成的标识符进行标记处理，其中，在珩磨处理之后的槽线具有横截面形状 反向梯形，深度为0.2〜0.5mm，宽度为0.8mm以上。 通过重复移动激光的焦点来形成凹槽线。

公开(公告)号：US20160202192A1

公开(公告)日：2016-07-14

申请号：US14901030

申请日：2013-06-30

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Tadahiro SATO ,  Ken KITAHARA ,  Masami OHARA

IPC分类号： G01N21/95 ,  G01N21/65 ,  G01N21/3563

CPC分类号： H01J37/32935 ,  C30B15/00 ,  C30B15/10 ,  C30B15/14 ,  C30B29/06 ,  C30B35/002 ,  G01N21/3563 ,  G01N21/65 ,  G01N21/68 ,  G01N21/95 ,  G01N2021/8477 ,  G01N2201/105 ,  G01N2201/12

摘要： An inspection method of vitreous silica crucibles includes: a measurement step of measuring an infrared absorption spectrum or a Raman shift of a measurement point on an inner surface of the vitreous silica crucible; a determining step of predicting whether or not a surface-defect region occurs at the measurement point based on an obtained spectrum to determine a quality of the vitreous silica crucible.

摘要翻译： 玻璃状石英坩埚的检查方法包括：测量石英坩埚内表面上的测量点的红外吸收光谱或拉曼偏移的测量步骤; 基于获得的光谱来预测在测量点是否发生表面缺陷区域以确定玻璃石英坩埚的质量的确定步骤。

公开(公告)号：US20160201216A1

公开(公告)日：2016-07-14

申请号：US14901036

申请日：2013-06-30

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Tadahiro SATO ,  Ken KITAHARA ,  Eriko KITAHARA

IPC分类号： C30B15/10 ,  C30B29/06

CPC分类号： C30B29/06 ,  C03B19/095 ,  C30B15/10 ,  Y02P40/57

摘要： A vitreous silica crucible includes: a substantially cylindrical straight body portion having an opening on a top end and extending in a vertical direction; a curved bottom portion; and a corner portion connecting the straight body portion with the bottom portion and a curvature of which is greater than that of the bottom portion, wherein an inner surface of the crucible has a concavo-convex structure in which groove-shaped valleys are interposed between ridges, and an average interval of the ridges is 5-100 μm.

摘要翻译： 石英玻璃坩埚包括：大致圆筒形的直体部分，其在顶端具有开口并在垂直方向上延伸; 弯曲的底部; 以及将所述直体部与所述底部连接的角部，其曲率大于所述底部的曲率，所述坩埚的内表面具有凹凸结构，在所述凹凸结构中，槽状谷部插入在所述脊部 ，脊的平均间隔为5〜100μm。

公开(公告)号：US20160108550A1

公开(公告)日：2016-04-21

申请号：US14894328

申请日：2013-05-31

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Ken KITAHARA ,  Akihiro AIBA ,  Kazushi OUSYUYA ,  Fumie YOSHIDA ,  Makiko HINOOKA ,  Eriko KITAHARA ,  Tadahiro SATO

IPC分类号： C30B15/10 ,  C03B19/09 ,  C30B29/06

CPC分类号： C30B15/10 ,  C03B19/095 ,  C30B29/06 ,  C30B35/002 ,  Y02P40/57

摘要： The present invention provides a vitreous silica crucible which inhibits a deformation even when used under a high temperature condition for a long time, and a method for manufacturing the same. The vitreous silica crucible comprises: a substantially cylindrical straight body portion having an opening on the top end and extending in a vertical direction, a curved bottom portion, and a corner portion connecting the straight body portion with the bottom portion and a curvature of which is greater than that of the bottom portion, wherein, the vitreous silica crucible comprises a transparent layer on the inside and a bubble layer on the outside thereof, a compressive stress layer in which compressive stress remains in the inner surface side of the transparent layer, and a tensile stress layer in which tensile stress remains and is adjacent to the compressive stress layer at a gradual rate of change of stress.

摘要翻译： 本发明提供即使长时间在高温条件下使用也抑制变形的石英玻璃坩埚及其制造方法。 玻璃状石英玻璃坩埚包括：基本上圆柱形的直体部分，其在顶端具有开口并在垂直方向上延伸，弯曲的底部部分和将直体部分与底部连接的拐角部分，其曲率是 大于底部的玻璃状坩埚，其中，石英玻璃坩埚包括内侧的透明层和外侧的气泡层，在透明层的内表面侧残留有压缩应力的压缩应力层，以及 拉伸应力层，其中拉应力保持并且以逐渐的应力变化率与压应力层相邻。

公开(公告)号：US20150337456A1

公开(公告)日：2015-11-26

申请号：US14818243

申请日：2015-08-04

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Takuma YOSHIOKA ,  Hiroshi KISHI ,  Takeshi FUJITA ,  Minoru KANDA ,  Koichi SUZUKI ,  Ken KITAHARA

IPC分类号： C30B15/10 ,  C03B5/02 ,  C03C17/00 ,  C03B19/02 ,  C03C17/02 ,  C30B29/06 ,  C03B19/09

CPC分类号： C04B41/5022 ,  C03B5/025 ,  C03B19/02 ,  C03B19/09 ,  C03B19/095 ,  C03C17/004 ,  C03C17/02 ,  C03C2217/213 ,  C03C2218/13 ,  C03C2218/17 ,  C04B35/185 ,  C04B41/009 ,  C04B41/86 ,  C04B2235/6027 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  Y02P40/57 ,  Y10T117/1032 ,  C04B41/4527

摘要： A composite crucible 10 is characterized in the use of mullite (3Al2O3.2SiO2) as the basic material of the crucible. The composite crucible 10 has a crucible body 11 made of mullite material whose main component is alumina and silica, and a transparent vitreous silica layer 12 formed on the inner surface of the crucible body 11. The thickness of the transparent vitreous silica layer 12 is smaller than that of the crucible body 11. The crucible body 11 is formed by the slip casting method, and the transparent vitreous silica layer 12 is formed by the thermal spraying method.

摘要翻译： 复合坩埚10的特征在于使用莫来石（3Al2O3.2SiO2）作为坩埚的基本材料。 复合坩埚10具有由主成分为氧化铝和二氧化硅的莫来石材料制成的坩埚体11和形成在坩埚体11的内表面上的透明氧化硅玻璃层12.透明氧化硅玻璃层12的厚度较小 坩埚主体11通过流延法形成，透明玻璃状二氧化硅层12通过热喷涂法形成。

公开(公告)号：US20140358270A1

公开(公告)日：2014-12-04

申请号：US14369165

申请日：2012-10-31

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Tadahiro SATO ,  Eriko KITAHARA ,  Shuji TOBITA ,  Koichi SUZUKI

IPC分类号： G06F17/50 ,  B01L3/04

CPC分类号： G06F17/50 ,  B01L3/04 ,  C03B19/095 ,  C30B15/10 ,  C30B29/06 ,  G06F17/5009 ,  G06F2217/12 ,  G06F2217/16 ,  Y02P90/265

摘要： A vitreous silica crucible is manufactured by rotational molding in such a manner that the three-dimensional shape thereof matches design data to a high degree. If the degree of matching between three-dimensional shapes of simulation data obtained based on initial property parameters and measurement data falls below a predetermined level, improved property parameters are set such that the degree of matching becomes higher than or equal to the predetermined level. If the degree of matching between three-dimensional shapes of simulation data obtained based on initial manufacturing conditions and the measurement data falls below a predetermined level, improved manufacturing conditions are set such that simulation data matching design data to a degree higher than or equal to the predetermined level is obtained. As a result, the degree of matching between the three-dimensional shapes of the design data and measurement data of the vitreous silica crucible can be enhanced to the predetermined level or higher. That is, it is possible to manufacture a vitreous silica crucible by rotational molding in such a manner that the three-dimensional shape thereof matches the design data to a high degree.

摘要翻译： 通过旋转成型制造石英玻璃坩埚，使得其三维形状与高度的设计数据相匹配。 如果基于初始属性参数和测量数据获得的模拟数据的三维形状之间的匹配程度低于预定水平，则设置改进的属性参数，使得匹配度变得高于或等于预定水平。 如果基于初始制造条件获得的模拟数据的三维形状与测量数据之间的匹配程度低于预定水平，则设置改进的制造条件，使得将设计数据匹配到大于或等于 获得预定水平。 结果，设计数据的三维形状与石英玻璃坩埚的测量数据之间的匹配程度可以提高到预定水平或更高。 也就是说，可以通过旋转成型制造石英坩埚坩埚，使得其三维形状高度地匹配设计数据。

公开(公告)号：US20140283552A1

公开(公告)日：2014-09-25

申请号：US14297314

申请日：2014-06-05

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Eriko SUZUKI

IPC分类号： C03B19/09

CPC分类号： C03B19/095 ,  C03B2201/02 ,  G01J5/0022 ,  G01J5/0037 ,  G01J5/0862 ,  Y02P40/57

摘要： Accurate temperature measurement during manufacturing a vitreous silica crucible is enabled. The present invention provides an apparatus for manufacturing a vitreous silica crucible including: a mold for forming a silica powder layer by supplying silica powder therein; an are discharge unit having carbon electrodes and a power supply unit and for heating and fusing the silica powder layer by arc discharge; and a temperature measurement unit for measuring temperature of a fused portion in the mold, wherein the temperature measurement unit is an radiation thermometer for measuring temperature by detecting radiation energy of a wavelength of 4.8 to 5.2 μm.

摘要翻译： 在制造玻璃状石英坩埚期间能够进行精确的温度测量。 本发明提供一种二氧化硅玻璃坩埚的制造装置，其特征在于，包括：通过在其中供给二氧化硅粉末而形成二氧化硅粉末层的模具; a是具有碳电极和电源单元的放电单元，用于通过电弧放电来加热和熔融二氧化硅粉末层; 以及用于测量模具中的熔融部分的温度的温度测量单元，其中温度测量单元是通过检测4.8至5.2μm的波长的辐射能量来测量温度的辐射温度计。