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公开(公告)号:US09882347B2
公开(公告)日:2018-01-30
申请号:US15222765
申请日:2016-07-28
Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Inventor: Jun-ichi Hashimoto , Tsukuru Katsuyama , Hiroyuki Yoshinaga
IPC: H01S5/34 , H01S5/042 , H01S5/026 , H01S5/028 , H01S5/22 , H01S5/227 , H01S5/40 , H01S5/125 , H01S5/022 , H01S5/12
CPC classification number: H01S5/0425 , H01S5/02276 , H01S5/026 , H01S5/0261 , H01S5/0287 , H01S5/12 , H01S5/125 , H01S5/22 , H01S5/2205 , H01S5/2272 , H01S5/3401 , H01S5/4031 , H01S5/4087 , H01S2301/176
Abstract: A quantum cascade laser includes a substrate having first and second substrate regions arranged along a first axis; a laser structure body including a laser body region having laser waveguide structures extending along the first axis, the laser structure body including first and second regions respectively including the first and second substrate regions, the laser body region having an end facet located at a boundary between the first and second regions, the second region including a terrace extending along the first axis from a bottom edge of the end facet; a plurality of first electrodes disposed on the laser waveguide structures; a plurality of pad electrodes disposed on the terrace; and a plurality of wiring metal bodies each of which includes a first portion on the terrace and a second portion on the end facet. The pad electrodes are connected with the first electrodes through the wiring metal bodies, respectively.
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公开(公告)号:US09774168B2
公开(公告)日:2017-09-26
申请号:US15088490
申请日:2016-04-01
Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Inventor: Jun-ichi Hashimoto
IPC: H01S5/00 , H01S3/08 , H01S5/34 , H01S3/067 , H01S5/227 , H01S5/022 , H01S5/125 , H01S5/024 , H01S5/22
CPC classification number: H01S5/3402 , H01S3/0675 , H01S5/0224 , H01S5/02461 , H01S5/125 , H01S5/2214 , H01S5/2224 , H01S5/227 , H01S5/2275 , H01S5/3401
Abstract: A quantum cascade semiconductor laser includes a substrate with a main surface including a waveguide area and a distributed Bragg reflection area that are arranged in a direction of a first axis; a laser region provided on the waveguide area, the laser region including a mesa waveguide having first and second side surfaces, and first and second burying regions provided on the first and second side surfaces, respectively; a distributed Bragg reflection region provided on the distributed Bragg reflection area, the distributed Bragg reflection region including a semiconductor wall having first bulk semiconductor regions and first laminate regions that are alternately arrayed in a direction of a second axis intersecting the first axis; and an upper electrode provided on the laser region. Each first bulk semiconductor region includes a bulk semiconductor layer. Each first laminate region includes a stacked semiconductor layer having a plurality of semiconductor layers.
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公开(公告)号:US09184567B2
公开(公告)日:2015-11-10
申请号:US13738179
申请日:2013-01-10
Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Inventor: Jun-ichi Hashimoto , Takashi Kato , Hiroshi Inada
IPC: H01S5/30 , H01S5/343 , H01S5/20 , H01S5/227 , H01S5/34 , B82Y20/00 , H01S5/024 , H01S5/32 , H01S5/22
CPC classification number: H01S5/343 , B82Y20/00 , H01S5/02461 , H01S5/2031 , H01S5/2224 , H01S5/2275 , H01S5/3211 , H01S5/3402
Abstract: A quantum cascade laser includes a substrate having a conductivity type, substrate having a first region, a second region, and a third region; a semiconductor lamination provided on a principal surface of the substrate, the semiconductor lamination including a mesa stripe section provided on the second region, an upper cladding layer having the same conductivity type as the substrate, a first burying layer, and a second burying layer, the mesa stripe section including a core layer; and an electrode provided on the semiconductor lamination. The first and second burying layers are provided on the first and third regions and on both side faces of the mesa stripe section. The upper cladding layer is provided on the mesa stripe section, the first burying layer, and the second burying layer. The first and second burying layers include a first and second semi-insulating semiconductor regions comprised of a semi-insulating semiconductor material.
Abstract translation: 量子级联激光器包括具有导电类型的衬底,具有第一区域,第二区域和第三区域的衬底; 设置在所述基板的主表面上的半导体层叠体,所述半导体层叠体包括设置在所述第二区域上的台面条状部分,具有与所述基板相同的导电类型的上部包覆层,第一埋入层和第二埋入层, 所述台面条状部分包括芯层; 以及设置在半导体层叠体上的电极。 第一和第二掩埋层设置在台面条状部分的第一和第三区域以及两个侧面上。 上包层设置在台面条状部分,第一掩埋层和第二掩埋层上。 第一和第二掩埋层包括由半绝缘半导体材料构成的第一和第二半绝缘半导体区域。
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公开(公告)号:US09146442B2
公开(公告)日:2015-09-29
申请号:US14481498
申请日:2014-09-09
Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Inventor: Jun-ichi Hashimoto
CPC classification number: G02F1/225 , G02F1/035 , G02F2001/212 , G02F2201/17 , G02F2201/34
Abstract: A Mach-Zehnder interferometer type optical modulator includes a first end facet and a reflecting portion opposing the first end facet; a single optical coupler including input and output ports, the optical coupler being disposed between the first end facet and the reflecting portion; first and second optical waveguides that are connected to the input ports of the optical coupler; third and fourth optical waveguides that are connected to the output ports of the optical coupler; and a phase shifting section disposed between the optical coupler and the reflecting portion. The phase shifting section includes a first optical waveguide structure constituting part of the third optical waveguide; a first upper electrode on the first optical waveguide structure; a second optical waveguide structure constituting part of the fourth optical waveguide; and a second upper electrode on the second optical waveguide structure.
Abstract translation: 马赫 - 曾德干涉仪型光调制器包括第一端面和与第一端面相对的反射部分; 包括输入和输出端口的单个光耦合器,所述光耦合器设置在所述第一端面与所述反射部分之间; 第一和第二光波导,其连接到光耦合器的输入端口; 第三和第四光波导,其连接到光耦合器的输出端口; 以及设置在光耦合器和反射部分之间的相移部分。 相移部分包括构成第三光波导的一部分的第一光波导结构; 第一光波导结构上的第一上电极; 构成第四光波导的一部分的第二光波导结构; 和在第二光波导结构上的第二上电极。
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公开(公告)号:US08804785B2
公开(公告)日:2014-08-12
申请号:US13907059
申请日:2013-05-31
Applicant: Sumitomo Electric Industries, Ltd.
Inventor: Jun-ichi Hashimoto , Takashi Kato , Hiroshi Inada , Michio Murata
IPC: H01S5/00
CPC classification number: H01S5/3401 , B82Y20/00 , H01S5/0655 , H01S5/2219 , H01S5/222 , H01S5/2224 , H01S5/2226 , H01S5/227 , H01S5/3402
Abstract: A quantum cascade semiconductor laser includes a n-type semiconductor substrate, the substrate having a main surface; a mesa waveguide disposed on the substrate, the mesa waveguide including a core layer and an n-type upper cladding layer disposed on the core layer; a first semiconductor layer disposed on a side surface of the mesa waveguide and the main surface of the substrate, the first semiconductor layer being in contact with the side surface of the mesa waveguide; and a second semiconductor layer disposed on the first semiconductor layer. The first semiconductor layer and the second semiconductor layer constitute a burying region embedding the side surfaces of the mesa waveguide. The first semiconductor layer is formed of at least one of a semi-insulating semiconductor and a p-type semiconductor. In addition, the second semiconductor layer is formed of an n-type semiconductor.
Abstract translation: 量子级联半导体激光器包括n型半导体衬底,该衬底具有主表面; 设置在所述基板上的台面波导,所述台面波导包括芯层和设置在所述芯层上的n型上包层; 设置在所述台面波导的侧面和所述基板的主面的第一半导体层,所述第一半导体层与所述台面波导的侧面接触; 以及设置在第一半导体层上的第二半导体层。 第一半导体层和第二半导体层构成嵌入台面波导的侧面的掩埋区域。 第一半导体层由半绝缘半导体和p型半导体中的至少一个形成。 此外,第二半导体层由n型半导体形成。
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公开(公告)号:US11621541B2
公开(公告)日:2023-04-04
申请号:US17086640
申请日:2020-11-02
Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Inventor: Hiroyuki Yoshinaga , Jun-ichi Hashimoto , Masato Furukawa
Abstract: A quantum cascade laser includes a laser structure having an output face for emitting laser light in a first direction; and a lens having an entrance surface and a convex surface, the entrance surface receiving the laser light from the output face, and the convex surface emitting the laser light after being condensed by the lens. The laser structure includes a semiconductor substrate and a mesa waveguide provided on a first region of a principal surface of the semiconductor substrate, the mesa waveguide extending in the first direction. The lens includes a semiconductor and is provided on a second region of the principal surface of the semiconductor substrate. The first region and the second region are arranged in the first direction.
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公开(公告)号:US11121525B2
公开(公告)日:2021-09-14
申请号:US16584973
申请日:2019-09-27
Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Inventor: Jun-ichi Hashimoto
Abstract: A quantum cascade laser including: a laser structure having a first region including a first facet, a second region including a second facet, an epitaxial surface, and a substrate surface; an insulating film disposed on the second facet and the epitaxial surface; an electrode disposed on the epitaxial surface and the insulating film and in contact with the epitaxial surface; and a metal film disposed over the second facet and the epitaxial surface and separated from the electrode and the substrate surface. The insulating film is disposed between the metal film and the second facet and between the metal film and the epitaxial surface. The second region includes a semiconductor mesa. The second facet is located at a boundary between the first region and the second region. The first region includes a connecting surface. The connecting surface connects the second facet to the first facet.
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公开(公告)号:US10608412B2
公开(公告)日:2020-03-31
申请号:US16009044
申请日:2018-06-14
Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Inventor: Jun-ichi Hashimoto
IPC: H01S5/34 , H01S5/026 , H01S5/024 , H01S5/042 , H01S5/022 , H01S5/22 , H01S5/028 , H01S5/227 , H01S5/02 , H01S5/12
Abstract: A light emitting apparatus includes: a submount including a mounting face and an end face, and the end face having an upper edge apart from a front edge of the mounting face; and a quantum cascade laser disposed on the front edge and the mounting face. The quantum cascade laser includes: a laser structure having first, and second faces; a first electrode on the first face; a second electrode on the second face; and a reflecting structure on a first end face of the laser structure. The reflecting structure includes an insulating film having a first end on the first face and a second end on the second face, and a metal film having a first end on the first face, and a second end on the second face. The insulating film is disposed between the laser structure and the first end and the second end of the metal film.
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公开(公告)号:US09923337B2
公开(公告)日:2018-03-20
申请号:US15352159
申请日:2016-11-15
Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Inventor: Hiroyuki Yoshinaga , Tsukuru Katsuyama , Jun-ichi Hashimoto
CPC classification number: H01S5/3401 , H01S5/02276 , H01S5/026 , H01S5/028 , H01S5/0425 , H01S5/12 , H01S5/125 , H01S5/22 , H01S5/4087
Abstract: A quantum cascade laser includes a laser structure including laser waveguide structures and a first terrace region; first electrodes; pad electrodes; and wiring metal conductors. The laser structure includes first, second and third regions arranged in a direction of a first axis. The third region is disposed between the first and second regions. The first region has a first end facet disposed at a boundary between the first and third regions. The first end facet extends in a direction intersecting with the first axis. The second region has a second end facet disposed at a boundary between the second and third regions. The second region includes the laser structure. The pad electrodes are disposed on the first terrace region. The first electrodes are disposed on the laser waveguide structures. Each of the pad electrodes is connected to one of the first electrodes through one of the wiring metal conductors.
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公开(公告)号:US09711944B2
公开(公告)日:2017-07-18
申请号:US15205610
申请日:2016-07-08
Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Inventor: Jun-ichi Hashimoto , Manabu Shiozaki , Hiroyuki Yoshinaga
CPC classification number: H01S5/125 , H01S5/0014 , H01S5/02461 , H01S5/026 , H01S5/2224 , H01S5/2275 , H01S5/3401 , H01S5/3402 , H01S5/34313 , H01S5/34346
Abstract: A quantum cascade laser includes a substrate having a principal surface; a laser body region disposed on the principal surface, the laser body region including a semiconductor laminate structure having an end facet, the laser body region having a waveguide structure extending along a waveguide axis; and a distributed Bragg reflection region disposed on the principal surface, the distributed Bragg reflection region including low and high refractive index portions that are alternately arranged in a direction of the waveguide axis. The end facet of the semiconductor laminate structure is optically coupled to the distributed Bragg reflection region. Each of the high refractive index portions includes a semiconductor wall including upper and lower portions that are arranged in a direction intersecting with the principal surface of the substrate. The principal surface is disposed between the upper and lower portions. The lower portion includes a part of the substrate.
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