公开(公告)号：US20190341277A1

公开(公告)日：2019-11-07

申请号：US16173950

申请日：2018-10-29

Applicant: Samsung Display Co., Ltd.

Inventor： Haeyoung Yoo ,  Taejong Kim ,  Juhee Lee ,  Myungsoo Huh ,  Jaekyu Park ,  Hyunwoo Joo

IPC: H01L21/67 ,  H01J37/32 ,  H01L27/12 ,  H01L21/311 ,  H01L27/32 ,  H01L21/027

Abstract: Provided is a display device manufacturing apparatus and a manufacturing method of a display device. The display device manufacturing apparatus includes: a chamber; a supporter arranged in the chamber and supporting a substrate; an electrode arranged in the chamber so as to face the supporter; a gas supply arranged in the chamber and configured to supply process gas into the chamber; a first baffle arranged at a rim of the supporter and having at least one first through hole; and a second baffle arranged between the first baffle and the chamber and covering the at least one first through hole in a plan view to alter a path of by-products discharged from the chamber.

公开(公告)号：US10361263B2

公开(公告)日：2019-07-23

申请号：US15949614

申请日：2018-04-10

Applicant: Samsung Display Co., Ltd.

Inventor： Jaihyuk Choi ,  Sukwon Jung ,  Myungsoo Huh ,  Seok-jin Ko ,  Hyunwoo Joo

IPC: H01L27/32 ,  H01L27/12 ,  H01L29/786

Abstract: Provided is a display apparatus. The display apparatus includes a base substrate, a first transistor disposed on the base substrate and including a first semiconductor layer including a first layer and a second layer disposed to come into contact with a first layer and including a compound made of at least two materials of a Group IV elements, a first control electrode overlapping the first semiconductor layer, a first input electrode connected to the first semiconductor layer, and a first output electrode connected to the first semiconductor layer, a second transistor and an organic light emitting diode.

公开(公告)号：US10211427B2

公开(公告)日：2019-02-19

申请号：US15640945

申请日：2017-07-03

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Myungsoo Huh ,  Sunghun Key ,  Sungchul Kim ,  Cheollae Roh ,  Sukwon Jung ,  Hyunwoo Joo ,  Jaihyuk Choi

IPC: H01L51/52 ,  H01J37/32 ,  C23C16/04 ,  C23C16/34 ,  C23C16/455 ,  C23C16/505

Abstract: A display device and an apparatus and method for manufacturing the same are disclosed. The display device includes: a substrate; a display unit formed on the substrate; and an inorganic layer formed on the display unit, wherein a water vapor transmission rate (WVTR) of the inorganic layer is 5×10−5 g/m2 day or less. The apparatus for manufacturing a display device includes: a chamber; a shower head for spraying a mixed gas into the chamber; a plasma generation unit for forming plasma from the mixed gas; a susceptor facing the shower head and on which a substrate is seated; and a power supply unit electrically connected to the plasma generation unit, wherein a frequency of a current supplied from the power supply unit to the plasma generation unit is between about 27 MHz and about 42 MHz.

公开(公告)号：US20180366688A1

公开(公告)日：2018-12-20

申请号：US16111037

申请日：2018-08-23

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Choelmin Jang ,  Dongkyun Ko ,  Inkyo Kim ,  Sukwon Jung ,  Nam Ha ,  Myungsoo Huh

IPC: H01L51/56 ,  C23C16/54 ,  H01L51/52 ,  C23C16/455 ,  H01L51/00 ,  C23C16/44

CPC classification number: H01L51/56 ,  C23C16/4412 ,  C23C16/45551 ,  C23C16/45563 ,  C23C16/54 ,  H01L51/0097 ,  H01L51/5253 ,  H01L51/5256

Abstract: An apparatus and method for manufacturing a display apparatus includes: a chamber; a first nozzle unit at the chamber, the first nozzle unit configured to deposit an organic layer or an inorganic layer on a substrate; a second nozzle unit at the chamber, the second nozzle unit configured to deposit the organic layer or the inorganic layer on a substrate and the second nozzle unit being linearly aligned with the first nozzle unit in a first direction; and an injection nozzle unit between the first nozzle unit and the second nozzle unit, the injection nozzle unit configured to inject a first gas in the chamber toward the substrate.

公开(公告)号：US12207530B2

公开(公告)日：2025-01-21

申请号：US14929159

申请日：2015-10-30

Applicant: Samsung Display Co., Ltd.

Inventor： Choelmin Jang ,  Dongkyun Ko ,  Inkyo Kim ,  Sukwon Jung ,  Nam Ha ,  Myungsoo Huh

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/54 ,  H10K50/844 ,  H10K71/00 ,  H10K77/10

Abstract: An apparatus and method for manufacturing a display apparatus includes: a chamber; a first nozzle unit at the chamber, the first nozzle unit configured to deposit an organic layer or an inorganic layer on a substrate; a second nozzle unit at the chamber, the second nozzle unit configured to deposit the organic layer or the inorganic layer on a substrate and the second nozzle unit being linearly aligned with the first nozzle unit in a first direction; and an injection nozzle unit between the first nozzle unit and the second nozzle unit, the injection nozzle unit configured to inject a first gas in the chamber toward the substrate.

公开(公告)号：US20230219343A1

公开(公告)日：2023-07-13

申请号：US17963810

申请日：2022-10-11

Applicant: Samsung Display Co., Ltd.

Inventor： Jeongwon Han ,  Jongho Park ,  Taeho Yang ,  Myungsoo Huh

IPC: B41J2/145 ,  B41M3/00 ,  B41J2/165

CPC classification number: B41J2/145 ,  B41M3/003 ,  B41J2/16505

Abstract: An inkjet printing device includes a chamber having an imaginary centerline that divides a length of the chamber in the first direction into two halves, and a plurality of inkjet nozzles coupled to the chamber and receiving ink from the chamber, the inkjet nozzles being arranged in a plurality of columns along a first direction. The inkjet nozzles include a center column nozzle disposed adjacent to the centerline of the chamber and an outer column nozzle disposed farther from the centerline than the center column nozzle. The chamber includes a bump portion disposed farther from the centerline than the outer column nozzle, the bump portion including a bump on an inner surface of the chamber.

公开(公告)号：US20230012818A1

公开(公告)日：2023-01-19

申请号：US17951111

申请日：2022-09-23

Applicant: Samsung Display Co., Ltd.

Inventor： Choelmin Jang ,  Sunghun Key ,  Junggon Kim ,  Myungsoo Huh

IPC: C23C16/54 ,  H01J37/32 ,  C23C16/455

Abstract: A deposition apparatus including a gas supply unit, including: a first process gas supply unit blowing a first process gas onto a deposition-target surface; a second process gas supply unit blowing a second process gas different from the first process gas onto the deposition-target surface of the substrate; and air curtain units blocking an area between an area where the process gas is blown and an area where the second process gas is blown, by blowing an inert gas.

公开(公告)号：US11075059B2

公开(公告)日：2021-07-27

申请号：US16239874

申请日：2019-01-04

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Junggon Kim ,  Sunghun Key ,  Choelmin Jang ,  Myungsoo Huh

IPC: H01J37/32 ,  C23C16/455

Abstract: A deposition apparatus includes a deposition gas supply unit including an opening and closing valve. The deposition gas supply unit is configured to selectively supply a source gas or a mixture gas into a chamber. A cleaning gas supply unit is configured to supply a cleaning gas into the chamber. A deposition head includes a first deposition head including a first nozzle configured to supply the source gas and the cleaning gas and a second deposition head including a second nozzle configured to supply the source gas, the mixture gas, and the cleaning gas. An exhaust unit is configured to discharge the cleaning gas and remaining source and mixture gases from the chamber. A cleaning gas valve unit is configured to be selectively opened and closed to supply the cleaning gas to at least any one of the first deposition head and the second deposition head.

公开(公告)号：US20200024724A1

公开(公告)日：2020-01-23

申请号：US16354006

申请日：2019-03-14

Applicant: Samsung Display Co., Ltd.

Inventor： Sangjin Han ,  Junha Park ,  Myungsoo Huh ,  Cheollae Roh ,  Seongho Jeong

IPC: C23C14/24 ,  C23C14/04

Abstract: An apparatus for manufacturing a display apparatus includes a chamber configured to accommodate a first display substrate and a second display substrate therein, a deposition source positioned in the chamber and comprising a plurality of crucibles configured to move and supply at least two deposition materials to the first display substrate or the second display substrate, a mask assembly arranged between the first display substrate or the second display substrate and the deposition source, and a shutter portion arranged between the mask assembly and the deposition source and configured to control an amount of the at least two deposition materials supplied from the plurality of crucibles.

公开(公告)号：US20190211445A1

公开(公告)日：2019-07-11

申请号：US16160757

申请日：2018-10-15

Applicant: Samsung Display Co., Ltd.

Inventor： Seokjin Ko ,  Myungsoo Huh ,  Sukwon Jung ,  Dongkyun Ko ,  Inkyo Kim

IPC: C23C16/44 ,  C23C16/46

CPC classification number: C23C16/4405 ,  C23C16/46

Abstract: An apparatus for manufacturing a display apparatus includes: a chamber; a head unit configured to supply a process gas and a cleaning gas to an inside of the chamber; which has a storage space where the process gas or the cleaning gas is temporarily stored, and including a nozzle connected to the storage space and configured to guide the process gas or the cleaning gas from the storage space to the inside of the chamber; a susceptor unit arranged to face the head unit and on which a substrate is placeable; a cleaning gas supply unit connected to the head unit and configured to plasmarize the cleaning gas and supply the cleaning gas that is plasmarized to the head unit; and a cleaning gas ejection unit connected to the cleaning gas supply unit and configured to supply the cleaning gas to at least two portions of the storage space.