BULK ACOUSTIC RESONATOR
    12.
    发明公开

    公开(公告)号:US20240364299A1

    公开(公告)日:2024-10-31

    申请号:US18608106

    申请日:2024-03-18

    CPC classification number: H03H9/02157 H03H9/02023 H03H9/132

    Abstract: A bulk acoustic resonator includes an active region in which a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode in a height direction, and a second electrode disposed on the piezoelectric layer in the height direction overlap each other in the height direction; a peripheral region in which the first electrode or the second electrode extends outwardly from the active region so that the first electrode and the second electrode do not overlap each other in the height direction in the peripheral region; and an auxiliary layer disposed in the peripheral region, wherein a first cutoff frequency of the active region is substantially equal to a second cutoff frequency of the peripheral region.

    BULK-ACOUSTIC WAVE RESONATOR
    15.
    发明申请

    公开(公告)号:US20220038075A1

    公开(公告)日:2022-02-03

    申请号:US17144602

    申请日:2021-01-08

    Abstract: A bulk-acoustic wave resonator includes a resonator including a central portion in which a first electrode, a piezoelectric layer, and a second electrode are sequentially stacked on a substrate, and an extension portion disposed along a periphery of the central portion; and an insertion layer disposed between the piezoelectric layer and the substrate in the extension portion to raise the piezoelectric layer. The insertion layer includes a first insertion layer having a first inclined surface formed along a side surface facing the central portion and a second inclined surface disposed between the first insertion layer and the piezoelectric layer and having a second inclined surface spaced apart from the first inclined surface with respect to a surface direction of the first electrode. The first insertion layer is thinner than the second insertion layer.

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