公开(公告)号：US20130164687A1

公开(公告)日：2013-06-27

申请号：US13538421

申请日：2012-06-29

申请人： Michael B. Binnard ,  Scott Coakley

发明人： Michael B. Binnard ,  Scott Coakley

IPC分类号： H02K9/00 ,  G03F7/20 ,  H02K41/02

CPC分类号： H02K9/005 ,  G03F7/2041 ,  H02K9/22 ,  H02K41/02 ,  H02K41/031

摘要： A stage assembly includes a stage, a base assembly, a stage mover, and a temperature adjuster. The temperature adjuster includes a first plate, a first thermal insulator, a circulation housing, a first fluid system, and a second fluid system. The first plate is positioned adjacent to a conductor array of the stage mover. The first thermal insulator is positioned adjacent to the first plate. The circulation housing defines at least a portion of a housing passageway that is positioned adjacent to the first thermal insulator. The first fluid system directs a first circulation fluid through the housing passageway, and the second fluid system directs a second circulation fluid through the first plate channel. With this design, the second circulation fluid removes the majority of the heat from the conductor array, and the first circulation fluid shields an outer surface of the circulation housing from thermal disturbance.

摘要翻译： 舞台组件包括舞台，基座组件，舞台推动器和温度调节器。 温度调节器包括第一板，第一绝热体，循环壳体，第一流体系统和第二流体系统。 第一板被定位成与载物台移动器的导体阵列相邻。 第一绝热体位于第一板附近。 循环壳体限定了与第一绝热体相邻定位的壳体通道的至少一部分。 第一流体系统引导第一循环流体通过壳体通道，并且第二流体系统引导第二循环流体穿过第一板通道。 通过这种设计，第二循环流体从导体阵列中除去大部分的热量，并且第一循环流体屏蔽循环壳体的外表面免受热扰动。

公开(公告)号：US20120127447A1

公开(公告)日：2012-05-24

申请号：US13110760

申请日：2011-05-18

申请人： Pai-Hsueh Yang ,  Scott Coakley ,  Michael B. Binnard ,  Kazuhiro Hirano ,  Bausan Yuan ,  Shiang-Lung Koo

发明人： Pai-Hsueh Yang ,  Scott Coakley ,  Michael B. Binnard ,  Kazuhiro Hirano ,  Bausan Yuan ,  Shiang-Lung Koo

IPC分类号： G03B27/58

CPC分类号： G03F7/70758 ,  G03F7/70516 ,  G03F7/70775 ,  H02P6/006

摘要： A method for determining a commutation offset for a mover (250A) of a mover assembly (220C) that moves and positions a stage (220A) relative to a stage base (220B) includes controlling the mover assembly (220C) in a closed loop fashion to maintain the position of the stage (220A) along a first axis and along a second axis with the stage (220A) levitated above the stage base (220B). The method also includes the steps of (i) directing current to a coil array (240) of the mover assembly (220C) so that the mover assembly (220C) imparts a disturbance on the stage (220A); and (ii) evaluating one or more forces generated by the mover assembly (220C) as a result of the disturbance on the stage (220A) created by the mover (250A). Further, a method for generating a compensation map (1402) includes sequentially directing a plurality of excitation signals to the control of the mover assembly (220C) and determining the control commands that result from the plurality of excitation signals.

摘要翻译： 用于确定相对于台架（220B）移动和定位平台（220A）的移动器组件（220C）的移动器（250A）的换向偏移的方法包括以闭环方式控制所述动子组件（220C） 以使台架（220A）沿着第一轴线并且沿着第二轴线保持台架（220A）的位置，台架（220A）悬浮在平台底座（220B）上方。 该方法还包括以下步骤：（i）将电流引导到移动器组件（220C）的线圈阵列（240），使得移动器组件（220C）在平台（220A）上施加干扰; 以及（ii）评估由所述移动器组件（220C）产生的由所述移动器（250A）产生的所述平台（220A）上的干扰所产生的一个或多个力。 此外，用于产生补偿图（1402）的方法包括将多个激励信号顺序地引导到移动器组件（220C）的控制，并且确定由多个激励信号产生的控制命令。

公开(公告)号：US20120113405A1

公开(公告)日：2012-05-10

申请号：US13101264

申请日：2011-05-05

申请人： Pai-Hsueh Yang ,  Scott Coakley ,  Michael B. Binnard ,  Kazuhiro Hirano ,  Bausan Yuan ,  Shiang-Lung Koo

发明人： Pai-Hsueh Yang ,  Scott Coakley ,  Michael B. Binnard ,  Kazuhiro Hirano ,  Bausan Yuan ,  Shiang-Lung Koo

IPC分类号： G03B27/58 ,  G05B1/06

CPC分类号： G03F7/70758 ,  G03F7/70516 ,  G03F7/70775 ,  H02P6/006

摘要： A method for determining a commutation offset for a mover (250A) of a mover assembly (220C) that moves and positions a stage (220A) relative to a stage base (220B) includes controlling the mover assembly (220C) in a closed loop fashion to maintain the position of the stage (220A) along a first axis and along a second axis with the stage (220A) levitated above the stage base (220B). The method also includes the steps of (i) directing current to a coil array (240) of the mover assembly (220C) so that the mover assembly (220C) imparts a disturbance on the stage (220A); and (ii) evaluating one or more forces generated by the mover assembly (220C) as a result of the disturbance on the stage (220A) created by the mover (250A). Further, a method for generating a compensation map (1402) includes sequentially directing a plurality of excitation signals to the control of the mover assembly (220C) and determining the control commands that result from the plurality of excitation signals.

摘要翻译： 用于确定相对于台架（220B）移动和定位平台（220A）的移动器组件（220C）的移动器（250A）的换向偏移的方法包括以闭环方式控制所述动子组件（220C） 以使台架（220A）沿着第一轴线并且沿着第二轴线保持台架（220A）的位置，台架（220A）悬浮在平台底座（220B）上方。 该方法还包括以下步骤：（i）将电流引导到移动器组件（220C）的线圈阵列（240），使得移动器组件（220C）在平台（220A）上施加干扰; 以及（ii）评估由所述移动器组件（220C）产生的由所述移动器（250A）产生的所述平台（220A）上的干扰所产生的一个或多个力。 此外，用于产生补偿图（1402）的方法包括将多个激励信号顺序地引导到移动器组件（220C）的控制，并且确定由多个激励信号产生的控制命令。

公开(公告)号：US08140288B2

公开(公告)日：2012-03-20

申请号：US11986314

申请日：2007-11-19

申请人： Pai-Hsueh Yang ,  Bausan Yuan ,  Kazuo Masaki ,  Kazuhiro Hirano ,  Xiao-Feng Yang ,  Scott Coakley ,  Michael B. Binnard

发明人： Pai-Hsueh Yang ,  Bausan Yuan ,  Kazuo Masaki ,  Kazuhiro Hirano ,  Xiao-Feng Yang ,  Scott Coakley ,  Michael B. Binnard

IPC分类号： G01L25/00

CPC分类号： G03F7/70758 ,  G03F7/70725

摘要： Methods, apparatus, and systems are disclosed for identifying force-ripple and/or side-forces in actuators used for moving a multiple-axis stage. The identified force-ripple and/or side-forces can be mapped, and maps of corresponding position-dependent compensation ratios useful for correcting same are obtained. The methods are especially useful for stages providing motion in at least one degree of freedom using multiple (redundant) actuators. In an exemplary method a stage member is displaced, using at least one selected actuator, multiple times over a set distance in the range of motion of the subject actuator(s). Each displacement has a predetermined trajectory and respective starting point in the range. For each displacement, respective section force-command(s) are extracted and normalized to a reference section force-command to define a section compensation-ratio. Multiple section compensation-ratios are assembled, as functions of displacement in the range, to provide a map of compensation ratios for the actuator(s) throughout the range.

摘要翻译： 公开了用于识别用于移动多轴平台的致动器中的力波动和/或侧向力的方法，装置和系统。 可以对所识别的力 - 纹波和/或侧向力进行映射，并且获得用于校正相应的位置相关的补偿比的映射。 这些方法对于使用多个（冗余）致动器在至少一个自由度中提供运动的阶段特别有用。 在示例性方法中，使用至少一个所选择的致动器，在主体致动器的运动范围内的设定距离上移动台架构件多次。 每个位移具有预定的轨迹和该范围内的相应起始点。 对于每个位移，提取相应的截面力命令并将其归一化为参考部分力命令以定义截面补偿比。 组合多段补偿比作为该范围内的位移的函数，以提供在整个范围内的致动器的补偿比的图。

公开(公告)号：US20100237819A1

公开(公告)日：2010-09-23

申请号：US12406322

申请日：2009-03-18

申请人： Michael B. Binnard ,  Scott Coakley ,  Douglas C. Watson ,  Pai-Hsueh Yang

发明人： Michael B. Binnard ,  Scott Coakley ,  Douglas C. Watson ,  Pai-Hsueh Yang

IPC分类号： G05B11/36

CPC分类号： G05B19/404 ,  G03F7/70725 ,  G03F7/70758 ,  G05B2219/41128 ,  G05B2219/41443

摘要： Embodiments of the invention compensate for one or more effects of a stage motor in a precision stage device. A feedforward module receives an input signal corresponding to the effect of the motor and generates a feedforward control signal that can be used to modify a motor control signal to compensate for the effect of the motor. In some embodiments, a control system is provided to compensate for a back-electromotive force generated by a motor, while in other embodiments, a control system may compensate for an inductive effect of a motor. Embodiments of the invention may be useful in precision stage devices, for example, lithography devices such as steppers and scanners.

摘要翻译： 本发明的实施例补偿了精密级装置中的级电动机的一个或多个效果。 前馈模块接收与电动机的效果相对应的输入信号，并产生可用于修改电动机控制信号以补偿电动机的影响的前馈控制信号。 在一些实施例中，提供控制系统以补偿由电动机产生的反电动势，而在其他实施例中，控制系统可以补偿电动机的感应效应。 本发明的实施例可用于精密平台装置，例如平版印刷装置，例如步进器和扫描器。

公开(公告)号：US20120069316A1

公开(公告)日：2012-03-22

申请号：US13228341

申请日：2011-09-08

申请人： Pai-Hsueh Yang ,  Michael B. Binnard ,  Scott Coakley

发明人： Pai-Hsueh Yang ,  Michael B. Binnard ,  Scott Coakley

IPC分类号： G03B27/58 ,  G05B11/42

CPC分类号： G05B19/404 ,  G03F7/70725 ,  G03F7/70766

摘要： An exemplary stage assembly has movable stage mass and counter-mass. A stage motor is coupled to the stage mass and counter-mass such that stage-mass motion imparted by the stage motor causes a reactive motion of the counter-mass counter to the motion of the stage mass. At least one trim-motor is coupled to the counter-mass. A control system commands the trim-motor to regulate movement of the counter-mass in reaction to stage-mass motion. A PI feedback controller receives the following-error of the counter-mass and generates corresponding center-of-gravity (CG) force commands and trim-motor force commands to the trim-motor(s) to produce corrective counter-mass motion. A trim-motor force limiter receives trim-motor force commands and produces corresponding limited trim-motor force commands that are fed back as actual CG force commands to the feedback controller to modify integral terms of the feedback controller according to the limited trim-motor force commands.

摘要翻译： 示例性的舞台组件具有可移动的舞台质量和反质量。 舞台电机被耦合到舞台质量和反质量，使得由舞台电动机施加的舞台质量运动导致反质量计数器对舞台质量的运动的反作用运动。 至少一个调整电机与反质量联接。 控制系统命令微调电机调节反质量运动反应阶段质量运动。 PI反馈控制器接收反质量的跟随误差，并产生相应的重心（CG）力指令和微调电机力指令给微调电机，以产生校正反质量运动。 修剪马达力限制器接收修剪马达力指令并产生相应的有限的修剪马达力命令，作为实际的CG力命令反馈到反馈控制器，以根据限制的修正马达力修改反馈控制器的积分项 命令。

公开(公告)号：US20120062866A1

公开(公告)日：2012-03-15

申请号：US13225235

申请日：2011-09-02

申请人： Michael B. Binnard ,  Scott Coakley ,  Alex Ka Tim Poon ,  Masahiro Totsu ,  Derek Coon ,  Leonard Wai Fung Kho ,  Gaurav Keswani ,  Alexander Cooper ,  Michel Pharand ,  Matt Bjork

发明人： Michael B. Binnard ,  Scott Coakley ,  Alex Ka Tim Poon ,  Masahiro Totsu ,  Derek Coon ,  Leonard Wai Fung Kho ,  Gaurav Keswani ,  Alexander Cooper ,  Michel Pharand ,  Matt Bjork

IPC分类号： G03B27/58 ,  H02K41/02

CPC分类号： H02K9/22 ,  G03F7/70758 ,  G03F7/70875 ,  H02K9/19 ,  H02K41/031 ,  H02K2201/18

摘要： Electromagnetic actuators are disclosed having at least one actively cooled coil assembly. Exemplary actuators are linear and planar motors of which the cooled coil assembly has a coil having first and second main surfaces. A respective thermally conductive cooling plate is in thermal contact with at least one main surface of the coil. Defined in or on each cooling plate is a coolant passageway that conducts a liquid coolant. A primary pattern of the coolant passageway is coextensive with at least part of the main surface of the coil. The primary pattern can have a secondary pattern through which coolant flows in a manner reducing eddy-current losses. An exemplary secondary pattern is serpentine. An exemplary primary pattern is radial or has a radial aspect, such as an X-shaped pattern. The devices exhibit reduced eddy-current drag.

摘要翻译： 公开了具有至少一个主动冷却的线圈组件的电磁致动器。 示例性致动器是线性和平面电动机，其中冷却的线圈组件具有具有第一和第二主表面的线圈。 相应的导热冷却板与线圈的至少一个主表面热接触。 在每个冷却板中或每个冷却板上定义的是冷却剂通道，其导通液体冷却剂。 冷却剂通道的主要图案与线圈的主表面的至少一部分共同延伸。 初级图案可以具有二次图案，冷却剂通过该图案以减少涡流损耗的方式流动。 示例性的次要图案是蛇纹石。 示例性的主要图案是径向的或具有径向方面，例如X形图案。 该装置表现出减小的涡流阻力。

公开(公告)号：US20100167556A1

公开(公告)日：2010-07-01

申请号：US12596569

申请日：2008-04-16

申请人： Masahiro Totsu ,  Michael B. Binnard ,  Scott Coakley

发明人： Masahiro Totsu ,  Michael B. Binnard ,  Scott Coakley

IPC分类号： H01L21/26 ,  G03B27/58 ,  H02K41/02 ,  H02P7/285 ,  H05K13/00

CPC分类号： H02K41/03 ,  G03F7/70758 ,  H02K2201/18 ,  H02P25/06 ,  Y10T29/49002

摘要： A mover (344) moving a stage (238) along a first axis and about a second axis includes a magnetic component (454), and a conductor component (456). The magnetic component (454) includes one or more magnets (454D) that are surrounded by a magnetic field. The conductor component (456) is positioned near the magnetic component (454) in the magnetic field. Further, the conductor component (456) interacts with the magnetic component (454) when current is directed to the conductor component (456) to generate a controlled force along the first axis, and a controlled moment about the second axis. Additionally, the conductor component (456) interacts with the magnetic component (454) to generate a controlled force along a third axis that is perpendicular to the first axis and the second axis when current is directed to the conductor component (456).

摘要翻译： 沿着第一轴线和第二轴线移动台架（238）的移动器（344）包括磁性部件（454）和导体部件（456）。 磁性部件（454）包括由磁场包围的一个或多个磁体（454D）。 导体部件（456）位于磁场附近的磁性部件（454）附近。 此外，当电流指向导体部件（456）时，导体部件（456）与磁性部件（454）相互作用，以产生沿着第一轴线的受控力，以及围绕第二轴线的受控力矩。 另外，当电流被引导到导体部件（456）时，导体部件（456）与磁性部件（454）相互作用，以沿垂直于第一轴线和第二轴线的第三轴线产生受控的力。

公开(公告)号：US20090263747A1

公开(公告)日：2009-10-22

申请号：US12424878

申请日：2009-04-16

申请人： Scott Coakley ,  Michael B. Binnard

发明人： Scott Coakley ,  Michael B. Binnard

IPC分类号： G03F7/20 ,  H02K41/03 ,  G03B27/58

CPC分类号： H02K41/02 ,  G03B27/58 ,  G03F7/70758 ,  H02K41/03 ,  H02K2201/18

摘要： A mover (344) moving a stage (238) along a first axis, along a second axis and along a third axis includes a magnetic component (354), a conductor component (356), and a control system (324). The magnetic component (354) includes a plurality of magnets (354D) that are surrounded by a magnetic field. The conductor component (356) is positioned near the magnetic component (354) in the magnetic field. Further, the conductor component (356) interacts with the magnetic component (354) when current is directed to the conductor component (356) to generate a controllable force along the first axis, a controllable force along the second axis, and a controllable force along the third axis. The conductor component (356) can include a split coil design, having a first conductor array (356A) and a second conductor array (356B) that is positioned substantially adjacent to the first conductor array (356A). The conductor component (356) and the magnetic component (354) can be displaced relative to each other along the third axis. The control system (324) independently directs current to each of the conductor arrays (356A, 356B) to generate a controllable force along the first axis, along the second axis, and along the third axis. With this design, the same mover can be used to move the stage along three degrees of freedom (“DOF”).

摘要翻译： 移动台（344）沿着第一轴线沿第二轴线和第三轴线移动台架（238）包括磁性部件（354），导体部件（356）和控制系统（324）。 磁性部件（354）包括由磁场包围的多个磁体（354D）。 导体部件（356）位于磁场附近的磁性部件（354）附近。 此外，当电流被引导到导体部件356时，导体部件356与磁性部件354相互作用，沿着第一轴线产生可控制的力，沿着第二轴线产生可控制的力， 第三轴。 导体部件（356）可以包括具有第一导体阵列（356A）和基本上邻近于第一导体阵列（356A）定位的第二导体阵列（356B）的分裂线圈设计。 导体部件（356）和磁性部件（354）可以相对于彼此沿着第三轴线移位。 控制系统（324）独立地将电流引导到每个导体阵列（356A，356B），以沿着第一轴线，沿第二轴线以及第三轴线产生可控制的力。 通过这种设计，可以使用相同的推动器沿着三个自由度（“DOF”）移动舞台。

公开(公告)号：US20090033895A1

公开(公告)日：2009-02-05

申请号：US11882027

申请日：2007-07-30

申请人： Michael B. Binnard ,  Douglas C. Watson ,  Alton H. Phillips ,  Scott Coakley

发明人： Michael B. Binnard ,  Douglas C. Watson ,  Alton H. Phillips ,  Scott Coakley

IPC分类号： G03B27/42

CPC分类号： G03F7/709 ,  G03F7/70833

摘要： A lithography apparatus includes a projection optical system that projects an image of a pattern, a first support member, a second support member that is flexibly coupled to the first support member by a first flexible coupling device such that the second support member is suspended from the first support member, and a second flexible coupling device that flexibly couples the projection optical system to the second support structure. This arrangement is capable of improving the vibration characteristics of the projection optical system.

摘要翻译： 光刻设备包括投影光学系统，其投影图案的图像，第一支撑构件和第二支撑构件，第二支撑构件通过第一柔性联接装置柔性地联接到第一支撑构件，使得第二支撑构件从 第一支撑构件和将投影光学系统柔性地耦合到第二支撑结构的第二柔性耦合装置。 这种布置能够改善投影光学系统的振动特性。