Gas discharge laser with pulse multiplier
    11.
    发明授权
    Gas discharge laser with pulse multiplier 有权
    带脉冲倍增器的气体放电激光器

    公开(公告)号:US06535531B1

    公开(公告)日:2003-03-18

    申请号:US10006913

    申请日:2001-11-29

    IPC分类号: H01S310

    摘要: A gas discharge laser with a pulse multiplier. In the pulse multiplier, short pulses from the laser are divided into portions and all or all but one of these portions are delayed in delay legs by different time periods and recombined to provide a stretched output pulse having substantially reduced intensity and longer duration as compared to the pulse from the laser. Focusing optics are included in each delay leg to assure that beam size and angular spread of each portion of the combined pulse is not substantially different from other portions of the pulse.

    摘要翻译: 具有脉冲倍增器的气体放电激光器。 在脉冲乘法器中,来自激光器的短脉冲被分成多个部分,全部或全部,但是这些部分中的一个在延迟支路中延迟不同的时间段,并且重新组合以提供具有显着降低的强度和更长持续时间的拉伸输出脉冲,与 来自激光的脉冲。 每个延迟支路都包括聚焦光学元件,以确保组合脉冲的每个部分的光束尺寸和角度扩展与脉冲的其他部分基本不同。

    Implantable radiation therapy device having controllable radiation emission
    12.
    发明授权
    Implantable radiation therapy device having controllable radiation emission 有权
    具有可控辐射发射的可植入放射治疗装置

    公开(公告)号:US06471631B1

    公开(公告)日:2002-10-29

    申请号:US09575431

    申请日:2000-05-22

    IPC分类号: A61M3612

    摘要: An implantable radiation therapy device includes a biocompatible radiotranslucent outer capsule containing a radiation shielding element and a radioactive isotope at least partially shielded by the shielding element. When the device is at or below body temperature, radiation is prevented or limited from being transmitted through the outer capsule by the shielding element. When non-ambient energy is applied to the device, the shielding element and radioactive isotope are reconfigured such that an increased level of radiation is transmitted through the outer capsule and emitted by the device.

    摘要翻译: 可植入放射治疗装置包括生物相容的无辐射透明外胶囊,其包含至少部分被屏蔽元件屏蔽的辐射屏蔽元件和放射性同位素。 当装置处于或低于体温时,防止或限制辐射通过屏蔽元件透过外胶囊。 当非环境能量被施加到设备时,屏蔽元件和放射性同位素被重新配置,使得增加的辐射水平通过外部胶囊传输并被设备发射。

    Deep ultraviolet catadioptric anamorphic telescope
    13.
    发明授权
    Deep ultraviolet catadioptric anamorphic telescope 有权
    深紫外反射折射变形望远镜

    公开(公告)号:US06356576B1

    公开(公告)日:2002-03-12

    申请号:US09450919

    申请日:1999-11-29

    申请人: Scott T. Smith

    发明人: Scott T. Smith

    IPC分类号: H01S308

    摘要: A catadioptric anamorphic beam expanding telescope expands an optical beam in a first axis substantially perpendicular to the beam propagation axis, and deflects it in a plane substantially perpendicular to the first axis. The beam expanding telescope can include reflective, refractive, and combined reflective/refractive elements. An embodiment includes an off axis convex spheric reflector and an off axis combined reflective/reflective optical element, commonly known as a Mangin mirror, incorporating a refractive first surface and a reflective rear surface, which compensate for aberrations introduced by the off axis deflection of the beam. The telescope is particularly useful for deep ultraviolet (DUV) applications at wavelengths shorter than about 250 nm. In some applications, the telescope illuminates a diffraction grating or other wavelength dispersive element, aligned to retroreflect a preferential wavelength, thereby providing wavelength narrowing. In some applications a combined telescope and diffraction grating are incorporated within a laser optical cavity, thereby narrowing the output wavelength spectrum of the laser. Embodiments are advantageous for intracavity line narrowing in an electric discharge laser, such as a KrF excimer laser, ArF excimer laser, or F2 molecular laser. Additionally, embodiments in accordance with the present invention provide an improved general purpose DUV beam expander.

    摘要翻译: 反射折射变形光束扩展望远镜在基本上垂直于光束传播轴线的第一轴上扩展光束,并使其在基本上垂直于第一轴线的平面中偏转。 光束扩展望远镜可以包括反射,折射和组合的反射/折射元件。 一个实施例包括离轴凸球面反射器和离轴组合的反射/反射光学元件,通常称为Mangin镜,其包括折射第一表面和反射后表面,其补偿由偏转的偏转引起的像差 光束。 望远镜特别适用于波长短于约250 nm的深紫外(DUV)应用。 在一些应用中,望远镜照射衍射光栅或其他波长色散元件,其被对准以回射优先波长,从而提供波长变窄。 在一些应用中,将组合的望远镜和衍射光栅并入激光光腔内,从而使激光器的输出波长谱变窄。 实施例对于诸如KrF准分子激光器,ArF准分子激光器或F2分子激光器的放电激光器中的腔内线窄化是有利的。 另外,根据本发明的实施例提供了一种改进的通用DUV光束扩展器。

    Correction factor for color response calibration
    15.
    发明授权
    Correction factor for color response calibration 有权
    颜色响应校准的校正因子

    公开(公告)号:US09080916B2

    公开(公告)日:2015-07-14

    申请号:US13600057

    申请日:2012-08-30

    摘要: The color response of camera devices may be calibrated, using a correction factor that can account for differences in the spectra of light emitted by different light sources used during calibration. The correction factor may be calculated based on the expected spectral sensitivities of the camera devices, the power spectrum of an actual light source, and the power spectrum of a canonical light source. The correction factor is then applied to adjust a measured color response of a given camera device, so that the adjusted color response is effectively the response of the given camera device if it had been illuminated by the canonical light source. In this manner, any measured color response differences, which may be due to differences between the actual light source used and the canonical light source, can be effectively reduced (if not essentially eliminated.) Other embodiments are also described and claimed.

    摘要翻译: 可以使用校正因子来校准照相机装置的颜色响应,校正因子可以解决在校准期间使用的不同光源发射的光的光谱差异。 可以基于相机装置的预期光谱灵敏度,实际光源的功率谱和规范光源的功率谱来计算校正因子。 然后应用校正因子来调整给定相机装置的测量的颜色响应,使得如果被规范的光源照亮,则调整的颜色响应实际上是给定相机装置的响应。 以这种方式,可以有效地减少可能由于使用的实际光源和规范光源之间的差异而导致的任何测量的颜色响应差异(如果不是基本消除的话)。还描述和要求保护其他实施例。

    CORRECTION FACTOR FOR COLOR RESPONSE CALIBRATION
    16.
    发明申请
    CORRECTION FACTOR FOR COLOR RESPONSE CALIBRATION 有权
    用于颜色响应校准的校正因子

    公开(公告)号:US20140063283A1

    公开(公告)日:2014-03-06

    申请号:US13600057

    申请日:2012-08-30

    IPC分类号: H04N9/73

    摘要: The color response of camera devices may be calibrated, using a correction factor that can account for differences in the spectra of light emitted by different light sources used during calibration. The correction factor may be calculated based on the expected spectral sensitivities of the camera devices, the power spectrum of an actual light source, and the power spectrum of a canonical light source. The correction factor is then applied to adjust a measured color response of a given camera device, so that the adjusted color response is effectively the response of the given camera device if it had been illuminated by the canonical light source. In this manner, any measured color response differences, which may be due to differences between the actual light source used and the canonical light source, can be effectively reduced (if not essentially eliminated.) Other embodiments are also described and claimed.

    摘要翻译: 可以使用校正因子来校准照相机装置的颜色响应,校正因子可以解决在校准期间使用的不同光源发射的光的光谱差异。 可以基于相机装置的预期光谱灵敏度,实际光源的功率谱和规范光源的功率谱来计算校正因子。 然后应用校正因子来调整给定相机装置的测量的颜色响应,使得如果被规范的光源照亮,则调整的颜色响应实际上是给定相机装置的响应。 以这种方式,可以有效地减少可能由于使用的实际光源和规范光源之间的差异而导致的任何测量的颜色响应差异(如果不是基本消除的话)。还描述和要求保护其他实施例。

    Pixel arrangement for extended dynamic range imaging
    17.
    发明授权
    Pixel arrangement for extended dynamic range imaging 有权
    用于扩展动态范围成像的像素排列

    公开(公告)号:US08582006B2

    公开(公告)日:2013-11-12

    申请号:US13111150

    申请日:2011-05-19

    申请人: Scott T. Smith

    发明人: Scott T. Smith

    摘要: The present invention relates to an imager for improving image quality. The imager includes a pixel array of a plurality of pixels arranged in rows and columns. The imager also includes a color filter array (CFA) including a color pattern of a first color filter allowing a first pixel to detect a first color of light, and a second color filter allowing a second pixel to detect a second color of light and a third color of light. Each of the color filters in the color pattern are included in each row of the pixel array.

    摘要翻译: 本发明涉及一种用于提高图像质量的成像器。 成像器包括以行和列排列的多个像素的像素阵列。 成像器还包括滤色器阵列(CFA),其包括允许第一像素检测第一颜色的光的第一滤色器的颜色图案,以及允许第二像素检测第二颜色的光的第二滤色器和 第三种颜色的光。 彩色图案中的每个滤色器都包含在像素阵列的每行中。

    High resolution spectral measurement device
    18.
    发明授权
    High resolution spectral measurement device 有权
    高分辨率光谱测量装置

    公开(公告)号:US06713770B2

    公开(公告)日:2004-03-30

    申请号:US10098975

    申请日:2002-03-15

    IPC分类号: G01J314

    摘要: A high resolution spectral measurement device. A preferred embodiment presents an extremely narrow slit function in the ultraviolet range and is very useful for measuring bandwidth of narrow-band excimer lasers used for integrated circuit lithography. Light from the laser is focused into a diffuser and the diffused light exiting the diffuser illuminates an etalon. A portion of its light exiting the etalon is collected and directed into a slit positioned at a fringe pattern of the etalon. Light passing through the slit is collimated and the collimated light illuminates a grating positioned in an approximately Littrow configuration which disburses the light according to wavelength. A portion of the dispursed light representing the wavelength corresponding to the selected etalon fringe is passed through a second slit and monitored by a light detector. When the etalon and the grating are tuned to the same precise wavelength a slit function is defined which is extremely narrow such as about 0.034 pm (FWHM) and about 0.091 pm (95 percent integral). The bandwidth of a laser beam can be measured very accurately by a directing portion of the laser beam into the insulator and scanning the laser wavelength over a range which includes the monochromator slit wavelength. In a second embodiment the second slit and the light detector is replaced by a photodiod array and the bandwidth of a laser beam is determined by analyzing a set of scan data from the photodiode array. Alternately, the laser wavelength can be fixed near the middle of the spectrum range of the grating spectrometer, and the etalon can be scanned.

    摘要翻译: 高分辨率光谱测量装置。 优选的实施例在紫外线范围内呈现非常窄的狭缝功能,并且对于测量用于集成电路光刻的窄带准分子激光器的带宽是非常有用的。 来自激光的光被聚焦成漫射器,并且离开扩散器的漫射光照射标准具。 将其从标准具出射的光的一部分收集并引导到位于标准具的边缘图案处的狭缝中。 通过狭缝的光线被准直,并且准直光照射位于大约Littrow配置中的光栅,其根据波长散发光。 表示对应于所选择的标准具条纹的波长的调度光​​的一部分通过第二狭缝并由光检测器监视。 当标准具和光栅调谐到相同的精确波长时,定义狭缝功能,其极窄,例如约0.034μm(FWHM)和约0.091μm(95%积分)。 通过激光束的引导部分进入绝缘体并且在包括单色器狭缝波长的范围内扫描激光波长,可以非常精确地测量激光束的带宽。 在第二实施例中,第二狭缝和光检测器由光电二极管阵列替代,并且通过分析来自光电二极管阵列的一组扫描数据来确定激光束的带宽。 或者,激光波长可以固定在光栅光谱仪的光谱范围附近,可以扫描标准具。

    Implantable brachytherapy device having at least partial deactivation
capability
    19.
    发明授权
    Implantable brachytherapy device having at least partial deactivation capability 失效
    具有至少部分失活能力的植入式近距离放射治疗装置

    公开(公告)号:US06066083A

    公开(公告)日:2000-05-23

    申请号:US200698

    申请日:1998-11-27

    IPC分类号: A61M36/12 A61N5/10

    摘要: An implantable brachytherapy device includes a biocompatible outer capsule containing a radiation shielding element and a radioactive isotope between the shielding element and the wall of the outer capsule. When the device is at body temperature, radiation is emitted by the isotope through the wall of the outer capsule. When a predetermined amount of energy is applied to the device, the shielding element is adapted to at least partially surround the isotope, and thereby at least partially prevent the transmission of radiation through the outer capsule.

    摘要翻译: 可植入近程放射治疗装置包括生物相容性外胶囊,其包含辐射屏蔽元件和屏蔽元件与外胶囊壁之间的放射性同位素。 当设备处于体温时,同位素通过外部胶囊的壁发射辐射。 当预定量的能量被施加到装置时,屏蔽元件适于至少部分地围绕同位素,并且因此至少部分地防止辐射通过外部胶囊的传播。

    Portable, digital X-ray apparatus for producing, storing, and displayng
electronic radioscopic images
    20.
    发明授权
    Portable, digital X-ray apparatus for producing, storing, and displayng electronic radioscopic images 失效
    用于制造,存储和显示电子放射线图像的便携式数字X射线装置

    公开(公告)号:US5828726A

    公开(公告)日:1998-10-27

    申请号:US773483

    申请日:1996-12-23

    摘要: A portable, self-contained, electronic radioscopic imaging system uses a pulsed X-ray source, a remote X-ray sensor, and a self-contained, display and controller unit to produce, store, and/or display digital radioscopic images of an object under investigation. The pulsed X-ray source transmits a burst of narrow pulses of X-rays at the object being investigated at a low repetition rate. The X-ray sensor utilizes an X-ray scintillating screen in combination with either an integrating CCD camera, or an active matrix of thin film transistors and sample-and-hold photodiodes, to produce an integrated signal representative of the accumulated number of flashes of radiation (X-ray pulses that pass through the object) that are sensed in a given pixel area of the scintillating screen. The self-contained display and controller unit utilizes digital signal processing within an enhanced portable computer, including a flat solid state display panel and associated drive circuitry, in order to display the full dynamic range and resolution of the sensor. A modem allows the digitized image to be sent to a remote location where the exact same image can be recreated for analysis by off-site experts.

    摘要翻译: 便携式,独立的电子放射线成像系统使用脉冲X射线源,远程X射线传感器和独立的显示器和控制器单元来产生,存储和/或显示数字放射线图像 被调查对象 脉冲X射线源以低重复率在正在研究的物体上发射X射线的窄脉冲的脉冲。 X射线传感器利用X射线闪烁屏幕与积分CCD相机或薄膜晶体管的有源矩阵以及采样和保持光电二极管组合,以产生代表累积闪光次数的积分信号 在闪烁屏幕的给定像素区域中感测到的辐射(穿过物体的X射线脉冲)。 独立显示和控制器单元利用增强型便携式计算机内的数字信号处理,包括平面固态显示面板和相关联的驱动电路,以便显示传感器的全部动态范围和分辨率。 调制解调器允许将数字化图像发送到远程位置,其中可以重新创建完全相同的图像以供异地专家分析。