公开(公告)号：US20080218751A1

公开(公告)日：2008-09-11

申请号：US12073295

申请日：2008-03-04

Applicant: Takahiro Togashi ,  Shigeru Matsui

Inventor： Takahiro Togashi ,  Shigeru Matsui

IPC: G01N21/00

CPC classification number: G01N21/9503 ,  G01N21/4738

Abstract: An inspection device of an object, comprising: a laser beam source for oscillating a laser beam and irradiating the laser beam onto a surface of an object to be inspected, a rotary table for loading and rotating the object, a moving mechanism for moving the rotary table in a transfer direction of the object, a plurality of light receptors disposed above the object for receiving a scattering light scattered from the surface of the object when the laser beam irradiated from the laser beam source onto the surface of the object loaded on the rotary table, and a data processor for performing operations on the basis of received signals of the scattering light received by the plurality of light receptors and discriminating a boundary position between a flat plane area of the surface of the object which is irradiated with the laser beam and a predetermined area corresponding to an edge portion outside the plane area.

Abstract translation: 一种物体的检查装置，包括：激光束源，用于振荡激光束并将激光束照射到待检查物体的表面上;旋转台，用于装载和旋转物体;移动机构，用于使旋转 在物体的传送方向上设置多个光接收器，设置在物体上方的多个光接收器，用于当从激光束源照射到加载在旋转体上的物体的表面上时从物体的表面散射的散射光 表和数据处理器，用于基于由多个光接收器接收的散射光的接收信号进行操作，并且识别被激光束照射的物体的表面的平面区域与边界位置之间的边界位置;以及 对应于平面区域外的边缘部分的预定区域。

公开(公告)号：US20080174764A1

公开(公告)日：2008-07-24

申请号：US11834217

申请日：2007-08-06

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/4738

Abstract: Provided are a surface inspection method and a surface inspection apparatus that are capable of detecting scattered light from a contaminant particle and a defect at a good S/N even when the relative ratio of background scattered light to the total quantity of scattered light and the anisotropy of background scattered light in angular directions are not relatively large in a case where background scattered light deriving from the surface roughness of a semiconductor wafer has directivity in a direction of an elevation angle or an azimuthal angle and in a case where the directivity of background scattered light changes depending on positions on a wafer to be inspected. In surface inspection according to the present invention, by use of a plurality of photodetectors arranged in a plurality of directions, light scattered, diffracted or reflected on a surface of an object to be inspected or in the vicinity of the surface is detected and a plurality of signals obtained by this are subjected to weighted addition processing or weighted averaging processing by linear combination, whereby a contaminant particle and a defect on a surface of an object to be inspected and the like are detected. The size of a contaminant particle and a defect is calculated from results of the weighted addition processing or weighted averaging processing.

Abstract translation: 提供了即使当背景散射光与散射光的总量和各向异性的相对比率时，能够检测来自污染物颗粒的散射光和良好S / N的缺陷的表面检查方法和表面检查装置 在从半导体晶片的表面粗糙度导出的背景散射光在仰角方位角或方位角方向上具有方向性的背景散射光在角度方向上的背景散射光不会相对较大，并且在背景分散的方向性的情况下 光取决于要检查的晶片上的位置。 在根据本发明的表面检查中，通过使用多个沿多个方向布置的光检测器，检测被检测物体的表面或表面附近的散射，衍射或反射的光，并且检测多个 通过线性组合对由此获得的信号进行加权相加处理或加权平均处理，由此检测待检测对象的表面上的污染物颗粒和缺陷等。 通过加权加法处理或加权平均处理的结果计算污染物颗粒的尺寸和缺陷。

公开(公告)号：US20070268484A1

公开(公告)日：2007-11-22

申请号：US11798805

申请日：2007-05-17

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/47 ,  G01N2021/8861

Abstract: An optical inspection apparatus irradiates a light beam onto the outer surface of an object to be inspected, in the form of an illumination spot having an illumination intensity which is higher in the outer peripheral part of the object to be inspected than in the inner peripheral part thereof while uniformly maintains a temperature rise caused by the irradiation of the light beam, over the outer surface of the object to be inspected, in order to prevent the effective entire signal value of a scattered light signal from lowering, without lowering the linear speed of a movable stage for the object to be inspected in the outer peripheral part of the object to be inspected, thereby it is possible to prevent lowering of the detectability for a foreign matter or a defect, for preventing lowering of inspection throughput.

Abstract translation: 光学检查装置将光束照射到被检查物体的外周部的照明强度比要检查对象的外周部的照明强度高于内周部的照明光斑的形状 同时在被检查物体的外表面上均匀地保持由光束照射引起的温度升高，以防止散射光信号的有效整体信号值降低，而不会降低线性速度 在待检查物体的外周部分中可检测物体的可移动台，从而可以防止异物或缺陷的可检测性的降低，以防止检查吞吐量的降低。

公开(公告)号：US5253183A

公开(公告)日：1993-10-12

申请号：US803894

申请日：1991-12-09

Applicant: Masaru Inoue ,  Shigeru Matsui

Inventor： Masaru Inoue ,  Shigeru Matsui

IPC: G01J3/453 ,  G01J9/02

CPC classification number: G01J3/4537 ,  G01J2009/0261

Abstract: A device according to the present invention includes an interferometer which produces interference fringes from light received from a light source. The interference fringes are imaged onto a photo-diode array which transforms the imaged interference fringes into a single set of electric signals. The single set of electric signals is digitized and stored as a group of consecutive data points which represent an interferogram signal containing a DC component. The data points are processed to obtain moving average values representing the DC component of the interferogram signal. The moving average values are subtracted from the data points to obtain a clean interferogram signal which is Fourier-transformed to obtain a spectrogram of the light source.

Abstract translation: 根据本发明的装置包括干涉仪，其从光源接收的光产生干涉​​条纹。 干涉条纹被成像到光电二极管阵列，其将成像的干涉条纹变换成单组电信号。 单组电信号被数字化并存储为表示包含DC分量的干涉图信号的一组连续数据点。 处理数据点以获得表示干涉图信号的DC分量的移动平均值。 从数据点中减去移动平均值，以获得干涉干涉图信号，该信号被傅里叶变换以获得光源的光谱图。

公开(公告)号：USD337334S

公开(公告)日：1993-07-13

申请号：US678630

申请日：1991-04-01

Applicant: Shigeru Matsui ,  Masao Tokita ,  Shinichi Omura

Designer： Shigeru Matsui ,  Masao Tokita ,  Shinichi Omura

公开(公告)号：US4757168A

公开(公告)日：1988-07-12

申请号：US871328

申请日：1986-06-06

Applicant: Shiori Fujiyoshi ,  Shigeru Matsui

Inventor： Shiori Fujiyoshi ,  Shigeru Matsui

IPC: H01H23/02 ,  H01H9/00

CPC classification number: H01H23/02

Abstract: A switch device is disclosed, which comprises a mounting frame provided with a switch body or bodies, a reinforcing frame to be provided with a plate, placed on the surface of a building-forming material and threadedly fixed to the mounting frame, a decorative frame fixed integrally with or separately from the reinforcing frame, and a decorative surface sheet or sheets to be fitted into the decorative frame and attached to a switch-working portion or portions of the switch body or bodies and having an area larger than that of the switch body or bodies. A light display for indicating the on.off state of the switch is or are formed on the decorative surface sheet or sheets.

Abstract translation: 公开了一种开关装置，其包括设置有开关主体或主体的安装框架，设置有板的加强框架，放置在建筑物形成材料的表面上并螺纹地固定到安装框架上，装饰框架 与加强框架一体地固定或与加强框架分开固定的装饰性表面片材，以及装配到装饰框架中并附接到开关工作部分或开关体或部分的装饰性表面片材，并且具有比开关 身体或身体。 用于指示开关的开启状态的光显示器形成在装饰性表面片材上。

公开(公告)号：US4752735A

公开(公告)日：1988-06-21

申请号：US946957

申请日：1986-12-29

Applicant: Takashi Onodera ,  Shigeru Matsui ,  Hideki Kohno

Inventor： Takashi Onodera ,  Shigeru Matsui ,  Hideki Kohno

IPC: A61B5/055 ,  A61B10/00 ,  G01R33/24 ,  G01R33/387 ,  G01R33/565 ,  G01R33/20

CPC classification number: G01R33/56518 ,  G01R33/24

Abstract: Method for measuring the time dependence of an oscillating field gradient and representatively its integral function with respect to time for imaging method using the field gradient such as rapid chemical shift imaging method echo planar method, etc. A uniform specimen is placed within a coil of an NMR device, in which nuclear spins are excited; a phase encoding field gradient is applied thereto; and signals are sampled under application of the field gradient to be measured. These steps are repeated and an integral function of the field gradient with respect to time is obtained by using the peak position in the series of data obtained by this repetition.

Abstract translation: 用于使用诸如快速化学位移成像方法回波平面法等场梯度的成像方法来测量振荡场梯度的时间依赖性和代表性的其积分函数的方法。将均匀的样本放置在 其中核自旋激发的NMR装置; 应用相位编码场梯度; 并且在应用待测量的场梯度下对信号进行采样。 重复这些步骤，通过使用通过该重复获得的一系列数据中的峰值位置获得相对于时间的场梯度的积分函数。

公开(公告)号：US20130107255A1

公开(公告)日：2013-05-02

申请号：US13702684

申请日：2011-05-31

Applicant: Shigeru Matsui ,  Daisuke Kurimoto

Inventor： Shigeru Matsui ,  Daisuke Kurimoto

IPC: G01J3/10

CPC classification number: G01J3/10 ,  G01J3/12 ,  G01J3/2803 ,  G01J3/42 ,  G01N21/255 ,  G01N21/31

Abstract: Disclosed is a spectrophotometer capable of achieving a good signal-to-noise ratio by improving the use efficiency of the amount of light emitted from a Xe flash lamp or other intermittent light source. Light having a desired wavelength is selected from the light emitted from the Xe flash lamp (1), which is a single light source having a wide wavelength range, allowed to pass through a sample (7), detected by a photodetector (21, 22), and supplied to a low-pass filter (24) in a signal processing circuit (23). The duration of the waveform of a signal output from the photodetector (21, 22) is extended by the low-pass filter (24), which has a time constant equivalent to the elapsed time required for the intensity of the light emitted from the Xe flash lamp (1) to decrease from a peak value to a half value and acts as delay means or other duration extension means. The signal having a waveform whose duration is extended is supplied to a computer (30) through an amplifier (25) and an analog-to-digital conversion circuit (26). As the signal having the waveform whose duration is extended can be used, it is possible to enhance the use efficiency of the total amount of emitted light and optimize the effect of signal-to-noise ratio improvement.

Abstract translation: 公开了一种分光光度计，其能够通过提高从Xe闪光灯或其它间歇光源发射的光量的使用效率来获得良好的信噪比。 从具有宽波长范围的单个光源的Xe闪光灯（1）发出的光被选择为允许通过样品（7）的光，由光电检测器（21,22）检测到的光 ），并提供给信号处理电路（23）中的低通滤波器（24）。 从光电检测器（21,22）输出的信号的波形的持续时间由低通滤波器（24）延长，该低通滤波器具有等于从Xe发射的光的强度所需的经过时间的时间常数 闪光灯（1）从峰值减小到半值，并作为延迟装置或其他持续时间延长装置。 具有延长其持续时间的波形的信号通过放大器（25）和模拟 - 数字转换电路（26）提供给计算机（30）。 由于可以使用其持续时间延长的波形的信号，所以可以提高发光总量的使用效率并优化信噪比改善的效果。

公开(公告)号：US08246803B2

公开(公告)日：2012-08-21

申请号：US11654683

申请日：2007-01-18

Applicant: Motohiro Yamazaki ,  Ryoji Inaba ,  Satoshi Takahashi ,  Shigeru Matsui

Inventor： Motohiro Yamazaki ,  Ryoji Inaba ,  Satoshi Takahashi ,  Shigeru Matsui

IPC: G01N27/453

CPC classification number: G01N27/44721

Abstract: An object of the present invention is to provide a capillary electrophoresis apparatus in which simultaneity can be ensured between sensitivity and data acquisition to decrease a pull-up signal while spectral data acquisition is eliminated in each capillary exchange. The invention relates to a capillary electrophoresis apparatus characterized in that a multi-bandpass filter is provided in an optical detection system. In one aspect of the invention, a signal detection area of a two-dimensional detector is divided into plural regions corresponding to wavelength transmission regions of the multi-bandpass filter. An integrated value of the fluorescence spectrum signal is determined in the region including a fluorescence spectrum peak of an analysis sample in the plural regions. The analysis is performed with the integrated value.

Abstract translation: 本发明的目的是提供一种毛细管电泳装置，其中可以在灵敏度和数据采集之间确保同时性，以减少上拉信号，同时在每个毛细管交换中消除光谱数据采集。 本发明涉及一种毛细管电泳装置，其特征在于在光学检测系统中提供多带通滤波器。 在本发明的一个方面，二维检测器的信号检测区域被分成与多带通滤波器的波长透射区域对应的多个区域。 在包括多个区域中的分析样品的荧光光谱峰的区域中确定荧光光谱信号的积分值。 分析用积分值进行。

公开(公告)号：US08243263B2

公开(公告)日：2012-08-14

申请号：US13167298

申请日：2011-06-23

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/94

Abstract: In the conventional contaminant particle/defect inspection method, if the illuminance of the illumination beam is held at not more than a predetermined upper limit value not to give thermal damage to the sample, the detection sensitivity and the inspection speed being in the tradeoff relation with each other, it is very difficult to improve one of the detection sensitivity and the inspection speed without sacrificing the other or improve both at the same time. The invention provides an improved optical inspection method and an improved optical inspection apparatus, in which a pulse laser is used as a light source, and a laser beam flux is split into a plurality of laser beam fluxes which are given different time delay to form a plurality of illumination spots. The scattered light signal from each illumination spot is isolated and detected by using a light emission start timing signal for each illumination spot.

Abstract translation: 在常规污染物颗粒/缺陷检查方法中，如果照明光束的照度被保持在不对样品造成热损伤的预定上限值以下，则检测灵敏度和检查速度与 彼此难以提高检测灵敏度和检测速度之一而不牺牲另一方或同时改善两者。 本发明提供了一种改进的光学检查方法和改进的光学检查装置，其中使用脉冲激光器作为光源，并且激光束通量被分割成多个激光束，其被给予不同的时间延迟以形成 多个照明点。 通过使用每个照明点的发光开始定时信号来隔离并检测来自每个照明点的散射光信号。