公开(公告)号：US11488857B2

公开(公告)日：2022-11-01

申请号：US16906615

申请日：2020-06-19

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yu-Shih Wang ,  Po-Nan Yeh ,  U-Ting Chiu ,  Chun-Neng Lin ,  Chia-Cheng Chen ,  Liang-Yin Chen ,  Ming-Hsi Yeh ,  Kuo-Bin Huang

IPC: H01L21/768 ,  H01L23/522 ,  H01L23/532

Abstract: Semiconductor devices and methods of manufacture are described herein. A method includes forming an opening through an interlayer dielectric (ILD) layer to expose a contact etch stop layer (CESL) disposed over a conductive feature in a metallization layer. The opening is formed using photo sensitive materials, lithographic techniques, and a dry etch process that stops on the CESL. Once the CESL is exposed, a CESL breakthrough process is performed to extend the opening through the CESL and expose the conductive feature. The CESL breakthrough process is a flexible process with a high selectivity of the CESL to ILD layer. Once the CESL breakthrough process has been performed, a conductive fill material may be deposited to fill or overfill the opening and is then planarized with the ILD layer to form a contact plug over the conductive feature in an intermediate step of forming a semiconductor device.

公开(公告)号：US20220285209A1

公开(公告)日：2022-09-08

申请号：US17193201

申请日：2021-03-05

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： U-Ting Chiu ,  Po-Nan Yeh ,  Yu-Shih Wang ,  Chun-Neng Lin ,  Ming-Hsi Yeh

IPC: H01L21/768 ,  H01L23/535 ,  H01L23/532 ,  H01L23/522

Abstract: A method of forming a semiconductor device includes: forming a semiconductor feature over a substrate, the semiconductor feature includes a conductive region; forming a dielectric layer over the semiconductor feature; patterning the dielectric layer to form a contact opening exposing a top surface of the conductive region; forming a monolayer over the dielectric layer, the top surface of the conductive region remaining exposed; and depositing a conductive material in the contact opening.

公开(公告)号：US11424185B2

公开(公告)日：2022-08-23

申请号：US16945595

申请日：2020-07-31

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Cheng-Wei Chang ,  Chia-Hung Chu ,  Kao-Feng Lin ,  Hsu-Kai Chang ,  Shuen-Shin Liang ,  Sung-Li Wang ,  Yi-Ying Liu ,  Po-Nan Yeh ,  Yu Shih Wang ,  U-Ting Chiu ,  Chun-Neng Lin ,  Ming-Hsi Yeh

IPC: H01L23/532 ,  H01L23/522 ,  H01L21/768 ,  H01L21/285 ,  H01L21/02

Abstract: A semiconductor device includes a gate electrode, a source/drain structure, a lower contact contacting either of the gate electrode or the source/drain structure, and an upper contact disposed in an opening formed in an interlayer dielectric (ILD) layer and in direct contact with the lower contact. The upper contact is in direct contact with the ILD layer without an interposing conductive barrier layer, and the upper contact includes ruthenium.

公开(公告)号：US11276571B2

公开(公告)日：2022-03-15

申请号：US16907634

申请日：2020-06-22

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yu Shih Wang ,  Hong-Jie Yang ,  Chia-Ying Lee ,  Po-Nan Yeh ,  U-Ting Chiu ,  Chun-Neng Lin ,  Ming-Hsi Yeh ,  Kuo-Bin Huang

IPC: H01L21/027 ,  H01L21/8234 ,  H01L29/78 ,  H01L29/66 ,  H01L21/308

Abstract: A photo resist layer is used to protect a dielectric layer and conductive elements embedded in the dielectric layer when patterning an etch stop layer underlying the dielectric layer. The photo resist layer may further be used to etch another dielectric layer underlying the etch stop layer, where etching the next dielectric layer exposes a contact, such as a gate contact. The bottom layer can be used to protect the conductive elements embedded in the dielectric layer from a wet etchant used to etch the etch stop layer.

公开(公告)号：US20210375677A1

公开(公告)日：2021-12-02

申请号：US16887316

申请日：2020-05-29

Applicant: Taiwan Semiconductor Manufacturing Co. Ltd.

Inventor： Yu Shih Wang ,  Kuo-Bin Huang ,  Ming-Hsi Yeh ,  Po-Nan Yeh

IPC: H01L21/768 ,  H01L21/8238 ,  H01L29/66 ,  H01L21/28 ,  H01L21/3213 ,  H01L27/092 ,  H01L29/08 ,  H01L29/49 ,  H01L23/535

Abstract: A method for forming a semiconductor device includes forming a metal contact on a substrate, forming a first dielectric on the metal contact, forming a first opening in the first dielectric, and performing a wet etch on a bottom surface of the first opening through a first etch stop layer (ESL) over the metal contact. The wet etch forms a first recess in a top surface of the metal contact. An upper width of the first recess is smaller than a lower width of the first recess. A first conductive feature is formed in the first recess and the first opening.

公开(公告)号：US20250140724A1

公开(公告)日：2025-05-01

申请号：US18420595

申请日：2024-01-23

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Meng-Che Tu ,  Po-Nan Yeh ,  Po-Han Wang ,  Yu-Hsiang Hu ,  Hung-Jui Kuo

IPC: H01L23/00 ,  H01L23/31

Abstract: A method includes forming a conductive pillar over and connecting to a conductive pad, dispensing a first polymer layer, wherein the first polymer layer contacts a lower portion of a sidewall of the conductive pillar, curing the first polymer layer, and dispensing a second polymer layer on the first polymer layer. The second polymer layer contacts an upper portion of the sidewall of the conductive pillar. The second polymer layer is then cured.

公开(公告)号：US20220392803A1

公开(公告)日：2022-12-08

申请号：US17818587

申请日：2022-08-09

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： U-Ting Chiu ,  Po-Nan Yeh ,  Yu-Shih Wang ,  Chun-Neng Lin ,  Ming-Hsi Yeh

IPC: H01L21/768 ,  H01L23/522 ,  H01L23/532 ,  H01L23/535

Abstract: A method of forming a semiconductor device includes: forming a semiconductor feature over a substrate, the semiconductor feature includes a conductive region; forming a dielectric layer over the semiconductor feature; patterning the dielectric layer to form a contact opening exposing a top surface of the conductive region; forming a monolayer over the dielectric layer, the top surface of the conductive region remaining exposed; and depositing a conductive material in the contact opening.

公开(公告)号：US11195752B1

公开(公告)日：2021-12-07

申请号：US16887316

申请日：2020-05-29

Applicant: Taiwan Semiconductor Manufacturing Co. Ltd.

Inventor： Yu Shih Wang ,  Kuo-Bin Huang ,  Ming-Hsi Yeh ,  Po-Nan Yeh

IPC: H01L21/768 ,  H01L21/8238 ,  H01L21/3213 ,  H01L23/535 ,  H01L29/66 ,  H01L21/28 ,  H01L27/092 ,  H01L29/08 ,  H01L29/49

Abstract: A method for forming a semiconductor device includes forming a metal contact on a substrate, forming a first dielectric on the metal contact, forming a first opening in the first dielectric, and performing a wet etch on a bottom surface of the first opening through a first etch stop layer (ESL) over the metal contact. The wet etch forms a first recess in a top surface of the metal contact. An upper width of the first recess is smaller than a lower width of the first recess. A first conductive feature is formed in the first recess and the first opening.

公开(公告)号：US20210202238A1

公开(公告)日：2021-07-01

申请号：US16907634

申请日：2020-06-22

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yu Shih Wang ,  Hong-Jie Yang ,  Chia-Ying Lee ,  Po-Nan Yeh ,  U-Ting Chiu ,  Chun-Neng Lin ,  Ming-Hsi Yeh ,  Kuo-Bin Huang

IPC: H01L21/027 ,  H01L21/8234 ,  H01L21/308 ,  H01L29/66 ,  H01L29/78

Abstract: A photo resist layer is used to protect a dielectric layer and conductive elements embedded in the dielectric layer when patterning an etch stop layer underlying the dielectric layer. The photo resist layer may further be used to etch another dielectric layer underlying the etch stop layer, where etching the next dielectric layer exposes a contact, such as a gate contact. The bottom layer can be used to protect the conductive elements embedded in the dielectric layer from a wet etchant used to etch the etch stop layer.

公开(公告)号：US20210134660A1

公开(公告)日：2021-05-06

申请号：US16906615

申请日：2020-06-19

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yu Shih Wang ,  Po-Nan Yeh ,  U-Ting Chiu ,  Chun-Neng Lin ,  Chia-Cheng Chen ,  Liang-Yin Chen ,  Ming-Hsi Yeh ,  Kuo-Bin Huang

IPC: H01L21/768 ,  H01L23/522 ,  H01L23/532

Abstract: Semiconductor devices and methods of manufacture are described herein. A method includes forming an opening through an interlayer dielectric (ILD) layer to expose a contact etch stop layer (CESL) disposed over a conductive feature in a metallization layer. The opening is formed using photo sensitive materials, lithographic techniques, and a dry etch process that stops on the CESL. Once the CESL is exposed, a CESL breakthrough process is performed to extend the opening through the CESL and expose the conductive feature. The CESL breakthrough process is a flexible process with a high selectivity of the CESL to ILD layer. Once the CESL breakthrough process has been performed, a conductive fill material may be deposited to fill or overfill the opening and is then planarized with the ILD layer to form a contact plug over the conductive feature in an intermediate step of forming a semiconductor device.