公开(公告)号：US5252103A

公开(公告)日：1993-10-12

申请号：US831473

申请日：1992-02-05

Applicant: Masayasu Kamata ,  Osamu Sasaki ,  Shouzou Suefuku ,  Tatsuya Maeda

Inventor： Masayasu Kamata ,  Osamu Sasaki ,  Shouzou Suefuku ,  Tatsuya Maeda

IPC: D06P5/04 ,  D06P1/00 ,  D06P1/52 ,  D06P1/66 ,  D06P3/64 ,  D06P5/20 ,  D06P5/22

CPC classification number: D06P1/5278 ,  D06P1/0012 ,  D06P1/004 ,  D06P1/0096 ,  D06P1/5221 ,  D06P1/5235 ,  D06P1/5257 ,  D06P1/5271 ,  D06P1/5285 ,  D06P1/66 ,  D06P3/64 ,  Y10S8/918

Abstract: An improved pigmented product is obtained by a pigmenting method comprising the steps of:treating a cellulose fiber textile product with a cationic compound; andtreating the thus-treated textile product by immersing it in a aqueous dispersion containing a pigment and an anionic compound.

Abstract translation: 通过着色方法获得改进的着色产物，其包括以下步骤：用阳离子化合物处理纤维素纤维纺织品; 并将这样处理过的纺织品浸渍在含有颜料和阴离子化合物的水性分散体中进行处理。

公开(公告)号：US08003940B2

公开(公告)日：2011-08-23

申请号：US12349751

申请日：2009-01-07

Applicant: Mayuka Oosaki ,  Chie Shishido ,  Hiroki Kawada ,  Tatsuya Maeda

Inventor： Mayuka Oosaki ,  Chie Shishido ,  Hiroki Kawada ,  Tatsuya Maeda

IPC: H01J37/28 ,  H01J37/256 ,  G01N23/00

CPC classification number: H01J37/28 ,  H01J2237/282

Abstract: A system for controlling a tool-to-tool disparity between a plurality of scanning electron microscopes includes a measuring unit for measuring a tool-to-tool disparity between plural scanning electron microscopes based on information extracted from secondary electron images which are captured by imaging a reference pattern formed on a wafer, a tool state monitoring unit for monitoring tool states of each of the plural scanning electron microscopes, and an output unit for displaying on a screen a relationship between the tool-to-tool disparity between the plural scanning electron microscopes and tool states of each of the plural scanning electron microscopes monitored by the tool state monitoring unit. The tool state monitoring unit monitors the tool states of each of the plural scanning electron microscopes while imaging the reference pattern formed on the wafer by using each of the plural scanning electron microscopes.

Abstract translation: 用于控制多个扫描电子显微镜之间的工具对工具差异的系统包括：测量单元，用于基于通过成像获得的二次电子图像提取的信息来测量多个扫描电子显微镜之间的工具对工具差异 在晶片上形成的参考图案，用于监视多个扫描电子显微镜中的每一个的工具状态的工具状态监视单元和用于在屏幕上显示多个扫描电子显微镜之间的工具与工具之间的差异之间的关系的输出单元 以及由工具状态监视单元监视的多个扫描电子显微镜中的每一个的工具状态。 工具状态监视单元通过使用多个扫描电子显微镜中的每一个对成像在晶片上的参考图案进行成像，监视多个扫描电子显微镜中的每一个的工具状态。

公开(公告)号：US07640509B2

公开(公告)日：2009-12-29

申请号：US11446287

申请日：2006-06-05

Applicant: Takahisa Gunji ,  Tatsuya Maeda

Inventor： Takahisa Gunji ,  Tatsuya Maeda

IPC: G06F3/00 ,  G06F9/00 ,  G06F17/00

CPC classification number: G06F8/38 ,  G06F8/34

Abstract: A program creation apparatus creates a program for a microcomputer that includes an input section, a processor and an output section. The apparatus includes a GUI display section displaying a plurality of icons, each corresponding to each operation of the input section, the processor and the output section, and a program creator creating a program according to manipulation of the icons by a user.

Abstract translation: 程序创建装置创建包括输入部分，处理器和输出部分的微计算机程序。 该装置包括显示多个图标的GUI显示部分，每个图标对应于输入部分，处理器和输出部分的每个操作，以及根据用户对图标的操纵创建程序的程序创建者。

公开(公告)号：US20090214122A1

公开(公告)日：2009-08-27

申请号：US12434786

申请日：2009-05-04

Applicant: Mitsuji IKEDA ,  Tatsuya Maeda ,  Osamu Nasu ,  Fumihiro Sasajima

Inventor： Mitsuji IKEDA ,  Tatsuya Maeda ,  Osamu Nasu ,  Fumihiro Sasajima

IPC: G06K9/62

CPC classification number: G06T7/001 ,  G01N21/95607 ,  G06T2207/30148

Abstract: Information indicating the reason for a failure of template matching is provided. Difference information between a first image, which is referred to as a template, and a third image that is selected by the operator from a second image and that is larger than the template is displayed.

Abstract translation: 提供指示模板匹配失败的原因的信息。 显示被称为模板的第一图像与操作者从第二图像选择并且大于模板的第三图像之间的差异信息。

公开(公告)号：US20090041333A1

公开(公告)日：2009-02-12

申请号：US12249014

申请日：2008-10-10

Applicant: Satoru YAMAGUCHI ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

Inventor： Satoru YAMAGUCHI ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

IPC: G06K9/00 ,  G01N23/00

CPC classification number: H01J37/28 ,  G01N23/04 ,  G01N23/225 ,  G06T7/74 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01J37/222 ,  H01J2237/2817

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract translation: 本发明的目的是提供一种用于减少与检查定位或输入操作相关的处理的扫描电子显微镜，从而以高速度高精度地运行。 为了实现上述目的，本发明提供了一种扫描电子显微镜，其具有基于预先登记的图案来识别期望位置的功能，该扫描电子显微镜包括用于设置关于图案种类的信息的装置，多个部分之间的间隔 构成图案的部分，以及构成图案的部分的尺寸，以及基于由相关装置获得的信息形成由多个部分组成的图案图像的装置。

公开(公告)号：US20070164219A1

公开(公告)日：2007-07-19

申请号：US11647348

申请日：2006-12-29

Applicant: Chie Shishido ,  Mayuka Oosaki ,  Mitsugu Sato ,  Hiroki Kawada ,  Tatsuya Maeda

Inventor： Chie Shishido ,  Mayuka Oosaki ,  Mitsugu Sato ,  Hiroki Kawada ,  Tatsuya Maeda

IPC: G21K7/00

CPC classification number: H01J37/263 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2826

Abstract: The present invention provides a charged particle beam apparatus used to measure micro-dimensions (CD value) of a semiconductor apparatus or the like which captures images for measurement. For the present invention, a sample for calibration, on which a plurality of polyhedral structural objects with known angles on surfaces produced by the crystal anisotropic etching technology are arranged in a viewing field, is used. A beam landing angle at each position within a viewing field is calculated based on geometric deformation on an image of each polyhedral structural object. Beam control parameters for equalizing the beam landing angle at each position within the viewing field are pre-registered. The registered beam control parameters are applied according to the position of the pattern to be measured within the viewing field when performing dimensional measurement. Accordingly, the present invention provides methods for reducing the variation in the CD value caused by the variation in the electron beam landing angle with respect to the sample with an equal beam landing angle and methods for reducing the instrumental error caused by the difference in the electron beam landing angle between apparatuses.

Abstract translation: 本发明提供一种用于测量捕获用于测量的图像的半导体装置等的微尺寸（CD值）的带电粒子束装置。 对于本发明，使用用于校准的样品，其上在视场中排列有通过晶体各向异性蚀刻技术产生的表面上具有已知角度的多个多面体结构物体。 基于每个多面体结构物体的图像上的几何变形来计算视野内的每个位置处的束着陆角。 用于均衡视场内每个位置的束着陆角的光束控制参数被预先注册。 当进行尺寸测量时，根据待测图案的位置在观察区域中应用登记的光束控制参数。 因此，本发明提供了减少相对于具有相同束着陆角的样品的电子束着角的变化引起的CD值的变化的方法，以及用于减少由电子差异引起的仪器误差的方法 设备之间的束着陆角度。

公开(公告)号：US20070114405A1

公开(公告)日：2007-05-24

申请号：US11583886

申请日：2006-10-20

Applicant: Mayuka Oosaki ,  Chie Shishido ,  Hiroki Kawada ,  Tatsuya Maeda

Inventor： Mayuka Oosaki ,  Chie Shishido ,  Hiroki Kawada ,  Tatsuya Maeda

IPC: G21K7/00

CPC classification number: H01J37/28 ,  H01J2237/282

Abstract: A system for controlling a tool-to-tool matching between a plurality of scanning electron microscopes for pattern dimension measurement includes a measuring unit for, at regular intervals, measuring a tool-to-tool disparity between scanning electron microscopes based on secondary electron image data, and measuring indicators indicating states of the microscopes, a tool-to-tool-disparity causing factor analyzing unit for analyzing a relationship between the tool-to-tool disparity and the values of the indicators measured by the measuring unit to estimate a factor that has caused said tool-to-tool disparity, and an output unit for displaying and outputting the tool-to-tool disparity causing factor estimated by the tool-to-tool-disparity causing factor analyzing unit.

Abstract translation: 用于控制用于图案尺寸测量的多个扫描电子显微镜之间的工具对工具匹配的系统包括用于以规则的间隔测量基于二次电子图像数据的扫描电子显微镜之间的工具对工具差异的测量单元 以及指示显示器状态的测量指示器，工具对工具差异因素分析单元，用于分析工具与工具之间的差异与由测量单元测量的指标的值之间的关系，以估计因素 已经引起了工具对工具的差异，以及输出单元，用于显示和输出由工具对工具差异造成因子分析单元估计的工具对工具差异引起的因素。

公开(公告)号：US20060013467A1

公开(公告)日：2006-01-19

申请号：US11227189

申请日：2005-09-16

Applicant: Tatsuya Maeda ,  Shigenori Miyawaki

Inventor： Tatsuya Maeda ,  Shigenori Miyawaki

IPC: G06K9/00

CPC classification number: G06T7/0004 ,  G01N21/8851 ,  G06T2207/30148

Abstract: An inspection apparatus of an electric junction box is provided, by which improper mounting of electric parts can be detected. The inspection apparatus 1 has a CCD camera 5, an image-processing device 7 and a control device 8. The CCD camera picks up images of fuse 14 in the electric junction box 12 as a subject of the inspection. The image-processing device 7 stores an image consulting data 60. The image consulting data 60 includes a plurality of images of each fuse 14 having the same item symbol with regard to every item symbol, the fuses 14 being used in the electric junction box 12. The control device 8 stores normal data indicating the proper item symbol of the fuse 14 to be mounted on a corresponding mount 13. The image-processing device 7 extracts the image most analogous to the image picked up by the CCD camera 5 from the images in the image consulting data. The control device 8 judges the quality of the item symbol of the fuse 14 having the most analogous image on the basis of the normal data.

Abstract translation: 提供电接线盒的检查装置，由此可以检测到电气部件的不正确的安装。 检查装置1具有CCD照相机5，图像处理装置7和控制装置8。 作为检查对象，CCD摄像机拾取电接线盒12中的保险丝14的图像。 图像处理装置7存储图像咨询数据60。 图像咨询数据60包括关于每个物品符号具有相同物品符号的每个保险丝14的多个图像，在电接线盒12中使用保险丝14。 控制装置8存储指示要安装在相应的安装件13上的保险丝14的适当物品符号的正常数据。 图像处理装置7从图像咨询数据中的图像提取与CCD照相机5拾取的图像最相似的图像。 控制装置8基于正常数据判断具有最相似图像的熔丝14的物品符号的质量。

公开(公告)号：US20050207673A1

公开(公告)日：2005-09-22

申请号：US11019109

申请日：2004-12-22

Applicant: Atsushi Takane ,  Tatsuya Maeda ,  Takashi Iizumi

Inventor： Atsushi Takane ,  Tatsuya Maeda ,  Takashi Iizumi

IPC: G01B15/00 ,  G01B15/04 ,  G06K9/36 ,  G06K9/48

CPC classification number: G01B15/04 ,  G03F7/70625 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/24578 ,  H01J2237/2817

Abstract: The present invention is relates to a method for measuring average line width of line and space patterns in a simplified manner and at high speed without measuring at many positions. An average line width, an average space width, and an average pitch width are calculated from peak intervals of auto-correlation values of a differentiated image of the line and space patterns or peak patterns corresponding to line edges on projection data of the differentiated image.

Abstract translation: 本发明涉及一种用于以简单的方式和高速测量线和空间图形的平均线宽而不在许多位置测量的方法。 根据差分图像的投影数据上的线条和空间图案的不同图像的自相关值的峰值间隔或与线条边缘对应的峰值图案的峰值间隔，计算平均线宽，平均间隔宽度和平均间距宽度。

公开(公告)号：US06530795B2

公开(公告)日：2003-03-11

申请号：US10096480

申请日：2002-03-12

Applicant: Tatsuya Maeda ,  Tetsuya Shinozaki ,  Kazuhiro Aoki

Inventor： Tatsuya Maeda ,  Tetsuya Shinozaki ,  Kazuhiro Aoki

IPC: H01R1328

CPC classification number: H01R13/28 ,  H01R4/185 ,  H01R11/12 ,  Y10S439/907

Abstract: A terminal fitting (1) is provided with a wire connecting portion (3) to be connected with an end of a wire (W) and a shaft fixing portion (5) through which a bolt (4) is insertable. The shaft fixing portion (5) is formed by folding a metallic plate material in three. Each of exposed surface portions (8, 9) located at the front and rear surfaces of the shaft fixing portion (5) is provided with engaging portions (10, 11) for holding the adjacent terminal fittings fixed by engaging with the mating engaging portions (11, 10).

Abstract translation: 端子接头（1）设置有与线（W）的端部连接的线连接部（3）和可插入螺栓（4）的轴固定部（5）。 轴固定部（5）通过将三块金属板材折叠而形成。 位于轴固定部分（5）的前表面和后表面的每个暴露表面部分（8,9）设置有接合部分（10,11），用于通过与配合接合部分接合来固定相邻的端子接头（10,11） 11，10）。