公开(公告)号：US09514526B2

公开(公告)日：2016-12-06

申请号：US14005913

申请日：2011-11-09

Applicant: Jun'ichi Taguchi ,  Mitsuji Ikeda ,  Yuichi Abe ,  Masahiro Kitazawa

Inventor： Jun'ichi Taguchi ,  Mitsuji Ikeda ,  Yuichi Abe ,  Masahiro Kitazawa

IPC: G06K9/00 ,  G06T7/00 ,  G06K9/32

CPC classification number: G06T7/0004 ,  G06K9/3275

Abstract: An evaluation value indicative of the extent of lines in each direction is calculated for a pre-processed image in which 0s are filled in and extended in the lateral direction of the inputted image and which has been reduced ⅛th in the longitudinal direction. To obtain the angle of rotation of an image from the change in the evaluation value obtained while the angle relative to the lateral direction of the pre-processed image is modified in small steps, a parallel line is drawn for each direction, a projection is taken, and the sum of squares serves as the evaluation value of the direction. The direction having the highest evaluation value serves as the obtained direction of rotation from the normal position. The projection of each direction references the point of intersection between the parallel line drawn for each direction and the coordinate line of the horizontal axis.

Abstract translation: 对于其中0被填充并在输入图像的横向方向上延伸并且在纵向方向上被减小的预处理图像，计算表示每个方向的行程度的评估值。 为了在以小步骤修改相对于预处理图像的横向方向的角度获得的评估值的变化中获得图像的旋转角度，对于每个方向绘制平行线，进行投影 ，并且平方和作为方向的评价值。 具有最高评估值的方向用作从正常位置获得的旋转方向。 每个方向的投影参考在每个方向绘制的平行线与水平轴的坐标线之间的交点。

公开(公告)号：US08498489B2

公开(公告)日：2013-07-30

申请号：US12920724

申请日：2009-04-16

Applicant: Yuichi Abe ,  Mitsuji Ikeda ,  Yoshimichi Sato ,  Yasutaka Toyoda

Inventor： Yuichi Abe ,  Mitsuji Ikeda ,  Yoshimichi Sato ,  Yasutaka Toyoda

IPC: G06K9/62 ,  G06K9/00

CPC classification number: G06T7/60 ,  G06K9/6203 ,  G06T7/74 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: The present invention provides a unified template matching technique which allows an adequate matching position to be provided even in an image with a distorted pattern shape and a variation in edge intensity. A correlation value contribution rate map is created for the vicinity of each of top candidate positions obtained by applying a centroid distance filter to a normalized correlation map resulting from template matching. A corrected intensity image is created from the correlation value contribution rate maps. Luminance correction is performed based on the corrected intensity image. Local matching is performed again on the vicinity of each candidate position. The candidates are then re-sorted based on candidate positions and correlation values newly obtained. Thus, even in an image with a distorted pattern shape and a variation in edge intensity, an adequate matching position can be provided in a unified manner.

Abstract translation: 本发明提供了一种统一的模板匹配技术，其允许即使在具有失真的图案形状和边缘强度的变化的图像中也能够提供足够的匹配位置。 对于通过将质心距离滤波器应用于由模板匹配得到的归一化相关图而获得的每个顶候选位置的附近，创建相关值贡献率图。 从相关值贡献率图形创建校正强度图像。 基于校正强度图像进行亮度校正。 在每个候选位置附近再次执行局部匹配。 然后基于新获得的候选位置和相关值对候选者进行重新排序。 因此，即使在具有失真的图案形状和边缘强度的变化的图像中，也能够以统一的方式提供足够的匹配位置。

公开(公告)号：US20130114898A1

公开(公告)日：2013-05-09

申请号：US13696260

申请日：2011-03-17

Applicant: Jun'ichi Taguchi ,  Mitsuji Ikeda ,  Yuichi Abe ,  Masahiro Kitazawa ,  Wataru Nagatomo

Inventor： Jun'ichi Taguchi ,  Mitsuji Ikeda ,  Yuichi Abe ,  Masahiro Kitazawa ,  Wataru Nagatomo

IPC: G06K9/62

CPC classification number: G06K9/6201 ,  G01B11/00 ,  G01B15/00 ,  G06K9/6202 ,  G06T7/001 ,  G06T7/74 ,  G06T2207/30148 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The present invention is a template matching processing device capable of evaluating a similarity degree which supports even a case of intensive morphological change between a design image and a photographic image. In the template matching processing device, matching processing between the design image and the photographic image is performed, a partial design image is obtained by clipping a portion having the highest correlation (step 101), and processing for deforming the photographic image in accordance with the clipped design image (steps 102 to 105) is performed, so that correlation between the deformed image obtained and the design image is taken to be set as the similarity degree.

Abstract translation: 本发明是一种模拟匹配处理装置，其能够评价即使在设计图像和摄影图像之间形成密集的情况的情况下也能够支持的相似度。 在模板匹配处理装置中，进行设计图像与摄影图像之间的匹配处理，通过剪切具有最高相关性的部分（步骤101）获得部分设计图像，以及根据 执行剪辑设计图像（步骤102至105），使得获得的变形图像与设计图像之间的相关性被设置为相似度。

公开(公告)号：US08139868B2

公开(公告)日：2012-03-20

申请号：US12194763

申请日：2008-08-20

Applicant: Yuichi Abe ,  Mitsuji Ikeda ,  Yoshimichi Sato ,  Yasutaka Toyoda

Inventor： Yuichi Abe ,  Mitsuji Ikeda ,  Yoshimichi Sato ,  Yasutaka Toyoda

IPC: G06K9/62

CPC classification number: G06K9/6203

Abstract: An inspection apparatus and method outputs an accurate matching position even if a search image contains a pattern similar to a template. An image search unit includes a relative position comparing unit which compares the relative position of a template in a template selection image with the relative position of a location currently being searched for in a search image and outputs the amount of position mismatch between the relative positions. A matching position determining unit determines a matching position by taking into consideration the amount of position mismatch in addition to search image similarity distribution information.

Abstract translation: 即使搜索图像包含类似于模板的图案，检查装置和方法输出精确的匹配位置。 图像搜索单元包括相对位置比较单元，其将模板选择图像中的模板的相对位置与搜索图像中当前正在搜索的位置的相对位置进行比较，并输出相对位置之间的位置失配量。 匹配位置确定单元除了搜索图像相似度分布信息之外还考虑位置偏差量来确定匹配位置。

公开(公告)号：US20110110597A1

公开(公告)日：2011-05-12

申请号：US12920724

申请日：2009-04-16

Applicant: Yuichi Abe ,  Mitsuji Ikeda ,  Yoshimichi Sato ,  Yasutaka Toyoda

Inventor： Yuichi Abe ,  Mitsuji Ikeda ,  Yoshimichi Sato ,  Yasutaka Toyoda

IPC: G06K9/48

CPC classification number: G06T7/60 ,  G06K9/6203 ,  G06T7/74 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: The present invention provides a unified template matching technique which allows an adequate matching position to be provided even in an image with a distorted pattern shape and a variation in edge intensity. A correlation value contribution rate map is created for the vicinity of each of top candidate positions obtained by applying a centroid distance filter to a normalized correlation map resulting from template matching. A corrected intensity image is created from the correlation value contribution rate maps. Luminance correction is performed based on the corrected intensity image. Local matching is performed again on the vicinity of each candidate position. The candidates are then re-sorted based on candidate positions and correlation values newly obtained. Thus, even in an image with a distorted pattern shape and a variation in edge intensity, an adequate matching position can be provided in a unified manner.

Abstract translation: 本发明提供了一种统一的模板匹配技术，其允许即使在具有失真的图案形状和边缘强度的变化的图像中也能够提供足够的匹配位置。 对于通过将质心距离滤波器应用于由模板匹配得到的归一化相关图而获得的每个顶候选位置的附近，创建相关值贡献率图。 从相关值贡献率图形创建校正强度图像。 基于校正强度图像进行亮度校正。 在每个候选位置附近再次执行局部匹配。 然后基于新获得的候选位置和相关值对候选者进行重新排序。 因此，即使在具有失真的图案形状和边缘强度的变化的图像中，也能够以统一的方式提供足够的匹配位置。

公开(公告)号：US07925076B2

公开(公告)日：2011-04-12

申请号：US11836452

申请日：2007-08-09

Applicant: Yuichi Abe ,  Mitsuji Ikeda ,  Yoshimichi Satou ,  Yasutaka Toyoda

Inventor： Yuichi Abe ,  Mitsuji Ikeda ,  Yoshimichi Satou ,  Yasutaka Toyoda

IPC: G06K9/00

CPC classification number: G06K9/6203 ,  G06K2209/19 ,  G06T7/32 ,  G06T2207/10056 ,  G06T2207/30148

Abstract: An inspection apparatus performing template matching of a search image capable of outputting a correct matching position even if a pattern similar to a template exists in the search image is provided. The inspection apparatus includes a template cutout means for cutting out a template from a template selection image, a marginal similarity calculation means for calculating marginal similarity distribution information, which is a similarity distribution of the template selection image to the template, a search image similarity calculation part for calculating search image similarity distribution information, which is a similarity distribution of the search image to the template, a similarity distribution-to-similarity distribution similarity calculation means for calculating similarity distribution-to-similarity distribution similarity information between the marginal similarity distribution information and the search image similarity distribution information, and a matching position determination part for determining a matching position based on the similarity distribution-to-similarity distribution similarity.

Abstract translation: 提供了即使在搜索图像中存在类似于模板的图案，也能够执行能够输出正确的匹配位置的搜索图像的模板匹配的检查装置。 所述检查装置包括用于从模板选择图像切割模板的模板切除装置，用于计算作为模板选择图像与模板的相似度分布的边缘相似度分布信息的边缘相似度计算装置，搜索图像相似度计算 用于计算搜索图像与模板的相似度分布的搜索图像相似度分布信息的部分，用于计算边缘相似度分布信息之间的相似度分布 - 相似度分布相似度信息的相似度分布 - 相似度分布相似度计算装置 以及搜索图像相似度分布信息，以及匹配位置确定部分，用于基于相似度分布与相似度分布相似度来确定匹配位置。

公开(公告)号：US20080116376A1

公开(公告)日：2008-05-22

申请号：US12005387

申请日：2007-12-27

Applicant: Atsushi Takane ,  Haruo Yoda ,  Hideo Todokoro ,  Fumio Mizuno ,  Shoji Yoshida ,  Mitsuji Ikeda ,  Mitsugu Sato ,  Makoto Ezumi

Inventor： Atsushi Takane ,  Haruo Yoda ,  Hideo Todokoro ,  Fumio Mizuno ,  Shoji Yoshida ,  Mitsuji Ikeda ,  Mitsugu Sato ,  Makoto Ezumi

IPC: H01J37/28

CPC classification number: G06T5/002 ,  G06T5/003 ,  G06T5/20 ,  G06T5/50 ,  G06T7/13 ,  G06T7/62 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/21 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/21 ,  H01J2237/216 ,  H01J2237/221 ,  H01J2237/226 ,  H01J2237/281 ,  H01J2237/2815 ,  H01J2237/2817

Abstract: It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample, based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.

Abstract translation: 本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。 为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器， 基于所述带电粒子束聚焦的信号，所述信号是从带电粒子检测器输出的信号中的装置，用于构成样品的表面部分的二维图像的装置。

公开(公告)号：US20080073526A1

公开(公告)日：2008-03-27

申请号：US11699065

申请日：2007-01-29

Applicant: Atsushi Takane ,  Mitsuji Ikeda ,  Satoru Yamaguchi ,  Yasuhiko Ozawa

Inventor： Atsushi Takane ,  Mitsuji Ikeda ,  Satoru Yamaguchi ,  Yasuhiko Ozawa

IPC: G01N23/00

CPC classification number: G01N23/225 ,  H01J2237/21 ,  H01J2237/2817

Abstract: A charged particle beam apparatus for obtaining information of an uneven surface or a depression/protrusion of a sample by irradiating a charged particle beam to a sample having an uneven surface or a depression/protrusion at a plurality of focal positions, measuring signal emitted from the sample, and comparing profile waveforms corresponding to edge portions of the uneven surface.

Abstract translation: 一种带电粒子束装置，用于通过向多个焦点位置处具有不平坦表面或凹陷/突起的样品照射带电粒子束来获得样品的不平坦表面或凹陷/突起的信息，测量从 样本和比较与不平坦表面的边缘部分相对应的轮廓波形。

公开(公告)号：US07329868B2

公开(公告)日：2008-02-12

申请号：US11515732

申请日：2006-09-06

Applicant: Atsushi Takane ,  Haruo Yoda ,  Hideo Todokoro ,  Fumio Mizuno ,  Shoji Yoshida ,  Mitsuji Ikeda ,  Mitsugu Sato ,  Makoto Ezumi

Inventor： Atsushi Takane ,  Haruo Yoda ,  Hideo Todokoro ,  Fumio Mizuno ,  Shoji Yoshida ,  Mitsuji Ikeda ,  Mitsugu Sato ,  Makoto Ezumi

IPC: H01J37/21

CPC classification number: G06T5/002 ,  G06T5/003 ,  G06T5/20 ,  G06T5/50 ,  G06T7/13 ,  G06T7/62 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/21 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/21 ,  H01J2237/216 ,  H01J2237/221 ,  H01J2237/226 ,  H01J2237/281 ,  H01J2237/2815 ,  H01J2237/2817

Abstract: It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.

Abstract translation: 本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。 为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器， 发射的带电粒子束，以及用于基于所述带电粒子束聚焦的信号来组合样品的表面部分的二维图像的装置，所述信号在从带电粒子检测器输出的信号中。

公开(公告)号：US07230243B2

公开(公告)日：2007-06-12

申请号：US11156478

申请日：2005-06-21

Applicant: Maki Tanaka ,  Atsushi Miyamoto ,  Hidetoshi Morokuma ,  Chie Shishido ,  Mitsuji Ikeda ,  Yasutaka Toyoda

Inventor： Maki Tanaka ,  Atsushi Miyamoto ,  Hidetoshi Morokuma ,  Chie Shishido ,  Mitsuji Ikeda ,  Yasutaka Toyoda

IPC: H01J37/28 ,  G01N23/00 ,  G21K7/00 ,  G06K9/00

CPC classification number: H01J37/28 ,  H01J2237/2814

Abstract: The present invention relates to a method and apparatus for measuring a three-dimensional profile using a SEM, capable of accurately measuring the three-dimensional profile of even a flat surface or a nearly vertical surface based on the inclination angle dependence of the amount of secondary electron image signal detected by the SEM. Specifically, a tilt image obtaining unit obtains a tilt image (a tilt secondary electron image) I(2) of flat regions a and c1 on a pattern to be measured by using an electron beam incident on the pattern from an observation direction φ(2). Then, profile measuring units presume the slope (or surface inclination angle) at each point on the pattern based on the obtained tilt image and integrate successively each presumed slope value (or surface inclination angle value) to measure three-dimensional profiles S2a and S2c. This arrangement allows a three-dimensional profile to be accurately measured.

Abstract translation: 本发明涉及一种用于使用SEM测量三维轮廓的方法和装置，其能够基于二次侧的量的倾斜角度依赖性精确地测量均匀的平面或几乎垂直的表面的三维轮廓 电子图像信号由SEM检测。 具体地说，倾斜图像获取单元通过使用从观察方向phi入射到图案上的电子束来获得待测图案上的平坦区域a和c 1的倾斜图像（倾斜二次电子图像）I（2） 2）。 然后，轮廓测量单元基于所获得的倾斜图像来假设在图案上的每个点处的斜率（或表面倾斜角），并且连续地积分每个假设的斜率值（或表面倾斜角值），以测量三维轮廓S 2a和 S 2 c。 这种布置允许精确地测量三维轮廓。