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11.发明申请System for supplying halogen gas or halogen containing gas and method thereof 有权用于提供卤素气体或含卤素气体的系统及其方法公开(公告)号：US20050247341A1
公开(公告)日：2005-11-10
申请号：US11033117
申请日：2005-01-12
申请人： Tetsuro Tojo , Jiro Hiraiwa , Osamu Yoshimoto
发明人： Tetsuro Tojo , Jiro Hiraiwa , Osamu Yoshimoto
CPC分类号： F17C9/00 , F17C2201/056 , F17C2201/058 , F17C2203/0643 , F17C2205/0323 , F17C2205/0338 , F17C2205/0391 , F17C2223/0123 , F17C2223/033 , F17C2227/0157 , F17C2227/044 , F17C2250/0626 , F17C2260/024 , F17C2260/036 , F17C2270/0518 , Y10T137/0318 , Y10T137/0329 , Y10T137/3115 , Y10T137/4673
摘要： Since the system for supplying gas comprises a storage container, a compressor which pressurizes fluorine gas in the storage container, and a pressurized storing container which presses fit and stores the fluorine gas, by supplying fluorine gas or the like to the destination from this system for supplying gas, it is not necessary to change gas source such as a gas cylinder or the like. In this way, fluorine gas or the like can be supplied to the destination inexpensively and safely.
摘要翻译： 由于用于供给气体的系统包括储存容器，对储存容器中的氟气进行加压的压缩机和通过从该系统向目的地供应氟气等而压入和储存氟气的加压储存容器， 供给气体时，不需要改变气瓶等气体源。 这样，能够廉价，安全地向目的地供给氟气等。
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公开(公告)号：US20100064969A1
公开(公告)日：2010-03-18
申请号：US12278407
申请日：2007-02-07
申请人： Jiro Hiraiwa , Osamu Yoshimoto , Hiroshi Hayakawa , Tetsuro Tojo , Tsuneyuki Okabe , Takanobu Asano , Shinichi Wada , Ken Nakao , Hitoshi Kato
发明人： Jiro Hiraiwa , Osamu Yoshimoto , Hiroshi Hayakawa , Tetsuro Tojo , Tsuneyuki Okabe , Takanobu Asano , Shinichi Wada , Ken Nakao , Hitoshi Kato
IPC分类号： H01L21/46
CPC分类号： F17D1/04 , C01B7/19 , F17C2250/032 , F17C2270/0518 , H01L21/67017 , H01L21/67276
摘要： Fluorine gas generators are connected with semiconductor manufacturing apparatuses through a gas supplying system including a storage tank that can store a predetermined quantity of fluorine gas generated in the on-site fluorine gas generators. When one or more of the on-site fluorine gas generators are stopped, fluorine gas is supplied to the semiconductor manufacturing apparatuses from the storage tank storing a predetermined quantity of fluorine gas, so as to keep the operations of the semiconductor manufacturing apparatuses. Thereby obtained is a semiconductor manufacturing plant in which fluorine gas generated in the fluorine gas generators can be safely and stably supplied to the semiconductor manufacturing apparatuses, and with superior cost performance.
摘要翻译： 氟气发生器通过包括存储在现场氟气发生器中产生的预定量的氟气的储罐的气体供给系统与半导体制造装置连接。 当一个或多个现场氟气发生器停止时，从储存预定量的氟气的储罐向半导体制造装置供应氟气，以保持半导体制造装置的操作。 由此，能够将在氟气发生器中产生的氟气安全稳定地供给到半导体制造装置，并具有优异的成本性能的半导体制造工厂。
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公开(公告)号：US07316765B2
公开(公告)日：2008-01-08
申请号：US10879135
申请日：2004-06-30
申请人： Tetsuro Tojo , Jiro Hiraiwa , Osamu Yoshimoto
发明人： Tetsuro Tojo , Jiro Hiraiwa , Osamu Yoshimoto
IPC分类号： C25B15/02
摘要： An apparatus for controlling a molten salt electrolyzer in which an electrolytic bath in a solid form as contained in the electrolyzer is melted to automatically attain a state allowing electrolysis, which apparatus comprises detecting means for detecting the changes in state of the electrolyzer by means of detectors fitted to the electrolyzer, and adjusting means for adjusting, after using the detecting means, the liquid electrolytic bath levels to a state allowing electrolysis.
摘要翻译： 一种用于控制熔盐电解器的装置，其中包含在电解槽中的固体电解液熔化，以自动获得允许电解的状态，该装置包括用于通过检测器检测电解槽状态变化的检测装置 以及调节装置，用于在使用检测装置之后将液体电解槽液位调整到允许电解的状态。
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公开(公告)号：US20110020187A1
公开(公告)日：2011-01-27
申请号：US12921305
申请日：2008-03-06
申请人： Jiro Hiraiwa , Hitoshi Takebayashi , Osamu Yoshimoto , Noriyuki Tanaka , Ichiro Fujita , Hiroyoshi Sasaki , Kazutaka Mori
发明人： Jiro Hiraiwa , Hitoshi Takebayashi , Osamu Yoshimoto , Noriyuki Tanaka , Ichiro Fujita , Hiroyoshi Sasaki , Kazutaka Mori
CPC分类号： H01L21/6719 , B01J4/008 , H01L21/67017 , H01L21/67109
摘要： A surface treatment apparatus 100 includes a diluent gas supplier 1, a fluorine gas supplier 2, a mixer 5 which mixes a diluent gas with a fluorine gas, and a reactor 6 which treats a treatment target by using a mixed gas generated by the mixer 5. A diluent gas supplied from a diluent gas supplier is heated by a heater 8, and the heated diluent gas is mixed with a fluorine gas supplied from a fluorine gas supplier, in the mixer 5. The mixed gas is supplied to the reactor 6. The gas in the reactor 6 is supplied from the reactor 6 to flow paths 219, 220, 221, and 222 by an exhauster 207. The valves 223, 224, 225, and 226 are serially opened, so that the gas in the reactor 6 is supplied to a harm removal apparatus 208 while the gas flow rate is being adjusted by the flow paths 219, 220, 221, and 222.
摘要翻译： 表面处理装置100包括稀释气体供给体1，氟气供给体2，将稀释气体与氟气混合的混合器5以及通过使用由混合器5产生的混合气体来处理处理对象物的反应器6 从稀释气体供给装置供给的稀释气体由加热器8加热，加热后的稀释气体与从氟气供给体供给的氟气混合在混合器5中。混合气体供给反应器6。 反应器6中的气体通过排气器207从反应器6供应到流动路径219,220,221和222.阀223,224,225和226串联打开，使得反应器6中的气体 在通过流路219,220,221和222调节气体流量的同时，供给到危害消除装置208。
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15.发明授权公开(公告)号：US07351322B2
公开(公告)日：2008-04-01
申请号：US10702654
申请日：2003-11-07
申请人： Jiro Hiraiwa , Osamu Yoshimoto , Tetsuro Tojo
发明人： Jiro Hiraiwa , Osamu Yoshimoto , Tetsuro Tojo
摘要： A fluorine gas generator for generating fluorine gas by electrolysis of an electrolytic bath comprising a hydrogen fluoride-containing mixed molten salt in which generator the position of the electrolytic bath liquid surface in the electrolytic cell can be safely controlled even during suspension of electrolysis therein is provided. The generator comprises an anode chamber and a cathode chamber separated from each other by a partition wall and is provided with electrolytic bath liquid level controlling means for controlling the electrolytic bath liquid level in at least one of the anode chamber and cathode chamber during suspension of fluorine gas generation.
摘要翻译： 提供一种用于通过电解电解产生氟气的氟气发生器，其包括含氟化氢的混合熔盐，其中发电机即使在电解池中的电解停止期间电解槽液面的电解液液表面的位置也能够被安全地控制 。 发电机包括通过分隔壁彼此分离的阳极室和阴极室，并且设置有电解液液位控制装置，用于在氟的悬浮期间控制阳极室和阴极室中的至少一个中的电解液液位 天然气生成。
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16.发明授权公开(公告)号：US07288180B2
公开(公告)日：2007-10-30
申请号：US10849174
申请日：2004-05-20
申请人： Tetsuro Tojo , Jiro Hiraiwa , Osamu Yoshimoto
发明人： Tetsuro Tojo , Jiro Hiraiwa , Osamu Yoshimoto
IPC分类号： C25C3/20
摘要： The invention provides a method and apparatus for current control in gas generators capable of generating a fluorine or fluoride gas by and in which the electrolysis can be maintained in an optimum condition, stable operation is possible and no manpower is demanded. According to the method of current control in gas generators for generating a fluorine or fluoride gas by electrolysis of an electrolytic bath 5 comprising a hydrogen fluoride-containing mixed molten salt using a carbon electrode as the anode 4a, the range of voltage fluctuation between the cathode 4b and anode 4a as occurring when a certain current is applied to the gas generator is measured, and current application is continued while varying the current amount to be applied according to the voltage fluctuation range.
摘要翻译： 本发明提供了一种用于气体发生器中的电流控制的方法和装置，其能够产生氟或氟化物气体，其中电解可以保持在最佳状态，稳定的操作是可能的，并且不需要人力。 根据使用碳电极作为阳极4a的包含含氟化氢的混合熔融盐的电解槽5产生氟或氟化物气体的气体发生器的电流控制方法， 测量向气体发生器施加一定电流时发生的阴极4b和阳极4a，并且根据电压波动范围改变要施加的电流量，继续施加电流。
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17.发明授权
公开(公告)号：US5894696A
公开(公告)日：1999-04-20
申请号：US825567
申请日：1997-03-31
申请人： Shigeru Ando , Minehiro Kamiyama , Megumu Dohi , Osamu Yoshimoto , Tetsuro Tojo
发明人： Shigeru Ando , Minehiro Kamiyama , Megumu Dohi , Osamu Yoshimoto , Tetsuro Tojo
CPC分类号： A01G7/02 , A01C23/042
摘要： A method of efficiently supplying terrestrial plants with raising substances such as a solution comprises the steps of: producing a solution by an electrolysis of a water using a carbonaceous electrode; reducing the produced solution to minute particles or fine spray; and supplying the solution to the terrestrial plants including leaves entirely. An apparatus includes a container for storing water having at least a water inlet and a water outlet; a pair of electrodes comprising an anode and a cathode provided in the container, at least the anode being made of composition of carbonaceous materials and cured resins and molded into a plate-like form; a power supply to supply an electric current between the pair of electrodes to produce a solution by an electrolysis of the water; and a pump connected with the water outlet in the container for supplying the solution to the terrestrial plants.
摘要翻译： 有效地向陆生植物提供诸如溶液的物质的方法包括以下步骤：通过使用碳质电极电解水来产生溶液; 将生成的溶液还原成微小颗粒或精细喷雾; 并将溶液全部提供给包括叶子在内的陆地植物。 一种装置包括用于储存至少具有水入口和出水口的水的容器; 一对电极，其包括设置在容器中的阳极和阴极，至少阳极由碳质材料和固化树脂的组合物制成并成型为板状; 用于在所述一对电极之间提供电流以通过电解电解产生溶液的电源; 以及与容器中的出水口连接以将溶液供应给陆地植物的泵。
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公开(公告)号：US09343876B2
公开(公告)日：2016-05-17
申请号：US13984561
申请日：2012-02-13
摘要： A spark plug including a center electrode; an insulator; a metallic shell; and a ground electrode, wherein at least one of the center electrode and the ground electrode has thereon an intermediate member which connects the center electrode or the ground electrode to a noble metal tip. The intermediate member has a tip-bonding portion to which the noble metal tip is bonded, and an electrode-bonding portion which has a diameter greater than that of the tip-bonding portion, and which is bonded to the center electrode or the ground electrode. The intermediate member contains nickel (Ni) as a main component, and also contains chromium (Cr) in an amount of 15 to 25 wt. %. The intermediate member contains, in a surface portion thereof, silicon (Si) in an amount per unit volume of 0.04 mg/mm3 to 0.12 mg/mm3, and aluminum (Al) in an amount per unit volume of 0.03 mg/mm3 to 0.10 mg/mm3.
摘要翻译： 一种包括中心电极的火花塞; 绝缘体 金属壳; 和接地电极，其中中心电极和接地电极中的至少一个具有将中心电极或接地电极连接到贵金属电极头的中间部件。 中间构件具有接合贵金属电极头的尖端接合部分和直径大于尖端接合部分直径的电极接合部分，并且接合到中心电极或接地电极 。 中间构件含有镍（Ni）作为主要成分，并且还含有15〜25重量％的铬（Cr）。 ％。 中间部件的表面部分含有每单位体积的量为0.04mg / mm 3〜0.12mg / mm 3的硅（Si），每单位体积的铝（Al）为0.03mg / mm 3〜0.10 mg / mm3。
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公开(公告)号：US09109288B2
公开(公告)日：2015-08-18
申请号：US13393895
申请日：2010-09-02
申请人： Osamu Yoshimoto
发明人： Osamu Yoshimoto
IPC分类号： F16K11/20 , C23C16/455 , F17C5/00
CPC分类号： C23C16/45561 , F17C5/00 , F17C2205/0142 , F17C2205/0323 , F17C2221/01 , F17C2250/03 , F17C2250/043 , Y10T137/877
摘要： A fluorine gas generation system includes a plurality of fluorine gas supply systems and a controller. Each of the fluorine gas supply systems includes a fluorine gas generation apparatus. Each of the fluorine gas supply systems is connected to a CVD device group. The fluorine gas generation apparatus includes a fluorine gas generator and a buffer tank. An opening/closing valve is inserted through a piping. The other end of the piping is branched into a plurality of pipings. Each of the pipings is connected to CVD devices. Pipings in the adjacent fluorine gas supply systems are connected to each other via a piping. An opening/closing valve is inserted through each of the pipings.
摘要翻译： 氟气生成系统包括多个氟气供给系统和控制器。 每个氟气供应系统包括氟气产生装置。 每个氟气供应系统连接到CVD装置组。 氟气产生装置包括氟气发生器和缓冲罐。 打开/关闭阀通过管道插入。 管道的另一端分支成多个管道。 每个管道都连接到CVD设备。 相邻氟气供给系统中的管道通过管道相互连接。 通过每个管道插入开/关阀。
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公开(公告)号：US08664842B2
公开(公告)日：2014-03-04
申请号：US13515627
申请日：2011-01-11
申请人： Tomoo Tanaka , Tsutomu Shibata , Osamu Yoshimoto , Takaaki Kikai , Takehito Kuno , Kenji Nunome
发明人： Tomoo Tanaka , Tsutomu Shibata , Osamu Yoshimoto , Takaaki Kikai , Takehito Kuno , Kenji Nunome
摘要： A spark plug including a center electrode and a ground electrode having a gap between the center electrode and the ground electrode, the ground electrode has an outer layer which is formed from an Ni-based alloy and a core portion which is covered by the outer layer and formed from a material having a thermal conductivity higher than that of the outer layer. Further, the melting point of the Ni-based alloy forming the outer layer is 1150° C. or more and 1350° C. or less.
摘要翻译： 一种火花塞，其包括中心电极和接地电极，所述接地电极在所述中心电极和所述接地电极之间具有间隙，所述接地电极具有由Ni基合金形成的外层和被所述外层覆盖的芯部分 并且由具有高于外层的热导率的材料形成。 此外，形成外层的Ni系合金的熔点为1150℃以上且1350℃以下。
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