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公开(公告)号：US06285496B1
公开(公告)日：2001-09-04
申请号：US09568224
申请日：2000-05-09
申请人： Harry Bauer , Sascha Kraus , Hans G Keck , Jörg Endler , Hans-Joachim Weippert
发明人： Harry Bauer , Sascha Kraus , Hans G Keck , Jörg Endler , Hans-Joachim Weippert
IPC分类号： G02B000
CPC分类号： G03F7/70825 , G02B7/025
摘要： An assembly includes a holder made of material selected from metal and ceramic/glass ceramic, a transparent optical component that is transparent in the ultraviolet (UV) wavelength region of light, which has functional faces serving for transmission, and adhesive that is hardenable by UV light of a given long wavelength region, a layer applied by thin film technology and fixed to the holder by the adhesive. The layer is provided only outside said functional faces and to a high degree at least reflects or absorbs radiated light in a predetermined UV wavelength region within the UV wavelength region transmitted by the transparent optical component, and is transparent in the given long wavelength region to harden the adhesive by UV light irradiation that passes through the transparent optical component and the layer.
摘要翻译： 组件包括由金属和陶瓷/玻璃陶瓷中选择的材料制成的保持器，在具有用于透射的功能面的紫外线（UV）波长区域中透明的透明光学部件和可通过UV固化的粘合剂 给定长波长区域的光，通过薄膜技术施加的层并且通过粘合剂固定到保持器。 该层仅设置在所述功能面之外，并且高度地至少反射或吸收由透明光学部件透射的UV波长区域内的预定UV波长区域中的辐射光，并且在给定的长波长区域中是透明的以硬化 通过穿过透明光学部件和层的UV光照射的粘合剂。
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公开(公告)号：US5817256A
公开(公告)日：1998-10-06
申请号：US811236
申请日：1997-03-03
IPC分类号： G02B21/00 , C07C69/00 , C07C69/08 , C07C69/44 , C10M105/18 , C10M105/36 , C10M105/38 , C10M107/34 , C10M111/02 , C10M111/04 , F21V9/00 , C07C69/34 , C09K31/02
CPC分类号： C07C69/44 , C10M105/18 , C10M105/36 , C10M105/38 , C10M107/34 , C10M111/02 , C10M111/04 , C07C2103/00 , C07C2103/68 , C10M2203/1006 , C10M2203/1025 , C10M2203/1045 , C10M2203/1065 , C10M2203/1085 , C10M2207/281 , C10M2207/2815 , C10M2207/282 , C10M2207/2825 , C10M2207/283 , C10M2207/2835 , C10M2207/2845 , C10M2207/2855 , C10M2207/286 , C10M2207/34 , C10M2209/1033 , C10M2209/104 , C10M2209/1045 , C10M2209/105 , C10M2209/1055 , C10M2209/106 , C10M2209/1065 , C10M2209/1075 , C10M2209/1085 , C10M2209/1095 , C10N2240/00 , C10N2240/22 , C10N2240/30 , C10N2240/50 , C10N2240/52 , C10N2240/54 , C10N2240/56 , C10N2240/58 , C10N2240/60 , C10N2240/66
摘要： The invention is directed to an immersion oil for microscopy. The immersion oil includes an ester or ether with tricyclodecane structure as a main constituent and one or more high-boiling liquids as minor constituents. The immersion oil is free of halogens and exhibits a high UV-transmissibility and is characterized by low intrinsic fluorescence because the components utilized can be vacuum distilled.
摘要翻译： 本发明涉及用于显微镜的浸油。 浸渍油包括以三环癸烷结构为主要成分的酯或醚，以及一种或多种高沸点液体作为次要成分。 浸没油不含卤素并具有高的紫外线透过率，其特征在于低固有荧光，因为所用组分可被真空蒸馏。
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公开(公告)号：US09158207B2
公开(公告)日：2015-10-13
申请号：US13564983
申请日：2012-08-02
CPC分类号： G03F7/70341 , B32B27/38 , B82Y20/00 , G02B5/206 , G02B5/208 , G02B5/22 , G02B2207/101 , G03F7/70958 , Y10T428/31511
摘要： An optical component for transmitting radiation includes a radiation protective layer, which includes at least one oxide material selected from germanium dioxide (GeO2), antimony pentoxide (Sb2O5), aluminum oxide (Al2O3), niobium(V) oxide (Nb2O5), tin oxide (SnO2), metal oxides of rare earths, in particular lanthanum oxide (La2O3) or cerium oxide (CeO2), yttrium oxide (Y2O3), yttrium aluminum oxides, zinc oxide (ZnO), indium oxide (In2O3), bismuth trioxide (Bi2O3), barium titanate (BaTiO3) and spinels, such as magnesium aluminate (MgAl2O4). The radiation protective layer can be varnish-like, and the oxide material can be contained in a binder of the varnish-like radiation protective layer.
摘要翻译： 用于透射辐射的光学部件包括辐射保护层，其包括至少一种选自二氧化锗（GeO 2），五氧化二锑（Sb 2 O 5），氧化铝（Al 2 O 3），氧化铌（V 2）（Nb 2 O 5），氧化锡 （SnO 2），稀土金属氧化物，特别是氧化镧（La 2 O 3）或氧化铈（CeO 2），氧化钇（Y 2 O 3），钇铝氧化物，氧化锌（ZnO），氧化铟（In 2 O 3），氧化铋 ），钛酸钡（BaTiO 3）和尖晶石，例如铝酸镁（MgAl 2 O 4）。 辐射保护层可以是清漆状的，并且氧化物材料可以包含在清漆状辐射保护层的粘合剂中。
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公开(公告)号：US20130038849A1
公开(公告)日：2013-02-14
申请号：US13564983
申请日：2012-08-02
CPC分类号： G03F7/70341 , B32B27/38 , B82Y20/00 , G02B5/206 , G02B5/208 , G02B5/22 , G02B2207/101 , G03F7/70958 , Y10T428/31511
摘要： An optical component for transmitting radiation includes a radiation protective layer, which includes at least one oxide material selected from germanium dioxide (GeO2), antimony pentoxide (Sb2O5), aluminum oxide (Al2O3), niobium(V) oxide (Nb2O5), tin oxide (SnO2), metal oxides of rare earths, in particular lanthanum oxide (La2O3) or cerium oxide (CeO2), yttrium oxide (Y2O3), yttrium aluminum oxides, zinc oxide (ZnO), indium oxide (In2O3), bismuth trioxide (Bi2O3), barium titanate (BaTiO3) and spinels, such as magnesium aluminate (MgAl2O4). The radiation protective layer can be varnish-like, and the oxide material can be contained in a binder of the varnish-like radiation protective layer.
摘要翻译： 用于透射辐射的光学部件包括辐射保护层，其包括至少一种选自二氧化锗（GeO 2），五氧化二锑（Sb 2 O 5），氧化铝（Al 2 O 3），氧化铌（V 2）（Nb 2 O 5），氧化锡 （SnO 2），稀土金属氧化物，特别是氧化镧（La 2 O 3）或氧化铈（CeO 2），氧化钇（Y 2 O 3），钇铝氧化物，氧化锌（ZnO），氧化铟（In 2 O 3），氧化铋 ），钛酸钡（BaTiO 3）和尖晶石，例如铝酸镁（MgAl 2 O 4）。 辐射保护层可以是清漆状的，并且氧化物材料可以包含在清漆状辐射保护层的粘合剂中。
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15.发明申请DIFFRACTIVE OPTICAL ELEMENT AND USE OF AN OPTICAL ADHESIVE FOR PRODUCING THE SAME 有权衍射光学元件和用于生产光学粘合剂的光学粘合剂公开(公告)号：US20110026118A1
公开(公告)日：2011-02-03
申请号：US12739702
申请日：2008-09-19
CPC分类号： G02B5/1852 , C08K5/0008 , C09J163/00
摘要： A diffractive optical element is provided, which comprises a first layer (12) consisting of a material having a refractive index n1(λ), a second layer (14), adjacent to the first layer (12), consisting of a material having a refractive index n2(λ) and a diffraction structure (18) formed at the interface (16) between the first layer (12) and the second layer (14). The material of at least one of the two layers (12, 14) is obtained by curing an optical adhesive. The use of an optical adhesive for the production of a diffractive optical element according to claim 1 is furthermore provided.
摘要翻译： 提供了一种衍射光学元件，其包括由具有折射率n1（λ）的材料构成的第一层（12），与第一层（12）相邻的第二层（14），该第二层由具有 折射率n2（λ）和形成在第一层（12）和第二层（14）之间的界面（16）处的衍射结构（18）。 通过固化光学粘合剂获得两层（12,14）中的至少一层的材料。 此外还提供使用光学粘合剂来制造根据权利要求1的衍射光学元件。
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公开(公告)号：US20090213342A1
公开(公告)日：2009-08-27
申请号：US11577531
申请日：2005-10-20
CPC分类号： G03F7/70216 , G03F7/2041
摘要： The invention relates to a projection exposure apparatus with a projection objective that serves to project a structure onto a substrate coated with a light-sensitive resist, wherein an immersion liquid is arranged between an optical element of the projection objective and the resist-coated substrate. As an immersion liquid saturated cyclic or polycyclic hydrocarbons can be used, such as for example cyclo-alkanes comprising up to 12 carbon atoms, saturated polycyclic hydrocarbons with 2 to 6 rings, bridged polycyclic hydrocarbons, cyclic ethers and derivatives of these substances.
摘要翻译： 本发明涉及一种具有投影物镜的投影曝光装置，该投影物体用于将结构投影到涂有光敏抗蚀剂的基板上，其中浸没液体布置在投影物镜的光学元件和抗蚀剂涂覆的基底之间。 作为浸渍液体，可以使用饱和的环状或多环烃，例如包含至多12个碳原子的环烷烃，具有2至6个环的饱和多环烃，桥连多环烃，环醚和这些物质的衍生物。
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公开(公告)号：US20090071602A1
公开(公告)日：2009-03-19
申请号：US12209907
申请日：2008-09-12
CPC分类号： C08G59/62 , C08G59/24 , C08G59/687 , C08L61/16 , C08L63/00 , C08L2666/16
摘要： The present invention relates to a polymerizable composition comprising a cycloaliphatic epoxide compound, a monovalent alcohol, a photopolymerization initiator, wherein the molar ratio of the epoxide groups of the cycloaliphatic epoxide to the hydroxyl groups of the monovalent alcohol is 0.9:1.0 to 4.0:1.0 and the hydroxyl functionality of all organic compounds of the polymerizable composition having OH group(s) is in the range of 1.0 to 1.25.
摘要翻译： 本发明涉及包含脂环族环氧化合物，一价醇，光聚合引发剂的聚合性组合物，其中脂环族环氧化物的环氧化物与一元醇的羟基的摩尔比为0.9:1.0〜4.0:1.0 具有OH基的可聚合组合物的所有有机化合物的羟基官能度在1.0至1.25的范围内。
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公开(公告)号：US20070097529A1
公开(公告)日：2007-05-03
申请号：US11542771
申请日：2006-10-04
IPC分类号： G02B7/02
CPC分类号： G02B7/028
摘要： An apparatus for the thermal compensation of an optical system is disclosed. The apparatus comprises a housing, at least one optical element adapted to be displaced relative to the housing, and at least one piston-and-cylinder unit positioned directly between the housing and the optical element. The piston-and-cylinder unit acts on the position of the optical element within the housing. It contains a fluid. The coefficients of volumetric thermal expansion of the piston, the cylinder and the fluid are selected such that for a predetermined change in temperature of the apparatus a defined relative displacement between the piston and the cylinder takes place which compensates the change of the optical properties of the optical system caused by the change in temperature. The fluid is a polymer system.
摘要翻译： 公开了一种用于光学系统的热补偿的装置。 该装置包括壳体，适于相对于壳体移位的至少一个光学元件以及直接位于壳体和光学元件之间的至少一个活塞和缸单元。 活塞和气缸单元作用在壳体内的光学元件的位置。 它含有液体。 选择活塞，气缸和流体的体积热膨胀系数，使得对于装置的预定温度变化，发生活塞和气缸之间的限定的相对位移，这些位移补偿了活塞和气缸的光学特性的变化 光学系统由温度变化引起。 流体是聚合物体系。
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