公开(公告)号：US08309921B2

公开(公告)日：2012-11-13

申请号：US13019216

申请日：2011-02-01

申请人： Martinus Petrus Maria Bierhoff ,  Bart Buijsse ,  Cornelis Sander Kooijman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stoks ,  Steven Berger ,  Ben Jacobus Marie Bormans ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus W. G. Persoon

发明人： Martinus Petrus Maria Bierhoff ,  Bart Buijsse ,  Cornelis Sander Kooijman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stoks ,  Steven Berger ,  Ben Jacobus Marie Bormans ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus W. G. Persoon

IPC分类号： H01J37/20 ,  H01J37/252 ,  H01J37/28

CPC分类号： H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/21 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1405 ,  H01J2237/162 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006

摘要： A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.

摘要翻译： 紧凑型电子显微镜使用具有形成样品所在的真空区域的一部分的壁的可移除的样品保持器。 通过使用可拆卸的样品架来容纳真空，在成像之前需要排空的空气的体积大大减少，并且显微镜可以被快速排空。 在优选实施例中，滑动真空密封允许样品保持器位于电子柱下方，并且样品保持器首先在真空缓冲器下通过以除去样品保持器中的空气。

公开(公告)号：US20110133083A1

公开(公告)日：2011-06-09

申请号：US13019216

申请日：2011-02-01

申请人： MART PETRUS MARIA BIERHOFF ,  Bart Buijsse ,  Cornelis Sander Kooijman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stoks ,  Ben Jacobus Marie Bormans ,  Steven Berger ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus WILHELMUS Gerardus Persoon

发明人： MART PETRUS MARIA BIERHOFF ,  Bart Buijsse ,  Cornelis Sander Kooijman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stoks ,  Ben Jacobus Marie Bormans ,  Steven Berger ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus WILHELMUS Gerardus Persoon

IPC分类号： G01N23/225

CPC分类号： H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/21 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1405 ,  H01J2237/162 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006

摘要： A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.

摘要翻译： 紧凑型电子显微镜使用具有形成样品所在的真空区域的一部分的壁的可移除的样品保持器。 通过使用可拆卸的样品架来容纳真空，在成像之前需要排空的空气的体积大大减少，并且显微镜可以被快速排空。 在优选实施例中，滑动真空密封允许样品保持器位于电子柱下方，并且样品保持器首先在真空缓冲器下通过以除去样品保持器中的空气。

公开(公告)号：US20100194874A1

公开(公告)日：2010-08-05

申请号：US12303717

申请日：2007-06-07

申请人： Mart Petrus Maria Bierhoff ,  Bart Buijsse ,  Cornelis Sander Kooljman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stocks ,  Steven Berger ,  Ben Jacobus Marie Bormans ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus W.G. Persoon

发明人： Mart Petrus Maria Bierhoff ,  Bart Buijsse ,  Cornelis Sander Kooljman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stocks ,  Steven Berger ,  Ben Jacobus Marie Bormans ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus W.G. Persoon

IPC分类号： H04N7/18

CPC分类号： H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/21 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1405 ,  H01J2237/162 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006

摘要： A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

摘要翻译： 用于操作扫描电子显微镜装置的用户界面，其将较低倍率参考图像和较高放大倍率的图像组合在同一屏幕上，使得不被用于电子显微镜的高放大倍数的用户容易地确定样品在哪里更容易 正在获取图像并了解该图像与其余样本之间的关系。 此外，其他屏幕（例如存档屏幕和设置屏幕）允许用户比较保存的图像并分别调整系统的设置。

公开(公告)号：US20100171037A1

公开(公告)日：2010-07-08

申请号：US12303611

申请日：2007-06-07

申请人： Mart Petrus Maria Bierhoff ,  Bart Buijsse ,  Cornelis Sander Kooijman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stoks ,  Steven Berger ,  Ben Jacobus Marie Bormans ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus W. G. Persoon

发明人： Mart Petrus Maria Bierhoff ,  Bart Buijsse ,  Cornelis Sander Kooijman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stoks ,  Steven Berger ,  Ben Jacobus Marie Bormans ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus W. G. Persoon

IPC分类号： H01J37/28

CPC分类号： H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/21 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1405 ,  H01J2237/162 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006

摘要： A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.

摘要翻译： 紧凑型电子显微镜使用具有形成样品所在的真空区域的一部分的壁的可移除的样品保持器。 通过使用可拆卸的样品架来容纳真空，在成像之前需要排空的空气的体积大大减少，并且显微镜可以被快速排空。 在优选实施例中，滑动真空密封允许样品保持器位于电子柱下方，并且样品保持器首先在真空缓冲器下通过以除去样品保持器中的空气。

公开(公告)号：US07662524B2

公开(公告)日：2010-02-16

申请号：US12345368

申请日：2008-12-29

申请人： Diane K. Stewart ,  J. David Casey, Jr. ,  Joan Williams Casey, legal representative ,  John Beaty ,  Christian R. Musil ,  Steven Berger

发明人： Diane K. Stewart ,  J. David Casey, Jr. ,  John Beaty ,  Christian R. Musil ,  Steven Berger

IPC分类号： G03F1/00 ,  G03C5/00

CPC分类号： G03F1/74 ,  G03F1/72

摘要： Masks can be repaired by creating a structure that is different from the original design, but that produces the same aerial image. For example, missing opaque material can be replaced by implanting gallium atoms to reduce transmission and quartz can be etched to an appropriate depth to produce the proper phase. In another aspect, a laser or other means can be used to remove an area of a mask around a defect, and then mask structures, either the intended design structures or alternate structures that produce the same aerial image, can be constructed using charged particle beam deposition and etching. For example, an electron beam can be used to deposit quartz to alter the phase of transmitted light. An electron beam can also be used with a gas to etch quartz to remove a layer including implanted gallium atoms. Gallium staining can also be reduced or eliminated by providing a sacrificial layer that can be removed, along with the implanted gallium atoms, using, for example, a broad ion beam. In another aspect, a charged particle beam can be programmed to etch a defect using three-dimensional information derived from two charged particle beams images of the defect from different angle.

摘要翻译： 可以通过创建与原始设计不同的结构来修复面具，但产生相同的空间图像。 例如，可以通过注入镓原子来代替缺少的不透明材料以减少透射，并且可以将石英蚀刻到适当的深度以产生适当的相位。 在另一方面，可以使用激光器或其他装置去除缺陷周围的掩模区域，然后可以使用带电粒子束来构造掩模结构，或者产生相同空间图像的预期设计结构或替代结构 沉积和蚀刻。 例如，电子束可用于沉积石英以改变透射光的相位。 电子束也可与气体一起使用以蚀刻石英以除去包括注入的镓原子的层。 也可以通过提供可以使用例如宽离子束与注入的镓原子一起除去的牺牲层来还原或消除镓染色。 在另一方面，带电粒子束可被编程为使用从两个带电粒子束导出的来自不同角度的缺陷图像的三维信息来蚀刻缺陷。

公开(公告)号：US20070020605A1

公开(公告)日：2007-01-25

申请号：US11454293

申请日：2006-06-17

申请人： Steven Berger ,  Colin Sanford

发明人： Steven Berger ,  Colin Sanford

IPC分类号： G09B25/00

CPC分类号： G09B25/00 ,  H01J2237/2813

摘要： An improved simulator for an analytical instrument that provides the student with an experience similar to that of operating the actual instrument. In one preferred embodiment, the invention combines real functionality and simulated functionality where at least one function of the analytical instrument is real. In another preferred embodiment, the invention combines a functional first instrument along with a simulation of a second instrument, the simulation including both hardware with limited functionality and software that simulates the output of a functional instrument to create a teaching aid for use in classrooms and teaching laboratories.

摘要翻译： 用于分析仪器的改进模拟器，为学生提供与操作实际仪器相似的体验。 在一个优选实施例中，本发明结合了实际功能和模拟功能，其中分析仪器的至少一个功能是真实的。 在另一个优选实施例中，本发明将功能第一仪器与第二仪器的模拟结合在一起，模拟包括具有有限功能的硬件和模拟功能仪器的输出的软件，以创建用于教室和教学中的教学辅助 实验室。