公开(公告)号：US06270393B1

公开(公告)日：2001-08-07

申请号：US09410048

申请日：1999-10-01

申请人： Toshio Kubota ,  Tsutomu Yamada

发明人： Toshio Kubota ,  Tsutomu Yamada

IPC分类号： B24B100

CPC分类号： C09G1/02 ,  H01L21/31053

摘要： An abrasive slurry contains an alumina grain, an inorganic salt, a water-soluble chelating agent, an abrasive oil and a hardly water-soluble chelate aluminum salt or chelate nickel salt. The alumina grain has an average particle diameter of from 0.05 to 1 &mgr;m in an amount of from 0.1 to 10% by weight. The inorganic salt is selected from the group consisting of water-soluble inorganic aluminum salt and nickel salt in an amount of from 0.1 to 3% by weight. The content of the water-soluble chelating agent is from 0.1 to 3% by weight. The content of the abrasive oil is from 0.1 to 10% by weight. The content of the hardly water-soluble chelate aluminum salt or chelate nickel salt is not more than 0.1% by weight. The abrasive slurry is used for abrading an insulation layer of a semiconductor integrated circuit and a magnetic thin film head while they are produced.

摘要翻译： 磨料浆料含有氧化铝颗粒，无机盐，水溶性螯合剂，研磨油和几乎不溶于水的螯合铝盐或螯合镍盐。 氧化铝粒子的平均粒径为0.05〜1μm，重量比为0.1〜10％。 无机盐选自水溶性无机铝盐和镍盐，其含量为0.1-3重量％。 水溶性螯合剂的含量为0.1〜3重量％。 研磨油的含量为0.1〜10重量％。 难溶性螯合铝盐或螯合镍盐的含量不超过0.1重量％。 磨料浆料在制造时用于研磨半导体集成电路和磁性薄膜头的绝缘层。

公开(公告)号：US5808132A

公开(公告)日：1998-09-15

申请号：US614224

申请日：1996-03-12

申请人： Takehiro Sonoi ,  Toshimasa Sagawa ,  Futoshi Masaki ,  Toshio Kubota

发明人： Takehiro Sonoi ,  Toshimasa Sagawa ,  Futoshi Masaki ,  Toshio Kubota

IPC分类号： C07C67/00 ,  C07D303/48 ,  C07C69/76 ,  C07D303/02

CPC分类号： C07D303/48 ,  C07C67/00

摘要： Heptafluoroisobutenyl methyl ether having the following formula: ##STR1## is oxidized with ozone to produce perfluoro(2-methyl-1,2-epoxy-propyl) methyl ether. The resulting intermediate compound is allowed to react with an aromatic compound ArH to produce .alpha.,.alpha.-bis(trifluoromethyl)arylacetic acid methyl ester having the following formula: ##STR2## By hydrolysis, decarboxylation and further hydrolysis of the ester compound, .alpha.,.alpha.-bis(trifluoromethyl)arylacetic acid for use as raw materials for medicines, agricultural chemicals, liquid crystals, etc. or reagents for determining an optical purity can be obtained.

摘要翻译： 具有下式的七氟异丁烯基甲基醚：用臭氧氧化产生全氟（2-甲基-1,2-环氧丙基）甲基醚。 使得到的中间体化合物与芳族化合物ArH反应以产生具有下式的α，α-双（三氟甲基）芳基乙酸甲酯：通过水解，脱羧和进一步水解酯化合物，α，α 可以获得用作药物，农药，液晶等的原料的双（三氟甲基）芳基乙酸或用于测定光学纯度的试剂。

公开(公告)号：US5288029A

公开(公告)日：1994-02-22

申请号：US785262

申请日：1991-10-30

申请人： Ichirou Ishibashi ,  Toshio Kubota ,  Niichi Toyama ,  Shoko Sasaki ,  Yukihito Ono ,  Akihiko Tada

发明人： Ichirou Ishibashi ,  Toshio Kubota ,  Niichi Toyama ,  Shoko Sasaki ,  Yukihito Ono ,  Akihiko Tada

IPC分类号： B05B5/16 ,  B05B12/14 ,  B05B5/02

CPC分类号： B05B5/1675 ,  B05B5/1625 ,  B05B12/14

摘要： An apparatus for electrostatically spray-coating a workpiece with conductive paint which includes a color changeover valve mechanism for selectively supplying conductive paint, cleaning liquid and air. A flush valve mechanism is provided for selectively supplying the cleaning liquid and the air. A first directional control valve includes an outlet and inlets. The inlets are connected to feed lines extending from the color changeover valve mechanism and the flush valve mechanism, respectively. A block line is made of an insulating material and has a first end connected to the outlet of the first directional control valve. The block line includes a second end in communication with the first end. A second directional control valve is provided having outlets and an inlet. The inlet is connected to the second end of the block line. An intermediate reservoir is connected via a feed line to one of outlets of the second directional control valve. A waste-liquid tank is connected via a first discharge line to a second outlet of the second directional control valve. A spray gun is connected via a delivery line to the intermediate reservoir. A second discharge line is branched from the delivery line via a changeover valve. A discharge line cleaning mechanism is provided for selectively supplying at least cleaning liquid and air to the second discharge line. A high voltage is applied to the conductive paint between the second directional control valve and the spray gun.

摘要翻译： 一种用导电涂料对工件进行静电喷涂的装置，其包括用于选择性地供应导电涂料，清洁液体和空气的颜色转换阀机构。 提供了一种冲洗阀机构，用于选择性地供应清洗液和空气。 第一方向控制阀包括出口和入口。 入口分别连接到从颜色切换阀机构和冲洗阀机构延伸的供给管线。 块线由绝缘材料制成，并且具有连接到第一方向控制阀的出口的第一端。 块线包括与第一端连通的第二端。 提供具有出口和入口的第二方向控制阀。 入口连接到块线的第二端。 中间储存器经由进料管线连接到第二方向控制阀的出口之一。 废液槽经由第一排出管线连接到第二方向控制阀的第二出口。 喷枪通过输送管线连接到中间储存器。 第二排出管线通过切换阀从输送管线分支。 提供排出线清洁机构，用于至少选择性地向第二排出管线提供清洗液和空气。 向第二方向控制阀和喷枪之间的导电涂料施加高电压。

公开(公告)号：US5255856A

公开(公告)日：1993-10-26

申请号：US778269

申请日：1991-10-17

申请人： Ichirou Ishibashi ,  Nobunari Arai ,  Toshio Kubota

发明人： Ichirou Ishibashi ,  Nobunari Arai ,  Toshio Kubota

IPC分类号： B05B5/16 ,  B05B12/14

CPC分类号： B05B5/1675 ,  B05B5/1625 ,  B05B12/14

摘要： An electrostatic spray painting apparatus includes an electrically-insulated intermediate reservoir for storing therein conductive paint to which a high voltage is directly applied. In addition, the intermediate reservoir includes a cylinder, a piston reciprocatively and slidably disposed within the cylinder, and a fluid-flow straightening member protrudently formed in a part of a cylinder chamber used to be charged with the paint. The cylinder chamber is defined by the cylinder and the piston. An injection hole is defined near an outer peripheral edge of a cylinder wall so as to be connected to a paint and cleaning fluid feed source. A discharge hole is centrally defined in the cylinder wall so as to be connected to a spray gun, the discharge hole being used to discharge the paint and the cleaning liquid.

摘要翻译： 静电喷涂装置包括电绝缘的中间储存器，用于存储直接施加高电压的导电涂料。 此外，中间储存器包括缸体，可往复滑动地设置在缸体内的活塞和突出地形成在用于装入油漆的汽缸室的一部分中的流体流动矫直构件。 气缸室由气缸和活塞限定。 在气缸壁的外周边缘附近设有喷射孔，以连接到油漆和清洁液供给源。 排出孔中心地限定在气缸壁中，以便连接到喷枪，排出孔用于排出油漆和清洁液体。

公开(公告)号：US06599435B2

公开(公告)日：2003-07-29

申请号：US09867425

申请日：2001-05-31

申请人： Toshio Kubota ,  Fujimi Kimura

发明人： Toshio Kubota ,  Fujimi Kimura

IPC分类号： B44C122

CPC分类号： G11B5/3163 ,  H01L21/02071 ,  H01L21/3046

摘要： A gas at an extremely low temperature is jet-sprayed onto a warped concave surface of a wafer to correct this warped concave surface flat.

公开(公告)号：US06340558B1

公开(公告)日：2002-01-22

申请号：US09450773

申请日：1999-11-30

申请人： Toshio Kubota ,  Masumi Sugawara ,  Takehiro Horinaka ,  Fujimi Kimura

发明人： Toshio Kubota ,  Masumi Sugawara ,  Takehiro Horinaka ,  Fujimi Kimura

IPC分类号： B24B3700

CPC分类号： G11B5/3163 ,  B24B37/048 ,  G11B5/3116 ,  G11B5/3967 ,  Y10T29/49048

摘要： This invention relates to a polishing method for polishing a surface of a material to be polished and a fabrication method of a thin film magnetic head having a planarization process for planarizing the surface of the material to be polished by polishing, and an object thereof is to reduce variations of a residual film thickness on the surface of a material to be polished after polishing. An insulating film 14 is formed on an AlTiC substrate 12 and a bottom shielding layer 16 is formed thereover. After forming a coating layer 18 and etching a mask layer 22 as an etching mask, a protruding portion of the coating layer 18 at the bottom of the opening of the mask layer 22 is removed by a desired thickness. Since a protruding portion of the coating layer 18 on the periphery of the opening of the mask layer is suitably undercut, the protruding portion is shaved, thereby obtaining the coating layer 18 which is planarized as a whole.

摘要翻译： 本发明涉及一种抛光抛光材料表面的抛光方法和一种具有用于通过抛光使待抛光材料的表面平坦化的平面化处理的薄膜磁头的制造方法，其目的是 减少研磨后的被研磨材料的表面的残留膜厚的变化。 在AlTiC基板12上形成绝缘膜14，在其上形成底部屏蔽层16。 在形成涂层18并蚀刻作为蚀刻掩模的掩模层22之后，将掩模层22的开口底部的涂层18的突出部分去除期望的厚度。 由于掩模层的开口周围的涂层18的突出部分被适当地切割，所以突出部分被刮削，从而获得整体平坦化的涂层18。

公开(公告)号：US06178974B2

公开(公告)日：2001-01-30

申请号：US09572227

申请日：2000-05-17

申请人： Kanji Kobayashi ,  Masao Yamaguchi ,  Shinya Yoshihara ,  Toshio Kubota ,  Jun Kudo

发明人： Kanji Kobayashi ,  Masao Yamaguchi ,  Shinya Yoshihara ,  Toshio Kubota ,  Jun Kudo

IPC分类号： B08B312

CPC分类号： H01L21/67057 ,  B08B3/10 ,  B08B3/12 ,  Y10S134/902

摘要： A cleaning apparatus includes a cleaning tank for reserving cleaning fluid, an object to be cleaned being immersed in the cleaning fluid, a vibrator for vibrating the cleaning fluid in the cleaning tank, and two micro-vibration sources for minutely vibrating the object to be cleaned in two different directions.

摘要翻译： 一种清洁装置，包括：用于储存清洗液的清洗槽，待清洗物体浸入清洗液中;振动器，用于振动清洗槽中的清洗液;以及两个微振动源，用于使待清洗物体微小振动 在两个不同的方向。

公开(公告)号：US5897984A

公开(公告)日：1999-04-27

申请号：US781184

申请日：1997-01-09

申请人： Toshio Kubota ,  Satoshi Kurimoto ,  Hiroshi Shindo ,  Satoru Takeshima ,  Shingo Kamata

发明人： Toshio Kubota ,  Satoshi Kurimoto ,  Hiroshi Shindo ,  Satoru Takeshima ,  Shingo Kamata

IPC分类号： G11B5/60 ,  G11B21/21 ,  G03C5/00

CPC分类号： G11B5/6005

摘要： A method for manufacturing a flying type magnetic head slider includes an ion etching step for shaping a surface of the slider facing to a magnetic information medium to form a predetermined pattern by using an ion etching method, a step of forming a protection layer of an organic material to cover at least one face of the slider on which at least one electromagnetic transducer element is formed, by injecting the organic material to the at least one face of the slider from a ink jet type printer head, and a step of removing the protection layer of the organic material. The protection layer forming step is executed before the ion etching step, whereas the protection layer removing step is executed after the ion etching step.

摘要翻译： 用于制造飞行型磁头滑块的方法包括离子蚀刻步骤，用于使面向磁信息介质的滑块的表面成形，通过使用离子蚀刻方法形成预定图案，形成有机保护层的步骤 通过从喷墨式打印头将有机材料注入到滑块的至少一个表面上来覆盖其上形成有至少一个电磁换能器元件的滑块的至少一个面的材料，以及去除保护的步骤 有机材料层。 在离子蚀刻步骤之前执行保护层形成步骤，而在离子蚀刻步骤之后执行保护层去除步骤。

公开(公告)号：US5640755A

公开(公告)日：1997-06-24

申请号：US422929

申请日：1995-04-17

申请人： Toshio Kubota ,  Tetsuo Miyazaki

发明人： Toshio Kubota ,  Tetsuo Miyazaki

IPC分类号： G11B5/187 ,  G11B5/31 ,  G11B5/60 ,  G11B21/21 ,  G11B5/127

CPC分类号： G11B5/6005 ,  G11B5/1871 ,  G11B5/3103 ,  Y10T29/49041 ,  Y10T29/49048

摘要： The slider is provided with at least one rail portion which extends between the trailing end portion and the leading end portion on one surface of the slider body. At least one magnetic transducer is provided on a line extended from the rail portion toward the trailing end of the slider body. The rail portion is provided with indented rail portions formed along the two sides and the rail surface, excluding the indented rail portions, forms the air bearing surface. The indented rail portions are formed shorter than the rail portion so that the air bearing surface continues all the way to, at least, the trailing end portion of the slider body. The width of the air bearing surfaces, which are cut into by the indented rail portions, is maintained at approximately the same dimension over the entire length of the indented rail portions. This reduces dependency of the flying height and flight attitute on the skew angle and, at the same time, prevents minute particles from the slider, generated through dry etching, from adhering to the side surfaces. Magnetic head elements are manufactured from a magnetic head aggregate which includes a section of a wafer to be formed into magnetic head elements, each magnetic head element comprising a slider body and at least one transducer, wherein the at least one transducer for each magnetic head element is formed at a trailing end of the magnetic head aggregate by fabricating a thin film element which is integrated with the slider body. A mask is placed over the magnetic head aggregate with openings through which the slider bodies are etched to form the indented rail portions. Finally, the magnetic head aggregate is machined to create the indented center portions and indented side portions, and the magnetic head aggregate is cut into plural magnetic head elements.

摘要翻译： 滑块设置有至少一个轨道部分，该轨道部分在滑块体的一个表面上在后端部分和前端部分之间延伸。 至少一个磁换能器设置在从导轨部分延伸到滑块体的后端的线上。 轨道部分设置有沿着两侧形成的凹入轨道部分，并且除了凹入轨道部分之外的轨道表面形成空气轴承表面。 缩进的轨道部分形成得比轨道部分短，使得空气支承表面至少一直延伸到滑块体的后端部分。 由凹入轨道部分切割的空气轴承表面的宽度在凹入轨道部分的整个长度上保持大致相同的尺寸。 这降低了飞行高度和飞行位置对倾斜角度的依赖性，并且同时防止了通过干蚀刻产生的微小颗粒从滑块附着到侧表面。 磁头元件由磁头集合体制成，该磁头集合体包括要形成磁头元件的晶片的一部分，每个磁头元件包括滑块体和至少一个换能器，其中每个磁头元件的至少一个换能器 通过制造与滑块体一体化的薄膜元件形成在磁头集合体的后端。 将掩模放置在具有开口的磁头集合体上，滑块主体通过该开口蚀刻以形成凹入的轨道部分。 最后，对磁头集合体进行加工，以形成凹陷的中心部分和凹入侧部分，并将磁头集合体切成多个磁头元件。

公开(公告)号：US5208078A

公开(公告)日：1993-05-04

申请号：US722195

申请日：1991-06-27

申请人： Ichirou Ishibashi ,  Yoshio Tomioka ,  Toshio Kubota ,  Niichi Toyama

发明人： Ichirou Ishibashi ,  Yoshio Tomioka ,  Toshio Kubota ,  Niichi Toyama

IPC分类号： B05B5/025 ,  B05B5/08 ,  B05B5/16 ,  B05B12/14 ,  B05D1/04

CPC分类号： B05B5/1675 ,  B05B12/14 ,  B05B5/1625 ,  B05B5/1633

摘要： Disclosed herein is a method of paint application. This method has the following advantageous effects. More specifically, when different paint is used, desired paint is alternately supplied to a first paint feeder and a second paint feeder from a paint feed source thereby to enable efficient painting of a workpiece by a spray gun. On the other hand, when the same paint is used, the paint is supplied only to the first paint feeder without using the second paint feeder, thereby making it possible to reduce wastefully-discharged paint and to efficiently carry out any cleaning work.

摘要翻译： 本文公开了一种涂漆方法。 该方法具有以下有益效果。 更具体地，当使用不同的涂料时，期望的涂料被交替地从涂料进料源供应到第一涂料进料器和第二涂料进料器，从而能够通过喷枪有效地涂覆工件。 另一方面，当使用相同的涂料时，仅将涂料仅供给第一涂料供给器而不使用第二涂料进料器，从而可以减少浪费的涂料并有效地进行任何清洁工作。