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公开(公告)号:US11707003B2
公开(公告)日:2023-07-18
申请号:US17140981
申请日:2021-01-04
发明人: Chich-Neng Chang , Da-Jun Lin , Shih-Wei Su , Fu-Yu Tsai , Bin-Siang Tsai
CPC分类号: H10N70/24 , H10B63/30 , H10N70/063 , H10N70/826 , H10N70/841
摘要: A memory device and a manufacturing method thereof are provided. The memory device includes a device substrate, a resistance variable layer and a top electrode. The bottom electrode is disposed on the device substrate. The resistance variable layer is disposed on the bottom electrode. The top electrode is disposed on the resistance variable layer. The bottom electrode is formed with a tensile stress, while the top electrode is formed with a compressive stress.
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公开(公告)号:US11688802B2
公开(公告)日:2023-06-27
申请号:US17179322
申请日:2021-02-18
发明人: Chih-Wei Chang , Yao-Hsien Chung , Shih-Wei Su , Hao-Hsuan Chang , Ting-An Chien , Bin-Siang Tsai
IPC分类号: H01L29/778 , H01L29/66 , H01L29/20
CPC分类号: H01L29/7786 , H01L29/2003 , H01L29/66462
摘要: A method for forming a high electron mobility transistor is disclosed. A substrate is provided. A channel layer is formed on the substrate. An electron supply layer is formed on the channel layer. A dielectric passivation layer is formed on the electron supply layer. A gate recess is formed into the dielectric passivation layer and the electron supply layer. A surface modification layer is conformally deposited on an interior surface of the gate recess. The surface modification layer is then subjected to an oxidation treatment or a nitridation treatment. A P-type GaN layer is formed in the gate recess and on the surface modification layer.
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公开(公告)号:US11676920B2
公开(公告)日:2023-06-13
申请号:US17159080
申请日:2021-01-26
发明人: Da-Jun Lin , Bin-Siang Tsai , Fu-Yu Tsai
IPC分类号: H01L23/00
CPC分类号: H01L24/05 , H01L24/45 , H01L2224/05124 , H01L2224/45147 , H01L2224/45464
摘要: A method for fabricating a semiconductor device includes the steps of first forming an aluminum (Al) pad on a substrate, forming a passivation layer on the substrate and an opening exposing the Al pad, forming a cobalt (Co) layer in the opening and on the Al pad, bonding a wire onto the Co layer, and then performing a thermal treatment process to form a Co—Pd alloy on the Al pad.
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公开(公告)号:US11521895B2
公开(公告)日:2022-12-06
申请号:US17325125
申请日:2021-05-19
发明人: Da-Jun Lin , Bin-Siang Tsai , Chich-Neng Chang
IPC分类号: H01L23/522 , H01L23/528 , H01L23/532 , H01L21/768
摘要: A structure of semiconductor device includes a substrate, having a dielectric layer on top. The structure further includes at least two metal elements being adjacent, disposed in the dielectric layer, wherein an air gap is existing between the two metal elements. The air gap has a cross-section of substantially bottle shape with a flat top. A porous dielectric layer is disposed over the substrate, sealing the flat top of the air gap. An inter-layer dielectric layer disposed on the porous dielectric layer.
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公开(公告)号:US20220246839A1
公开(公告)日:2022-08-04
申请号:US17725511
申请日:2022-04-20
发明人: Da-Jun Lin , Min-Hua Tsai , Tai-Cheng Hou , Fu-Yu Tsai , Bin-Siang Tsai
摘要: An MRAM structure includes a dielectric layer. A first MRAM, a second MRAM and a third MRAM are disposed on the dielectric layer, wherein the second MRAM is disposed between the first MRAM and the third MRAM, and the second MRAM includes an MTJ. Two gaps are respectively disposed between the first MRAM and the second MRAM and between the second MRAM and the third MRAM. Two tensile stress pieces are respectively disposed in each of the two gaps. A first compressive stress layer surrounds and contacts the sidewall of the MTJ entirely. A second compressive stress layer covers the openings of each of the gaps and contacts the two tensile material pieces.
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公开(公告)号:US20220140229A1
公开(公告)日:2022-05-05
申请号:US17573641
申请日:2022-01-12
发明人: Da-Jun Lin , Bin-Siang Tsai , Ting-An Chien
摘要: A method for fabricating memory cell of magnetoresistive RAM includes forming a memory stack structure on a first electrode layer. The memory stack structure includes a SAF layer to serve as a pinned layer; a magnetic free layer and a barrier layer sandwiched between the SAF layer and the magnetic free layer. A second electrode layer is then formed on the memory stack structure. The SAF layer includes a first magnetic layer, a second magnetic layer, and a spacer layer of a first metal element sandwiched between the first magnetic layer and the second magnetic layer. The first metal element is phase separated from a second metal element of the first and second magnetic layers, and the second metal element of the first magnetic layer and the second magnetic layer interfaces with the spacer layer.
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公开(公告)号:US20220140002A1
公开(公告)日:2022-05-05
申请号:US17106214
申请日:2020-11-30
发明人: Da-Jun Lin , Yi-An Shih , Bin-Siang Tsai , Fu-Yu Tsai
摘要: A method for fabricating a semiconductor device includes the steps of first forming a magnetic tunneling junction (MTJ) on a substrate, forming a top electrode on the MTJ, forming an inter-metal dielectric (IMD) layer around the top electrode and the MTJ, forming a landing layer on the IMD layer and the MTJ, and then patterning the landing layer to form a landing pad. Preferably, the landing pad is disposed on the top electrode and the IMD layer adjacent to one side of the top electrode.
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公开(公告)号:US11258005B2
公开(公告)日:2022-02-22
申请号:US16656304
申请日:2019-10-17
发明人: Da-Jun Lin , Bin-Siang Tsai , Ting-An Chien
摘要: A cell structure of magnetoresistive RAM includes a synthetic anti-ferromagnetic (SAF) layer to serve as a pinned layer; a barrier layer, disposed on the SAF layer; and a magnetic free layer, disposed on the barrier layer. The SAF layer includes: a first magnetic layer; a second magnetic layer; and a spacer layer of a first metal element sandwiched between the first magnetic layer and the second magnetic layer. The first metal element is phase separated from a second metal element of the first magnetic layer and the second magnetic layer interfacing with the spacer layer.
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公开(公告)号:US20210367147A1
公开(公告)日:2021-11-25
申请号:US17394424
申请日:2021-08-05
发明人: Da-Jun Lin , Tai-Cheng Hou , Bin-Siang Tsai , Ting-An Chien
摘要: A semiconductor device includes a magnetic tunneling junction (MTJ) on a substrate, a top electrode on the MTJ, a trapping layer in the top electrode for trapping hydrogen, a first inter-metal dielectric (IMD) layer on the MTJ, and a first metal interconnection in the first IMD layer and on the top electrode. Preferably, a top surface of the trapping layer is lower than a bottom surface of the first IMD layer.
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公开(公告)号:US11101324B2
公开(公告)日:2021-08-24
申请号:US16513719
申请日:2019-07-17
发明人: Da-Jun Lin , Bin-Siang Tsai , Ya-Jyuan Hung , Chin-Chia Yang , Ting-An Chien
摘要: A memory cell includes a first conductive line, a lower electrode, a carbon nano-tube (CNT) layer, a middle electrode, a resistive layer, a top electrode and a second conductive line. The first conductive line is disposed over a substrate. The lower electrode is disposed over the first conductive line. The carbon nano-tube (CNT) layer is disposed over the lower electrode. The middle electrode is disposed over the carbon nano-tube layer, thereby the lower electrode, the carbon nano-tube (CNT) layer and the middle electrode constituting a nanotube memory part. The resistive layer is disposed over the middle electrode. The top electrode is disposed over the resistive layer, thereby the middle electrode, the resistive layer and the top electrode constituting a resistive memory part. The second conductive line is disposed over the top electrode.
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