公开(公告)号：US11466979B2

公开(公告)日：2022-10-11

申请号：US17151681

申请日：2021-01-19

Applicant: University of Electronic Science and Technology of China

Inventor： Chao Wang ,  Zezhan Zhang ,  Peifeng Yu ,  Yi Niu ,  Ying Duan ,  Xueke Gou ,  Yekui Zhong ,  Anmei Qiu ,  Pei Huang ,  Yuehai Zhang ,  Shan Gao ,  Jing Jiang

IPC: G01B11/16

Abstract: The present invention discloses a method of measuring longitude deformation of blades. The radiation and rotation speed of the blade are collected by an optical probe and a synchronized rotation sensor. The stretch of the blade is able to be determined by the obvious change in the light intensity detected by the optical probe. The precision servo motor keeps driving the optical probe to move upward. The collected radiation is compared with the radiation collected on the previous point. The stretch of the blade is calculated based on position of the blade tip which is determined by the time when the high level radiation from the blade is disappeared. The longitude deformation of the blade is calculated by plugging the stretch into the deformation equation. Mapping the calculated deformation with the number of the blade calculated with rotation speed synchronizing signals to achieve the deformation of all the blades.

公开(公告)号：US11410849B2

公开(公告)日：2022-08-09

申请号：US16618354

申请日：2019-03-22

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Ying Duan ,  Jing Jiang ,  Jun Hu ,  Zezhan Zhang ,  Yang Yang ,  Xueke Gou ,  Congjun Wu

IPC: H01L21/20 ,  G02B27/10 ,  G02B27/30 ,  H01L21/02 ,  H01L21/66 ,  G01J5/00 ,  G02B27/14 ,  H01L21/64

Abstract: The present invention designs a measurement scheme for the longitudinal temperature of the film during nitride epitaxial growth, belongs to the field of semiconductor measurement technology. Epitaxial growth technology is one of the most effective methods for preparing nitride materials. The temperature during the growth process restricts the performance of the device. The non-contact temperature measurement method is generally used to measure the temperature of the graphite disk as the base, which can't obtain the longitudinal temperature. The present invention respectively measures the surface temperature of the epitaxial layer and the temperature of the graphite disk by ultraviolet and infrared radiation temperature measurement technologies, and then uses the finite element simulation method to perform thermal field analysis from the bottom surface of the substrate to the surface of the epitaxial layer, so that the longitudinal temperature is obtained, thereby providing a favorable basis for temperature regulation during nitride growth.

公开(公告)号：US20210140761A1

公开(公告)日：2021-05-13

申请号：US17151681

申请日：2021-01-19

Applicant: University of Electronic Science and Technology of China

Inventor： Chao Wang ,  Zezhan Zhang ,  Peifeng Yu ,  Yi Niu ,  Ying Duan ,  Xueke Gou ,  Yekui Zhong ,  Anmei Qiu ,  Pei Huang ,  Yuehai Zhang ,  Shan Gao ,  Jing Jiang

IPC: G01B11/16

Abstract: The present invention discloses a method of measuring longitude deformation of blades. The radiation and rotation speed of the blade are collected by an optical probe and a synchronized rotation sensor. The stretch of the blade is able to be determined by the obvious change in the light intensity detected by the optical probe. The precision servo motor keeps driving the optical probe to move upward. The collected radiation is compared with the radiation collected on the previous point. The stretch of the blade is calculated based on position of the blade tip which is determined by the time when the high level radiation from the blade is disappeared. The longitude deformation of the blade is calculated by plugging the stretch into the deformation equation. Mapping the calculated deformation with the number of the blade calculated with rotation speed synchronizing signals to achieve the deformation of all the blades.

公开(公告)号：US20200209606A1

公开(公告)日：2020-07-02

申请号：US16622868

申请日：2019-03-22

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Xueke Gou ,  Jing Jiang ,  Jun Hu ,  Zezhan Zhang ,  Yang Yang ,  Ying Duan ,  Congjun Wu ,  Yueming Wang

IPC: G02B21/36 ,  C23C16/52 ,  H01L21/02 ,  H01L21/67 ,  G02B21/02

Abstract: A real-time monitoring microscopic imaging system for nitride MOCVD (metal organic chemical vapor deposition) epitaxial growth mode includes an observation window, an imaging lens set, a CCD (charge coupled device) camera, an image capture card and an image storage and display device, wherein: the observation window is provided at a top portion of a graphite carrier in an MOCVD reaction chamber and is formed by a thicker quartz glass to prevent temperature in the reaction chamber from damaging the lenses. The microscopic imaging system has the resolution better than 1 μm, is able to distinguish the 2D growth mode and the 3D growth mode, observe whether the surface of the epitaxial wafer has screw dislocations in the MOCVD process, so as to observe the growth mode of the MOCVD epitaxial wafer in real time during the growth process.

公开(公告)号：US10670467B2

公开(公告)日：2020-06-02

申请号：US15865297

申请日：2018-01-09

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Jun Hu ,  Fei Wang ,  Zezhan Zhang ,  Jing Jiang ,  Jie Xiong ,  Yueming Wang ,  Tiezhong Ma ,  Dong Yan ,  Xueke Gou ,  Ting Zhou ,  Yi Niu ,  Pei Huang

IPC: G01J5/00 ,  G01K1/00 ,  G01K13/00 ,  G01J5/08 ,  G01K1/02 ,  F01D17/08

Abstract: A device for measuring surface-temperature of a turbine blade, the device including a probe having a front-end mirror for receiving infrared radiation of a surface on the blade, a collimation lens for refracted the infrared radiation, a PD detector to receive the infrared radiation, and a focal-length servo; and a radial-scanning servo connected to the probe. The front-end mirror, the collimation lens, and PD detector are disposed along the optical axis of the collimation lens. The focal-length servo is adapted to move the collimation lens along the optical axis of the collimation lens. The radial-scanning servo is adapted to move the probe along the optical axis of the collimation lens. The device of the invention is capable of accurately targeting a particular point on the blade having an irregular shape for temperature measurement to accurately detect the temperature distribution on the surface of the blade.

公开(公告)号：US10670464B2

公开(公告)日：2020-06-02

申请号：US15871033

申请日：2018-01-14

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Ying Duan ,  Jun Hu ,  Zezhan Zhang ,  Yang Yang ,  Xueke Gou ,  Fei Wang ,  Jing Jiang ,  Jinguang Lv ,  Yueming Wang ,  Hongchuan Jiang ,  Li Du ,  Jiexiong Ding ,  Jingqiu Liang ,  Xianfu Liu ,  Xiaojiang Shi ,  Bing Xiong

IPC: G01K1/00 ,  G01J5/00 ,  G01J5/52 ,  F01D17/08 ,  F01D21/00 ,  F01D17/02 ,  G01J5/06

Abstract: A method of collecting radiation information of a turbine blade, the method including: 1) collecting a radiated light from the surface of the turbine blade, analyzing the radiated light using a spectrometer to calculate compositions and corresponding concentrations of combustion gas; 2) calculating an absorption coefficient of the combustion gas at different concentrations; 3) calculating a total absorption rate of the combustion gas at different radiation wavelengths under different concentrations of component gases; 4) obtaining a relationship between the radiation and a wavelength; 5) finding at least 3 bands with a least gas absorption rate; 6) calculating a distance between a wavelength of a strongest radiation point of the turbine blade and the center wavelength, and selecting three central wavelengths closest to the wavelength with the strongest radiation; and 7) acquiring radiation data of the turbine blade in the windows obtained in 6).

公开(公告)号：US11808632B2

公开(公告)日：2023-11-07

申请号：US17387527

申请日：2021-07-28

Applicant: University of Electronic Science and Technology of China

Inventor： Chao Wang ,  Jing Jiang ,  Yi Niu ,  Anmei Qiu ,  Zezhan Zhang ,  Peifeng Yu ,  Guiyun Tian ,  Shan Gao

IPC: G01J5/00 ,  G01J5/04

CPC classification number: G01J5/0088 ,  G01J5/048 ,  F05D2260/232

Abstract: A four-shaft panoramic scanning temperature measuring device with a circulating water-cooling device is provided, which not only improves the working reliability of the probe, but also increases the overall flexibility and scanning measurement efficiency. The circulating water-cooling device is self-cooled. Compared with the conventional single-circulation water-cooling way, the design of five cooling cavities can achieve higher circulating water-cooling efficiency. The four-shaft structure includes a shaft structure for translation, a shaft structure for rotation, a shaft structure for swinging, and a shaft structure with coaxial sight pipe and light pipe. The design of the four-shaft structure is able to panoramically scan the high-temperature components inside the turbine. The temperature measuring device integrates functions of cooling, swinging, translating and rotating together, which solves problems of large size and complex control of the conventional temperature measuring device.

公开(公告)号：US20220271370A1

公开(公告)日：2022-08-25

申请号：US17741342

申请日：2022-05-10

Applicant: University of Electronic Science and Technology of China

Inventor： Chao Wang ,  Jing Jiang ,  Yi Niu ,  Xinrui He ,  Zhipeng Li ,  Fu Li ,  Pei Huang ,  Yuehai Zhang ,  Shan Gao

IPC: H01M10/6572 ,  H01L35/32 ,  H01M10/42

Abstract: An intelligent thermoelectric-battery integrated structure, which belongs to the field of new energy device, is provided. The structure intelligently controls the temperature of the single cells inside the battery pack by means of direct contact, so as to reduce the temperature and cut off the occurrence of thermal runaway from the root cause. In addition, the Seebeck voltage generated based on the temperature difference can directly store energy inside the battery when charging, and can increase the overall output voltage when discharging. The advantage of this structure solves the contradiction between the difficulty of achieving high energy density and high safety performance for traditional batteries at the same time, and provides a practical solution for the development and utilization of a new generation of high-performance batteries.

公开(公告)号：US20220260423A1

公开(公告)日：2022-08-18

申请号：US17735102

申请日：2022-05-02

Applicant: University of Electronic Science and Technology of China

Inventor： Chao Wang ,  Jing Jiang ,  Yi Niu ,  Hongzu Li ,  Zezhan Zhang ,  Lihao Yang ,  Peifeng Yu ,  Shan Gao

IPC: G01J5/00 ,  G01J5/0875 ,  G01J5/0806 ,  G01J5/0821

Abstract: An optical probe with high stability for measurement of radiation information of a turbine disk of an aeroengine includes a one-piece outer casing, a pressing ring, a sapphire window piece, an inner spacer, an outer spacer, a lens, first fixing nuts, second fixing nuts, fixing ropes and fixing screws. The one-piece outer casing is made from GH3044 solid solution strengthened nickel-based antioxidant alloy. An interior of the probe is divided into eight parts, which are as follows from a proximal hot end to a right end of the probe in sequence: a pressing ring chamber, a cold air vent, a sapphire window piece chamber, an outer spacer fixing chamber, a lens chamber, a beam chamber, a beam focusing chamber, and an optical fiber chamber.

公开(公告)号：US11340440B2

公开(公告)日：2022-05-24

申请号：US16622868

申请日：2019-03-22

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Xueke Gou ,  Jing Jiang ,  Jun Hu ,  Zezhan Zhang ,  Yang Yang ,  Ying Duan ,  Congjun Wu ,  Yueming Wang

IPC: G02B21/36 ,  G02B21/02 ,  H01L21/67 ,  G02B21/00 ,  G02B17/08 ,  G02B21/04 ,  C23C16/52 ,  H01L21/02

Abstract: A real-time monitoring microscopic imaging system for nitride MOCVD (metal organic chemical vapor deposition) epitaxial growth mode includes an observation window, an imaging lens set, a CCD (charge coupled device) camera, an image capture card and an image storage and display device, wherein: the observation window is provided at a top portion of a graphite carrier in an MOCVD reaction chamber and is formed by a thicker quartz glass to prevent temperature in the reaction chamber from damaging the lenses. The microscopic imaging system provided by the present invention has the resolution better than 1 μm, is able to distinguish the 2D growth mode and the 3D growth mode, observe whether the surface of the epitaxial wafer has screw dislocations in the MOCVD process, so as to observe the growth mode of the MOCVD epitaxial wafer in real time during the growth process.