公开(公告)号：US5196716A

公开(公告)日：1993-03-23

申请号：US702087

申请日：1991-05-17

申请人： Kazuo Moriya ,  Hideo Wada ,  Katsuyuki Hirai

发明人： Kazuo Moriya ,  Hideo Wada ,  Katsuyuki Hirai

IPC分类号： G01N21/88 ,  G01N21/00 ,  G01N21/35 ,  G01N21/3563 ,  G01N21/359 ,  G01N21/39 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66

CPC分类号： G01N21/9505 ,  G01N2021/1782 ,  G01N2021/393 ,  G01N2021/4735 ,  G01N2021/8887 ,  G01N2021/8896 ,  G01N2201/102

摘要： A method for measuring internal defects of a specimen, comprising the steps of allowing a finely focused laser beam to be incident into a specimen from its surface and observing the scattered light of the said laser beam from inside the said specimen from the surface of the specimen and in a different direction to the optical axis of incidence of the laser beam.

公开(公告)号：US5106189A

公开(公告)日：1992-04-21

申请号：US669513

申请日：1991-03-14

申请人： Kazuo Moriya ,  Susumu Taira

发明人： Kazuo Moriya ,  Susumu Taira

IPC分类号： G01N21/31 ,  G01N21/71 ,  H01F7/02

CPC分类号： G01N21/3103 ,  H01F7/0205 ,  G01N2021/3111 ,  G01N21/714

摘要： A Zeeman atomic spectrophotometer comprising a sample heating means for atomizing a sample, a means for applying a magnetic flux to the atomized sample and a ceramic film coated on at least tips of pole pieces which are disposed facing the heated sample. As the tips of the pole pieces are coated with a ceramic film, the measuring accuracy of the Zeeman atomic absorption spectrophotometer becomes high and stable over a very long term.

摘要翻译： 一种塞曼原子分光光度计，其包括用于使样品雾化的样品加热装置，用于向雾化样品施加磁通量的装置和涂覆在至少面向加热样品的极片顶端的陶瓷膜。 由于极片的尖端涂覆有陶瓷膜，因此塞曼原子吸收分光光度计的测量精度在很长的一段时间内变得高稳定。

公开(公告)号：US4179931A

公开(公告)日：1979-12-25

申请号：US942511

申请日：1978-09-15

申请人： Kazuo Moriya

发明人： Kazuo Moriya

IPC分类号： G01N33/20 ,  G01N1/10 ,  G01N1/14 ,  G01N1/12

CPC分类号： G01N1/1409 ,  Y10S73/09

摘要： Disclosed herein is a pneumatic molten metal sampler for pneumatically obtaining a sample of metal which includes an elongated fill tube which is secured to the side of a paperboard sleeve by refractory cement and projects beyond the end of the paperboard sleeve for immersion in a molten melt. A bend on the fill tube discharges into the sample cavity intermediate the ends of the cavity. A vent construction at the end of the cartridge affords communication with a vacuum pump but prevents loss of metal from the sample cavity.

摘要翻译： 本文公开了一种用于气动获得金属样品的气动熔融金属取样器，其包括细长的填充管，细长的填充管通过耐火水泥固定在纸板套筒的侧面并突出超过纸板套筒的端部以浸入熔融熔体中。 填充管上的弯曲部在腔的端部中间放出到样品腔中。 在墨盒末端的通风口结构提供与真空泵的通信，但防止金属从样品腔中损失。

公开(公告)号：US07633617B2

公开(公告)日：2009-12-15

申请号：US11883510

申请日：2006-02-03

申请人： Kazuo Moriya

发明人： Kazuo Moriya

IPC分类号： G01N15/02

CPC分类号： G01B11/0608 ,  G01N15/1463 ,  G01N21/8806 ,  G01N2015/1452 ,  H01L22/10

摘要： A defective particle measuring apparatus that irradiates focused laser light on a sample, images scattered light from the sample, and measures defective particles in the sample based on the image result, includes a position deviation computing portion which, based on an in-plane intensity distribution of scattered light of each defective particle that is imaged, obtains a deviation from a focal point position on an image point side of the scattered light of each defective particle and calculates a position deviation amount in a depth direction of the defective particle corresponding to the deviation from the focal point position, a light intensity correcting portion for correcting the light intensity of the scattered light of the defective particle corresponding to the position deviation amount in the depth direction, and a size determining portion for determining the defective particle size based on the light intensity corrected by the light intensity correcting portion. Thus, the size of the defective particles can be determined at a high precision by a simple constitution in a short time, and density distribution of the defective particles can be obtained.

摘要翻译： 一种有缺陷的粒子测量装置，其将聚焦的激光照射在样本上，对来自样品的散射光进行成像，并且基于图像结果测量样品中的有缺陷的颗粒，包括：位置偏差计算部，其基于面内强度分布 对每个有缺陷粒子的散射光的散射光进行成像，得到与各缺陷粒子的散射光的像点侧的焦点位置的偏差，并计算与该偏差对应的有缺陷粒子的深度方向的位置偏差量 从焦点位置，用于校正与深度方向上的位置偏差量相对应的有缺陷粒子的散射光的光强度的光强度校正部分和用于基于光线确定缺陷粒径的尺寸确定部分 强度由光强度校正部分校正。 因此，可以通过简单的结构在短时间内以高精度确定有缺陷的颗粒的尺寸，并且可以获得缺陷颗粒的密度分布。

公开(公告)号：US5995216A

公开(公告)日：1999-11-30

申请号：US794394

申请日：1997-02-06

申请人： Kazuo Moriya ,  Kazumi Fujimoto

发明人： Kazuo Moriya ,  Kazumi Fujimoto

IPC分类号： G01B11/24 ,  G01N21/956 ,  H01L21/60 ,  H01L21/66 ,  G01B11/02 ,  H04N7/18

CPC分类号： G01N21/95607

摘要： A pattern inspection apparatus for inspecting an abnormality in a pattern of a plurality of straight lines which are arranged in parallel in a direction perpendicular to the longitudinal direction includes a data acquisition means for acquiring, by photoelectric conversion, first and second image data of the straight lines on first and second lines which pass first and second points at different positions along the straight lines, respectively, and are perpendicular to the straight lines, and a data processing means for detecting the abnormality in the straight lines on the basis of a difference between the first and second image data. The pattern is a pattern of, e.g., inner leads of a TAB tape. When density changes of the first and second image data at a position x along the first and second lines can be approximated by sin.sup.2 x, the data processing means can detect the abnormality by using a relationship established between a phase difference and a density difference between the two changes.

摘要翻译： 用于检查在与纵向垂直的方向上平行布置的多条直线的图形异常的图案检查装置包括数据获取装置，用于通过光电转换获取直线的第一和第二图像数据 分别沿着直线在不同位置上通过第一点和第二点并垂直于直线的第一和第二线上的线，以及用于根据直线之间的差异来检测直线上的异常的数据处理装置 第一和第二图像数据。 图案是例如TAB带的内引线的图案。 当沿着第一和第二行的位置x处的第一和第二图像数据的浓度变化可以近似为sin2x时，数据处理装置可以通过使用在相位差和两者之间的浓度差之间建立的关系来检测异常 变化。

公开(公告)号：US5298963A

公开(公告)日：1994-03-29

申请号：US842073

申请日：1992-02-26

申请人： Kazuo Moriya ,  Takayuki Tsuzura

发明人： Kazuo Moriya ,  Takayuki Tsuzura

IPC分类号： G01N21/88 ,  G01N21/95

CPC分类号： G01N21/9501 ,  G01N21/8806 ,  G01N2021/8838 ,  G01N2021/8845 ,  G01N2021/8887 ,  G01N2201/0696 ,  G01N2201/103

摘要： An apparatus for inspecting the surface of a sheet-like object has a movable stage with an object mounted thereon; a source for lighting the object on the stage, particularly by making a plurality of illumination lights respectively having different wavelengths incident on the surface of the object from respective predetermined directions; image pickup device for fetching the image of the object under illumination of the light as image data or the images of parts of the object as image data obtained on the respective different wavelengths; image data processing device for inspecting the image data for defects; and a device for synchronizing control either for flashing the light at a predetermined time interval just after the stage commences its movement, synchronously with fetching the image data or for flashing the light and simultaneously fetching the image data obtained on the respective different wavelengths, synchronously with the object on the stage reaching respective predetermined positions while moving the stage.

摘要翻译： 用于检查片状物体的表面的装置具有安装在其上的物体的可移动台; 特别是通过从各个预定方向制造分别具有入射到物体表面上的不同波长的多个照明光源，用于点亮舞台上的物体的源; 图像拾取装置，用于在照明光下取出对象的图像作为图像数据或对象的部分的图像作为在各个不同波长上获得的图像数据; 图像数据处理装置，用于检查图像数据的缺陷; 以及用于同步控制的装置，用于在阶段开始其移动之后的预定时间间隔闪光，同步获取图像数据或闪烁光，同时取出在各个不同波长上获得的图像数据，与 舞台上的物体在移动舞台时达到相应的预定位置。

公开(公告)号：US4432643A

公开(公告)日：1984-02-21

申请号：US245162

申请日：1981-03-18

申请人： Hideaki Koizumi ,  Yosio Taiti ,  Kazuo Moriya ,  Katsuhito Harada ,  Kazuo Sato

发明人： Hideaki Koizumi ,  Yosio Taiti ,  Kazuo Moriya ,  Katsuhito Harada ,  Kazuo Sato

IPC分类号： G01N21/31 ,  G01N21/74

CPC分类号： G01N21/74

摘要： An apparatus for atomizing a sample comprises a cuvette of heating material into which a sample is introduced, a pair of electrodes of supplying an electric current to the cuvette, thereby heating and atomizing the sample, supports of supporting the pair of the electrodes, a means for supplying light to the atomized sample and a means of slidably maintaining at least one of the pair of the electrodes against the cuvette in a predetermined range of contact pressures, where the heating temperature of the cuvette can be maintained constant with improved reproducibility of analytical values.

摘要翻译： 用于对样品进行雾化的装置包括：向其中引入样品的加热材料的比色皿，向比色皿供应电流的一对电极，从而加热和雾化样品，支撑一对电极的支撑体， 用于向雾化样品提供光，以及在预定接触压力范围内可滑动地将一对电极中的至少一个电极抵靠反应杯的装置，其中比色杯的加热温度可以通过分析值的再现性得到改善而保持恒定 。

公开(公告)号：US4202628A

公开(公告)日：1980-05-13

申请号：US781938

申请日：1977-03-28

申请人： Hideaki Koizumi ,  Kazuo Moriya

发明人： Hideaki Koizumi ,  Kazuo Moriya

IPC分类号： G01N21/31 ,  G01N21/74 ,  G01J3/30

CPC分类号： G01N21/74 ,  G01N2021/151

摘要： A cuvette used in a flameless atomizer is hollow and includes an opening at both ends and a hole in a radial direction substantially at its central portion. The cuvette is made of a conductive material and Joule-heated by currents flowing therethrough. The interior of the cuvette is divided substantially into three sections: a sample mount section at which a sample introduced through the hole of the cuvette is disposed; a light beam path section through which light incident from the opening at one end of the cuvette passes and goes out of the opening at the other end; and an absorption cell section at which the light beam path section intersects with atomic vapors generated from the sample disposed at the sample mount section. The electric resistance of the cuvette is made smaller at the sample mount section than at a portion near the absorption cell section. This allows the higher temperature of the portions near the absorption cell section than that of the sample mount section. Therefore, almost all of the atomic vapors in the cuvette exist at the absorption cell portion, and the application of a magnetic field to the absorption cell section allows a great improvement in analysis precision and sensitivity of the flameless atomizer for atomic absorption analysis using a Zeeman effect.

摘要翻译： 在无焰雾化器中使用的比色杯是中空的，并且包括在两端的开口和在径向方向上的大致在其中心部分的孔。 试管由导电材料制成，并由流过其中的电流进行焦耳加热。 试管的内部基本上分为三个部分：样品安装部分，其中设置通过反应杯的孔引入的样品; 光束路径部分，通过所述光束路径部分从所述反应杯的一端处的所述开口入射的光在所述另一端通过并离开所述开口; 以及吸收单元部分，光束路径部分与从设置在样品安装部分处的样品产生的原子蒸汽相交。 在样品安装部分，反应杯的电阻比吸收单元部分附近的电阻小。 这允许吸收单元部分附近的部分的温度高于样品安装部分的温度。 因此，比色皿中的几乎所有的原子蒸汽都存在于吸收单元部分，并且向吸收单元部分施加磁场允许使用塞曼对无焰雾化器进行原子吸收分析的分析精度和灵敏度大大提高 影响。

公开(公告)号：US5982922A

公开(公告)日：1999-11-09

申请号：US794391

申请日：1997-02-06

申请人： Kazuo Moriya

发明人： Kazuo Moriya

IPC分类号： G01B11/24 ,  G06T7/00 ,  H01L21/60 ,  H01L21/66 ,  G06K9/00

CPC分类号： G06T7/001 ,  G06T7/0002 ,  G06T2207/30141

摘要： A pattern inspection apparatus includes a device for acquiring image data of a target inspection pattern, and an image processing unit for extracting a defect in the target inspection pattern on the basis of the image data and image data of a reference pattern. The image processing means performs image processing such that image data is prepared by reducing or increasing the pattern width of at least one of the pattern of a target inspection image represented by the image data of the target inspection pattern and the pattern of a reference image represented by the image data of the reference pattern to make the pattern width of the reference image smaller than that of the target inspection image, in this condition the target inspection image and the reference image are superposed and a portion where only the pattern of the reference image is present is extracted as a defect, image data is prepared by reducing or increasing the pattern width of at least one of the pattern of the target inspection image and the pattern of the reference image to make the pattern width of the reference image larger than that of the target inspection image, in this condition the target inspection image and the reference image are superposed and a portion where only the pattern of the target inspection image is present is extracted as a defect.

摘要翻译： 图案检查装置包括用于获取目标检查图案的图像数据的装置，以及用于基于图像数据和参考图案的图像数据提取目标检查图案中的缺陷的图像处理单元。 图像处理装置执行图像处理，使得通过减少或增加由目标检查图案的图像数据表示的目标检查图像的图案和表示的参考图像的图案中的至少一个的图案宽度来准备图像数据 通过参考图案的图像数据，使参考图像的图案宽度小于目标检查图像的图案宽度，在该条件下，将目标检查图像和参考图像重叠，并且仅将参考图像的图案 被提取为缺陷，通过减少或增加目标检查图像的图案和参考图像的图案中的至少一个的图案宽度来制作图像数据，以使参考图像的图案宽度大于该参考图像的图案宽度 的目标检查图像，在该条件下，将目标检查图像和参考图像重叠，并将其中的一部分重叠 提取目标检查图像的图案作为缺陷。

公开(公告)号：US5892241A

公开(公告)日：1999-04-06

申请号：US899119

申请日：1997-07-23

申请人： Kazuo Moriya

发明人： Kazuo Moriya

IPC分类号： G03F7/26 ,  G01N21/94 ,  G01N21/956 ,  G03F7/38 ,  H01L21/027 ,  H01L21/66 ,  G01N21/86

CPC分类号： G01N21/956

摘要： A resist scattered on and attached to unwanted portions is stably detected. A target inspection region including the unwanted portions to which the scattered resist should not be attached is illuminated with white light to obtain a color image, and a region having the same hue and chroma as a resist is detected. The target inspection region may be illuminated with light containing a first wavelength light exhibiting high reflectance for the unwanted portions and high absorbance for the resist and a second wavelength light exhibiting high reflectance for the unwanted portions and high transmittance for the resist to detect a color image obtained with the second wavelength light from the images of the target inspection region which are obtained by illumination with the illumination light. The resist attached to the unwanted portions may be detected on the basis of the contrast of the image obtained upon illumination with only the first wavelength light. The image of a resist-attached portion is extracted as a portion having lightness not more than a predetermined value from the images of the target inspection region which are obtained by illumination with the first wavelength light, and there is extracted the image of the scattered resist attached to the unwanted portions which are common to both the image of the unwanted portions having no scattered resist thereon, said image being obtained upon illumination of the target inspection region with the second wavelength light, and the image of the resist-attached portions.

摘要翻译： 稳定地检测散布在不想要的部分上并附着在不想要的部分上的抗蚀剂。 用白色光照射包括不需要附着的不需要的部分的目标检查区域以获得彩色图像，并且检测具有与抗蚀剂相同的色调和色度的区域。 目标检查区域可以用含有对于不想要的部分呈现高反射率的第一波长光和抗蚀剂的高吸光度的光和对于不期望的部分呈现高反射率的第二波长光以及抗蚀剂的高透射率来检测彩色图像 通过用照明光照射获得的来自目标检查区域的图像的第二波长光获得。 可以基于仅利用第一波长光照明时获得的图像的对比度来检测附着到不想要的部分的抗蚀剂。 抗蚀剂附着部分的图像从通过用第一波长光照射获得的目标检查区域的图像中提取为具有不大于预定值的亮度的部分，并且提取散射抗蚀剂的图像 附着到不需要的部分的不需要的部分的图像的共同的不想要的部分，所述图像是在用第二波长的光照射目标检查区域时获得的，以及抗蚀剂附着部分的图像。