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公开(公告)号：US20120279837A1
公开(公告)日：2012-11-08
申请号：US12415937
申请日：2009-03-31
CPC分类号： B81B3/0008 , B81B2201/016 , H01G5/16 , H01H59/0009 , H01H2059/0018
摘要： An electrostatically actuatable micro electromechanical device is provided with enhanced reliability and lifetime. The electrostatically actuatable micro electromechanical device comprises: a substrate, a first conductor fixed to the top layer of the substrate, forming a fixed electrode, a second conductor fixed to the top layer of the substrate, and a substrate area. The second conductor is electrically isolated from the first conductor and comprises a moveable portion, suspended at a predetermined distance above the first conductor, the moveable portion forming a moveable electrode which approaches the fixed electrode upon applying an actuation voltage between the first and second conductors. The selected substrate surface area is defined as the orthogonal projection of the moveable portion on the substrate between the first and second conductors. In the substrate surface area at least one recess is provided in at least the top layer of the substrate.
摘要翻译： 提供了一种可静电驱动的微机电装置，具有更高的可靠性和寿命。 静电致动微机电装置包括：基板，固定到基板的顶层的第一导体，形成固定电极，固定到基板的顶层的第二导体和基板区域。 所述第二导体与所述第一导体电隔离并且包括悬挂在所述第一导体上方预定距离处的可移动部分，所述可移动部分形成在所述第一和第二导体之间施加致动电压时接近所述固定电极的可移动电极。 所选择的基板表面积被定义为在第一和第二导体之间的基板上的可移动部分的正交投影。 在基板表面区域中，至少一个凹部设置在基板的至少顶层中。
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12.发明申请Method for designing a micro electromechanical device with reduced self-actuation 有权用于设计具有减少的自动致动的微机电装置的方法公开(公告)号：US20060168788A1
公开(公告)日：2006-08-03
申请号：US11317370
申请日：2005-12-23
IPC分类号： H04R17/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/40 , H01H2059/0063 , Y10T29/42 , Y10T29/435 , Y10T29/49105
摘要： A method is described for designing a micro electromechanical device in which the risk of self-actuation of the device in use is reduced. The method includes locating a first conductor in a plane and locating a second conductor with its collapsible portion at a predetermined distance above the plane. The method also includes laterally offsetting the first conductor by a predetermined distance from a region of maximum actuation liability. The region of maximum actuation liability is where an attraction force to be applied to activate the device is at a minimum.
摘要翻译： 描述了一种用于设计微机电装置的方法，其中使用中的装置的自动致动的风险降低。 该方法包括将第一导体定位在平面中并将具有其可折叠部分的第二导体定位在平面上方预定距离处。 该方法还包括将第一导体横向偏移距离最大致动责任区域预定的距离。 最大致动责任区域是要施加以激活装置的吸引力的最小值。
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公开(公告)号：US08294976B1
公开(公告)日：2012-10-23
申请号：US12415937
申请日：2009-03-31
IPC分类号： G02B26/00
CPC分类号： B81B3/0008 , B81B2201/016 , H01G5/16 , H01H59/0009 , H01H2059/0018
摘要： An electrostatically actuatable micro electromechanical device is provided with enhanced reliability and lifetime. The electrostatically actuatable micro electromechanical device comprises: a substrate, a first conductor fixed to the top layer of the substrate, forming a fixed electrode, a second conductor fixed to the top layer of the substrate, and a substrate area. The second conductor is electrically isolated from the first conductor and comprises a moveable portion, suspended at a predetermined distance above the first conductor, the moveable portion forming a moveable electrode which approaches the fixed electrode upon applying an actuation voltage between the first and second conductors. The selected substrate surface area is defined as the orthogonal projection of the moveable portion on the substrate between the first and second conductors. In the substrate surface area at least one recess is provided in at least the top layer of the substrate.
摘要翻译： 提供了一种可静电驱动的微机电装置，具有更高的可靠性和寿命。 静电致动微机电装置包括：基板，固定到基板的顶层的第一导体，形成固定电极，固定到基板的顶层的第二导体和基板区域。 所述第二导体与所述第一导体电隔离并且包括悬挂在所述第一导体上方预定距离处的可移动部分，所述可移动部分形成在所述第一和第二导体之间施加致动电压时接近所述固定电极的可移动电极。 所选择的基板表面积被定义为在第一和第二导体之间的基板上的可移动部分的正交投影。 在基板表面区域中，至少一个凹部设置在基板的至少顶层中。
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公开(公告)号：US20110210801A1
公开(公告)日：2011-09-01
申请号：US13033932
申请日：2011-02-24
IPC分类号： H03B5/30
CPC分类号： H03H9/2463 , G01K7/32 , H03H9/02377 , H03H2009/02496
摘要： A micromechanical resonator device and a method for measuring a temperature are disclosed. In one aspect, the device has a resonator body, an excitation module, a control module, and a frequency detection module. The resonator body is adapted to resonate separately in at least a first and a second predetermined resonance state, selected by applying a different bias, the states being of the same eigenmode but having a different resonance frequency, each resonance frequency having a different temperature dependence. The micromechanical resonator device may have a passive temperature compensated resonance frequency.
摘要翻译： 公开了一种微机械谐振器装置和用于测量温度的方法。 一方面，该装置具有谐振器本体，激励模块，控制模块和频率检测模块。 谐振器体适于以至少第一和第二预定谐振状态分别谐振，通过施加不同的偏压来选择，状态具有相同的本征模，但是具有不同的谐振频率，每个谐振频率具有不同的温度依赖性。 微机械谐振器装置可以具有无源温度补偿谐振频率。
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公开(公告)号：US08003537B2
公开(公告)日：2011-08-23
申请号：US11779794
申请日：2007-07-18
IPC分类号： H01L21/302
CPC分类号： B81C1/00611 , B81B2201/0271 , B81C2201/0123
摘要： A method for the production of a planar structure is disclosed. The method comprises producing on a substrate a plurality of structures of substantially equal height, and there being a space in between the plurality of structures. The method further comprises providing a fill layer of electromagnetic radiation curable material substantially filling the space between the structures. The method further comprises illuminating a portion of the fill layer with electromagnetic radiation, hereby producing a exposed portion and an unexposed portion, the portions being separated by an interface substantially parallel with the first main surface of the substrate. The method further comprises removing the portion above the interface.
摘要翻译： 公开了一种制造平面结构的方法。 该方法包括在基板上制造具有大致相同高度的多个结构，并且在多个结构之间存在空间。 该方法还包括提供基本上填充结构之间的空间的电磁辐射可固化材料的填充层。 该方法还包括用电磁辐射照射填充层的一部分，从而产生暴露部分和未曝光部分，该部分被基本平行于基底的第一主表面的界面分开。 该方法还包括去除界面上方的部分。
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公开(公告)号：US07782594B2
公开(公告)日：2010-08-24
申请号：US11893990
申请日：2007-08-17
申请人： Xavier Rottenberg
发明人： Xavier Rottenberg
IPC分类号： H01G5/01
摘要： One inventive aspect relates a variable capacitor comprising first and second electrically conductive electrodes, arranged above a support structure and spaced apart from each other and defining the capacitance of the capacitor. At least one of the electrodes comprises at least one bendable portion. The bendable portion(s) are actuated by a DC voltage difference which is applied over the electrodes to vary the capacitance. In preferred embodiments, the support structure comprises a layer of higher permittivity than the atmosphere surrounding the electrodes and the electrodes configure as an interdigitated structure upon actuation. Also disclosed is a 2-mask process for producing such capacitors.
摘要翻译： 一个发明方面涉及一种包括第一和第二导电电极的可变电容器，其布置在支撑结构上方并彼此间隔开并限定电容器的电容。 至少一个电极包括至少一个可弯曲部分。 可弯曲部分由施加在电极上以改变电容的直流电压差致动。 在优选实施例中，支撑结构包括比围绕电极的气氛更高介电常数的层，并且电极在致动时构成为交错结构。 还公开了用于制造这种电容器的2掩模工艺。
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公开(公告)号：US20090262043A1
公开(公告)日：2009-10-22
申请号：US12413432
申请日：2009-03-27
申请人： Xavier Rottenberg , Stefan Pauwen
发明人： Xavier Rottenberg , Stefan Pauwen
摘要： Systems and methods for controlling a micro electromechanical device using power actuation are disclosed. The disclosed micro electromechanical systems comprise at least one electrostatically actuatable micro electromechanical device and an actuation device. The micro electromechanical device comprises a first conductor and a second conductor having a moveable portion which in use may be attracted by the first conductor as a result of a predetermined actuation power. The actuation device comprises a high frequency signal generator for generating at least part of the actuation power by means of a predetermined high frequency signal with a frequency higher than the mechanical resonance frequency of the moveable portion of the micro electromechanical device.
摘要翻译： 公开了使用动力驱动来控制微机电装置的系统和方法。 所公开的微机电系统包括至少一个静电致动微机电装置和致动装置。 微机电装置包括第一导体和具有可移动部分的第二导体，该可移动部分在预定的致动能量的作用下可被第一导体吸引。 致动装置包括高频信号发生器，用于通过具有高于微机电装置的可移动部分的机械共振频率的预定高频信号产生至少一部分致动功率。
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18.发明授权Method for designing a micro electromechanical device with reduced self-actuation 有权用于设计具有减少的自动致动的微机电装置的方法公开(公告)号：US07439117B2
公开(公告)日：2008-10-21
申请号：US11317370
申请日：2005-12-23
IPC分类号： H01L21/336 , H01L21/8234
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/40 , H01H2059/0063 , Y10T29/42 , Y10T29/435 , Y10T29/49105
摘要： A method is described for designing a micro electromechanical device in which the risk of self-actuation of the device in use is reduced. The method includes locating a first conductor in a plane and locating a second conductor with its collapsible portion at a predetermined distance above the plane. The method also includes laterally offsetting the first conductor by a predetermined distance from a region of maximum actuation liability. The region of maximum actuation liability is where an attraction force to be applied to activate the device is at a minimum.
摘要翻译： 描述了一种用于设计微机电装置的方法，其中使用中的装置的自动致动的风险降低。 该方法包括将第一导体定位在平面中并将具有其可折叠部分的第二导体定位在平面上方预定距离处。 该方法还包括将第一导体横向偏移距离最大致动责任区域预定的距离。 最大致动责任区域是要施加以激活装置的吸引力的最小值。
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公开(公告)号：US20080038916A1
公开(公告)日：2008-02-14
申请号：US11779794
申请日：2007-07-18
IPC分类号： H01L21/4763 , H01L21/311
CPC分类号： B81C1/00611 , B81B2201/0271 , B81C2201/0123
摘要： A method for the production of a planar structure is disclosed. The method comprises producing on a substrate a plurality of structures of substantially equal height, and there being a space in between the plurality of structures. The method further comprises providing a fill layer of electromagnetic radiation curable material substantially filling the space between the structures. The method further comprises illuminating a portion of the fill layer with electromagnetic radiation, hereby producing a exposed portion and an unexposed portion, the portions being separated by an interface substantially parallel with the first main surface of the substrate. The method further comprises removing the portion above the interface.
摘要翻译： 公开了一种制造平面结构的方法。 该方法包括在基板上制造具有大致相同高度的多个结构，并且在多个结构之间存在空间。 该方法还包括提供基本上填充结构之间的空间的电磁辐射可固化材料的填充层。 该方法还包括用电磁辐射照射填充层的一部分，从而产生暴露部分和未曝光部分，该部分被基本平行于基底的第一主表面的界面分开。 该方法还包括去除界面上方的部分。
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