公开(公告)号：US08901522B2

公开(公告)日：2014-12-02

申请号：US13196311

申请日：2011-08-02

申请人： Yoshifumi Ueno ,  Shinji Nagai ,  Osamu Wakabayashi

发明人： Yoshifumi Ueno ,  Shinji Nagai ,  Osamu Wakabayashi

IPC分类号： H05G2/00 ,  G21K5/00 ,  G03F7/20

CPC分类号： H05G2/003 ,  G03F7/70033 ,  G03F7/70916 ,  H05G2/008

摘要： A chamber apparatus used with a laser apparatus may include: a chamber provided with at least one inlet through which a laser beam outputted from the laser apparatus enters the chamber; a target supply unit provided to the chamber for supplying a target material to a predetermined region inside the chamber; a magnetic field generation unit for generating a magnetic field in the predetermined region; and a charged particle collection unit disposed in a direction of a magnetic flux of the magnetic field for collecting a charged particle thereinto, the charged particle being generated when the target material is irradiated with the laser beam inside the chamber and traveling along the magnetic flux.

摘要翻译： 与激光装置一起使用的室装置可以包括：设置有至少一个入口的室，从激光装置输出的激光束通过该入口进入室; 目标供给单元，其设置在所述室中，用于将目标材料供应到所述室内的预定区域; 用于在预定区域中产生磁场的磁场产生单元; 以及带电粒子收集单元，其设置在所述磁场的磁通方向上，用于收集带电粒子，所述带电粒子是当所述靶材料被所述腔室内的所述激光束照射并且沿着所述磁通量行进时产生的。

公开(公告)号：US20140097461A1

公开(公告)日：2014-04-10

申请号：US14123534

申请日：2012-07-05

申请人： Yasushi Ito ,  Yoshifumi Ueno ,  Hirofumi Tani

发明人： Yasushi Ito ,  Yoshifumi Ueno ,  Hirofumi Tani

IPC分类号： H01L33/50 ,  C09K11/02

CPC分类号： H01L33/502 ,  C08L53/025 ,  C09K11/02 ,  C09K11/025 ,  C09K11/7731 ,  H01L33/501 ,  H01L33/505 ,  Y10T428/31692 ,  Y10T428/31855

摘要： A phosphor sheet-forming resin composition uses a low-cost resin material having high light fastness and low visible light absorption and is capable of providing a phosphor sheet at low cost with deterioration of a phosphor due to moisture being suppressed. The phosphor sheet-forming resin composition contains a film-forming resin composition and a powdery phosphor that emits fluorescence when irradiated with excitation light. The film-forming resin composition contains a hydrogenated styrene-based copolymer, and uses a sulfide-based phosphor as the phosphor. Examples of the hydrogenated styrene-based copolymer include hydrogenated products of styrene-ethylene-butylene-styrene block copolymers. CaS:Eu is used as a preferred sulfide-based phosphor.

摘要翻译： 荧光体片状树脂组合物使用具有高耐光性和低可见光吸收性的低成本树脂材料，并且能够以低成本提供荧光体片材，由于抑制了水分而使荧光体劣化。 荧光体片状树脂组合物含有成膜树脂组合物和当用激发光照射时发出荧光的粉状磷光体。 成膜树脂组合物含有氢化苯乙烯系共聚物，使用硫化物系荧光体作为荧光体。 氢化苯乙烯类共聚物的实例包括苯乙烯 - 乙烯 - 丁烯 - 苯乙烯嵌段共聚物的氢化产物。 CaS：Eu用作优选的硫化物系荧光体。

公开(公告)号：US20140029238A1

公开(公告)日：2014-01-30

申请号：US14110796

申请日：2012-07-05

申请人： Yasushi Ito ,  Yoshifumi Ueno ,  Hirofumi Tani ,  Tomomitsu Hori

发明人： Yasushi Ito ,  Yoshifumi Ueno ,  Hirofumi Tani ,  Tomomitsu Hori

IPC分类号： F21V9/00 ,  F21V9/16

摘要： Provided is an illumination device that can be made thin and increases the efficiency of extracting light to the outside. The present invention is provided with: light-emitting structures wherein a blue light-emitting element is embedded in a transparent resin having a convex surface shape; a substrate wherein the light-emitting structures are disposed two-dimensionally; a diffuser plate that diffuses the blue light of the blue light-emitting elements; and a fluorescent sheet that is disposed spaced from the substrate and that contains a particulate fluorescent body that obtains a white light from the blue light of the blue light-emitting elements.

摘要翻译： 本发明提供一种能够变薄的照明装置，提高向外部提取光的效率。 本发明提供：发光结构，其中蓝色发光元件嵌入具有凸表面形状的透明树脂中; 基板，其中所述发光结构被二维地设置; 漫射板，其漫射蓝色发光元件的蓝色光; 以及荧光片，其与所述基板间隔开并且包含从蓝色发光元件的蓝色光获得白光的微粒荧光体。

公开(公告)号：US08471226B2

公开(公告)日：2013-06-25

申请号：US12547896

申请日：2009-08-26

申请人： Hiroshi Komori ,  Tatsuya Yanagida ,  Yoshifumi Ueno ,  Akira Sumitani ,  Akira Endo ,  Tsukasa Hori

发明人： Hiroshi Komori ,  Tatsuya Yanagida ,  Yoshifumi Ueno ,  Akira Sumitani ,  Akira Endo ,  Tsukasa Hori

IPC分类号： A61N5/06

CPC分类号： G21K5/00 ,  G03F7/70033 ,  G03F7/70916 ,  H05G2/003 ,  H05G2/005 ,  H05G2/008

摘要： An EUV (Extreme Ultra Violet) light source device ionizes a target material in an ionizer, and supplies the ionized target material to a point of generating a plasma. This reduces the generation of debris. The ionizer simultaneously irradiates laser beams of plural wavelengths corresponding to the excited level of tin on a target material to ionize the target material. The ionized target material is extracted from the ionizer with a high voltage applied from an ion beam extractor, and accelerated and supplied to a plasma generation chamber. When driver laser beam is irradiated on the ionized target material, a plasma is generated, thereby emitting EUV radiation.

摘要翻译： EUV（Extreme Ultra Violet）光源装置将离子发生器中的目标材料离子化，并将电离靶材材料提供到产生等离子体的点。 这减少了碎片的产生。 离子发生器同时将与激发的锡水平相对应的多个波长的激光束照射在目标材料上以电离目标材料。 电离目标材料从离子束提取器施加的高电压从电离器中提取，并被加速并提供给等离子体产生室。 当驱动激光束照射在电离靶材上时，产生等离子体，从而发射EUV辐射。

公开(公告)号：US08256441B2

公开(公告)日：2012-09-04

申请号：US12148969

申请日：2008-04-24

申请人： Masato Moriya ,  Yoshifumi Ueno ,  Tamotsu Abe ,  Akira Sumitani

发明人： Masato Moriya ,  Yoshifumi Ueno ,  Tamotsu Abe ,  Akira Sumitani

IPC分类号： B08B3/00 ,  B08B3/12 ,  B08B6/00 ,  A61N5/06 ,  G01J3/10 ,  H05G2/00

CPC分类号： H05G2/001 ,  G03F7/70033 ,  H05G2/005

摘要： A method for cleaning an optical element of an extreme ultraviolet light source device for removing, from the optical element in a chamber, scattered matter generated together with extreme ultraviolet light by plasma formed through laser beam excitation of a target in the chamber, the method which comprises: making the scattered matter generated by the plasma no larger than nanosize by using solid tin as the target and using a CO2 laser as an excitation source of the solid tin; and imparting, to the scattered matter no larger than the nanosize adhered to the optical element, an effect of overcoming the adherence of the scattered matter.

摘要翻译： 一种用于清除极紫外光源装置的光学元件的方法，用于从腔室中的光学元件除去通过室中的靶的激光束激发而形成的等离子体与极紫外光一起产生的散射物质， 包括：通过使用固体锡作为目标并使用CO 2激光器作为固体锡的激发源，使由等离子体产生的散射物质不大于纳米尺寸; 并且对不大于粘附到光学元件的纳米尺度的散射物质赋予克服散射物质的粘附的效果。

公开(公告)号：US08164076B2

公开(公告)日：2012-04-24

申请号：US12569194

申请日：2009-09-29

申请人： Akira Endo ,  Yoshifumi Ueno ,  Youichi Sasaki ,  Osamu Wakabayashi

发明人： Akira Endo ,  Yoshifumi Ueno ,  Youichi Sasaki ,  Osamu Wakabayashi

IPC分类号： H05G2/00

CPC分类号： G21K5/00 ,  G03F7/70033 ,  H05G2/00 ,  H05G2/003 ,  H05G2/008

摘要： An extreme ultraviolet light source apparatus, which is to generate an extreme ultraviolet light by irradiating a target with a main pulse laser light after irradiating the target with a prepulse laser light, the extreme ultraviolet light source apparatus comprises: a prepulse laser light source generating a pre-plasma by irradiating the target with the prepulse laser light while a part of the target remains, the pre-plasma being generated at a different region from a target region, the different region being located on an incident side of the prepulse laser light; and a main pulse laser light source generating the extreme ultraviolet light by irradiating the pre-plasma with the main pulse laser light.

摘要翻译： 一种极紫外光源装置，其特征在于，所述极紫外光源装置包括：前脉冲激光光源，其产生前脉冲激光光源，所述极紫外光源装置包括：前脉冲激光光源，其通过用前脉冲激光照射所述靶之后用主脉冲激光照射靶， 在一部分目标物保留的同时用前脉冲激光照射靶的预等离子体，在与目标区域不同的区域产生预等离子体，不同的区域位于预激光激光的入射侧; 以及通过用主脉冲激光照射预等离子体而产生极紫外光的主脉冲激光光源。

公开(公告)号：US20110163247A1

公开(公告)日：2011-07-07

申请号：US13047131

申请日：2011-03-14

申请人： Georg SOUMAGNE ,  Yoshifumi Ueno ,  Hiroshi Komori ,  Akira Sumitani ,  Katsunobu Nishihara ,  Young Gwang Kang ,  Masanori Nunami

发明人： Georg SOUMAGNE ,  Yoshifumi Ueno ,  Hiroshi Komori ,  Akira Sumitani ,  Katsunobu Nishihara ,  Young Gwang Kang ,  Masanori Nunami

IPC分类号： G21K5/00

CPC分类号： H05G2/003 ,  G03F7/70033 ,  G03F7/70858 ,  G03F7/70916 ,  H05G2/005 ,  H05G2/008

摘要： In an extreme ultra violet light source apparatus of a laser produced plasma type, charged particles such as ions emitted from plasma are promptly ejected to the outside of a chamber. The extreme ultra violet light source apparatus includes a chamber in which extreme ultra violet light is generated, a target supply unit for supplying a target material to a predetermined position within the chamber, a driver laser for applying a laser beam to the target material supplied by the target supply unit to generate plasma, a collector mirror for collecting the extreme ultra violet light radiated from the plasma to output the extreme ultra violet light, a magnetic field forming unit for forming an asymmetric magnetic field in a generation position of the plasma by using a coil, and a charged particle collection mechanism provided on at least one of two surfaces of the chamber to which lines of magnetic force generated by the coil extend.

摘要翻译： 在激光产生的等离子体型的极紫外光源装置中，将从等离子体发射的离子等带电粒子迅速地排出到室外。 极紫外光源装置包括产生极紫外光的室，用于将目标材料供应到室内的预定位置的目标供应单元，用于将激光束施加到由 用于产生等离子体的目标供应单元，用于收集从等离子体辐射的极端紫外光以输出极紫外光的集光镜;用于在等离子体的产生位置形成非对称磁场的磁场形成单元，其通过使用 线圈和带电粒子收集机构，设置在腔室的两个表面中的至少一个上，线圈产生的磁力线延伸到该表面。

公开(公告)号：US20080197298A1

公开(公告)日：2008-08-21

申请号：US12071250

申请日：2008-02-19

申请人： Tamotsu Abe ,  Yoshifumi Ueno ,  Takayuki Yabu

发明人： Tamotsu Abe ,  Yoshifumi Ueno ,  Takayuki Yabu

IPC分类号： G01J3/10

CPC分类号： H05G2/003 ,  H05G2/005 ,  H05G2/008

摘要： In an extreme ultra violet light source apparatus having a comparatively large output power for exposing, a solid target is supplied fast and continuously while heat dissipation for irradiation of a driver laser light is performed successfully. The extreme ultra violet light source apparatus includes: a chamber in which extreme ultra violet light is generated; a target material supplying unit which coats a wire with target material, a wire supplying unit which supplies the wire coated with the target material to a predetermined position within the chamber, a driver laser which applies a laser beam onto the wire coated with the target material to generate plasma; and a collector mirror which collects the extreme ultra violet light radiated from the plasma and outputting the extreme ultra violet light.

摘要翻译： 在具有相对较大的曝光输出功率的极紫外光源装置中，能够快速，连续地供给固体靶，成功地进行用于照射驱动激光的散热。 极紫外光源装置包括：产生极紫外光的室; 将目标材料供给单元涂敷到目标材料上的导线供给单元，将涂布有目标材料的线材供给到室内的预定位置的导线供给单元，将激光束施加到涂覆有目标材料的线材上的驱动器激光器 产生等离子体; 以及收集从等离子体辐射的极紫外光并输出极紫外光的收集镜。

公开(公告)号：US06777622B2

公开(公告)日：2004-08-17

申请号：US10351725

申请日：2003-01-27

申请人： Yoshifumi Ueno ,  Yokihiro Takikawa

发明人： Yoshifumi Ueno ,  Yokihiro Takikawa

IPC分类号： H05K706

CPC分类号： H01B7/0861 ,  H05K1/0218 ,  H05K1/0393

摘要： In a flexible wiring board of the present invention, a first shield film is connected to a ground wiring at the bottom of an opening in a cover film. The first shield film is connected to a second shield film via a through-hole penetrating from the surface to the rear surface of a base film. Thus, the second shield film is connected to the ground wiring via the first shield film, whereby the wiring board can be wholly shielded.

摘要翻译： 在本发明的柔性布线基板中，第一屏蔽膜连接到覆盖膜的开口底部的接地布线。 第一屏蔽膜通过从底膜的表面贯穿到后表面的贯通孔与第二屏蔽膜连接。 因此，第二屏蔽膜通过第一屏蔽膜连接到接地布线，从而可以完全屏蔽布线板。

公开(公告)号：US09577158B2

公开(公告)日：2017-02-21

申请号：US14123534

申请日：2012-07-05

申请人： Yasushi Ito ,  Yoshifumi Ueno ,  Hirofumi Tani

发明人： Yasushi Ito ,  Yoshifumi Ueno ,  Hirofumi Tani

IPC分类号： H01L33/50 ,  C09K11/02 ,  C09K11/77 ,  C08L53/02

CPC分类号： H01L33/502 ,  C08L53/025 ,  C09K11/02 ,  C09K11/025 ,  C09K11/7731 ,  H01L33/501 ,  H01L33/505 ,  Y10T428/31692 ,  Y10T428/31855

摘要： A phosphor sheet-forming resin composition uses a low-cost resin material having high light fastness and low visible light absorption and is capable of providing a phosphor sheet at low cost with deterioration of a phosphor due to moisture being suppressed. The phosphor sheet-forming resin composition contains a film-forming resin composition and a powdery phosphor that emits fluorescence when irradiated with excitation light. The film-forming resin composition contains a hydrogenated styrene-based copolymer, and uses a sulfide-based phosphor as the phosphor. Examples of the hydrogenated styrene-based copolymer include hydrogenated products of styrene-ethylene-butylene-styrene block copolymers. CaS:Eu is used as a preferred sulfide-based phosphor.

摘要翻译： 荧光体片状树脂组合物使用具有高耐光性和低可见光吸收的低成本树脂材料，并且能够以低成本提供荧光体片材，由于抑制了水分而导致的荧光体劣化。 荧光体片状树脂组合物含有成膜树脂组合物和当用激发光照射时发出荧光的粉状磷光体。 成膜树脂组合物含有氢化苯乙烯系共聚物，使用硫化物系荧光体作为荧光体。 氢化苯乙烯类共聚物的实例包括苯乙烯 - 乙烯 - 丁烯 - 苯乙烯嵌段共聚物的氢化产物。 CaS：Eu用作优选的硫化物系荧光体。