公开(公告)号：US20140097461A1

公开(公告)日：2014-04-10

申请号：US14123534

申请日：2012-07-05

申请人： Yasushi Ito ,  Yoshifumi Ueno ,  Hirofumi Tani

发明人： Yasushi Ito ,  Yoshifumi Ueno ,  Hirofumi Tani

IPC分类号： H01L33/50 ,  C09K11/02

CPC分类号： H01L33/502 ,  C08L53/025 ,  C09K11/02 ,  C09K11/025 ,  C09K11/7731 ,  H01L33/501 ,  H01L33/505 ,  Y10T428/31692 ,  Y10T428/31855

摘要： A phosphor sheet-forming resin composition uses a low-cost resin material having high light fastness and low visible light absorption and is capable of providing a phosphor sheet at low cost with deterioration of a phosphor due to moisture being suppressed. The phosphor sheet-forming resin composition contains a film-forming resin composition and a powdery phosphor that emits fluorescence when irradiated with excitation light. The film-forming resin composition contains a hydrogenated styrene-based copolymer, and uses a sulfide-based phosphor as the phosphor. Examples of the hydrogenated styrene-based copolymer include hydrogenated products of styrene-ethylene-butylene-styrene block copolymers. CaS:Eu is used as a preferred sulfide-based phosphor.

摘要翻译： 荧光体片状树脂组合物使用具有高耐光性和低可见光吸收性的低成本树脂材料，并且能够以低成本提供荧光体片材，由于抑制了水分而使荧光体劣化。 荧光体片状树脂组合物含有成膜树脂组合物和当用激发光照射时发出荧光的粉状磷光体。 成膜树脂组合物含有氢化苯乙烯系共聚物，使用硫化物系荧光体作为荧光体。 氢化苯乙烯类共聚物的实例包括苯乙烯 - 乙烯 - 丁烯 - 苯乙烯嵌段共聚物的氢化产物。 CaS：Eu用作优选的硫化物系荧光体。

公开(公告)号：US20140029238A1

公开(公告)日：2014-01-30

申请号：US14110796

申请日：2012-07-05

申请人： Yasushi Ito ,  Yoshifumi Ueno ,  Hirofumi Tani ,  Tomomitsu Hori

发明人： Yasushi Ito ,  Yoshifumi Ueno ,  Hirofumi Tani ,  Tomomitsu Hori

IPC分类号： F21V9/00 ,  F21V9/16

摘要： Provided is an illumination device that can be made thin and increases the efficiency of extracting light to the outside. The present invention is provided with: light-emitting structures wherein a blue light-emitting element is embedded in a transparent resin having a convex surface shape; a substrate wherein the light-emitting structures are disposed two-dimensionally; a diffuser plate that diffuses the blue light of the blue light-emitting elements; and a fluorescent sheet that is disposed spaced from the substrate and that contains a particulate fluorescent body that obtains a white light from the blue light of the blue light-emitting elements.

摘要翻译： 本发明提供一种能够变薄的照明装置，提高向外部提取光的效率。 本发明提供：发光结构，其中蓝色发光元件嵌入具有凸表面形状的透明树脂中; 基板，其中所述发光结构被二维地设置; 漫射板，其漫射蓝色发光元件的蓝色光; 以及荧光片，其与所述基板间隔开并且包含从蓝色发光元件的蓝色光获得白光的微粒荧光体。

公开(公告)号：US09577158B2

公开(公告)日：2017-02-21

申请号：US14123534

申请日：2012-07-05

申请人： Yasushi Ito ,  Yoshifumi Ueno ,  Hirofumi Tani

发明人： Yasushi Ito ,  Yoshifumi Ueno ,  Hirofumi Tani

IPC分类号： H01L33/50 ,  C09K11/02 ,  C09K11/77 ,  C08L53/02

CPC分类号： H01L33/502 ,  C08L53/025 ,  C09K11/02 ,  C09K11/025 ,  C09K11/7731 ,  H01L33/501 ,  H01L33/505 ,  Y10T428/31692 ,  Y10T428/31855

摘要： A phosphor sheet-forming resin composition uses a low-cost resin material having high light fastness and low visible light absorption and is capable of providing a phosphor sheet at low cost with deterioration of a phosphor due to moisture being suppressed. The phosphor sheet-forming resin composition contains a film-forming resin composition and a powdery phosphor that emits fluorescence when irradiated with excitation light. The film-forming resin composition contains a hydrogenated styrene-based copolymer, and uses a sulfide-based phosphor as the phosphor. Examples of the hydrogenated styrene-based copolymer include hydrogenated products of styrene-ethylene-butylene-styrene block copolymers. CaS:Eu is used as a preferred sulfide-based phosphor.

摘要翻译： 荧光体片状树脂组合物使用具有高耐光性和低可见光吸收的低成本树脂材料，并且能够以低成本提供荧光体片材，由于抑制了水分而导致的荧光体劣化。 荧光体片状树脂组合物含有成膜树脂组合物和当用激发光照射时发出荧光的粉状磷光体。 成膜树脂组合物含有氢化苯乙烯系共聚物，使用硫化物系荧光体作为荧光体。 氢化苯乙烯类共聚物的实例包括苯乙烯 - 乙烯 - 丁烯 - 苯乙烯嵌段共聚物的氢化产物。 CaS：Eu用作优选的硫化物系荧光体。

公开(公告)号：US20140124813A1

公开(公告)日：2014-05-08

申请号：US14123601

申请日：2012-07-05

申请人： Yasushi Ito ,  Yoshifumi Ueno ,  Hirofumi Tani

发明人： Yasushi Ito ,  Yoshifumi Ueno ,  Hirofumi Tani

IPC分类号： H01L33/50

CPC分类号： H01L33/504 ,  B32B7/12 ,  B32B27/08 ,  B32B27/20 ,  B32B27/32 ,  B32B2307/404 ,  B32B2307/412 ,  C08L53/025 ,  C09J153/025 ,  C09K11/02 ,  C09K11/0883 ,  C09K11/7731 ,  C09K11/7734 ,  H01L33/505 ,  Y10T428/31938

摘要： A phosphor sheet-forming resin composition uses a low-cost resin material having high light fastness and low visible light absorption and is capable of providing a phosphor sheet at low cost with deterioration of a phosphor due to moisture being suppressed. The resin composition contains a film-forming resin composition and a powdery phosphor that emits fluorescence when irradiated with excitation light. The film-forming resin composition used contains a polyolefin copolymer component and a maleic anhydride component. A sulfurized phosphor, an oxide-based phosphor, or a phosphor mixture thereof is preferably used as the phosphor.

摘要翻译： 荧光体片状树脂组合物使用具有高耐光性和低可见光吸收性的低成本树脂材料，并且能够以低成本提供荧光体片材，由于抑制了水分而使荧光体劣化。 树脂组合物含有成膜树脂组合物和用激发光照射时发出荧光的粉状磷光体。 所用的成膜树脂组合物含有聚烯烃共聚物组分和马来酸酐组分。 作为荧光体，优选使用硫化荧光体，氧化物系荧光体或荧光体混合物。

公开(公告)号：US10415793B2

公开(公告)日：2019-09-17

申请号：US14110796

申请日：2012-07-05

申请人： Yasushi Ito ,  Yoshifumi Ueno ,  Hirofumi Tani ,  Tomomitsu Hori

发明人： Yasushi Ito ,  Yoshifumi Ueno ,  Hirofumi Tani ,  Tomomitsu Hori

IPC分类号： F21V9/00 ,  G02F1/1335 ,  H01L33/50 ,  F21V9/32 ,  F21Y113/17 ,  H01L25/075 ,  H01L33/48 ,  H01L33/54

摘要： Provided is an illumination device that can be made thin and increases the efficiency of extracting light to the outside. The present invention is provided with: light-emitting structures wherein a blue light-emitting element is embedded in a transparent resin having a convex surface shape; a substrate wherein the light-emitting structures are disposed two-dimensionally; a diffuser plate that diffuses the blue light of the blue light-emitting elements; and a fluorescent sheet that is disposed spaced from the substrate and that contains a particulate fluorescent body that obtains a white light from the blue light of the blue light-emitting elements.

公开(公告)号：US08492738B2

公开(公告)日：2013-07-23

申请号：US13465108

申请日：2012-05-07

申请人： Yoshifumi Ueno ,  Osamu Wakabayashi ,  Tamotsu Abe ,  Akira Sumitani ,  Hideo Hoshino ,  Akira Endo ,  Georg Soumagne

发明人： Yoshifumi Ueno ,  Osamu Wakabayashi ,  Tamotsu Abe ,  Akira Sumitani ,  Hideo Hoshino ,  Akira Endo ,  Georg Soumagne

IPC分类号： H01J1/50

CPC分类号： H05G2/003 ,  G03F7/70033 ,  G03F7/70858 ,  G03F7/70916 ,  G03F7/70983 ,  G21K1/093 ,  G21K2201/00 ,  H05G2/005 ,  H05G2/008

摘要： An ion withdrawal apparatus that withdraws ions emitted from a plasma in an EUV light production apparatus in which a target at an EUV light production point is irradiated with laser light to be made in a plasma state and the target emits EUV light, the ion withdrawal apparatus which includes: a collector mirror that is disposed in a direction opposite to a laser light incidence direction to collect the EUV light and has a hole for the ions to pass therethrough; magnetic line of force production means that produces a magnetic line of force that is parallel or approximately parallel to the laser light incidence direction at or in the vicinity of the EUV light production point; and ion withdrawal means that is disposed on the opposite side of the collector mirror from the EUV light production point and withdraws the ions.

摘要翻译： 一种离子提取装置，其在EUV光产生装置中从在等离子体状态的激光照射EUV光产生点的靶，并且靶射出EUV光的EUV光产生装置中，从等离子体发射的离子， 其包括：收集器反射镜，其设置在与激光入射方向相反的方向上以收集EUV光，并具有用于离子通过的孔; 磁力线产生装置意味着产生在EUV光产生点处或附近平行或近似平行于激光入射方向的磁力线; 以及离开收集反射镜与EUV光产生点相反的一侧的离子提取装置，并且离子退出。

公开(公告)号：US08354657B2

公开(公告)日：2013-01-15

申请号：US13047131

申请日：2011-03-14

申请人： Georg Soumagne ,  Yoshifumi Ueno ,  Hiroshi Komori ,  Akira Sumitani ,  Katsunobu Nishihara ,  Young Gwang Kang ,  Masanori Nunami

发明人： Georg Soumagne ,  Yoshifumi Ueno ,  Hiroshi Komori ,  Akira Sumitani ,  Katsunobu Nishihara ,  Young Gwang Kang ,  Masanori Nunami

IPC分类号： A61N5/06 ,  G01J3/10

CPC分类号： H05G2/003 ,  G03F7/70033 ,  G03F7/70858 ,  G03F7/70916 ,  H05G2/005 ,  H05G2/008

摘要： In an extreme ultra violet light source apparatus of a laser produced plasma type, charged particles such as ions emitted from plasma are promptly ejected to the outside of a chamber. The apparatus includes a chamber, a target supply unit for supplying a target material into the chamber, a collector mirror for collecting extreme ultra violet light radiated from plasma generated by irradiating the target material with a laser beam to output the extreme ultra violet light, an electromagnet arranged outside of the chamber, and a charged particle collection mechanism provided on at least one of two surfaces of the chamber to which lines of magnetic force generated by the electromagnet extend.

摘要翻译： 在激光产生的等离子体型的极紫外光源装置中，将从等离子体发射的离子等带电粒子迅速地排出到室外。 该装置包括：室，用于将目标材料供应到室中的目标供应单元，用于收集由用激光束照射目标材料而产生的等离子体辐射的极紫外光以输出极紫外光的集光镜; 设置在室外的电磁体，以及设置在室的两个表面中的至少一个表面上的电荷粒子收集机构，由电磁体产生的磁力线延伸。

公开(公告)号：US20110101863A1

公开(公告)日：2011-05-05

申请号：US12547896

申请日：2009-08-26

申请人： Hiroshi Komori ,  Tatsuya Yanagida ,  Yoshifumi Ueno ,  Akira Sumitani ,  Akira Endo ,  Tsukasa Hori

发明人： Hiroshi Komori ,  Tatsuya Yanagida ,  Yoshifumi Ueno ,  Akira Sumitani ,  Akira Endo ,  Tsukasa Hori

IPC分类号： H01J7/00

CPC分类号： G21K5/00 ,  G03F7/70033 ,  G03F7/70916 ,  H05G2/003 ,  H05G2/005 ,  H05G2/008

摘要： An EUV (Extreme Ultra Violet) light source device ionizes a target material in an ionizer, and supplies the ionized target material to a point of generating a plasma. This reduces the generation of debris. The ionizer simultaneously irradiates laser beams of plural wavelengths corresponding to the excited level of tin on a target material to ionize the target material. The ionized target material is extracted from the ionizer with a high voltage applied from an ion beam extractor, and accelerated and supplied to a plasma generation chamber. When driver laser beam is irradiated on the ionized target material, a plasma is generated, thereby emitting EUV radiation.

摘要翻译： EUV（Extreme Ultra Violet）光源装置将离子发生器中的目标材料离子化，并将电离靶材材料提供到产生等离子体的点。 这减少了碎片的产生。 离子发生器同时将与激发的锡水平相对应的多个波长的激光束照射在目标材料上以电离目标材料。 电离目标材料从离子束提取器施加的高电压从电离器中提取，并被加速并提供给等离子体产生室。 当驱动激光束照射在电离靶材上时，产生等离子体，从而发射EUV辐射。

公开(公告)号：US07928418B2

公开(公告)日：2011-04-19

申请号：US12385569

申请日：2009-04-13

申请人： Georg Soumagne ,  Yoshifumi Ueno ,  Hiroshi Komori ,  Akira Sumitani ,  Katsunobu Nishihara ,  Young Gwang Kang ,  Masanori Nunami

发明人： Georg Soumagne ,  Yoshifumi Ueno ,  Hiroshi Komori ,  Akira Sumitani ,  Katsunobu Nishihara ,  Young Gwang Kang ,  Masanori Nunami

IPC分类号： A61N5/06 ,  G01J3/10 ,  H05G2/00

CPC分类号： H05G2/003 ,  G03F7/70033 ,  G03F7/70858 ,  G03F7/70916 ,  H05G2/005 ,  H05G2/008

摘要： In an extreme ultra violet light source apparatus of a laser produced plasma type, charged particles such as ions emitted from plasma are promptly ejected to the outside of a chamber. The extreme ultra violet light source apparatus includes a chamber in which extreme ultra violet light is generated, a target supply unit for supplying a target material to a predetermined position within the chamber, a driver laser for applying a laser beam to the target material supplied by the target supply unit to generate plasma, a collector mirror for collecting the extreme ultra violet light radiated from the plasma to output the extreme ultra violet light, a magnetic field forming unit for forming an asymmetric magnetic field in a generation position of the plasma by using a coil, and a charged particle collection mechanism provided on at least one of two surfaces of the chamber to which lines of magnetic force generated by the coil extend.

摘要翻译： 在激光产生的等离子体型的极紫外光源装置中，将从等离子体发射的离子等带电粒子迅速地排出到室外。 极紫外光源装置包括产生极紫外光的室，用于将目标材料供应到室内的预定位置的目标供应单元，用于将激光束施加到由 用于产生等离子体的目标供应单元，用于收集从等离子体辐射的极端紫外光以输出极紫外光的集光镜;用于在等离子体的产生位置形成非对称磁场的磁场形成单元，其通过使用 线圈和带电粒子收集机构，设置在腔室的两个表面中的至少一个上，线圈产生的磁力线延伸到该表面。

公开(公告)号：US07915600B2

公开(公告)日：2011-03-29

申请号：US11870020

申请日：2007-10-10

申请人： Yoshifumi Ueno ,  Georg Soumagne ,  Akira Sumitani ,  Osamu Wakabayashi

发明人： Yoshifumi Ueno ,  Georg Soumagne ,  Akira Sumitani ,  Osamu Wakabayashi

IPC分类号： G01J1/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033

摘要： An extreme ultra violet light source apparatus has a relatively high output for exposure and suppresses the production of debris as much as possible instead of disposing of debris that has been produced. The extreme ultra violet light source apparatus includes: a chamber in which extreme ultra violet light is generated; a target supply unit for supplying solid tin or lithium as a target to a predetermined position within the chamber; a CO2 laser for applying a laser beam based on pulse operation to the target supplied by the target supply unit so as to generate plasma; and a collector mirror having a multilayer film on a reflecting surface thereof, for collecting the extreme ultra violet light radiated from the plasma to output the extreme ultra violet light.

摘要翻译： 极紫外光源装置具有相对较高的曝光输出，尽可能地抑制碎片的产生，而不是处理已经产生的碎片。 极紫外光源装置包括：产生极紫外光的室; 用于将固体锡或锂作为目标供应到所述室内的预定位置的目标供应单元; 用于将基于脉冲操作的激光束施加到由目标供给单元提供的目标以产生等离子体的CO 2激光器; 以及在其反射表面上具有多层膜的收集器反射镜，用于收集从等离子体辐射的极紫外光以输出极紫外光。