公开(公告)号：US09863841B2

公开(公告)日：2018-01-09

申请号：US14986560

申请日：2015-12-31

Applicant: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences

Inventor： Xiangzhao Wang ,  Feng Tang ,  Guoxian Zhang ,  Shifu Xu

IPC: G01M11/02 ,  G03F7/20 ,  G01J9/02

CPC classification number: G01M11/0271 ,  G01J9/0215 ,  G01J2009/0223 ,  G01J2009/0226 ,  G01J2009/0265 ,  G03F7/706

Abstract: A point diffraction interferometric wavefront aberration measuring device comprising an optical source, an optical splitter, a first light intensity and polarization regulator, a phase shifter, a second light intensity and polarization regulator, an ideal wavefront generator, an object precision adjusting stage, a measured optical system, an image wavefront detection unit, an image precision adjusting stage, and a data processing unit. The center distance between the first output port and the second output port of the ideal wavefront generator is smaller than the diameter of the isoplanatic region of the measured optical system and is greater than the ratio of the diameter of the image point dispersion speckle of the measured optical system over the amplification factor thereof. A method for detecting wavefront aberration of the optical system is also provided by using the device.

公开(公告)号：US20070206201A1

公开(公告)日：2007-09-06

申请号：US11680968

申请日：2007-03-01

Applicant: Peter de Groot ,  Leslie Deck

Inventor： Peter de Groot ,  Leslie Deck

IPC: G01B11/02

CPC classification number: G01B9/02011 ,  G01B9/02002 ,  G01B9/02004 ,  G01B9/02007 ,  G01B9/02012 ,  G01B9/02057 ,  G01B2290/45 ,  G01B2290/70 ,  G01J2009/0234 ,  G01J2009/0265

Abstract: An interferometer system is disclosed which is configured to combine measurement light with reference light to form an optical interference pattern, where the interferometer system includes a modulator configured to repetitively introduce a sequence of phase shifts between the measurement and reference light; and a camera system positioned to measure the optical interference pattern, where the camera system is configured to separately accumulate time-integrated images of the optical interference pattern corresponding to the different phase shifts in the sequence during the repetitions of the sequence.

Abstract translation: 公开了一种干涉仪系统，其被配置为将测量光与参考光结合以形成光学干涉图案，其中所述干涉仪系统包括被配置为在所述测量参考光和所述参考光之间重复地引入相移序列的调制器; 以及定位成测量光学干涉图案的相机系统，其中相机系统被配置为在序列的重复期间分别累积对应于序列中的不同相移的光学干涉图案的时间集成图像。

公开(公告)号：US07050174B2

公开(公告)日：2006-05-23

申请号：US11146576

申请日：2005-06-06

Applicant: Vance A. Deason ,  Kenneth L. Telschow

Inventor： Vance A. Deason ,  Kenneth L. Telschow

IPC: G01B9/02

CPC classification number: G01H9/002 ,  G01B9/04 ,  G01H9/00 ,  G01J2009/0265

Abstract: An imaging system includes: an object wavefront source and an optical microscope objective all positioned to direct an object wavefront onto an area of a vibrating subject surface encompassed by a field of view of the microscope objective, and to direct a modulated object wavefront reflected from the encompassed surface area through a photorefractive material; and a reference wavefront source and at least one phase modulator all positioned to direct a reference wavefront through the phase modulator and to direct a modulated reference wavefront from the phase modulator through the photorefractive material to interfere with the modulated object wavefront. The photorefractive material has a composition and a position such that interference of the modulated object wavefront and modulated reference wavefront occurs within the photorefractive material, providing a full-field, real-time image signal of the encompassed surface area.

Abstract translation: 一种成像系统包括：物体波前源和光学显微镜物镜，其全部定位成将物体波前引导到由显微镜物镜的视场所包围的振动对象表面的区域上，并且引导从 通过光折射材料包围的表面积; 以及参考波前源和至少一个相位调制器，其全部定位成将参考波前引导通过相位调制器，并且通过光折射材料引导来自相位调制器的调制参考波阵面以干扰调制对象波前。 光折射材料具有组成和位置，使得调制对象波前和调制参考波阵面的干涉发生在光折射材料内，从而提供包围的表面区域的全场实时图像信号。

公开(公告)号：US07006234B1

公开(公告)日：2006-02-28

申请号：US10888465

申请日：2004-07-09

Applicant: William Jude Cottrell ,  Thomas George Ference

Inventor： William Jude Cottrell ,  Thomas George Ference

IPC: G01B9/02

CPC classification number: G01B9/02024 ,  G01B9/02057 ,  G01B2290/70 ,  G01J9/02 ,  G01J2009/0223 ,  G01J2009/0265

Abstract: A common-path, point-diffraction, phase-shifting interferometer uses a half wave plate having a diffractive element, such as pin hole. A coherent, polarized light source simultaneously generates a reference beam from the diffractive element and an object beam from remaining portions of the light going through the half wave plate. The reference beam has a nearly spherical wavefront. Each of the two beams possesses a different polarization state. The object and reference beams are then independently phase modulated by a polarization sensitive phase modulator that shifts phase an amount depending on applied voltage and depending on polarization state of the incident light. A polarizer is then used to provide the object and reference beams in the same polarization state with equal intensities so they can interfere to create an interferogram with near unity contrast.

Abstract translation: 公共路径，点衍射，相移干涉仪使用具有诸如针孔的衍射元件的半波片。 相干偏振光源同时从衍射元件产生参考光束，并且从通过半波片的光的剩余部分产生物体光束。 参考光束具有近似球面的波前。 两个光束中的每一个具有不同的偏振状态。 物体和参考光束然后通过偏振敏感相位调制器独立相位调制，偏振相位调制器根据施加的电压和取决于入射光的偏振状态移相量。 然后使用偏振器以相同的强度在相同的极化状态下提供物体和参考光束，因此它们可以干扰以产生具有近乎一致的对比度的干涉图。

公开(公告)号：US20050225773A1

公开(公告)日：2005-10-13

申请号：US11146576

申请日：2005-06-06

Applicant: Vance Deason ,  Kenneth Telschow

Inventor： Vance Deason ,  Kenneth Telschow

IPC: A61B20060101 ,  G01B9/02 ,  G01B9/04 ,  G01B11/02 ,  G01H9/00 ,  G01J9/02

CPC classification number: G01H9/002 ,  G01B9/04 ,  G01H9/00 ,  G01J2009/0265

Abstract: An imaging system includes: an object wavefront source and an optical microscope objective all positioned to direct an object wavefront onto an area of a vibrating subject surface encompassed by a field of view of the microscope objective, and to direct a modulated object wavefront reflected from the encompassed surface area through a photorefractive material; and a reference wavefront source and at least one phase modulator all positioned to direct a reference wavefront through the phase modulator and to direct a modulated reference wavefront from the phase modulator through the photorefractive material to interfere with the modulated object wavefront. The photorefractive material has a composition and a position such that interference of the modulated object wavefront and modulated reference wavefront occurs within the photorefractive material, providing a full-field, real-time image signal of the encompassed surface area.

Abstract translation: 一种成像系统包括：物体波前源和光学显微镜物镜，其全部定位成将物体波前引导到由显微镜物镜的视场所包围的振动对象表面的区域上，并且引导从 通过光折射材料包围的表面积; 以及参考波前源和至少一个相位调制器，所述至少一个相位调制器全部定位成将参考波前引导通过相位调制器并且通过光折射材料引导来自相位调制器的调制参考波阵面以干扰调制对象波前。 光折射材料具有组成和位置，使得调制对象波前和调制参考波阵面的干涉发生在光折射材料内，从而提供包围的表面区域的全场实时图像信号。