摘要:
A method and device for passivating the resonator end faces, in particular the cleaved edges of semiconductor laser diodes, by high-temperature epitaxy of the quaternary compound semiconductor InxGa1-xAsyP1-y, where (0≦x≦1 and 0≦y≦1). To passivate the InxGa1-xAsyP1-y, an additional passivation layer may be applied in situ. The semiconductor crystal is brought to the temperature required for the epitaxy by being heated. To avoid thermal destruction of the contact metal during the epitaxy, the metal is only deposited after the cleaving operation and the passivation. The deposition of the metal on the passivated laser bar is carried out by means of special equipment that allows deposition of metal on the entire surface of the laser and at the same time prevents vapour deposition on the cleaved edges. The method and device can be applied to the production of high-power laser diodes.
摘要翻译:通过四元化合物半导体的高温外延钝化谐振器端面,特别是半导体激光二极管的切割边缘的方法和装置。 其中(0 <= x <= 1且0 <= y <= 1)。 为了使钝化层钝化,可以将附加的钝化层(例如, 原位应用 通过加热使半导体晶体达到外延所需的温度。 为了在外延期间避免接触金属的热破坏,金属仅在分裂操作和钝化之后沉积。 金属在钝化激光棒上的沉积是通过特殊的设备进行的,这些设备允许金属沉积在激光的整个表面上,同时防止在切割边缘上的气相沉积。 该方法和装置可应用于大功率激光二极管的生产。
摘要:
The present invention relates to a nitride semiconductor laser device provided with a window layer on a light-emitting end face of the resonator which comprises an active layer of nitride semiconductor between the n-type nitride semiconductor layers and the p-type nitride semiconductor layers, in which at least the radiation-emitting end face of said resonator is covered by said window layer comprising monocrystalline nitride of general formula AlxGa1−x−yINyN, where 0≦x+y≦1, 0≦x≦1 and 0≦y
摘要翻译:本发明涉及在谐振器的发光端面上设置有窗口层的氮化物半导体激光器件,其包括n型氮化物半导体层和p型氮化物半导体层之间的氮化物半导体的有源层, 其中所述谐振器的至少辐射发射端面被所述窗口层覆盖,所述窗层包括通式为Al x Ga 1-xy IN y的单晶氮化物 N,其中0 <= x + y <= 1,0 <= x <= 1和0 <= y <1,具有比有源层更宽的能隙并且在低温下形成 以免损坏所述活性层。 这种窗口层的形成显着提高了根据本发明的氮化物激光器件的性能
摘要:
A semiconductor laser chip has an active layer, an allover electrode forming a lower face of the laser chip and a light emitting end surface of the laser chip. A Si thin film is formed on the light emitting end surface of the laser chip. An upper Si thin film is formed on an upper portion of the light emitting end surface and a lower Si thin film is formed on a lower portion thereof. The lower Si thin film is smaller in thickness than the upper Si thin film. Smaller thickness of the lower Si thin film prevents a component of the allover electrode from diffusing into the upper Si thin film that covers the active layer. Thus, decrease of a maximum optical output value is prevented, and reliability of the laser chips is increased.
摘要:
Anti-reflective coatings may be used on laser high index gain media to mitigate reflection. An absentee layer may be used to compliment the antireflective coating to improve its antireflective performance over a broader range of wavelengths. The absentee layer comprises a material having a higher index of refraction than that of the gain media and has a thickness corresponding to multiple halfwave thicknesses related to the center wavelength output by the laser.
摘要:
A semiconductor laser chip has an active layer, an allover electrode forming a lower face of the laser chip and a light emitting end surface of the laser chip. A Si thin film is formed on the light emitting end surface of the laser chip. An upper Si thin film is formed on an upper portion of the light emitting end surface and a lower Si thin film is formed on a lower portion thereof. The lower Si thin film is smaller in thickness than the upper Si thin film. Smaller thickness of the lower Si thin film prevents a component of the allover electrode from diffusing into the upper Si thin film that covers the active layer. Thus, decrease of a maximum optical output value is prevented, and reliability of the laser chips is increased.
摘要:
A semiconductor optical device structure includes passivated facets formed by first removing the native oxide contaminant with a “non-reactive” molecular gas etchant, such as XeF2. As the oxide is removed, a passivation flux is introduced into the vacuum chamber so as to begin the process of forming a passivation layer to cover the exposed facet surface. The gas etchant is slowly turned off and the flux is increased so as to form a passivation layer of the desired thickness on the “cleaned” facet surface. A protective film is then be evaporated to cover the passivation layer.
摘要:
The present invention refers to an ammonobasic method for preparing a gallium-containing nitride crystal, in which gallium-containing feedstock is crystallized on at least one crystallization seed in the presence of an alkali metal-containing component in a supercritical nitrogen-containing solvent. The method can provide monocrystalline gallium-containing nitride crystals having a very high quality.
摘要:
The present invention refers to an ammonobasic method for preparing a gallium-containing nitride crystal, in which gallium-containing feedstock is crystallized on at least one crystallization seed in the presence of an alkali metal-containing component in a supercritical nitrogen-containing solvent. The method can provide monocrystalline gallium-containing nitride crystals having a very high quality.
摘要:
A method to obtain contamination free surfaces of a material chosen from the group comprising GaAs, GaAlAs, InGaAs, InGaAsP and InGaAs at crystal mirror facets for GaAs based laser cavities. The crystal mirrors facets are cleaved out exposed to an ambient atmosphere containing a material from the group comprising air, dry air, or dry nitrogen ambients. Any oxides and other foreign contaminants obtained during the ambient atmosphere exposure of the mirror facets are removed by dry etching in vacuum. Thereafter, a native nitride layer is grown on the mirror facets by treating them with nitrogen.
摘要:
The present invention refers to an ammonobasic method for preparing a gallium-containing nitride crystal, in which gallium-containing feedstock is crystallized on at least one crystallization seed in the presence of an alkali metal-containing component in a supercritical nitrogen-containing solvent. The method can provide monocrystalline gallium-containing nitride crystals having a very high quality.