公开(公告)号：US10240925B1

公开(公告)日：2019-03-26

申请号：US15083190

申请日：2016-03-28

申请人： HRL Laboratories, LLC

发明人： Raviv Perahia ,  Jonathan Lake ,  Richard J. Joyce ,  Logan D. Sorenson

IPC分类号： G01C19/5684 ,  G01C25/00

摘要： A gyroscope includes a vibratory structure, and a control mechanism including at least a first electrode, and at least a second electrode adjacent the first electrode, wherein the vibratory structure is separated from the control mechanism by a gap, wherein to drive a vibration in the vibratory structure, the control mechanism is configured to apply an alternating electrical voltage between the first electrode and the second electrode, and wherein to sense motion in the vibratory structure, the control mechanism is configured to apply a direct current voltage bias between the first electrode and the second electrode.

公开(公告)号：US20180231382A1

公开(公告)日：2018-08-16

申请号：US15758948

申请日：2016-08-11

申请人： ATLANTIC INERTIAL SYSTEMS LIMITED

发明人： Alan Malvern

IPC分类号： G01C19/5684

摘要： An angular velocity sensor comprises: an insulative support layer (10); a substrate layer (8) formed of a silica-based material and comprising a planar ring structure (2) mounted to vibrate in-plane; and a plurality of conductive electrodes (14), each comprising a first set of moveable conductive electrode tracks (14a) formed on a surface of the planar ring and a second set of fixed conductive electrode tracks (14b) formed on a surface of the insulative support layer axially spaced from the surface of the planar ring. The first and second sets of conductive electrode tracks are interdigitated with a lateral spacing between them in a radial direction. Each moveable conductive electrode track has a radial offset from a median line between adjacent fixed conductive electrode tracks such that each moveable conductive electrode track has a different lateral spacing from two different adjacent fixed conductive electrode tracks in opposite radial directions.

公开(公告)号：US10032976B2

公开(公告)日：2018-07-24

申请号：US14485944

申请日：2014-09-15

申请人： Analog Devices, Inc.

发明人： Guiti Zolfagharkhani ,  Jan H. Kuypers ,  Alexei Gaidarzhy ,  Andrew Sparks

IPC分类号： G01C19/5684 ,  H01L41/047 ,  G01C19/5755 ,  G01C19/5712 ,  H01L41/053 ,  H01L41/08 ,  H01L41/107

摘要： In one embodiment, an apparatus includes a resonant structure having a plate, a drive electrode and a sense electrode. The resonant structure defines an axis substantially orthogonal to a plane defined by the plate when the resonant structure is not excited. The plate is formed from a piezoelectric material. The drive electrode is configured to excite the resonant structure, and the sense electrode is configured to sense a signal in response to rotation of the resonant structure about the axis.

公开(公告)号：US10030976B2

公开(公告)日：2018-07-24

申请号：US14710991

申请日：2015-05-13

申请人： Kionix, Inc.

发明人： Jonah DeWall

IPC分类号： G01C19/56 ,  G01C19/5684 ,  G01C19/5712 ,  G01C19/5776

摘要： A gyroscope includes a resonator, a transducer, and a comparator. The comparator is designed to receive an input signal from the transducer and compare the input signal with a reference signal to produce an output signal. Rising and falling edge transitions of the output signal are substantially synchronized with a motion of the resonator along a sense-axis of the transducer.

公开(公告)号：US09851373B2

公开(公告)日：2017-12-26

申请号：US14100100

申请日：2013-12-09

申请人： Murata Manufacturing Co., Ltd.

发明人： Katsumi Fujimoto ,  Toshimaro Yoneda ,  Takuo Hada ,  Hideya Horiuchi

IPC分类号： G01C19/56 ,  G01C19/5684

CPC分类号： G01P9/04 ,  G01C19/5684

摘要： A vibrator in a vibrating gyroscope includes a circular annular portion, a rectangular annular portion, and joining portions. The rectangular annular portion is disposed adjacent to an outer side of the circular annular portion. The joining portions join the circular annular portion and the rectangular annular portion. The rectangular annular portion includes linear beam portions. The joining portions join the circular annular portion and the center portions of the beam portions to each other.

公开(公告)号：US09709401B2

公开(公告)日：2017-07-18

申请号：US14266323

申请日：2014-04-30

申请人： Atlantic Inertial Systems Limited

发明人： Chris Fell

IPC分类号： G01C19/00 ,  G01P3/44 ,  G01P9/00 ,  G01P15/08 ,  G01C19/5719 ,  G01C19/5684 ,  G01C19/5769

CPC分类号： G01C19/5719 ,  G01C19/5684 ,  G01C19/5769 ,  Y10T29/49124

摘要： A MEMS sensor comprises a vibrating sensing structure formed from a semiconductor substrate layer (50). The semiconductor substrate layer (50) is mounted on a pedestal comprising an electrically insulating substrate layer (52) bonded to the semiconductor substrate (50) to form a rectangular sensor chip. The pedestal further comprises an electrically insulating spacer layer (54) for mounting the sensor chip to a housing. The electrically insulating spacer layer (54) is octagonal. When the vibrating sensing structure is excited into a cos 2θ vibration mode pair, the quadrature bias arising from any mode frequency split is not affected by changes in temperature as a result of the octagonal spacer layer (54).

公开(公告)号：US09702697B2

公开(公告)日：2017-07-11

申请号：US14618726

申请日：2015-02-10

申请人： Robert E. Stewart ,  David M. Rozelle ,  Charles A. Lee

发明人： Robert E. Stewart ,  David M. Rozelle ,  Charles A. Lee

IPC分类号： G01C19/56 ,  G01C19/5677 ,  G01C25/00 ,  G01C19/5684 ,  G01C19/5691 ,  G01C19/5776

CPC分类号： G01C19/5677 ,  G01C19/5684 ,  G01C19/5691 ,  G01C19/5776 ,  G01C25/00

摘要： One embodiment of the invention includes a CVG system. A plurality of electrodes electrostatically force a resonator into a periodic motion based on a drive axis forcer signal applied to a first set of the plurality of electrodes and a sense axis force-rebalance signal applied to a second set of the plurality of electrodes, and provides a sense axis pickoff signal and a drive axis pickoff signal. A gyroscope controller generates the drive axis forcer signal based on the drive axis pickoff signal and calculates an angular rate of rotation about an input axis based on the sense axis force-rebalance signal. The gyroscope controller modulates a predetermined disturbance signal component onto the sense axis force-rebalance signal and to control a modulation phase of the sense axis force-rebalance signal based on detection of the predetermined disturbance signal component in the sense axis force-rebalance signal to substantially mitigate bias and scale-factor error.

公开(公告)号：US09541395B2

公开(公告)日：2017-01-10

申请号：US14369874

申请日：2013-01-04

申请人： Atlantic Inertial Systems Limited

发明人： Christopher Paul Fell

IPC分类号： G01C19/5684 ,  B81B7/00 ,  G01C19/5783 ,  B81B3/00

CPC分类号： G01C19/5783 ,  B81B3/0021 ,  B81B7/0048 ,  B81B2201/0242 ,  G01C19/5684

摘要： A sensor comprises a substrate (16) and a sensor element (20) anchored to the substrate (16), the substrate (16) and sensor element (20) being of dissimilar materials and having different coefficients of thermal expansion, the sensor element (20) and substrate (16) each having a generally planar face arranged substantially parallel to one another, the sensor further comprising a spacer (26), the spacer (26) being located so as to space at least part of the sensor element (20) from at least part of the substrate (16), wherein the spacer (26) is of considerably smaller area than the area of the smaller of face of the substrate (16) and that of the sensor element (20).

摘要翻译： 传感器包括基板（16）和固定到基板（16）的传感器元件（20），基板（16）和传感器元件（20）具有不同的材料并且具有不同的热膨胀系数，传感器元件 20）和基板（16），每个基板具有基本上彼此平行布置的大致平坦的面，所述传感器还包括间隔件（26），所述间隔件（26）定位成使得所述传感器元件（20）的至少一部分 ），其中所述间隔件（26）的面积比所述基板（16）的面的较小面积和所述传感器元件（20）的面积的面积小得多。

公开(公告)号：US09374069B2

公开(公告)日：2016-06-21

申请号：US14341216

申请日：2014-07-25

申请人： Atlantic Inertial Systems Limited

发明人： Kevin Townsend

IPC分类号： H03K3/017 ,  G01C19/5684 ,  G01C19/5776 ,  H03D1/18 ,  H03M1/12 ,  H03M3/00

CPC分类号： H03K3/017 ,  G01C19/5684 ,  G01C19/5776 ,  H03D1/18 ,  H03M1/12 ,  H03M3/30

摘要： A method of processing an amplitude-modulated analog signal at a carrier frequency Fc comprises: digitizing the analog signal to produce an input bit stream that represents the amplitude of the analog signal; generating an in-phase reference bit stream that is synchronous to the carrier frequency Fc and represents an in-phase digital reference signal substantially in the form of a sine and/or cosine wave; and multiplying the input bit stream with the in-phase reference bit stream to produce an output bit stream representing the amplitude modulation of the analog signal.

摘要翻译： 一种在载波频率Fc处理幅度调制的模拟信号的方法包括：数字化模拟信号以产生表示模拟信号幅度的输入比特流; 产生与载波频率Fc同步的同相参考比特流，并且表示基本上呈正弦和/或余弦波形式的同相数字参考信号; 并将输入比特流与同相参考比特流相乘以产生表示模拟信号的幅度调制的输出比特流。

公开(公告)号：US09091544B2

公开(公告)日：2015-07-28

申请号：US13482186

申请日：2012-05-29

申请人： Houri Johari-Galle

发明人： Houri Johari-Galle

IPC分类号： G01C19/56 ,  G01C19/5684 ,  G01C19/5698

CPC分类号： G01C19/5684 ,  G01C19/5698

摘要： Cross-talk sensitivity in an xy-axis shell-type gyroscope can be rejected or reduced by operating the gyroscope with a single in-plane flexural or bulk resonance mode and sensing two out-of-plane degenerate or non-degenerate resonance modes resulting from rotations about two axes in the plane of the resonator. Mode matching in an xy-axis shell-type gyroscope can be achieved by configuring the resonator (e.g., size, shape, thickness) to match the in-plane and out-of-plane resonance frequencies for the drive and sense modes of interest.

摘要翻译： 通过使用单个面内弯曲或体共振模式操作陀螺仪，可以消除xy轴壳型陀螺仪中的串扰灵敏度，并且可以感测出两个平面外退化或非简并谐振模式 在谐振器的平面内的两个轴的旋转。 可以通过配置谐振器（例如，尺寸，形状，厚度）来匹配用于感兴趣的驱动和感测模式的平面内和平面外的谐振频率来实现xy轴壳型陀螺仪中的模式匹配。