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公开(公告)号:US20230417990A1
公开(公告)日:2023-12-28
申请号:US17847399
申请日:2022-06-23
Applicant: GlobalFoundries U.S. Inc.
Inventor: Kevin Dezfulian , Yusheng Bian
CPC classification number: G02B6/1228 , G02B6/4296 , G02B2006/12097
Abstract: Structures including a waveguide core and methods of fabricating a structure including a waveguide core. The structure comprises a photonics chip including a first chip region, a second chip region, a first waveguide core in the first chip region, and a second waveguide core in the second chip region. The first chip region adjoins the second chip region along a boundary. The first waveguide core includes a first tapered section, and the second waveguide core includes a second tapered section positioned across the boundary from the first tapered section. The first tapered section has a first width dimension that increases with increasing distance from the boundary, and the second tapered section has a second width dimension that increases with increasing distance from the boundary.
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公开(公告)号:US11846804B2
公开(公告)日:2023-12-19
申请号:US17679470
申请日:2022-02-24
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian , Hemant Dixit , Theodore Letavic
CPC classification number: G02B6/122 , G02B6/13 , G02B2006/12061 , G02B2006/12135
Abstract: Structures including an optical component and methods of fabricating a structure including an optical component. The structure includes an optical component having a waveguide core, and multiple features positioned adjacent to the waveguide core. The waveguide core contains a first material having a first thermal conductivity, and the features contain a second material having a second thermal conductivity that is greater than the first thermal conductivity.
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公开(公告)号:US11837547B2
公开(公告)日:2023-12-05
申请号:US17450324
申请日:2021-10-08
Applicant: GlobalFoundries U.S. Inc.
Inventor: Roderick Alan Augur , Yusheng Bian , Robert John Fox, III
IPC: H01L23/532 , H01L23/552 , H01L23/522
CPC classification number: H01L23/53295 , H01L23/5226 , H01L23/552
Abstract: A photonic integrated circuit (PIC) die includes a silicon nitride optical component over an active region. Multiple interconnect layers are over the silicon nitride optical component, each of the multiple interconnect layers including a metal interconnect therein. At least one optical deflector is over the multiple interconnect layers and over the silicon nitride optical component. The optical deflector(s) may also include a contact passing therethrough to the interconnect layers, but do not include any other electrical interconnects. Each optical deflector may deflect light within an ambient light range of less than 570 nanometers (nm) to protect the silicon nitride optical component from light-induced degradation.
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公开(公告)号:US20230384518A1
公开(公告)日:2023-11-30
申请号:US17828139
申请日:2022-05-31
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian
CPC classification number: G02B6/1228 , G02B6/12004 , G02B6/305 , G02B2006/12147 , G02B2006/12121 , G02B2006/12111 , G02B2006/12097
Abstract: Structures for an edge coupler and methods of fabricating a structure for an edge coupler. The structure comprises an edge coupler including a first waveguide core and a second waveguide core adjacent to the first waveguide core in a lateral direction. The first waveguide core includes a first section with a first thickness and a first plurality of segments projecting in a vertical direction from the first section. The second waveguide core includes a second section with a second thickness and a second plurality of segments projecting in the vertical direction from the second section.
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公开(公告)号:US20230367067A1
公开(公告)日:2023-11-16
申请号:US17741684
申请日:2022-05-11
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian , Rod Augur
CPC classification number: G02B6/124 , G02B6/1228 , G02B6/13 , G02B2006/12107
Abstract: Structures for an edge coupler and methods of fabricating such structures. The structure comprises a substrate and a back-end-of-line edge coupler including a waveguide core and a grating positioned in a vertical direction between the substrate and the waveguide core. The first waveguide core includes a first longitudinal axis, the grating includes a second longitudinal axis and a plurality of segments positioned with a spaced-apart arrangement along the second longitudinal axis, and the second longitudinal axis is aligned substantially parallel to the first longitudinal axis.
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公开(公告)号:US11808996B1
公开(公告)日:2023-11-07
申请号:US17729244
申请日:2022-04-26
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian
IPC: G02B6/42
CPC classification number: G02B6/4206 , G02B6/42
Abstract: Photonics structures for a waveguide or an edge coupler and methods of fabricating a photonics structure for a waveguide or an edge coupler. The photonics structure includes a waveguide core having a first section, a second section longitudinally adjacent to the first section, first segments projecting in a vertical direction from the first section, and second segments projecting in the vertical direction from the second section. The first section of the waveguide core has a first thickness, and the second section of the waveguide core has a second thickness that is greater than the first thickness.
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217.
公开(公告)号:US20230314706A1
公开(公告)日:2023-10-05
申请号:US17709841
申请日:2022-03-31
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian
CPC classification number: G02B6/12016 , G02B6/125 , G02B2006/12147
Abstract: Disclosed is a structure including a first waveguide core with a first end portion and a second waveguide core with a second end portion, which overlays and is physically separated from the first end portion. The structure includes a coupler configured for interlayer waveguide coupling. Specifically, the coupler includes an additional waveguide core stacked vertically between and physically separated from the first end portion and the second end portion. Optionally, the coupler includes multiple additional waveguide cores. The shapes of the various waveguide cores are configured in order to achieve mode matching so that optical signals pass between the first end portion of the first waveguide core and the second end portion of the second waveguide core through each additional waveguide core in sequence. Also disclosed is a structure including a crossing array implemented using couplers.
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公开(公告)号:US20230305242A1
公开(公告)日:2023-09-28
申请号:US17705911
申请日:2022-03-28
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian
IPC: G02B6/42
CPC classification number: G02B6/4203
Abstract: Photonics structures including a slotted waveguide and methods of fabricating such photonics structures. The photonics structure includes a slotted waveguide having a first waveguide core and a second waveguide core laterally positioned adjacent to the first waveguide core. The first waveguide core is separated from the second waveguide core by a slot. The photonics structure further includes a metamaterial structure having a plurality of elements separated by a plurality of gaps and a dielectric material in the plurality of gaps. The metamaterial structure and the slot of the slotted waveguide are positioned with an overlapping arrangement.
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公开(公告)号:US11719895B1
公开(公告)日:2023-08-08
申请号:US17679188
申请日:2022-02-24
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian , Nicholas Polomoff , Keith Donegan , Qizhi Liu , Steven M. Shank
IPC: G02B6/42 , H01S5/02251 , G02B1/00
CPC classification number: G02B6/4212 , G02B6/421 , G02B6/4245 , H01S5/02251 , G02B1/002
Abstract: Structures including an edge coupler, and methods of fabricating a structure that includes an edge coupler. The structure includes an edge coupler having a waveguide core with an end surface and a longitudinal axis. The end surface defines a plane tilted in a first direction at a first acute angle relative to the longitudinal axis and tilted in a second direction at a second acute angle relative to the longitudinal axis. The second direction differs from the first direction.
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公开(公告)号:US20230244033A1
公开(公告)日:2023-08-03
申请号:US17588440
申请日:2022-01-31
Applicant: GlobalFoundries U.S. Inc.
Inventor: Shesh Mani Pandey , Yusheng Bian , Judson Holt
IPC: G02B6/136
CPC classification number: G02B6/136 , G02B2006/12061
Abstract: Waveguide structures and methods of fabricating a waveguide structure. The structure includes a first waveguide core, a second waveguide core, and a third waveguide core adjacent to the first waveguide core and the second waveguide core. The third waveguide core is laterally separated from the first waveguide core by a first slot, and the third waveguide core is laterally separated from the second waveguide core by a second slot. The first waveguide core and the second waveguide core comprise a first material, and the third waveguide core comprises a second material that is different in composition from the first material.
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