公开(公告)号：US20130092084A1

公开(公告)日：2013-04-18

申请号：US13271449

申请日：2011-10-12

Applicant: ShouQian Shao ,  Jay DeDontney ,  Jason Wright

Inventor： ShouQian Shao ,  Jay DeDontney ,  Jason Wright

IPC: G01N7/00 ,  C23C16/52 ,  B23P11/00 ,  C23C16/455

CPC classification number: C23C16/52 ,  C23C16/45512 ,  C23C16/45557 ,  G01N7/00 ,  Y10T137/0402

Abstract: Systems and methods to determine ozone concentration in a gas mixture of ozone and oxygen, based on measurements of a total mass flow and a corresponding change in a chamber pressure accepting the mixture flow, can enable the measurements of ozone concentration at low pressure settings. The ozone concentration determination can be applied to a vacuum processing chamber, enabling precision semiconductor processing.

Abstract translation: 基于总质量流量的测量和接受混合物流动的室压力的相应变化来确定臭氧和氧气的混合物中的臭氧浓度的系统和方法可以使得能够在低压设置下测量臭氧浓度。 可以将臭氧浓度测定应用于真空处理室，从而实现精密的半导体处理。

公开(公告)号：US20130084337A1

公开(公告)日：2013-04-04

申请号：US13566274

申请日：2012-08-03

Applicant: Jason Wright ,  Antony Hitchcock ,  Frank Sugar ,  Tim Davies ,  Shreekant Adhikari ,  Nanda Menon ,  Quentin Florence

Inventor： Jason Wright ,  Antony Hitchcock ,  Frank Sugar ,  Tim Davies ,  Shreekant Adhikari ,  Nanda Menon ,  Quentin Florence

IPC: A61K35/76

CPC classification number: A61K35/76 ,  A61K2035/11 ,  C12N7/00 ,  C12N2795/00032 ,  C12N2795/14151 ,  Y10S977/773

Abstract: The invention relates to compositions of purified filamentous bacteriophage, as well as methods that allow reproducible purification of high concentrations of filamentous bacteriophage.

Abstract translation: 本发明涉及纯化的丝状噬菌体的组合物，以及允许可重复纯化高浓度丝状噬菌体的方法。

公开(公告)号：US20120156877A1

公开(公告)日：2012-06-21

申请号：US12973845

申请日：2010-12-20

Applicant: Lipyeow Yap ,  Jay DeDontney ,  Shouqian Shao ,  Jason Wright

Inventor： Lipyeow Yap ,  Jay DeDontney ,  Shouqian Shao ,  Jason Wright

IPC: H01L21/302 ,  B08B7/00 ,  B05C5/00 ,  H01L21/31 ,  B05B7/16 ,  H01L21/306

CPC classification number: C23C16/45565 ,  C23C16/4557 ,  C23C16/45572 ,  C23C16/45574 ,  C23C16/5096

Abstract: A top assembly for a processing chamber having a back plate and a hub is provided. The back plate has a first portion and a second portion. The first portion is connected to the second portion through a central region of the back plate, wherein a gap is defined between opposing surfaces of the first and second portions outside the central region. The first portion includes an embedded heating element. The hub is affixed to a top surface of the second portion of the back plate over the central region. The hub has a top surface with a plurality of channel openings defined within a central region of the hub and a bottom surface having a central extension with a plurality of channels defined therethrough. The bottom surface includes an annular extension spaced apart from the central extension.

Abstract translation: 提供了具有背板和毂的用于处理室的顶部组件。 背板具有第一部分和第二部分。 第一部分通过背板的中心区域连接到第二部分，其中在中心区域外部的第一和第二部分的相对表面之间限定间隙。 第一部分包括嵌入式加热元件。 轮毂在中心区域上固定在背板的第二部分的顶表面上。 毂具有顶表面，其具有限定在毂的中心区域内的多个通道开口，底面具有中心延伸部，多个通道限定在其中。 底表面包括与中心延伸部间隔开的环形延伸部。

公开(公告)号：US20130152857A1

公开(公告)日：2013-06-20

申请号：US13327597

申请日：2011-12-15

Applicant: Jason Wright ,  Tony P. Chiang

Inventor： Jason Wright ,  Tony P. Chiang

IPC: C23C16/455 ,  F15D1/00

CPC classification number: C23C16/4482 ,  Y10T137/0318 ,  Y10T137/5283

Abstract: Embodiments provided herein describe substrate processing fluid delivery systems and methods. The substrate processing fluid delivery systems include a flow regulator. A fluid conduit assembly is coupled to the flow regulator and a processing chamber of a substrate processing apparatus. A plurality of processing fluid containers is coupled to the fluid conduit assembly. A plurality of valves is coupled to the fluid conduit assembly. The plurality of valves are configurable to selectively place each of the plurality of processing fluid containers in fluid communication with only the flow regulator or the processing chamber of the substrate processing apparatus through the fluid conduit assembly.

Abstract translation: 本文提供的实施方案描述了基底处理流体递送系统和方法。 基板处理流体输送系统包括流量调节器。 流体导管组件联接到流量调节器和衬底处理装置的处理室。 多个处理流体容器联接到流体导管组件。 多个阀联接到流体导管组件。 多个阀可配置成选择性地将多个处理流体容器中的每一个通过流体导管组件与基板处理装置的流量调节器或处理室流体连通。

公开(公告)号：US20130133580A1

公开(公告)日：2013-05-30

申请号：US13306508

申请日：2011-11-29

Applicant: Jason Wright

Inventor： Jason Wright

IPC: C23C16/455

CPC classification number: C23C16/4412 ,  C23C16/45565

Abstract: A processing chamber is provided. The processing chamber includes a lid having a plurality of valves affixed thereto, the plurality of valves operable to enable process gases to flow into the chamber. The chamber includes a bottom portion, where the bottom portion includes a base and side walls extending from the base. A surface of the base is configured to support a substrate. A showerhead is affixed to a bottom surface of the lid. A bottom surface of the showerhead is configured to include a central port for providing process gases into the chamber. The central port is surrounded by an annular pump channel. The annular pump channel is surrounded by an annular purge channel, where a first ridge separates the delivery region and the annular pump channel and a second ridge separates the annular pump channel and the annular purge channel.

Abstract translation: 提供处理室。 处理室包括具有固定到其上的多个阀的盖，多个阀可操作以使处理气体能够流入室中。 该腔室包括底部，底部包括底座和从基座延伸的侧壁。 基底的表面构造成支撑基底。 淋浴头固定在盖的底面上。 喷头的底表面构造成包括用于将工艺气体提供到室中的中心端口。 中央港口环绕着一个环形的泵通道。 环形泵通道被环形吹扫通道包围，其中第一脊分开输送区域和环形泵通道，第二脊分隔环形泵通道和环形清洗通道。

公开(公告)号：US20130091926A1

公开(公告)日：2013-04-18

申请号：US13271471

申请日：2011-10-12

Applicant: ShouQian Shao ,  Jay DeDontney ,  Jason Wright

Inventor： ShouQian Shao ,  Jay DeDontney ,  Jason Wright

IPC: G01N25/00

CPC classification number: G01F1/74 ,  G01N25/18 ,  G01N33/0039 ,  Y02A50/247

Abstract: Systems and methods to determine ozone concentration in a gas mixture of ozone and oxygen, based on measurements of the total gas mixture properties, can enable the measurements of ozone concentration at low pressure settings. The ozone concentration determination can be applied to vacuum processing chamber, using either novel ozone sensor or existing mass flow meter or controller.

Abstract translation: 基于总气体混合物性质的测量，确定臭氧和氧气混合物中的臭氧浓度的系统和方法可以使得能够在低压设置下测量臭氧浓度。 使用新型臭氧传感器或现有的质量流量计或控制器，可以将臭氧浓度测定应用于真空处理室。

公开(公告)号：US08250235B2

公开(公告)日：2012-08-21

申请号：US10848159

申请日：2004-05-19

Applicant: Elaine M. Harvey ,  Wayne A. Mitzen ,  Jason Wright ,  John M. Sleggs ,  Lawrence A. Wimble

Inventor： Elaine M. Harvey ,  Wayne A. Mitzen ,  Jason Wright ,  John M. Sleggs ,  Lawrence A. Wimble

IPC: G06F15/16

CPC classification number: H04L63/105 ,  H04L63/0281 ,  H04L63/12

Abstract: A system including a transmitter, a receiver, and a conduit is provided. The transmitter is within a first network, and is in communication with at least one other device within the first network. The receiver is within a second network, and is in communication with at least one other device within the second network. The conduit is formed between the transmitter and the receiver, and is capable of carrying a signal transmitted from the transmitter to the receiver. To maintain the unidirectional nature of the conduit, either the transmitter is incapable of receiving any signal via the conduit or the receiver is incapable of transmitting any signal via the conduit.

Abstract translation: 提供了包括发射器，接收器和导管的系统。 发射机在第一网络内，并且与第一网络内的至少一个其他设备通信。 接收机在第二网络内，并且与第二网络内的至少一个其他设备通信。 导管形成在发射器和接收器之间，并且能够承载从发射器发送到接收器的信号。 为了保持导管的单向性质，发射器不能通过导管接收任何信号，或者接收器不能通过导管传输任何信号。