Abstract:
There are provided a piezoelectric device, an inkjet print head, and a method of manufacturing the same. The piezoelectric device includes piezoelectric ceramic powder containing 90 parts by weight or more to less than 100 parts by weight of Pb(Zr, Ti)O3, and more than 0 part by weight to 10 parts by weight or less of glass frit, based on 100 parts by weight of a piezoelectric substance composition for the piezoelectric device, wherein the glass frit contains 10 to 20 parts by weight of ZnO, based on 100 parts by weight of glass frit.
Abstract:
An inkjet printhead and a method of driving the inkjet printhead include a flow channel substrate having a pressure chamber, and a piezoelectric actuator formed on the flow channel substrate to apply a driving force to the pressure chamber to eject ink. The piezoelectric actuator includes a piezoelectric layer formed on the flow channel substrate to correspond to the pressure chamber, and a plurality of common electrodes and a plurality of driving electrodes alternately arranged in a length direction of the piezoelectric layer.
Abstract:
A method to form a thick layer by screen printing and a method to form a piezoelectric actuator of an inkjet head. The method to form the thick layer including forming a guide groove in a surface to a predetermined depth, and forming the thick layer by applying a material to the surface inside the guide groove through screen printing. The method to form the piezoelectric actuator including forming an insulating layer on a top surface of a vibration plate and forming a guide groove in the top surface of the vibration plate or an insulating layer to a predetermined depth at a position corresponding to each of a plurality of pressure chambers, forming a lower electrode on the top surface of the insulating layer; forming a piezoelectric layer inside the guide groove by screen printing, and forming an upper electrode on a top surface of the piezoelectric layer.
Abstract:
A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.
Abstract:
Provided is a pyrolysis furnace having a gas flowing path controller with an improved structure. The pyrolysis furnace includes: a silicon substrate; a main body of the pyrolysis furnace; a heating unit that is formed around the main body and controls the temperature of the main body; at least one gas supplying tube through which a gas flows into the main body; and a gas flowing path controller that is installed inside the main body and controls the flow of the gas. As a result, controlling and manufacturing of small-sized nanoparticles with excellent characteristics is possible.
Abstract:
A GaN based III-V nitride semiconductor light-emitting device and a method for fabricating the same are provided. In the GaN based III-V nitride semiconductor light-emitting device including first and second electrodes arranged facing opposite directions or the same direction with a high-resistant substrate therebetween and material layers for light emission or lasing, the second electrode directly contacts a region of the outmost material layer exposed through an etched region of the high-resistant substrate. A thermal conductive layer may be formed on the bottom of the high-resistant substrate to cover the exposed region of the outmost material layer.
Abstract:
An air-to-fuel (A/F) ratio sensor includes an insulation layer, two solid electrolyte layers made of a porous composite ceramic formed at both sides of the insulation layer, each solid electrolyte layer having an internal electrode layer on its boundary surface with the insulation layer and an external electrode layer on its other surface, and a diffusion barrier layer made of a porous composite ceramic, covering one of the external electrode layers. The A/F ratio sensor provides a linear A/F ratio signal by controlling only a pumping current for a reference partial pressure of oxygen. Thus, the A/F ratio sensor operates by a simpler driving principle, thereby simplifying the driving circuit thereof.
Abstract:
There are provided a piezoelectric device, an inkjet print head, and a method of manufacturing the same. The piezoelectric device includes piezoelectric ceramic powder containing 90 parts by weight or more to less than 100 parts by weight of Pb(Zr, Ti)O3, and more than 0 part by weight to 10 parts by weight or less of glass frit, based on 100 parts by weight of a piezoelectric substance composition for the piezoelectric device, wherein the glass frit contains 10 to 20 parts by weight of ZnO, based on 100 parts by weight of glass frit.
Abstract:
Disclosed is an inertial sensor, including a membrane, a mass body provided underneath a central portion of the membrane, a post provided underneath a peripheral portion of the membrane, and a cap having a peripheral portion bonded to a lower surface of the post using low-temperature silicon direct bonding. A method of manufacturing the inertial sensor is also provided.
Abstract:
Disclosed herein is an inertial sensor. The inertial sensor 100 according to preferred embodiments of the present invention includes: a membrane 110; a mass body 120 disposed under the membrane 110; a piezoelectric body 130 formed on the membrane 110 to drive the mass body 120; and trenches 140 formed by being collapsed in a thickness direction of the piezoelectric body 130 so as to vertically meet a direction in which the mass body 120 is driven. By this configuration, the trenches are formed by being collapsed in a thickness direction of the piezoelectric body 130 to provide directivity while retaining the rigidity of the piezoelectric body 130 to prevent a wave from being propagated in an unnecessary direction, thereby driving the inertial sensor 100 in a desired specific direction.