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45 条记录 (耗时 0.031 秒)

    Liquid flow controller and precision dispense apparatus and system
    22.
    发明授权
    Liquid flow controller and precision dispense apparatus and system 失效
    液体流量控制器和精密分配装置及系统

    公开(公告)号：US08430120B2

    公开(公告)日：2013-04-30

    申请号：US13300772

    申请日：2011-11-21

    申请人： Marc Laverdiere ,  Robert F. McLoughlin ,  George Gonnella ,  Iraj Gashgaee ,  Jennifer Marrs

    发明人： Marc Laverdiere ,  Robert F. McLoughlin ,  George Gonnella ,  Iraj Gashgaee ,  Jennifer Marrs

    IPC分类号： F16K31/12

    CPC分类号： G05D7/0617 ,  G05D16/2013 ,  Y10T137/0396 ,  Y10T137/7758 ,  Y10T137/776 ,  Y10T137/7761

    摘要： A proportional fluid control valve with improved linearity and reduced hysteresis is disclosed. The valve allows for smooth, gentle flow of fluid in a substantially linear fashion, with minimal turns. Preferably the valve is pneumatically actuated. Where temperature is not an issue, the valve can be actuated by any suitable means, including stepper motors, linear motors, voice coils or other force actuators. A versatile molded valve body that requires fewer parts compared to a machined valve is disclosed. In one embodiment, the molded valve body is designed specifically for flow control and contains two sensor housings with carefully positioned flow paths to optimize the use of space. The sensor housing or housings can be separately formed as inserts, allowing installation in various orientations.

    摘要翻译： 公开了一种具有改善的线性和减小滞后的比例流体控制阀。 该阀允许流体以基本上线性的方式平滑流畅地流动，并且转动最小。 优选地，气门致动阀。 在温度不是问题的地方，阀门可以通过任何合适的方式进行启动，包括步进电机，直线电机，音圈或其他力传动器。 公开了一种与加工阀相比需要更少零件的通用模制阀体。 在一个实施例中，模制阀体专门用于流量控制，并且包含具有仔细定位的流动路径的两个传感器壳体，以优化空间的使用。 传感器壳体或壳体可以单独形成为插入件，允许以各种取向安装。

    System and method for a variable home position dispense system
    23.
    发明授权
    System and method for a variable home position dispense system 有权
    可变归位分配系统的系统和方法

    公开(公告)号：US08292598B2

    公开(公告)日：2012-10-23

    申请号：US11666124

    申请日：2005-11-21

    申请人： Marc Laverdiere ,  James Cedrone ,  George Gonnella ,  Iraj Gashgaee ,  Paul Magoon ,  Timothy J. King

    发明人： Marc Laverdiere ,  James Cedrone ,  George Gonnella ,  Iraj Gashgaee ,  Paul Magoon ,  Timothy J. King

    IPC分类号： F04B49/00

    CPC分类号： F04B43/02 ,  F04B13/00 ,  F04B49/065 ,  F04B2201/0201 ,  F04B2205/09

    摘要： Embodiments of the present, invention provide a system and method for reducing the hold-up volume of a pump. More particularly, embodiments of the present invention provide a system and method for determining a home position to reduce hold-up volume at a dispense pump and/or a feed pump. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.

    摘要翻译： 本发明的实施例提供了一种用于减小泵的保持容积的系统和方法。 更具体地，本发明的实施例提供了一种用于确定原始位置以减少分配泵和/或进料泵的滞留体积的系统和方法。 可以选择隔膜的原始位置，使得在分配泵和/或进料泵处的室的体积包含足够的流体，以在最小化保持容积的同时执行分配循环的各个步骤。 另外，可以选择隔膜的原位来优化正位移的有效范围。

    Systems and methods for fluid flow control in an immersion lithography system
    26.
    发明申请
    Systems and methods for fluid flow control in an immersion lithography system 失效

    公开(公告)号：US20080036985A1

    公开(公告)日：2008-02-14

    申请号：US11502729

    申请日：2006-08-11

    申请人： Michael Clarke ,  Robert F. McLoughlin ,  Marc Laverdiere

    发明人： Michael Clarke ,  Robert F. McLoughlin ,  Marc Laverdiere

    IPC分类号： G03B27/42

    CPC分类号： G03B27/42 ,  G03F7/70341

    摘要： Systems and methods for controlling fluid flow in an immersion lithography system. The system includes a fluid flow path that allows fluid to flow from a source through a fluid retention hood and then a fluid control valve. The system includes a pressure sensing system for determining a pressure drop across the fluid retention hood. The pressure drop across the fluid retention hood changes with the fluid flow rate. A control system receives signals indicating the pressure drop across the fluid retention hood and produces control signals for the fluid control valve. The control signals adjust the fluid flow rate through the fluid control valve to drive the flow rate to a desired rate, thereby driving the sensed pressure drop across the fluid retention hood to a desired pressure drop.

    Liquid filtration device
    27.
    发明申请
    Liquid filtration device 失效
    液体过滤装置

    公开(公告)号：US20070107601A1

    公开(公告)日：2007-05-17

    申请号：US11591283

    申请日：2006-11-01

    申请人： Marc Laverdiere ,  Michael Clarke

    发明人： Marc Laverdiere ,  Michael Clarke

    IPC分类号： B01D19/00

    CPC分类号： B01D65/00 ,  B01D19/0031 ,  B01D19/0042 ,  B01D29/15 ,  B01D29/902 ,  B01D36/001 ,  B01D61/20 ,  B01D63/02 ,  B01D63/067 ,  B01D63/10 ,  B01D2201/302 ,  B01D2313/08 ,  B01D2313/16

    摘要： The present invention provides a liquid filtration device with internal flow paths that facilitate the purging of air bubbles from the device. The device includes internal channels that collect bubbles from fluid entering the filtration device and more efficiently direct fluid to sweep bubbles from the device during operation. The present invention also provides for an automatic means to minimize fluid loss during a vent process.

    摘要翻译： 本发明提供一种液体过滤装置，其具有便于从装置吹扫气泡的内部流动路径。 该装置包括内部通道，其从进入过滤装置的流体中收集气泡，并且在操作期间更有效地引导流体从装置中吹扫气泡。 本发明还提供了一种在排气过程中使流体损失最小化的自动装置。

    Separation module
    28.
    发明授权
    Separation module 失效
    分离模块

    公开(公告)号：US07163237B2

    公开(公告)日：2007-01-16

    申请号：US10489587

    申请日：2002-09-13

    申请人： J Karl Niermeyer ,  Marc Laverdiere ,  Ralph J. Stankowski ,  Joseph Smith

    发明人： J Karl Niermeyer ,  Marc Laverdiere ,  Ralph J. Stankowski ,  Joseph Smith

    IPC分类号： F16L39/00

    CPC分类号： B01D35/30 ,  B01D35/26 ,  B01D2201/302 ,  B01D2201/305 ,  B01D2201/4023 ,  B01D2201/4084

    摘要： A separation module is provided having a housing, a filter within the housing and at least one outlet and one inlet. The outlet and inlet are positioned to mate with fittings of a pump housing. A stationary receptor positioned between the pump housing and the separation module has a pivot line and two shelves on its outer surface which permit fitting the separation module in a stationary receptor adjacent the pump housing.

    摘要翻译： 提供了一种分离模块，其具有壳体，壳体内的过滤器和至少一个出口和一个入口。 出口和入口定位成与泵壳体的配件配合。 定位在泵壳体和分离模块之间的固定接收器在其外表面上具有枢转线和两个搁架，其允许将分离模块安装在邻近泵壳体的静止接收器中。

    System for controlling fluid flow
    29.
    发明授权
    System for controlling fluid flow 有权

    公开(公告)号：US07107128B2

    公开(公告)日：2006-09-12

    申请号：US10779009

    申请日：2004-02-13

    申请人： Marc Laverdiere ,  Robert F. McLoughlin

    发明人： Marc Laverdiere ,  Robert F. McLoughlin

    IPC分类号： G05D7/00 ,  G05D13/00

    CPC分类号： G05D7/0635 ,  H01L21/6715 ,  Y10T137/0989

    摘要： Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.