公开(公告)号：US20250051900A1

公开(公告)日：2025-02-13

申请号：US18706873

申请日：2023-03-30

Applicant: TOCALO CO., LTD.

Inventor： Akihiro MISHIMA ,  Tomoki FUNATSU ,  Keisuke NICHO

IPC: C23C4/18 ,  C23C4/11 ,  C23C4/134

Abstract: To provide a surface treatment method for smoothing the surface of a ceramic thermal spray coating, and a ceramic thermal spray coating subjected to the surface smoothing treatment.
A surface treatment method for a ceramic thermal spray coating, which comprises jetting a slurry containing a liquid having a viscosity at a temperature of 20° C. of 10 mPa/s or lower and a powder medium having a polyhedral structure and having a median diameter (D50) of from 1 to 50 μm with a content of the powder medium of from 1 to 50 vol %, against a surface of a ceramic thermal spray coating, using a compressed gas under a pressure of from 0.01 to 1.0 MPa, to smooth the surface of the ceramic thermal spray coating.

公开(公告)号：US20240043982A1

公开(公告)日：2024-02-08

申请号：US18266481

申请日：2021-11-18

Applicant: TOCALO Co., Ltd. ,  FUJIMI INCORPORATED

Inventor： Yasuhiro Shiojiri ,  Tatsuo Suidzu ,  Kensuke Taguchi ,  Hiroaki Mizuno ,  Takaya Masuda

IPC: C23C4/04 ,  H01J37/32

CPC classification number: C23C4/04 ,  H01J37/32477 ,  C23C4/134

Abstract: There is provided a thermal spray coating which has excellent plasma erosion resistance, which protects members of a plasma etching device from plasma erosion over a long period of term, and which can contribute to the stable production of devices and a longer life of members. The thermal spray material which is one aspect of this invention contains a composite compound containing a rare earth fluoride in the proportion of 40 mol % or more and 80 mol % or less, a magnesium fluoride in the proportion of 10 mol % or more and 40 mol % or less, and a calcium fluoride in the proportion of 0 mol % or more and 40 mol % or less.

公开(公告)号：US11631574B2

公开(公告)日：2023-04-18

申请号：US16764042

申请日：2018-10-29

Applicant: TOCALO CO., LTD.

Inventor： Shikou Abukawa ,  Kensuke Taguchi ,  Yu Asakimori ,  Ryutaro Kawamura

IPC: H01J37/32 ,  H01L21/683 ,  H01L21/687 ,  H05B1/02 ,  H05B3/03 ,  H05B3/28

Abstract: The heater component (1) has a substrate part (2), and a thin coating heater (4) which is equipped outside this substrate part (2) and generates heat by power supply. The thin coating heater (4) is formed of a thermal sprayed coating. The thin coating heater (4) has a heater body (10) and a heater extension part (11). The heater body (10) is arranged on a first end face (2a) of the substrate part (2). The heater extension part (11) is extended from the heater body (10) to a second end face (2b) of the substrate part (2) through a side surface (2c) of the substrate part (2). A tip part (11s) of the heater extension part (11) is a heater power supplying part (12) for supplying electric power to the heater body (10).

公开(公告)号：US11131014B2

公开(公告)日：2021-09-28

申请号：US15568445

申请日：2016-03-23

Applicant: TOCALO CO., LTD.

Inventor： Hiroki Yokota ,  Daisuke Kawai ,  Tatsuo Suidzu

IPC: B23K26/00 ,  C23C4/02 ,  B23K26/352 ,  C23C28/04 ,  C23C8/10 ,  C23C8/02 ,  C23C8/80 ,  C23C4/134

Abstract: A ceramic substrate is irradiated in an atmospheric air with a laser having a power density of 1.0×107-1.0×109 W/cm2 for an action time on an irradiation area of 1.0×10−7-1.0×10−5 s to roughen a surface of the ceramic substrate, as well as to form an oxide layer on a roughened surface. A thermal sprayed coating formed on the ceramic substrate sufficiently adheres to the ceramic substrate via the oxide layer.

公开(公告)号：US10914342B2

公开(公告)日：2021-02-09

申请号：US16229244

申请日：2018-12-21

Applicant: DENSO CORPORATION ,  TOHOKU UNIVERSITY ,  TOCALO Co., Ltd.

Inventor： Kentaro Kishi ,  Yasunori Niiyama ,  Koshi Adachi ,  Shinya Miki

IPC: F16C33/12 ,  F16C33/10 ,  F16C33/04 ,  C10N50/00

Abstract: A sliding member includes: a base material; a solid lubricant layer arranged on a surface of the base material; a defect layer having a material defect, disposed in the solid lubricant layer, and being changeable into an ultra low friction layer by mechanical stress more easily than changing from the solid lubricant layer to the ultra low friction layer; and a ultra low friction layer covering a surface of the defect layer.

公开(公告)号：US20190119802A1

公开(公告)日：2019-04-25

申请号：US16306526

申请日：2017-05-26

Applicant: TOCALO CO., LTD.

Inventor： Tatsuo SUIDZU ,  Akihiro KANNO ,  Noriyuki YASUO ,  Tadaki YOKOTA

IPC: C23C4/02 ,  B24C1/10 ,  C23C4/06 ,  C23C4/18

Abstract: A smooth roll (1) having a surface layer with water-retaining function is obtained by a method for producing a milling roll, comprising: a roughening process for blasting a surface (2a) of a roll substrate (2) constituting the smooth roll (1); and a coating process for spraying a thermal spray material over the roughened surface (2a) of the roll substrate (2) so as to form a thermal sprayed coating (3) having pores (5) that retain water. Satisfactory cereal powder is obtained by preventing drying of cereals in a milling process and retaining an adequate water content.

公开(公告)号：US20160348971A1

公开(公告)日：2016-12-01

申请号：US15116778

申请日：2015-10-02

Applicant: NIPPON STEEL & SUMITOMO METAL CORPORATION ,  TOCALO CO., LTD.

Inventor： Yasushi KURISU ,  Tatsuo SUIDZU

IPC: F27D3/02 ,  C23C4/10 ,  C23C4/18 ,  C23C4/06 ,  C23C22/24 ,  C23C28/00 ,  F27B9/30 ,  C22C29/06

CPC classification number: F27D3/026 ,  B65H27/00 ,  B65H2401/12 ,  B65H2401/13 ,  B65H2404/187 ,  B65H2404/5322 ,  B65H2701/173 ,  C21D9/56 ,  C21D9/563 ,  C22C29/005 ,  C22C29/02 ,  C22C29/06 ,  C22C29/12 ,  C23C4/06 ,  C23C4/10 ,  C23C4/18 ,  C23C22/24 ,  C23C28/00 ,  C23C28/30 ,  C23C28/321 ,  C23C28/345 ,  C23C28/36 ,  F27B9/28 ,  F27B9/30

Abstract: A hearth roll includes a base roll, a thermally sprayed coating formed on the base roll, and a modified coating formed on the thermally sprayed coating. The modified coating is formed by modifying a part or the whole of a surface of the thermally sprayed coating by melting and solidification of the thermally sprayed coating, by irradiating a part or the whole of the surface of the thermally sprayed coating with an energy beam. The thickness of the modified coating is from 2 to 20 μm, and the Vickers hardness HV of the modified coating is from 1.2 to 1.4 times larger than the Vickers hardness HV of the thermally sprayed coating.

Abstract translation: 炉底辊包括基辊，形成在基辊上的热喷涂层，以及形成在喷涂涂层上的改性涂层。 通过用能量束照射喷涂涂层的一部分或全部表面，通过熔融和固化热喷涂涂层来修饰喷涂涂层的表面的一部分或全部而形成改性涂层。 改性涂层的厚度为2〜20μm，改性涂层的维氏硬度HV为喷涂涂层的维氏硬度HV的1.2〜1.4倍。

公开(公告)号：US20150017463A1

公开(公告)日：2015-01-15

申请号：US14376647

申请日：2012-10-26

Applicant: TOCALO CO., LTD.

Inventor： Yoshio Harada ,  Kenichiro Togoe

IPC: B05D1/02

CPC classification number: B05D1/02 ,  B05B7/205 ,  B05D2350/33 ,  C23C4/02 ,  C23C4/04 ,  Y10T428/12056 ,  Y10T428/24372 ,  Y10T428/24413

Abstract: [Problem] To provide a fluoride spray coating covered member adhered with a fluoride spray coating having excellent properties on quality by suppressing a thermal decomposition reaction and an oxide reaction, and to propose a method for forming a cover by firmly adhering the coating.[Solution] A method for forming a fluoride spray coating in an implantation structure onto a substrate surface by spraying particles of a fluoride spraying material onto a substrate surface or a pretreated substrate surface, if necessary through an undercoat layer or spray particle dotted parts of carbide cermet, at a flying velocity of particles of not less than 500 m/sec with an inert gas as a working gas for coating formation at an inert gas temperature of 600° C.-1300° C. as well as a fluoride spray coating covered member.

Abstract translation: [问题]通过抑制热分解反应和氧化反应来提供通过抑制热分解反应和氧化物反应而具有优异质量性质的氟化物喷涂的氟喷涂层覆盖部件，并提出通过牢固地粘合涂层来形成盖的方法。 [解决方案]通过将氟化物喷涂材料的颗粒喷涂到基材表面或预处理的基材表面上，如果需要，通过底涂层或喷涂颗粒的碳化物的点部分将喷涂结构中的氟化物喷涂形成形成在基材表面上的方法 金属陶瓷以不小于500m / sec的颗粒的飞行速度，在惰性气体温度为600℃-1300℃下以惰性气体作为用于涂层形成的工作气体，以及覆盖氟化物喷涂层 会员。

公开(公告)号：US20140370249A1

公开(公告)日：2014-12-18

申请号：US14373505

申请日：2013-01-16

Applicant: TOCALO CO., LTD.

Inventor： Yoshio Harada ,  Takema Teratani ,  Shinya Miki ,  Kenichiro Togoe

IPC: C23C14/48

CPC classification number: C23C14/48 ,  C23C4/04 ,  C23C4/18 ,  Y10T428/24802

Abstract: This invention is to provide a fluoride spray coating covered member having excellent resistance to halogen corrosion and resistance to plasma erosion and displaying identification symbols such as letters, numeric characters, graphic, pattern, firm name, serial number and so on. In the invention, one or more implanting gases selected from fluorine-containing gas, oxygen gas and inert gas are ion-implanted onto a white fluoride spray coating formed on a surface of a substrate, whereby at least a part of the surface of the white fluoride spray coating is changed into a black color to form a black ion-implanted layer.

Abstract translation: 本发明提供一种具有优异的抗卤素腐蚀性和耐等离子体侵蚀性的氟喷涂层覆盖部件，并显示字母，数字，图形，图案，公司名称，序列号等识别符号。 在本发明中，将选自含氟气体，氧气和惰性气体的一种或多种注入气体离子注入到形成在基材表面上的白色氟化物喷涂层上，由此白色表面的至少一部分 氟化物喷涂改为黑色，形成黑色离子注入层。

公开(公告)号：US20040214026A1

公开(公告)日：2004-10-28

申请号：US10849797

申请日：2004-05-21

Applicant: Tocalo Co., Ltd. ,  Tokyo Electron Co., Ltd.

Inventor： Yoshio Harada ,  Junichi Takeuchi ,  Tatsuya Hamaguchi ,  Nobuyuki Nagayama ,  Kouji Mitsuhashi

IPC: B32B015/04 ,  H05H001/24

CPC classification number: H01J37/32477 ,  B01J19/02 ,  B01J2219/0218 ,  B01J2219/0236 ,  B01J2219/024 ,  B01J2219/0263 ,  B01J2219/0286 ,  B01J2219/0894 ,  C09D1/00 ,  C23C4/00 ,  C23C4/02 ,  C23C4/11 ,  Y10T428/12458 ,  Y10T428/12479 ,  Y10T428/12549 ,  Y10T428/12618 ,  Y10T428/24999

Abstract: It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.

Abstract translation: 本发明提供一种等离子体处理容器的内部构件，该等离子体处理容器在含有卤素气体的环境下具有优异的耐化学腐蚀和等离子体侵蚀性，并且其制造方法是通过将基材的表面覆盖而形成的构件 由作为底涂层形成的金属涂层，在作为中间层的底涂层上形成的Al 2 O 3膜和在中间层上形成的作为顶涂层的Y 2 O 3喷涂层构成的多层复合层。