-
公开(公告)号：US11209398B2
公开(公告)日：2021-12-28
申请号：US16597615
申请日：2019-10-09
Applicant: APPLIED MATERIALS, INC.
Inventor： Chuang-Chia Lin , Surajit Kumar , Upendra Ummethala
Abstract: Embodiments disclosed herein include diagnostic substrates and methods of using such substrates. In an embodiment, a diagnostic substrate comprises a substrate, and a device layer over the substrate. In an embodiment, the diagnostic substrate further comprises a resonator in the device layer. In an embodiment, the resonator comprises a cavity, a cover layer over the cavity, and electrodes within the cavity for driving and sensing resonance of the cover layer. In an embodiment, the diagnostic substrate further comprises a reflector surrounding a perimeter of the resonator.
-
公开(公告)号：US20190265288A1
公开(公告)日：2019-08-29
申请号：US16283371
申请日：2019-02-22
Applicant: APPLIED MATERIALS, INC.
Inventor： Chuang-Chia Lin , Upendra Ummethala , Andrew Choe
Abstract: Embodiments include systems and methods for determining a processing parameter of a processing operation utilizing micro resonator sensors. Some embodiments include a diagnostic substrate comprising a substrate, a circuit layer over the substrate, a cavity in the circuit layer, a capping layer over the circuit layer, a resonating body in or over the cavity, one or more electrodes in the cavity, and circuitry for driving and sensing the resonant frequency of the resonating body. In an embodiment, the circuitry comprises a biasing circuitry block configured to provide a bias voltage to the one or more electrodes, a frequency generator circuitry block configured to provide a signal with a varying frequency to the one or more electrodes, and a sensing circuitry block configured to detect a value correlated to oscillation of the resonating body.
-
公开(公告)号：US12062529B2
公开(公告)日：2024-08-13
申请号：US17395351
申请日：2021-08-05
Applicant: Applied Materials, Inc.
Inventor： David John Peterson , Chuang-Chia Lin
IPC: H01J37/32
CPC classification number: H01J37/32917 , H01J37/3222 , H01J37/32899 , H01J2237/24507 , H01J2237/24585
Abstract: Embodiments disclosed herein include sensor devices and methods of using the sensor devices. In an embodiment, a sensor device comprises a substrate, a support extending up from the substrate, and a resonator mechanically coupled to the support. In an embodiment, the sensor device further comprises an antenna that is configured to electromagnetically couple with the resonator, wherein the antenna is connected to a transmission line in the substrate.
-
公开(公告)号：US20230326726A1
公开(公告)日：2023-10-12
申请号：US17715866
申请日：2022-04-07
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin , Wenwei Qiao
CPC classification number: H01J37/3288 , G01J3/10 , G01J3/0205 , B08B9/46 , B25J11/0085 , G01J2003/102 , B08B2209/08
Abstract: Embodiments disclosed herein include a diagnostic substrate. In an embodiment, the diagnostic substrate comprises a substrate, a circuit board on the substrate, and a spectrometer coupled to the circuit board. In an embodiment, the diagnostic substrate further comprises a processor on the circuit board and communicatively coupled to the spectrometer.
-
公开(公告)号：US11735401B2
公开(公告)日：2023-08-22
申请号：US17466912
申请日：2021-09-03
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin , Upendra Ummethala , Steven E. Babayan , Lei Lian
CPC classification number: H01J37/32917 , G01J3/0218 , G01J3/443 , H01J37/22 , H01J2237/24585
Abstract: Embodiments disclosed herein include optical sensor systems and methods of using such systems. In an embodiment, the optical sensor system comprises a housing and an optical path through the housing. In an embodiment, the optical path comprises a first end and a second end. In an embodiment a reflector is at the first end of the optical path, and a lens is between the reflector and the second end of the optical path. In an embodiment, the optical sensor further comprises an opening through the housing between the lens and the reflector.
-
Patent Agency Ranking
公开(公告)号：US20220113208A1
公开(公告)日：2022-04-14
申请号：US17068733
申请日：2020-10-12
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin
Abstract: A sensor assembly that includes a surface acoustic wave (SAW) sensor. The SAW sensor is adapted to measure a first environmental condition in response to receiving an RF signal. The SAW sensor includes a substrate having a layer of piezoelectric material. The SAW sensor further includes a interdigitated transducer (IDT) formed on the piezoelectric material. The IDT includes two comb-shaped electrodes having interlocking conducting digits in a first arrangement. The interlocking conducting digits in the first arrangement generates a first signal modulation of an RF signal received by the first IDT. The first signal modulation identifies the first SAW sensor.
-
公开(公告)号：US20210398785A1
公开(公告)日：2021-12-23
申请号：US17466912
申请日：2021-09-03
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin , Upendra Ummethala , Steven E. Babayan , Lei Lian
Abstract: Embodiments disclosed herein include optical sensor systems and methods of using such systems. In an embodiment, the optical sensor system comprises a housing and an optical path through the housing. In an embodiment, the optical path comprises a first end and a second end. In an embodiment a reflector is at the first end of the optical path, and a lens is between the reflector and the second end of the optical path. In an embodiment, the optical sensor further comprises an opening through the housing between the lens and the reflector.
-
公开(公告)号：US11114286B2
公开(公告)日：2021-09-07
申请号：US16378271
申请日：2019-04-08
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin , Upendra Ummethala , Steven E. Babayan , Lei Lian
Abstract: Embodiments disclosed herein include optical sensor systems and methods of using such systems. In an embodiment, the optical sensor system comprises a housing and an optical path through the housing. In an embodiment, the optical path comprises a first end and a second end. In an embodiment a reflector is at the first end of the optical path, and a lens is between the reflector and the second end of the optical path. In an embodiment, the optical sensor further comprises an opening through the housing between the lens and the reflector.
-
公开(公告)号：US20210140824A1
公开(公告)日：2021-05-13
申请号：US16682616
申请日：2019-11-13
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin , Upendra Ummethala
Abstract: Embodiments disclosed herein include an optical sensor system for use in plasma processing tools. In an embodiment, the optical sensor system, comprises an optically clear body with a first surface and a second surface facing away from the first surface. In an embodiment, the optically clear body further comprises a third surface that is recessed from the second surface. In an embodiment, the optical sensor system further comprises a target over the third surface and a first reflector to optically couple the first surface to the target.
-
公开(公告)号：US20210080431A1
公开(公告)日：2021-03-18
申请号：US16597615
申请日：2019-10-09
Applicant: APPLIED MATERIALS, INC.
Inventor： Chuang-Chia Lin , Surajit Kumar , Upendra Ummethala
Abstract: Embodiments disclosed herein include diagnostic substrates and methods of using such substrates. In an embodiment, a diagnostic substrate comprises a substrate, and a device layer over the substrate. In an embodiment, the diagnostic substrate further comprises a resonator in the device layer. In an embodiment, the resonator comprises a cavity, a cover layer over the cavity, and electrodes within the cavity for driving and sensing resonance of the cover layer. In an embodiment, the diagnostic substrate further comprises a reflector surrounding a perimeter of the resonator.
-
-
-
-
-
-
-
-
-
Search Results
31
records
(took 0.024 seconds)
