公开(公告)号：US08781287B2

公开(公告)日：2014-07-15

申请号：US13946214

申请日：2013-07-19

Applicant: Axsun Technologies, Inc.

Inventor： Dale C. Flanders ,  James W. Getz ,  Walid A. Atia ,  Peter S. Whitney ,  Mark E. Kuznetsov

IPC: G02B6/36

CPC classification number: G01Q60/22 ,  A61B5/0066 ,  A61B5/0084 ,  A61B5/02007 ,  A61B2562/12 ,  G02B23/2469

Abstract: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. The refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.

Abstract translation: 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤，包括纵向延伸的光纤槽的硅光学台，其保持光纤的光纤终端和反射 表面，其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法，其包括在诸如SOI（绝缘体上硅）晶片的复合晶片材料的第一层中形成折射透镜，并沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。

公开(公告)号：US20140176958A1

公开(公告)日：2014-06-26

申请号：US13723829

申请日：2012-12-21

Applicant: AXSUN TECHNOLOGIES, INC.

Inventor： Dale C. Flanders ,  Mark E. Kuznetsov ,  Walid A. Atia ,  Bartley C. Johnson

IPC: H01L33/00 ,  G01B9/02 ,  H01S5/06

CPC classification number: H01S5/068 ,  G01B9/02004 ,  G01B9/02091 ,  H01L33/005 ,  H01S5/02204 ,  H01S5/02216 ,  H01S5/0222 ,  H01S5/02224 ,  H01S5/02284 ,  H01S5/02288 ,  H01S5/02415 ,  H01S5/041 ,  H01S5/06 ,  H01S5/183 ,  H01S5/18305 ,  H01S5/18341 ,  H01S5/18358 ,  H01S5/18366 ,  H01S5/18375

Abstract: A microelectromechanical systems (MEMS)-tunable vertical-cavity surface-emitting laser (VCSEL) in which the MEMS mirror is a bonded to the active region. This allows for a separate electrostatic cavity, that is outside the laser's optical resonant cavity. Moreover, the use of this cavity configuration allows the MEMS mirror to be tuned by pulling the mirror away from the active region. This reduces the risk of snap down. Moreover, since the MEMS mirror is now bonded to the active region, much wider latitude is available in the technologies that are used to fabricate the MEMS mirror. This is preferably deployed as a swept source in an optical coherence tomography (OCT) system.

Abstract translation: 微机电系统（MEMS）可调垂直腔表面发射激光器（VCSEL），其中MEMS反射镜结合到有源区域。 这允许在激光器的光学谐振腔外部的单独的静电腔。 此外，通过使用该腔结构，可以通过将镜子远离有源区域来调节MEMS镜。 这样可以降低坠落的风险。 此外，由于MEMS反射镜现在被结合到有源区域，所以在用于制造MEMS反射镜的技术中可获得更宽的纬度。 这优选地被部署为光学相干断层摄影（OCT）系统中的扫频源。

公开(公告)号：US20140168658A1

公开(公告)日：2014-06-19

申请号：US14159748

申请日：2014-01-21

Applicant: Axsun Technologies, Inc.

Inventor： Bartley C. Johnson ,  Walid A. Atia ,  Mark E. Kuznetsov ,  Dale C. Flanders

IPC: G01B9/02

CPC classification number: G01B9/02091 ,  G01B9/02004 ,  G01B9/02007 ,  G01B9/02069 ,  H01S3/1062 ,  H01S3/2383 ,  H01S5/141

Abstract: An optical coherence analysis system comprising: a first swept source that generates a first optical signal that is tuned over a first spectral scan band, a second swept source that generates a second optical signal that is tuned over a second spectral scan band, a combiner for combining the first optical signal and the second optical signal to form a combined optical signal, an interferometer for dividing the combined optical signal between a reference arm leading to a reference reflector and a sample arm leading to a sample, and a detector system for detecting an interference signal generated from the combined optical signal from the reference arm and from the sample arm.

Abstract translation: 一种光学相干分析系统，包括：第一扫描光源，其产生在第一光谱扫描带上调谐的第一光信号，产生在第二光谱扫描带上调谐的第二光信号的第二扫描光源， 组合第一光信号和第二光信号以形成组合的光信号;干涉仪，用于将导通到参考反射器的参考臂与通向样本的采样臂之间的组合光信号分开;以及检测器系统，用于检测 由来自参考臂和来自采样臂的组合光信号产生的干扰信号。

公开(公告)号：US20130215432A1

公开(公告)日：2013-08-22

申请号：US13847616

申请日：2013-03-20

Applicant: Axsun Technologies, Inc.

Inventor： Dale C. Flanders ,  Walid A. Atia ,  Mark E. Kuznetsov

IPC: G02B5/22 ,  G01B9/02

CPC classification number: G02B5/22 ,  G01B9/02004 ,  G01B9/02091 ,  G01J3/10 ,  G01J3/26 ,  G01J3/4338 ,  G01N21/4795

Abstract: An integrated swept wavelength optical source uses a filtered ASE signal with an optical amplifier and tracking filter. This source comprises a micro optical bench, a source for generating broadband light, a first tunable Fabry Perot filter, installed on the bench, for spectrally filtering the broadband light from the broadband source to generate a narrowband tunable signal, an amplifier, installed on the bench, for amplifying the tunable signal, and a second tunable Fabry Perot filter, installed on the bench, for spectrally filtering the amplified tunable signal from the amplifier. A self-tracking arrangement is also possible where a single tunable filter both generates the narrowband signal and spectrally filters the amplified signal. In some examples, two-stage amplification is provided. The use of a single bench implementation yields a low cost high performance system. For example, polarization control between components is no longer necessary.

Abstract translation: 集成扫描波长光源使用经滤波的ASE信号与光放大器和跟踪滤波器。 该源包括安装在工作台上的用于产生宽带光源的微型光学平台，用于产生宽带光源的第一可调谐法布里珀罗滤波器，用于对来自宽带源的宽带光进行频谱滤波以产生窄带可调谐信号，放大器，安装在 用于放大可调信号的工作台，以及安装在工作台上的第二个可调谐法布里珀罗滤波器，用于对来自放大器的放大的可调谐信号进行频谱滤波。 单个可调谐滤波器既可以生成窄带信号又对放大的信号进行频谱滤波，则自我跟踪装置也是可能的。 在一些实例中，提供了两级放大。 使用单台实现产生低成本的高性能系统。 例如，不再需要组件之间的极化控制。