公开(公告)号：US20120281814A1

公开(公告)日：2012-11-08

申请号：US13547073

申请日：2012-07-12

Applicant: Boris Yokhin ,  Isaac Mazor ,  Alexander Krohmal ,  Amos Gvirtzman ,  Gennady Openganden ,  David Berman ,  Matthew Wormington

Inventor： Boris Yokhin ,  Isaac Mazor ,  Alexander Krohmal ,  Amos Gvirtzman ,  Gennady Openganden ,  David Berman ,  Matthew Wormington

IPC: G01N23/207

CPC classification number: G01N23/207

Abstract: A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.

Abstract translation: 一种用于分析的方法包括将X射线的会聚束引导到其上形成有外延层的样品的表面，并且感测从样品衍射的X射线，同时将感测的X射线解析为角度的函数 从而产生由于外延层而引起的衍射峰和条纹的衍射光谱。 分析边缘的特性以测量外延层的弛豫。

公开(公告)号：US08243878B2

公开(公告)日：2012-08-14

申请号：US12683436

申请日：2010-01-07

Applicant: Boris Yokhin ,  Isaac Mazor ,  Alexander Krohmal ,  Amos Gvirtzman ,  Gennady Openganden ,  David Berman ,  Matthew Wormington

Inventor： Boris Yokhin ,  Isaac Mazor ,  Alexander Krohmal ,  Amos Gvirtzman ,  Gennady Openganden ,  David Berman ,  Matthew Wormington

IPC: G01N23/20 ,  G01N23/203 ,  G01N23/207

CPC classification number: G01N23/207

Abstract: A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.

Abstract translation: 一种用于分析的方法包括将X射线的会聚束引导到其上形成有外延层的样品的表面，并且感测从样品衍射的X射线，同时将感测的X射线解析为角度的函数 从而产生由于外延层而引起的衍射峰和条纹的衍射光谱。 分析边缘的特性以测量外延层的弛豫。

公开(公告)号：US07551719B2

公开(公告)日：2009-06-23

申请号：US11200857

申请日：2005-08-10

Applicant: Boris Yokhin ,  Alexander Krokhmal ,  Tzachi Rafaeli ,  Isaac Mazor ,  Amos Gvirtzman

Inventor： Boris Yokhin ,  Alexander Krokhmal ,  Tzachi Rafaeli ,  Isaac Mazor ,  Amos Gvirtzman

IPC: G01B15/02 ,  G01N23/20 ,  G01N23/201

CPC classification number: G01N23/20008

Abstract: Apparatus for analysis of a sample includes a radiation source, which is adapted to direct a first, converging beam of X-rays toward a surface of the sample and to direct a second, collimated beam of the X-rays toward the surface of the sample. A motion assembly moves the radiation source between a first source position, in which the X-rays are directed toward the surface of the sample at a grazing angle, and a second source position, in which the X-rays are directed toward the surface in a vicinity of a Bragg angle of the sample. A detector assembly senses the X-rays scattered from the sample as a function of angle while the radiation source is in either of the first and second source configurations and in either of the first and second source positions. A signal processor receives and processes output signals from the detector assembly so as to determine a characteristic of the sample.

Abstract translation: 用于分析样品的装置包括辐射源，其适于将X射线的第一收敛束指向样品的表面，并将X射线的第二准直光束引向样品的表面 。 运动组件使辐射源在X射线以掠射角指向样品表面的第一源位置和第二源位置之间移动，在该第二源位置，X射线朝向表面 样品的布拉格角附近。 检测器组件在辐射源处于第一和第二源配置中的任一个中以及在第一和第二源位置中的任一个中时，感测从样品散射的X射线作为角度的函数。 信号处理器接收并处理来自检测器组件的输出信号，以便确定样品的特性。

公开(公告)号：US20070274447A1

公开(公告)日：2007-11-29

申请号：US11798617

申请日：2007-05-15

Applicant: Isaac Mazor ,  Alex Dikopoltsev ,  Boris Yokhin ,  Tzachi Rafaeli ,  Alex Tokar ,  David Berman ,  Moshe Beylin

Inventor： Isaac Mazor ,  Alex Dikopoltsev ,  Boris Yokhin ,  Tzachi Rafaeli ,  Alex Tokar ,  David Berman ,  Moshe Beylin

IPC: G01N23/20

CPC classification number: G01N23/201 ,  G01N2223/052

Abstract: A computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of X-rays, and measuring an angular distribution of the X-rays that are emitted from the surface responsively to the beam, so as to produce a respective plurality of X-ray spectra. The X-ray spectra are analyzed to produce respective figures-of-merit indicative of a measurement quality of the X-ray spectra at the respective locations. One or more locations are selected out of the plurality of locations responsively to the figures-of-merit, and a property of the sample is estimated using the X-ray spectra measured at the selected locations.

Abstract translation: 用于检查样品的计算机实现的方法包括在样品的表面上限定多个位置，用X射线照射每个位置处的表面，并测量X射线的角度分布， 响应于光束从表面发射，以产生相应的多个X射线光谱。 分析X射线光谱以产生各自的相应的品质指数，表示在各个位置处的X射线光谱的测量质量。 响应于品质因数从多个位置中选择一个或多个位置，并且使用在所选择的位置处测量的X射线光谱来估计样品的性质。

公开(公告)号：US07103142B1

公开(公告)日：2006-09-05

申请号：US11065737

申请日：2005-02-24

Applicant: Dileep Agnihotri ,  Alex Dikopoltsev ,  Boris Yokhin

Inventor： Dileep Agnihotri ,  Alex Dikopoltsev ,  Boris Yokhin

IPC: G01T1/36

CPC classification number: G01N23/20

Abstract: A method for inspection of a sample includes irradiating the sample with a beam of X-rays, measuring a distribution of the X-rays that are emitted from the sample responsively to the beam, thereby generating an X-ray spectrum, and applying a multi-step analysis to the spectrum so as to determine one or more physical properties of a simulated model of the sample. The multi-step analysis includes spectrally analyzing the spectrum so as to determine one or more characteristic frequencies and fitting the simulated model to the spectrum by an iterative optimization process beginning from an initial condition determined by the one or more characteristic frequencies.

Abstract translation: 用于检查样品的方法包括用X射线照射样品，测量响应于光束从样品发射的X射线的分布，从而产生X射线谱，并且应用多 对光谱进行分析，以确定样品的模拟模型的一个或多个物理性质。 多步分析包括频谱分析频谱，以便通过从由一个或多个特征频率确定的初始条件开始的迭代优化过程来确定一个或多个特征频率并将模拟模型拟合到频谱中。

公开(公告)号：US07068753B2

公开(公告)日：2006-06-27

申请号：US10902177

申请日：2004-07-30

Applicant: David Berman ,  Isaac Mazor ,  Boris Yokhin ,  Amos Gvirtzman

Inventor： David Berman ,  Isaac Mazor ,  Boris Yokhin ,  Amos Gvirtzman

IPC: G01N23/20

CPC classification number: G01N23/203 ,  G01B15/02

Abstract: A method for inspection of a sample having a surface layer. The method includes acquiring a first reflectance spectrum of the sample while irradiating the sample with a collimated beam of X-rays, and processing the first reflectance spectrum to measure a diffuse reflection property of the sample. A second reflectance spectrum of the sample is acquired while irradiating the sample with a converging beam of the X-rays. The second reflectance spectrum is analyzed using the diffuse reflection property so as to determine a characteristic of the surface layer of the sample.

Abstract translation: 一种用于检查具有表面层的样品的方法。 该方法包括在准直的X射线束照射样品时获取样品的第一反射光谱，并且处理第一反射光谱以测量样品的漫反射特性。 在用X射线的会聚束照射样品的同时获取样品的第二反射光谱。 使用漫反射特性分析第二反射光谱，以确定样品的表面层的特性。

公开(公告)号：US20060115047A1

公开(公告)日：2006-06-01

申请号：US11000053

申请日：2004-12-01

Applicant: Boris Yokhin

Inventor： Boris Yokhin

IPC: G01N23/20 ,  G01N23/201

CPC classification number: G01N23/201

Abstract: X-ray apparatus, consisting of a single X-ray tube which is adapted to generate X-rays and a first optic which is adapted to focus a first portion of the X-rays onto a region of a sample via a first beam path, thereby generating first scattered X-rays from the region. The apparatus also includes a second optic which is adapted to focus a second portion of the X-rays onto the region of the sample via a second beam path, different from the first beam path, thereby generating second scattered X-rays from the region. A detector assembly simultaneously collects the first and the second scattered X-rays.

Abstract translation: X射线装置由适于产生X射线的单个X射线管和适于将X射线的第一部分经由第一光束路径聚焦到样品的区域上的第一光学元件组成， 从而从该区域产生第一散射X射线。 该装置还包括第二光学器件，其适于通过不同于第一光束路径的第二光束路径将X射线的第二部分聚焦到样品的区域上，从而从该区域产生第二散射X射线。 检测器组件同时收集第一和第二散射X射线。

公开(公告)号：US20060062351A1

公开(公告)日：2006-03-23

申请号：US11200857

申请日：2005-08-10

Applicant: Boris Yokhin ,  Alexander Krokhmal ,  Tzachi Rafaeli ,  Isaac Mazor ,  Amos Gvirtzman

Inventor： Boris Yokhin ,  Alexander Krokhmal ,  Tzachi Rafaeli ,  Isaac Mazor ,  Amos Gvirtzman

IPC: G01N23/201

CPC classification number: G01N23/20008

Abstract: Apparatus for analysis of a sample includes a radiation source, which is adapted to direct a first, converging beam of X-rays toward a surface of the sample and to direct a second, collimated beam of the X-rays toward the surface of the sample. a motion assembly moves the radiation source between a first source position, in which the X-rays are directed toward the surface of the sample at a grazing angle, and a second source position, in which the X-rays are directed toward the surface in a vicinity of a Bragg angle of the sample. A detector assembly senses the X-rays scattered from the sample as a function of angle while the radiation source is in either of the first and second source configurations and in either of the first and second source positions. A signal processor receives and processes output signals from the detector assembly so as to determine a characteristic of the sample.

Abstract translation: 用于分析样品的装置包括辐射源，其适于将X射线的第一收敛束指向样品的表面，并将X射线的第二准直光束引向样品的表面 。 运动组件将辐射源移动在X射线以掠射角指向样品表面的第一源位置和X射线朝向表面的第二源位置 样品的布拉格角附近。 检测器组件在辐射源处于第一和第二源配置中的任一个中以及在第一和第二源位置中的任一个中时，感测从样品散射的X射线作为角度的函数。 信号处理器接收并处理来自检测器组件的输出信号，以便确定样品的特性。

公开(公告)号：US20060062350A1

公开(公告)日：2006-03-23

申请号：US10946426

申请日：2004-09-21

Applicant: Boris Yokhin ,  Isaac Mazor ,  Tzachi Rafaeli

Inventor： Boris Yokhin ,  Isaac Mazor ,  Tzachi Rafaeli

IPC: G01N23/201

CPC classification number: G01N23/20008

Abstract: Apparatus for analysis of a sample includes a radiation source, which is adapted to direct a converging beam of X-rays toward a surface of the sample. At least one detector array is arranged to sense the X-rays scattered from the sample as a function of elevation angle over a range of elevation angles simultaneously, and to generate output signals responsively to the scattered X-rays. The detector array has a first configuration in which the detector array senses the X-rays that are reflected from the surface of the sample at a grazing angle, and a second configuration in which the detector array senses the X-rays that are diffracted from the surface in a vicinity of a Bragg angle of the sample. A signal processor processes the output signals so as to determine a characteristic of the surface layer of the sample.

Abstract translation: 用于分析样品的装置包括辐射源，其适于将X射线的会聚束引导到样品的表面。 至少一个检测器阵列布置成同时检测从样品散射的X射线作为仰角范围上的仰角的函数，并且响应于散射的X射线产生输出信号。 检测器阵列具有第一配置，其中检测器阵列以掠射角度感测从样品表面反射的X射线，以及第二配置，其中检测器阵列感测从衍射的X射线衍射的X射线 表面在样品的布拉格角附近。 信号处理器处理输出信号，以便确定样品的表面层的特性。

公开(公告)号：US06895071B2

公开(公告)日：2005-05-17

申请号：US10635365

申请日：2003-08-06

Applicant: Boris Yokhin ,  Alexander Dikopoltsev ,  Isaac Mazor ,  David Berman

Inventor： Boris Yokhin ,  Alexander Dikopoltsev ,  Isaac Mazor ,  David Berman

IPC: G01B15/02 ,  G01N23/20 ,  G01N23/223 ,  G01T1/36

CPC classification number: G01T1/36

Abstract: Reflectometry apparatus includes a radiation source, adapted to irradiate a sample with radiation over a range of angles relative to a surface of the sample, and a detector assembly, positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal responsive thereto. A shutter is adjustably positionable to intercept the radiation, the shutter having a blocking position, in which it blocks the radiation in a lower portion of the range of angles, thereby allowing the reflected radiation to reach the array substantially only in a higher portion of the range, and a clear position, in which the radiation in the lower portion of the range reaches the array substantially without blockage.

Abstract translation: 反射仪装置包括：辐射源，其适于在相对于样品表面的一定范围的角度范围内辐射样品;以及检测器组件，其定位成在角度范围内接收从样品反射的辐射，并产生 响应于此的信号。 快门可调节地定位以拦截辐射，快门具有阻挡位置，其中阻挡在角度范围的下部的辐射，从而允许反射的辐射基本上仅在其中的较高部分 范围和清晰的位置，其中该范围的下部的辐射基本上没有阻塞地达到阵列。