公开(公告)号：US20120140889A1

公开(公告)日：2012-06-07

申请号：US12958420

申请日：2010-12-02

Applicant: John Wall ,  David Jacques ,  Boris Yokhin ,  Alexander Krokhmal ,  Paul Ryan ,  Richard Bytheway ,  David Berman ,  Matthew Wormington

Inventor： John Wall ,  David Jacques ,  Boris Yokhin ,  Alexander Krokhmal ,  Paul Ryan ,  Richard Bytheway ,  David Berman ,  Matthew Wormington

IPC: G01N23/207

CPC classification number: G01N23/207

Abstract: A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having multiple single-crystal layers, including at least a first layer and a second layer that is formed over and tilted relative to the first layer. The X-rays that are diffracted from each of the first and second layers are sensed simultaneously while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including at least a first diffraction peak due to the first layer and a second diffraction peak due to the second layer. The diffraction spectrum is analyzed so as to identify a characteristic of at least the second layer.

Abstract translation: 一种用于分析的方法包括将X射线的会聚束指向具有多个单晶层的样品的表面，所述样品具有至少第一层和形成在第一层上并相对于第一层倾斜的第二层。 在将感测到的X射线分解为角度的同时，同时检测从第一和第二层中的每一个衍射的X射线，以便产生至少包括由于第一层的第一衍射峰的衍射光谱，以及 由于第二层造成的第二衍射峰。 分析衍射光谱以识别至少第二层的特征。

公开(公告)号：US20090074137A1

公开(公告)日：2009-03-19

申请号：US12272050

申请日：2008-11-17

Applicant: Dileep Agnihotri ,  Jeremy O'Dell ,  Isaac Mazor ,  Boris Yokhin

Inventor： Dileep Agnihotri ,  Jeremy O'Dell ,  Isaac Mazor ,  Boris Yokhin

IPC: G01N23/223

CPC classification number: G01B15/02 ,  G01N23/223 ,  G01N2223/076 ,  H01L22/12

Abstract: A method for inspection of a sample includes directing an excitation beam to impinge on an area of a planar sample that includes a feature having sidewalls perpendicular to a plane of the sample, the sidewalls having a thin film thereon. An intensity of X-ray fluorescence (XRF) emitted from the sample responsively to the excitation beam is measured, and a thickness of the thin film on the sidewalls is assessed based on the intensity. In another method, the width of recesses in a surface layer of a sample and the thickness of a material deposited in the recesses after polishing are assessed using XRF.

Abstract translation: 用于检查样品的方法包括引导激发光束撞击平面样品的区域，该平面样品的区域包括具有垂直于样品平面的侧壁的特征，该侧壁在其上具有薄膜。 测量响应于激发光束从样品发射的X射线荧光强度（XRF），并且基于强度来评估侧壁上的薄膜的厚度。 在另一种方法中，使用XRF来评估样品的表面层中的凹陷的宽度和抛光后沉积在凹部中的材料的厚度。

公开(公告)号：US07481579B2

公开(公告)日：2009-01-27

申请号：US11389490

申请日：2006-03-27

Applicant: Boris Yokhin ,  Isaac Mazor ,  Sean Jameson ,  Alex Dikopoltsev

Inventor： Boris Yokhin ,  Isaac Mazor ,  Sean Jameson ,  Alex Dikopoltsev

IPC: G01D18/00

CPC classification number: G03F7/70633

Abstract: A method for inspection includes directing a beam of X-rays to impinge upon an area of a sample containing first and second features formed respectively in first and second thin film layers, which are overlaid on a surface of the sample. A pattern of the X-rays diffracted from the first and second features is detected and analyzed in order to assess an alignment of the first and second features.

Abstract translation: 一种检查方法包括将X射线束引导到包含分别在第一和第二薄膜层上形成的第一和第二特征的样品的区域上，该第一和第二特征覆盖在样品的表面上。 检测和分析从第一和第二特征衍射的X射线的图案，以评估第一和第二特征的对准。

公开(公告)号：US20070224518A1

公开(公告)日：2007-09-27

申请号：US11389490

申请日：2006-03-27

Applicant: Boris Yokhin ,  Isaac Mazor ,  Sean Jameson ,  Alex Dikopoltsev

Inventor： Boris Yokhin ,  Isaac Mazor ,  Sean Jameson ,  Alex Dikopoltsev

IPC: G03F1/00

CPC classification number: G03F7/70633

Abstract: A method for inspection includes directing a beam of X-rays to impinge upon an area of a sample containing first and second features formed respectively in first and second thin film layers, which are overlaid on a surface of the sample. A pattern of the X-rays diffracted from the first and second features is detected and analyzed in order to assess an alignment of the first and second features.

Abstract translation: 一种检查方法包括将X射线束引导到包含分别在第一和第二薄膜层上形成的第一和第二特征的样品的区域上，该第一和第二特征覆盖在样品的表面上。 检测和分析从第一和第二特征衍射的X射线的图案，以评估第一和第二特征的对准。

公开(公告)号：US07245695B2

公开(公告)日：2007-07-17

申请号：US11103071

申请日：2005-04-11

Applicant: Isaac Mazor ,  Alex Dikopoltsev ,  Boris Yokhin ,  Tzachi Rafaeli ,  Alex Tokar

Inventor： Isaac Mazor ,  Alex Dikopoltsev ,  Boris Yokhin ,  Tzachi Rafaeli ,  Alex Tokar

IPC: G01N23/223

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: A method for testing a material applied to a surface of a sample includes directing an excitation beam, having a known beam-width and intensity cross-section, onto a region of the sample. An intensity of X-ray fluorescence emitted from the region responsively to the excitation beam is measured. A distribution of the material within the region is estimated, responsively to the measured intensity of the X-ray fluorescence and to the intensity cross-section of the excitation beam, with a spatial resolution that is finer than the beam-width.

Abstract translation: 用于测试施加到样品表面的材料的方法包括将具有已知束宽度和强度横截面的激发束引导到样品的区域上。 测量从响应于激发光束的区域发射的X射线荧光的强度。 响应于X射线荧光的测量强度和激发光束的强度横截面，估计区域内材料的分布，其空间分辨率比光束宽度更精细。

公开(公告)号：US20060274886A1

公开(公告)日：2006-12-07

申请号：US11487433

申请日：2006-07-17

Applicant: Isaac Mazor ,  Boris Yokhin

Inventor： Isaac Mazor ,  Boris Yokhin

IPC: G01N23/20

CPC classification number: G01N23/20

Abstract: A method for X-ray analysis of a sample includes directing a beam of X-rays to impinge on an area of a periodic feature on a surface of the sample and receiving the X-rays scattered from the surface in a reflection mode so as to detect a spectrum of diffraction in the scattered X-rays as a function of azimuth. The spectrum of diffraction is analyzed in order to determine a dimension of the feature.

公开(公告)号：US20060227931A1

公开(公告)日：2006-10-12

申请号：US11103071

申请日：2005-04-11

Applicant: Isaac Mazor ,  Alex Dikopoltsev ,  Boris Yokhin ,  Tzachi Rafaeli ,  Alexander Tokar

Inventor： Isaac Mazor ,  Alex Dikopoltsev ,  Boris Yokhin ,  Tzachi Rafaeli ,  Alexander Tokar

IPC: G01N23/223 ,  G01T1/36

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: A method for testing a material applied to a surface of a sample includes directing an excitation beam, having a known beam-width and intensity cross-section, onto a region of the sample. An intensity of X-ray fluorescence emitted from the region responsively to the excitation beam is measured. A distribution of the material within the region is estimated, responsively to the measured intensity of the X-ray fluorescence and to the intensity cross-section of the excitation beam, with a spatial resolution that is finer than the beam-width.

Abstract translation: 用于测试施加到样品表面的材料的方法包括将具有已知束宽度和强度横截面的激发束引导到样品的区域上。 测量从响应于激发光束的区域发射的X射线荧光的强度。 响应于X射线荧光的测量强度和激发光束的强度横截面，估计区域内材料的分布，其空间分辨率比光束宽度更精细。

公开(公告)号：US07113566B1

公开(公告)日：2006-09-26

申请号：US11181746

申请日：2005-07-15

Applicant: Asher Peled ,  Isaac Mazor ,  Boris Yokhin

Inventor： Asher Peled ,  Isaac Mazor ,  Boris Yokhin

IPC: G01N23/20 ,  G21K1/04 ,  H05G1/00

CPC classification number: G01N23/20

Abstract: A method for inspection of a sample includes directing a beam of X-rays toward a sample and configuring an array of detector elements to capture the X-rays scattered from the sample. The sample is shifted in a direction parallel to the axis of the array between at least first and second positions, which positions are separated one from another by an increment that is not an integer multiple of the pitch of the array. At least first and second signals are generated by the detector elements responsively to the X-rays captured thereby while the sample is in at least the first and second positions, respectively. The first and second signals are combined so as to determine an X-ray scattering profile of the sample as a function of position along the axis.

Abstract translation: 用于检查样品的方法包括将X射线束朝向样品引导并且配置检测器元件的阵列以捕获从样品散射的X射线。 样本在至少第一和第二位置之间沿与阵列的轴平行的方向移位，这些位置彼此分开不是阵列的音调的整数倍的增量。 响应于由此捕获的X射线，检测器元件至少产生第一和第二信号，而样品分别处于至少第一和第二位置。 第一和第二信号被组合以确定样品的X射线散射分布作为沿轴的位置的函数。

公开(公告)号：US6041095A

公开(公告)日：2000-03-21

申请号：US28588

申请日：1998-02-24

Applicant: Boris Yokhin

Inventor： Boris Yokhin

IPC: G01N23/223

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: Apparatus for X-ray excitation of a sample, including a substantially stationary X-ray source and X-ray optics, including at least one secondary target and a movable element. The movable element has at least a first position wherein X-rays emitted by the source excite the sample directly, and a second position wherein X-rays emitted by the source strike the at least one secondary target, causing the secondary target to emit X-rays that excite the sample, while the X-rays emitted by the source are substantially prevented from exciting the sample.

Abstract translation: 用于样品的X射线激发的装置，包括基本上固定的X射线源和X射线光学器件，包括至少一个次要靶和可移动元件。 可移动元件具有至少第一位置，其中由源发射的X射线直接激发样品，以及第二位置，其中由源发射的X射线撞击至少一个次目标， 激发样品的射线，而源头发射的X射线基本上被阻止激发样品。

公开(公告)号：US08731138B2

公开(公告)日：2014-05-20

申请号：US13547073

申请日：2012-07-12

Applicant: Boris Yokhin ,  Isaac Mazor ,  Alexander Krohmal ,  Amos Gvirtzman ,  Gennady Openganden ,  David Berman ,  Matthew Wormington

Inventor： Boris Yokhin ,  Isaac Mazor ,  Alexander Krohmal ,  Amos Gvirtzman ,  Gennady Openganden ,  David Berman ,  Matthew Wormington

IPC: G01N23/20 ,  G01N23/203 ,  G01N23/207

CPC classification number: G01N23/207

Abstract: A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.

Abstract translation: 一种用于分析的方法包括将X射线的会聚束引导到其上形成有外延层的样品的表面，并且感测从样品衍射的X射线，同时将感测的X射线解析为角度的函数 从而产生由于外延层而引起的衍射峰和条纹的衍射光谱。 分析边缘的特性以测量外延层的弛豫。