公开(公告)号：US12013619B2

公开(公告)日：2024-06-18

申请号：US17040073

申请日：2019-03-26

Applicant: CORNING INCORPORATED

Inventor： Ming-Huang Huang ,  Robert Bumju Lee ,  Rajesh Vaddi ,  Bin Zhu

IPC: G02F1/1368 ,  H01L29/786

CPC classification number: G02F1/1368 ,  H01L29/78681 ,  G02F1/13685

Abstract: A thin film transistor (TFT) liquid crystal display (LCD) comprises a plurality of image pixels demarcated between an overlying liquid crystal display layer and an underlying glass substrate. Each image pixel comprises a dedicated top-gate TFT disposed over the glass substrate. Each top-gate thin film transistor comprises a process sensitive semiconductor layer disposed over the glass substrate, and a source electrode and a drain electrode disposed over the process sensitive semiconductor layer. The process sensitive semiconductor layer forms a process sensitive semiconductor active layer between the source electrode and the drain electrode and an active layer protection film is disposed over the process sensitive semiconductor active layer. A gate dielectric layer is disposed over the active layer protection film between the source electrode and the drain electrode and a gate electrode is disposed over the gate dielectric layer.

公开(公告)号：US11952659B2

公开(公告)日：2024-04-09

申请号：US16940836

申请日：2020-07-28

Applicant: CORNING INCORPORATED

Inventor： Ming-Huang Huang ,  Hoon Kim ,  Jue Wang

IPC: G02B1/115 ,  C23C16/30 ,  C23C16/455 ,  H01L21/67 ,  G01N21/95

CPC classification number: C23C16/30 ,  C23C16/45553 ,  G02B1/115 ,  H01L21/67288 ,  G01N21/9501

Abstract: Atomic layer deposition methods for coating an optical substrate with magnesium fluoride. The methods include two primary processes. The first process includes the formation of a magnesium oxide layer over a surface of a substrate. The second process includes converting the magnesium oxide layer to a magnesium fluoride layer. These two primary processes may be repeated a plurality of times to create multiple magnesium fluoride layers that make up a magnesium fluoride film. The magnesium fluoride film may serve as an antireflective coating layer for an optical substrate, such as an optical lens.

公开(公告)号：US20230417954A1

公开(公告)日：2023-12-28

申请号：US18210461

申请日：2023-06-15

Applicant: CORNING INCORPORATED

Inventor： Donald Erwin Allen ,  Narendra Shamkant Borgharkar ,  Ming-Huang Huang ,  Hoon Kim ,  Jue Wang

IPC: G02B1/14 ,  G02B5/08 ,  C23C14/14 ,  C23C14/58 ,  C23C16/30 ,  C23C16/455 ,  C23C28/00

CPC classification number: G02B1/14 ,  G02B5/0891 ,  C23C14/14 ,  C23C14/5846 ,  C23C14/5873 ,  C23C16/30 ,  C23C16/45555 ,  C23C16/45527 ,  C23C16/45553 ,  C23C28/32 ,  C23C28/34

Abstract: A method of making an enhanced aluminium mirror for vacuum ultraviolet (VUV) optics includes depositing a reflective coating comprising aluminium metal to at least one surface of a substrate through physical vapor deposition (PVD) to produce a mirror comprising the substrate and the reflective coating. The method further includes removing aluminium oxides from an outer surface of the reflective coating by conducting atomic layer etching (ALE) in an Atomic Layer Deposition (ALD) system to produce an etched surface of the reflective coating and depositing an ALD protective layer onto the etched surface of the reflective coating by conducting atomic layer deposition in the ALD system to produce the enhanced aluminium mirror. The enhanced aluminium mirror includes the substrate, the reflective coating deposited on the substrate, and the ALD protective layer covering the etched surface of the reflective coating.

公开(公告)号：US20220221617A1

公开(公告)日：2022-07-14

申请号：US17711303

申请日：2022-04-01

Applicant: CORNING INCORPORATED

Inventor： Ming-Huang Huang ,  Chang-gyu Kim ,  Hoon Kim ,  Soo Ho Park ,  Jue Wang

IPC: G02B1/02 ,  C23C16/40 ,  C23C16/455 ,  G02B3/00

Abstract: An optical element including an optically transparent lens which defines a curved surface having a steepness given by an R/# of from about 0.5 to about 1.0. A film is positioned on the curved surface. The film includes an index layer. A composite layer is positioned on the curved surface having a refractive index greater than the index layer. The composite layer includes HfO2 and Al2O3. The composite layer has a mole fraction X of HfO2, wherein X is from about 0.05 to about 0.95 and a mole fraction of Al2O3 in the composite layer is 1−X.

公开(公告)号：US11053583B2

公开(公告)日：2021-07-06

申请号：US16348708

申请日：2017-11-09

Applicant: CORNING INCORPORATED

Inventor： James Gregory Couillard ,  Ming-Huang Huang

IPC: C23C14/50 ,  C03C17/00 ,  C23C14/56 ,  H01L21/67 ,  H01L21/687

Abstract: Described herein are apparatuses and methods for holding a substrate in a position that minimizes particle contamination of the substrate when the substrate is being coated. Along with the apparatus, processes for reducing particle reduction on substrates are provided. The articles and processes described herein are useful in making coated glass substrates, such as used in electrochromic, photochromic, or photovoltaic technologies.

公开(公告)号：US20170210666A1

公开(公告)日：2017-07-27

申请号：US15410320

申请日：2017-01-19

Applicant: Corning Incorporated

Inventor： Theresa Chang ,  Ming-Huang Huang ,  Linda Gaskill ,  Peter Joseph Lezzi ,  Kevin Lee Wasson

IPC: C03C17/00 ,  C03C17/10 ,  C03C17/34 ,  C03C17/22 ,  C03C17/25

CPC classification number: C03C17/002 ,  C03C17/009 ,  C03C17/10 ,  C03C17/22 ,  C03C17/225 ,  C03C17/245 ,  C03C17/25 ,  C03C17/256 ,  C03C17/3411 ,  C03C17/3417 ,  C03C2218/11

Abstract: A coated glass article and of a system and method for forming a coated glass article are provided. The process includes applying a first coating precursor material to the first surface of the glass article and supporting the glass article via a gas bearing. The process includes heating the glass article and the coating precursor material to above a glass transition temperature of the glass article while the glass article is supported by the gas bearing such that during heating, a property of the first coating precursor material changes forming a coating layer on the first surface of the glass article from the first precursor material. The high temperature and/or non-contact coating formation may form a coating layer with one or more new physical properties, such as a deep diffusion layer within the glass, and may form highly consistent coatings on multiple sides of the glass.