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公开(公告)号：US09684282B2
公开(公告)日：2017-06-20
申请号：US13500464
申请日：2010-10-08
申请人： George Barbastathis , Yuan Luo , Se Baek Oh
发明人： George Barbastathis , Yuan Luo , Se Baek Oh
CPC分类号： G03H1/2286 , G02B5/32 , G03H1/0248 , G03H1/041 , G03H1/28 , G03H2001/0033 , G03H2001/0072 , G03H2001/0264 , G03H2001/0268 , G03H2001/2244 , G03H2001/266 , G03H2210/45 , G03H2223/55
摘要： A volume holographic imaging system, apparatus, and/or method enables the projection of a two-dimensional (2D) slice of a four-dimensional (4D) probing object. A 4D probing source object is illuminated to emit or scatter an optical field. A holographic element having one or more recorded holograms receives and diffracts the optical field into a diffracted plane beam having spectral information. A 4-f telecentric relay system includes a pupil filter on the relayed conjugate plane of the volume hologram and images the pupil of the volume hologram onto the front focal plane of the collector lens. A collector lens focuses the diffracted plane beam to a 2D slice of the 4D probing source object. The focused 2D slice is projected onto a 2D imaging plane. The holographic element may have multiple multiplexed holograms that are arranged to diffract light from the corresponding slice of the 4D probing source object.
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22.发明授权公开(公告)号：US09360611B2
公开(公告)日：2016-06-07
申请号：US13500461
申请日：2010-10-08
CPC分类号： G03H1/2286 , G02B5/32 , G03H1/0248 , G03H1/041 , G03H1/28 , G03H2001/0033 , G03H2001/0072 , G03H2001/0264 , G03H2001/0268 , G03H2001/2244 , G03H2001/266 , G03H2210/45 , G03H2223/55
摘要： A volume holographic imaging system, apparatus and/or method enables the projection of a two-dimensional (2D) slice of a four-dimensional (4D) probing object A 4D probing source object is illuminated to emit or scatter an optical field. A holographic element having one or more recorded holograms receives and diffracts the optical field into a diffracted plane beam having spectral information. A 4-ftelecentric relay system includes a pupil filter on the relayed conjugate plane of the volume hologram and images the pupil of the volume hologram onto the front focal plane of the collector lens. A collector lens focuses the diffracted plane beam to a 2D slice of the 4D probing source object. The focused 2D slice is projected onto a 2D imaging plane. The holographic element may have multiple multiplexed holograms that are arranged to diffract light from the corresponding slice of the 4D probing source object.
摘要翻译： 体积全息成像系统，装置和/或方法使得四维（4D）探测对象的二维（2D）切片的投影使得4D扫描源对象被照亮以发射或散射光场。 具有一个或多个记录的全息图的全息元件接收并将光场衍射成具有光谱信息的衍射平面光束。 4位中心继电器系统包括在体积全息图的中继共轭平面上的光瞳滤波器，并将体积全息图的瞳孔成像到收集透镜的前焦平面上。 收集透镜将衍射平面光束聚焦到4D探测源对象的2D切片。 聚焦的2D切片投影到2D成像平面上。 全息元件可以具有多个多路复用全息图，其被布置为衍射来自4D探测源对象的相应切片的光。
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公开(公告)号：US20130171738A1
公开(公告)日：2013-07-04
申请号：US13704934
申请日：2011-06-17
申请人： Hyungryul Johnny Choi , Ayse Asatekin Alexiou , Se Young Yang , Christy D. Petruczok , Karen K. Gleason , Nicholas M. Patrikalakis , George Barbastathis
发明人： Hyungryul Johnny Choi , Ayse Asatekin Alexiou , Se Young Yang , Christy D. Petruczok , Karen K. Gleason , Nicholas M. Patrikalakis , George Barbastathis
IPC分类号： G01N27/06
CPC分类号： G01N27/06 , G01N27/3278
摘要： A chemical sensor that works while being submerged in a highly conductive medium is described. The chemical sensor includes hydrophobic structures that are distributed on conductive electrodes and are separated by small air cavities while submerged in the conductive medium. The hydrophobic structures are arranged such that their hydrophobicity varies in response to exposure to a target analyte. The change in the level of hydrophobicity results in permeation of the conductive liquid on to the conductive electrodes, thereby reducing the resistance levels between the conductive electrodes. The sensor indicates presence of the target analyte in response to detection of a change in resistance between at least two of the conductive electrodes.
摘要翻译： 描述了在浸没在高导电介质中时工作的化学传感器。 该化学传感器包括分布在导电电极上的疏水性结构，并且在浸没在导电介质中时被小空气腔分开。 疏水结构被布置成使得它们的疏水性随着暴露于目标分析物而变化。 疏水性水平的变化导致导电液体渗透到导电电极，从而降低导电电极之间的电阻水平。 响应于检测至少两个导电电极之间的电阻变化，传感器指示目标分析物的存在。
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24.发明申请公开(公告)号：US20120327492A1
公开(公告)日：2012-12-27
申请号：US13500461
申请日：2010-10-08
申请人： George Barbastathis , Yuan Luo , Se Baek Oh
发明人： George Barbastathis , Yuan Luo , Se Baek Oh
IPC分类号： G02B5/32
CPC分类号： G03H1/2286 , G02B5/32 , G03H1/0248 , G03H1/041 , G03H1/28 , G03H2001/0033 , G03H2001/0072 , G03H2001/0264 , G03H2001/0268 , G03H2001/2244 , G03H2001/266 , G03H2210/45 , G03H2223/55
摘要： A volume holographic imaging system, apparatus and/or method enables the projection of a two-dimensional (2D) slice of a four-dimensional (4D) probing object A 4D probing source object is illuminated to emit or scatter an optical field. A holographic element having one or more recorded holograms receives and diffracts the optical field into a diffracted plane beam having spectral information. A 4-f telecentric relay system includes a pupil filter on the relayed conjugate plane of the volume hologram and images the pupil of the volume hologram onto the front focal plane of the collector lens. A collector lens focuses the diffracted plane beam to a 2D slice of the 4D probing source object. The focused 2D slice is projected onto a 2D imaging plane. The holographic element may have multiple multiplexed holograms that are arranged to diffract light from the corresponding slice of the 4D probing source object.
摘要翻译： 体积全息成像系统，装置和/或方法使得四维（4D）探测对象的二维（2D）切片的投影使得4D扫描源对象被照亮以发射或散射光场。 具有一个或多个记录的全息图的全息元件接收并将光场衍射成具有光谱信息的衍射平面光束。 4-f远心继电器系统包括在体积全息图的中继共轭平面上的瞳孔滤光片，并将体积全息图的瞳孔成像到收集透镜的前焦平面上。 收集透镜将衍射平面光束聚焦到4D探测源对象的2D切片。 聚焦的2D切片投影到2D成像平面上。 全息元件可以具有多个多路复用全息图，其被布置为衍射来自4D探测源对象的相应切片的光。
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25.发明授权Method of forming a locally periodic 3D structure with larger-scale variation in periodic properties and applications thereof 有权形成周期性特性和应用中具有较大尺度变化的局部周期性3D结构的方法公开(公告)号：US08211625B2
公开(公告)日：2012-07-03
申请号：US12266869
申请日：2008-11-07
IPC分类号： G02F7/20
CPC分类号： G03F7/0005 , G02B5/1857 , G02B5/1871 , G02B6/30 , G02B27/0087 , G02B2006/1213 , G11B7/124 , G11B7/1372 , G11B7/22
摘要： An optical structure is provided. The optical structure includes a substrate structure. A photosensitive material layer is positioned on said substrate structure. The photosensitive material layer having uniform periodic geometry and a period length throughout associated with a 2D periodic pattern. The 2D periodic pattern includes a period length greater than the exposing light wavelength and spatial variation in the duty cycle of the features of a mask layer used in the formation of said 2D periodic pattern.
摘要翻译： 提供了一种光学结构。 光学结构包括基板结构。 感光材料层位于所述基片结构上。 感光材料层具有均匀的周期性几何形状和整个与2D周期性图案相关联的周期长度。 2D周期性图案包括大于曝光光波长的周期长度和用于形成所述2D周期图案的掩模层的特征的占空比的空间变化。
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公开(公告)号：US20110085173A1
公开(公告)日：2011-04-14
申请号：US12898830
申请日：2010-10-06
IPC分类号： G01B9/02
CPC分类号： G01J9/00
摘要： Phase differences associated with a defocused wavefront can be determined from a single color image. The color image, which is a measurement of intensity as a function of wavelength, is used to calculate the change in intensity with respect to wavelength over the image plane. The change in intensity can then be used to estimate a phase difference associated with the defocused wavefront using two-dimensional fast Fourier transform solvers. The phase difference can be used to infer information about objects in the path of the defocused wavefront. For example, it can be used to determine an object's shape, surface profile, or refractive index profile. It can also be used to calculate path length differences for actuating adaptive optical systems. Compared to other techniques, deriving phase from defocused color images is faster, simpler, and can be implemented using standard color filters.
摘要翻译： 与散焦波前相关联的相位差可以从单个彩色图像确定。 使用作为波长的函数的强度测量值的彩色图像来计算相对于图像平面上的波长的强度变化。 然后可以使用强度的变化来使用二维快速傅里叶变换解算器估计与散焦波前相关联的相位差。 相位差可用于推断散焦波前路径中的物体信息。 例如，它可以用于确定物体的形状，表面轮廓或折射率分布。 它也可以用于计算启动自适应光学系统的路径长度差异。 与其他技术相比，散焦色彩图像的相位更快，更简单，可以使用标准滤色镜实现。
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公开(公告)号：US20110042588A1
公开(公告)日：2011-02-24
申请号：US12805735
申请日：2010-08-17
IPC分类号： H01L21/02
CPC分类号： G03F7/70291 , G03F7/70316 , G03F7/70533
摘要： Disclosed herein is a semiconductor manufacturing apparatus. The semiconductor manufacturing apparatus precisely adjusts the position and size of a light spot formed on a substrate, enabling formation of a target pattern or elimination of an unnecessary pattern in an accurate and rapid manner. The semiconductor manufacturing apparatus includes a light source, a light modulator to modulate light irradiated from the light source into a plurality of beams to correspond to a target pattern, a diffraction element to adjust a direction of each of the plurality of beams, and an optics system to allow the plurality of beams, the direction of which has been controlled by the diffraction element, to form a light spot having a target size.
摘要翻译： 这里公开了一种半导体制造装置。 半导体制造装置精确地调整形成在基板上的光点的位置和尺寸，能够以准确且快速的方式形成目标图案或消除不必要的图案。 半导体制造装置包括光源，光调制器，用于将从光源照射的光调制成对应于目标图案的多个光束，用于调整多个光束中的每一个的方向的衍射元件，以及光学器件 系统允许其方向已被衍射元件控制的多个光束形成具有目标尺寸的光点。
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28.发明授权公开(公告)号：US07193782B2
公开(公告)日：2007-03-20
申请号：US10748058
申请日：2003-12-30
申请人： Rajesh Menon , Dario Gil , George Barbastathis , Henry I. Smith
发明人： Rajesh Menon , Dario Gil , George Barbastathis , Henry I. Smith
CPC分类号： G21K1/00 , Y10T436/25375
摘要： An optical manipulation system is disclosed that includes an array of focusing elements, which focuses the energy beamlets from an array of beamlet sources into an array of focal spots in order to individually manipulate a plurality of samples on an adjacent substrate.
摘要翻译： 公开了一种光学操纵系统，其包括聚焦元件阵列，聚焦元件将能量子束从一束子束源聚焦到焦点阵列中，以便单独地操纵相邻基底上的多个样本。
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29.发明申请公开(公告)号：US20060238842A1
公开(公告)日：2006-10-26
申请号：US11113544
申请日：2005-04-25
申请人： Wenyang Sun , George Barbastathis
发明人： Wenyang Sun , George Barbastathis
IPC分类号： G02B5/32
CPC分类号： G01J3/1838 , G01J3/2823
摘要： A holographic imaging system is disclosed that includes a spectral electromagnetic field unit for providing a plurality of focal areas of a plurality of wavelengths of electromagnetic fields along a first direction, a lens system for directing the electromagnetic fields having the plurality of wavelengths from an object that may be positioned at least substantially near the plurality of focal areas toward a holographic recording, and a detector surface for receiving electromagnetic fields from the holographic recording.
摘要翻译： 公开了一种全息成像系统，其包括用于沿着第一方向提供多个电磁场波长的多个焦点区域的光谱电磁场单元，用于从具有多个波长的物体引导具有多个波长的电磁场的透镜系统， 可以至少基本上靠近多个聚焦区域朝向全息记录，以及用于从全息记录接收电磁场的检测器表面。
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公开(公告)号：US20050173234A1
公开(公告)日：2005-08-11
申请号：US10979350
申请日：2004-11-02
CPC分类号： H01H59/0009 , H01H47/00 , H01H2059/0054
摘要： An electro-mechanical switch structure includes at least one fixed electrode and a free electrode which is movable in the structure with a voltage potential applied between each fixed electrode and the free, movable electrode. The voltage potentials applied between each fixed electrode and the movable electrode are modulated to actuate the electro-mechanical switch structure.
摘要翻译： 机电开关结构包括至少一个固定电极和自由电极，其可在结构中移动，其中施加有电压电位在每个固定电极和自由的可移动电极之间。 施加在每个固定电极和可动电极之间的电压被调制以致动机电开关结构。
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