公开(公告)号：US20110132869A1

公开(公告)日：2011-06-09

申请号：US12634490

申请日：2009-12-09

申请人： Liubo Hong ,  Aron Pentek ,  Yi Zheng

发明人： Liubo Hong ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/31

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head having a non-magnetic step layer, non-magnetic bump at the front of the non-magnetic step layer and a write pole with a tapered trailing edge. The tapered portion of the trailing edge of the write pole is formed by a two step process that allows the write pole taper to be formed with greater accuracy and repeatability than would be possible using a single step taper process. An alternative method is also described on how to make a non-magnetic bump structure with adjustable bump throat height prior to Damascene side shield gap formation in a Damascene wrap around shield head.

摘要翻译： 一种用于制造具有非磁性步骤层，非磁性阶梯层前面的非磁性凸起和具有锥形后缘的写入磁极的磁性写入头的方法。 写柱的后缘的锥形部分通过两步法形成，其允许以比使用单步骤锥形工艺可能的更高的精度和重复性形成写柱锥度。 还描述了一种替代方法，该方法还描述了如何制造具有可调凸起喉部高度的非磁性凸块结构，然后在镶嵌在屏蔽头周围的大马士革侧面屏蔽间隙形成。

公开(公告)号：US08347488B2

公开(公告)日：2013-01-08

申请号：US12634490

申请日：2009-12-09

申请人： Liubo Hong ,  Aron Pentek ,  Yi Zheng

发明人： Liubo Hong ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11S5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head having a non-magnetic step layer, non-magnetic bump at the front of the non-magnetic step layer and a write pole with a tapered trailing edge. The tapered portion of the trailing edge of the write pole is formed by a two step process that allows the write pole taper to be formed with greater accuracy and repeatability than would be possible using a single step taper process. An alternative method is also described on how to make a non-magnetic bump structure with adjustable bump throat height prior to Damascene side shield gap formation in a Damascene wrap around shield head.

摘要翻译： 一种用于制造具有非磁性步骤层，非磁性阶梯层前面的非磁性凸起和具有锥形后缘的写入磁极的磁性写入头的方法。 写柱的后缘的锥形部分通过两步法形成，其允许以比使用单步骤锥形工艺可能的更高的精度和重复性形成写柱锥度。 还描述了一种替代方法，该方法还描述了如何制造具有可调凸起喉部高度的非磁性凸块结构，然后在镶嵌在屏蔽头周围的大马士革侧面屏蔽间隙形成。

公开(公告)号：US20130082027A1

公开(公告)日：2013-04-04

申请号：US13251058

申请日：2011-09-30

申请人： Guomin Mao ,  Donald G. Allen ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Yi Zheng

发明人： Guomin Mao ,  Donald G. Allen ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116

摘要： A method for manufacturing a magnetic write head for magnetic data recording. The method includes forming a depositing a magnetic write pole material and forming a mask structure over the write pole material that includes a polymer mask under-layer, a dielectric hard mask formed over the polymer mask under-layer and a photoresist mask formed over the dielectric hard mask. The image of the photoresist mask is transferred onto the underlying dielectric hard mask and then a reactive ion etching is performed to transfer the image of the dielectric hard mask onto the polymer mask under-layer. This reactive ion etching is performed in an atmosphere chemistry that includes both an oxygen containing gas and a nitrogen containing gas.

摘要翻译： 一种用于制造用于磁数据记录的磁写头的方法。 该方法包括形成磁性写入极材料的沉积，并在包括聚合物掩模底层的写入极材料上形成掩模结构，在聚合物掩模底层上形成的电介质硬掩模和形成在电介质上的光致抗蚀剂掩模 硬面膜 将光致抗蚀剂掩模的图像转印到下面的电介质硬掩模上，然后进行反应离子蚀刻，以将电介质硬掩模的图像转印到聚合物掩模底层上。 该反应离子蚀刻在包含含氧气体和含氮气体的气氛化学中进行。

公开(公告)号：US20130022840A1

公开(公告)日：2013-01-24

申请号：US13187355

申请日：2011-07-20

申请人： Wen-Chien D. Hsiao ,  Ning Shi ,  Yi Zheng

发明人： Wen-Chien D. Hsiao ,  Ning Shi ,  Yi Zheng

IPC分类号： G11B5/33 ,  C25D5/02 ,  B05D5/12

CPC分类号： C25D5/022 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T428/1186

摘要： A method for manufacturing a magnetic write head having a write pole with a tapered leading edge formed on a substrate having a tapered surface and a wrap-around, trailing magnetic shield. The method uses a multi-layer anti-reflective coating prior to formation of the shield so that reflection from the tapered surface of the substrate does not affect the lithography of the mask used to form the trailing shield. The multi-layer antireflective coating is constructed of materials that can be left in the finished head, thereby eliminating problems associated with removal of the anti-reflective coating.

摘要翻译： 一种用于制造具有形成在具有锥形表面的基底上的锥形前缘的写入极和缠绕的磁性磁屏蔽的磁性写入头的制造方法。 该方法在形成屏蔽之前使用多层抗反射涂层，使得来自衬底的锥形表面的反射不影响用于形成后屏蔽的掩模的光刻。 多层抗反射涂层由可以留在成品头中的材料构成，从而消除与去除抗反射涂层有关的问题。

公开(公告)号：US20100157475A1

公开(公告)日：2010-06-24

申请号：US12342647

申请日：2008-12-23

申请人： Wen-Chien D. Hsiao ,  Ming Jiang ,  Sue S. Zhang ,  Yi Zheng

发明人： Wen-Chien D. Hsiao ,  Ming Jiang ,  Sue S. Zhang ,  Yi Zheng

IPC分类号： G11B5/127 ,  G03F7/20 ,  B44C1/22 ,  B32B37/14

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T156/10 ,  Y10T428/1171 ,  Y10T428/1186

摘要： A stepped main pole for a perpendicular write head and methods of making the stepped main pole. The stepped main pole has a main pole tip and a base portion. The main pole tip has a surface that forms part of the ABS and a first thickness. The base portion extends from the main pole tip and has a thickness that varies from the first thickness to a second thickness to form a slanted surface with an apex angle adjacent the main pole tip. By placing the base portion away from the ABS and providing a thickness that increases in a direction away from the ABS, the stepped pole can provide the necessary magnetic flux for writing, while avoiding undesired leakage and fringing. To form embodiments of the stepped main pole of the invention, a fluorine-based reactive ion etch (RIE) may be used. By using an RIE to define the stepped main pole, the apex angle can be better controlled and tight edge control can be achieved.

摘要翻译： 用于垂直写头的梯级主极和制作阶梯式主极的方法。 阶梯式主极具有主极尖和基部。 主极尖具有形成ABS的一部分的表面和第一厚度。 基部从主极尖延伸，并且具有从第一厚度变化到第二厚度的厚度，以形成邻近主极尖的顶角的倾斜表面。 通过将基座部分远离ABS并且提供沿离开ABS的方向增加的厚度，台阶极可以提供必要的写入磁通量，同时避免不期望的泄漏和边缘。 为了形成本发明的阶梯式主极的实施例，可以使用氟基反应离子蚀刻（RIE）。 通过使用RIE来定义阶梯式主极，可以更好地控制顶角，并且可以实现紧密的边缘控制。

公开(公告)号：US08233234B2

公开(公告)日：2012-07-31

申请号：US12342647

申请日：2008-12-23

申请人： Wen-Chien D. Hsiao ,  Ming Jiang ,  Sue S. Zhang ,  Yi Zheng

发明人： Wen-Chien D. Hsiao ,  Ming Jiang ,  Sue S. Zhang ,  Yi Zheng

IPC分类号： G11B5/127 ,  H01F10/08 ,  H01L43/12

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T156/10 ,  Y10T428/1171 ,  Y10T428/1186

摘要： A stepped main pole for a perpendicular write head and methods of making the stepped main pole. The stepped main pole has a main pole tip and a base portion. The main pole tip has a surface that forms part of the ABS and a first thickness. The base portion extends from the main pole tip and has a thickness that varies from the first thickness to a second thickness to form a slanted surface with an apex angle adjacent the main pole tip. By placing the base portion away from the ABS and providing a thickness that increases in a direction away from the ABS, the stepped pole can provide the necessary magnetic flux for writing, while avoiding undesired leakage and fringing. To form embodiments of the stepped main pole of the invention, a fluorine-based reactive ion etch (RIE) may be used. By using an RIE to define the stepped main pole, the apex angle can be better controlled and tight edge control can be achieved.

摘要翻译： 用于垂直写头的梯级主极和制作阶梯式主极的方法。 阶梯式主极具有主极尖和基部。 主极尖具有形成ABS的一部分的表面和第一厚度。 基部从主极尖延伸，并且具有从第一厚度变化到第二厚度的厚度，以形成邻近主极尖的顶角的倾斜表面。 通过将基座部分远离ABS并且提供沿离开ABS的方向增加的厚度，台阶极可以提供必要的写入磁通量，同时避免不期望的泄漏和边缘。 为了形成本发明的阶梯式主极的实施例，可以使用氟基反应离子蚀刻（RIE）。 通过使用RIE来定义阶梯式主极，可以更好地控制顶角，并且可以实现紧密的边缘控制。

公开(公告)号：US08318031B2

公开(公告)日：2012-11-27

申请号：US12748182

申请日：2010-03-26

申请人： Aron Pentek ,  Thomas J. A. Roucoux ,  Yi Zheng

发明人： Aron Pentek ,  Thomas J. A. Roucoux ,  Yi Zheng

IPC分类号： B44C1/22

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315

摘要： A method for manufacturing a magnetic write head having a write pole with a tapered leading edge and a tapered trailing edge. The method includes forming a non-magnetic bump player over a surface, forming a mask over the non-magnetic bump layer and performing a first ion milling to form a tapered back edge on the non-magnetic bump layer. A magnetic write pole material is then deposited over the surface and over the non-magnetic bump layer. Then a non-magnetic step structure is formed over the magnetic write pole material and an ion milling is performed to form a taper on the upper surface of the write pole. The write pole lateral dimensions can then be defined, and a non-magnetic bump formed over the tapered portion of the upper surface of the write pole. Another ion milling can then be performed to extend the taper of the surface of the write pole.

摘要翻译： 一种用于制造具有带有锥形前缘和锥形后缘的写极的磁写头的方法。 所述方法包括在表面上形成非磁性碰撞播放器，在非磁性凸块层上形成掩模，并执行第一离子铣削以在非磁性凸块层上形成锥形后缘。 然后将磁性写入磁极材料沉积在表面上并在非磁性凸起层上方。 然后在磁性写入磁极材料上形成非磁性阶梯结构，并且执行离子铣削以在写入极的上表面上形成锥形。 然后可以限定写入极横向尺寸，并且在写入极的上表面的锥形部分上形成非磁性凸块。 然后可以执行另一种离子铣削来延伸写极的表面的锥度。

公开(公告)号：US20110262774A1

公开(公告)日：2011-10-27

申请号：US12766769

申请日：2010-04-23

申请人： Aron Pentek ,  Yi Zheng

发明人： Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/33

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T428/1171

摘要： A magnetic write head having write pole and a wrap-around-trailing magnetic shield having side portions that are separated from the write pole by tapered non-magnetic side gap layers. The tapered non-magnetic side gap layers provide a non-magnetic side gap width that increases with increasing distance from the ABS, thereby providing optimal protection against adjacent track interference at the ABS while minimizing write field loss to the shield in regions away from the ABS.

摘要翻译： 具有写磁极的磁写头和卷绕后磁屏蔽，其具有通过锥形非磁性侧间隙层与写极分离的侧部。 锥形非磁性侧间隙层提供随着与ABS的距离的增加而增加的非磁性侧间隙宽度，从而为ABS提供最佳保护，以防止相邻的轨道干涉，同时最小化远离ABS的区域对屏蔽的写入场损失 。

公开(公告)号：US20110147222A1

公开(公告)日：2011-06-23

申请号：US12641138

申请日：2009-12-17

申请人： Aron Pentek ,  Yi Zheng

发明人： Aron Pentek ,  Yi Zheng

IPC分类号： C23C14/32 ,  C25D5/10

CPC分类号： C25D7/001 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163 ,  Y10T428/115

摘要： A method for manufacturing a magnetic write head that has a trailing magnetic shield with a tapered write pole trailing edge, a non-magnetic step layer and a Ru bump and an alumina bump formed at the front of the non-magnetic step layer. The process forms a Ru/alumina side wall at the sides of the write pole, such that the Ru side wall is closest to the write pole. The Ru is removed more readily than the alumina during the ion milling that is performed to taper the write pole. This causes the Ru portion of the side wall to taper away from the write pole rather than forming an abrupt step. This tapering prevents dishing of the trailing edge of the write pole for improved write head performance.

摘要翻译： 一种用于制造具有形成在非磁性阶梯层前面的锥形写磁头后缘的后磁屏蔽，非磁性阶梯层和Ru凸块以及氧化铝凸块的磁写头的方法。 该工艺在写入极的两侧形成Ru /氧化铝侧壁，使得Ru侧壁最靠近写入极。 在离子铣削期间，Ru比氧化铝更容易地被除去，以使得写柱变钝。 这使得侧壁的Ru部分远离写入磁极而变浅，而不是形成突然的步骤。 这种渐缩防止了写磁极的后缘的凹陷以改善写头性能。

公开(公告)号：US07881010B2

公开(公告)日：2011-02-01

申请号：US11956277

申请日：2007-12-13

申请人： Hung-Chin Guthrie ,  Ming Jiang ,  Edward Hin Pong Lee ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Hung-Chin Guthrie ,  Ming Jiang ,  Edward Hin Pong Lee ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： G11B5/187

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/315

摘要： A method for manufacturing a magnetic write head having a write pole with a flared step feature that defines a secondary flare point. The method involves depositing a magnetic write pole material on a substrate and then depositing a magnetic material over the write pole material followed by a non-magnetic material. A first mask is formed having a front edge to define the location of the secondary flare point, and one or more material removal processes are used to remove portions of the magnetic layer and non-magnetic layer that are not protected by this first mask. The first mask is replaced by a second mask that is configured to define a write pole, and an ion milling is performed to define the write pole. Shadowing from the magnetic layer and non-magnetic layer form a flared secondary flare point.

摘要翻译： 一种用于制造具有定义二次闪光点的具有扩口步骤特征的写极的磁写头的方法。 该方法包括将磁性写入极材料沉积在衬底上，然后将磁性材料沉积在写入极材料上，随后是非磁性材料。 形成第一掩模，其具有前边缘以限定次级火炬点的位置，并且使用一个或多个材料去除过程来去除未被该第一掩模保护的磁性层和非磁性层的部分。 第一个掩模由配置为定义写入极的第二个掩模代替，并且执行离子铣削来定义写入极点。 从磁性层和非磁性层的阴影形成扩张的次级耀斑点。