公开(公告)号：US20090211363A1

公开(公告)日：2009-08-27

申请号：US11631036

申请日：2005-06-14

申请人： Ulfert Drewes ,  Frank Hegner

发明人： Ulfert Drewes ,  Frank Hegner

IPC分类号： G01L9/00

CPC分类号： G01L19/145 ,  G01L19/147

摘要： A pressure transducer, including a housing having a housing axis and a measuring cell chamber defined in the housing. The measuring cell chamber is exposable to a pressure via an opening. The opening is surrounded by an annular, first sealing surface. A pressure measuring cell having a second sealing surface facing towards the opening, and a support surface facing away from the sealing surface, sealing ring; and a clamping apparatus, which engages the housing are provided. The pressure measuring cell and the sealing ring are clamped by means of an axial claimping force in such a manner between the clamping apparatus and the first sealing surface, that the sealing ring is arranged pressure-tightly between the first sealing surface and the second sealing surface. The pressure transducer further includes a misalignment accommodating arrangement, which includes a first transmission body, which faces toward the opening, and a second transmission body, which is facing away from the opening. The axial clamping formce is transmitted through the misalignment accommodating arrangement from the clamping apparatus to the pressure measuring cell, and the first transmission body is tiltable relative to the second transmission body about two mutually perpendicular axes.

摘要翻译： 一种压力传感器，包括具有壳体轴线的壳体和限定在壳体中的测量室室。 测量池室可通过开口暴露于压力。 开口被环形的第一密封表面包围。 一种压力测量单元，具有面向开口的第二密封表面和背离密封表面的支承表面，密封环; 并且提供与壳体接合的夹紧装置。 压力测量单元和密封环借助于夹紧装置和第一密封表面之间的这种方式被夹紧，密封环压紧地设置在第一密封表面和第二密封表面之间 。 压力传感器还包括不对准容纳装置，其包括朝向开口的第一传动体，以及远离开口的第二传递体。 轴向夹紧通过不对准容纳装置从夹紧装置传递到压力测量单元，并且第一传动体相对于第二传动体绕两个相互垂直的轴线倾斜。

公开(公告)号：US20070028696A1

公开(公告)日：2007-02-08

申请号：US10566364

申请日：2004-07-16

申请人： Ulfert Drewes ,  Karl Floegel ,  Frank Hegner ,  Thomas Uehlin ,  Rainer Martin

发明人： Ulfert Drewes ,  Karl Floegel ,  Frank Hegner ,  Thomas Uehlin ,  Rainer Martin

IPC分类号： G01L7/00

CPC分类号： G01L19/003

摘要： A pressure sensor including: A pressure measuring cell having an end face loadable with the medium; a housing having a media opening and a ring-shaped, axial bearing surface, which surrounds the media opening; a clamping apparatus; and a ring-shaped sealing arrangement. The pressure measuring cell is positioned in the housing and the sealing arrangement is positioned between the bearing surface and the end face, and the sealing arrangement, as well as the pressure measuring cell, are axially clamped between the bearing surface and the clamping apparatus. The sealing arrangement includes, a decoupling ring, as well as a first and a second, ring-shaped sealing element. The first sealing element lies against the end face, the second sealing element lies against the bearing surface, and the decoupling ring is axially clamped between the first and the second sealing elements.

摘要翻译： 一种压力传感器，包括：压力测量单元，其具有可与介质一起装载的端面; 壳体，其具有介质开口和围绕介质开口的环形的轴向支承表面; 夹紧装置; 和环形密封装置。 压力测量单元位于壳体中，并且密封装置位于支承表面和端面之间，并且密封装置以及压力测量单元被轴向地夹紧在支承表面和夹紧装置之间。 密封装置包括脱钩环以及第一和第二环形密封元件。 第一密封元件靠在端面上，第二密封元件位于支承表面上，并且解耦环被轴向夹紧在第一和第二密封元件之间。

公开(公告)号：US07150197B2

公开(公告)日：2006-12-19

申请号：US10518546

申请日：2003-07-01

申请人： Frank Hegner ,  Ulfert Drewes ,  Igor Getman

发明人： Frank Hegner ,  Ulfert Drewes ,  Igor Getman

IPC分类号： G01L9/12

CPC分类号： G01L19/02 ,  G01L9/0075

摘要： For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, wherein the pressure measuring cell is axially clamped between an elastic sealing ring, which bears against the membrane-containing, end face of the pressure measuring cell, and a support ring, which supports the measuring cell on the rear side thereof, the dimensions of the support ring are matched to the dimensions of the sealing ring and the pressure measuring cell in such a way that a radial deformation of the membrane-containing end face resulting from the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor because of a reduction of the axial clamping force by a least 10% amounts to not more than 0.02%. The geometry of the support ring is determined iteratively by means of the FEM.

公开(公告)号：US07249515B2

公开(公告)日：2007-07-31

申请号：US10528094

申请日：2003-09-09

申请人： Frank Hegner ,  Igor Getman ,  Ulfert Drewes

发明人： Frank Hegner ,  Igor Getman ,  Ulfert Drewes

IPC分类号： G01L19/04

CPC分类号： G01L9/0075

摘要： For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, with the pressure measuring cell being axially clamped between an elastic sealing ring, which bears against the membrane-bearing end face of the pressure measuring cell, and a support ring, which bears against the rear face of the pressure measuring cell, the dimensions of the support ring are coordinated with the dimensions of the sealing ring and pressure measuring cell such that a radial deformation of the membrane-bearing end face caused by the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor arising from a reduction of the axial clamping force by at least 10% amounts to not more than about 0.02%. Additionally, arranged between the support ring and a clamping ring is a stiff decoupling element, which minimizes the temperature hysteresis of the span. The geometry of the support ring and the decoupling element is determined iteratively by means of FEM.

摘要翻译： 为了最小化具有基本圆柱形平台的压力传感器的跨度误差和连接到平台的端面的测量膜，其中压力测量单元被轴向夹紧在弹性密封环之间，该弹性密封环承载在膜支承端面 的压力测量单元和支撑环，其支撑在压力测量单元的后表面上，支撑环的尺寸与密封环和压力测量单元的尺寸协调，使得膜的径向变形 由压力测量单元的轴向夹紧引起的端面的距离足够小，使得由轴向夹紧力减小至少10％所引起的压力传感器的跨度误差不大于约0.02％。 此外，布置在支撑环和夹紧环之间的是刚性去耦元件，其使跨度的温度滞后最小化。 通过有限元法迭代地确定支撑环和去耦元件的几何形状。

公开(公告)号：US5400489A

公开(公告)日：1995-03-28

申请号：US968811

申请日：1992-10-30

申请人： Frank Hegner ,  Ulfert Drewes

发明人： Frank Hegner ,  Ulfert Drewes

IPC分类号： C03C17/02 ,  C03C17/25 ,  C04B37/00 ,  C04B37/02 ,  C04B41/80 ,  C04B41/85 ,  C04B41/87 ,  C30B33/00 ,  C30B33/02 ,  G01L9/00 ,  G01L9/04 ,  G01L9/12 ,  H01L21/316 ,  H01G7/00 ,  B05D3/12 ,  G01L1/22

CPC分类号： G01L9/0075 ,  C03C17/25 ,  C04B37/006 ,  C04B37/026 ,  G01L9/0055 ,  C03C2217/213 ,  C03C2218/113 ,  C04B2235/6581 ,  C04B2237/062 ,  C04B2237/10 ,  C04B2237/122 ,  C04B2237/125 ,  C04B2237/127 ,  C04B2237/343 ,  C04B2237/40 ,  C04B2237/592 ,  C04B2237/708 ,  C04B2237/72 ,  Y10T29/43 ,  Y10T29/49103

摘要： To avoid any deterioration of the surface properties of objects of ceramic, glass, or a single-crystal insulating material which are subjected to a vacuum temperature process, a thin layer of a spin-on glass solution with a silicon-dioxide equivalent of not more than 10% is applied to the objects by spinning or spraying prior to the vacuum temperature process. This is particularly important to avoid the strong moisture dependence of capacitive or resistive pressure sensors having a substrate and a diaphragm to be joined together, forming a chamber sealed at least at the edge. The diaphragm is covered with a layer of silicon carbide, niobium, or tantalum serving as one capacitor electrode, or the surface portion of the diaphragm which will lie within the chamber is coated with at least one strain gage; the portion of the substrate surface which will lie within the chamber is coated with at least one additional capacitor electrode or, in the case of the resistive pressure sensor, not coated therewith; over the entire surface portion of the substrate and diaphragm thus coated, a thin layer of the spin-on glass solution is applied and dried; contact is made to the capacitor electrodes or strain gages through the substrate and/or diaphragm, and substrate and diaphragm are brazed together by a ring-shaped part of active brazing material, which also serves as a spacer, or by a sufficient amount of active brazing paste.

摘要翻译： 为了避免陶瓷，玻璃或经受真空温度处理的单晶绝缘材料的物体的表面性能的任何劣化，二氧化硅当量不大于的二氧化硅玻璃溶液的薄层 在真空温度过程之前通过旋涂或喷涂将10％以上的物质施加到物体上。 这对于避免具有要接合在一起的基板和隔膜的电容式或电阻式压力传感器的强的水分依赖性形成至少在边缘处密封的室来说尤为重要。 膜片被一层碳化硅，铌或钽覆盖，作为一个电容器电极，或者位于室内的隔膜的表面部分涂覆有至少一个应变计; 将位于室内的衬底表面的部分涂覆有至少一个附加的电容器电极，或者在电阻压力传感器的情况下，其不被涂覆; 在基板的整个表面部分和如此涂覆的隔膜上，施加和干燥旋涂玻璃溶液的薄层; 通过基板和/或隔膜对电容器电极或应变计进行接触，并且基板和隔膜通过活性钎焊材料的环形部分钎焊在一起，活性钎焊材料也用作间隔物，或通过足够量的活性物质 钎焊膏

公开(公告)号：US07861598B2

公开(公告)日：2011-01-04

申请号：US11631036

申请日：2005-06-14

申请人： Ulfert Drewes ,  Frank Hegner

发明人： Ulfert Drewes ,  Frank Hegner

IPC分类号： G01L7/00

CPC分类号： G01L19/145 ,  G01L19/147

摘要： A pressure transducer, including a housing having a housing axis and a measuring cell chamber defined in the housing. The measuring cell chamber is exposable to a pressure via an opening. The opening is surrounded by an annular, first sealing surface. A pressure measuring cell having a second sealing surface facing towards the opening, and a support surface facing away from the sealing surface sealing ring; and a clamping apparatus, which engages the housing are provided. The pressure measuring cell and the sealing ring are clamped by means of an axial clamping force in such a manner between the clamping apparatus and the first sealing surface, that the sealing ring is arranged pressure-tightly between the first sealing surface and the second sealing surface. The pressure transducer further includes a misalignment accommodating arrangement, which includes a first transmission body, which faces toward the opening, and a second transmission body, which is facing away from the opening. The axial clamping force is transmitted through the misalignment accommodating arrangement, from the clamping apparatus to the pressure measuring cell, and the first transmission body is tiltable relative to the second transmission body about two mutually perpendicular axes.

摘要翻译： 一种压力传感器，包括具有壳体轴线的壳体和限定在壳体中的测量室室。 测量池室可通过开口暴露于压力。 开口被环形的第一密封表面包围。 一种压力测量单元，具有面向开口的第二密封表面和背离密封表面密封环的支承表面; 并且提供与壳体接合的夹紧装置。 压力测量单元和密封环通过夹紧装置和第一密封表面之间的这种方式通过轴向夹紧力夹紧，密封环压紧地设置在第一密封表面和第二密封表面之间 。 压力传感器还包括不对准容纳装置，其包括朝向开口的第一传动体，以及远离开口的第二传递体。 轴向夹紧力通过不对准容纳装置从夹紧装置传递到压力测量单元，并且第一传动体相对于第二传动体可绕两个相互垂直的轴线倾斜。

公开(公告)号：US07448274B2

公开(公告)日：2008-11-11

申请号：US10566364

申请日：2004-07-16

申请人： Ulfert Drewes ,  Karl Floegel ,  Frank Hegner ,  Thomas Uehlin ,  Rainer Martin

发明人： Ulfert Drewes ,  Karl Floegel ,  Frank Hegner ,  Thomas Uehlin ,  Rainer Martin

IPC分类号： G01L7/00

CPC分类号： G01L19/003

摘要： A pressure sensor including: A pressure measuring cell having an end face loadable with the medium; a housing having a media opening and a ring-shaped, axial bearing surface, which surrounds the media opening; a clamping apparatus; and a ring-shaped sealing arrangement. The pressure measuring cell is positioned in the housing and the sealing arrangement is positioned between the bearing surface and the end face, and the sealing arrangement, as well as the pressure measuring cell, are axially clamped between the bearing surface and the clamping apparatus. The sealing arrangement includes, a decoupling ring, as well as a first and a second, ring-shaped sealing element. The first sealing element lies against the end face, the second sealing element lies against the bearing surface, and the decoupling ring is axially clamped between the first and the second sealing elements.

摘要翻译： 一种压力传感器，包括：压力测量单元，其具有可与介质一起装载的端面; 壳体，其具有介质开口和围绕介质开口的环形的轴向支承表面; 夹紧装置; 和环形密封装置。 压力测量单元位于壳体中，并且密封装置位于支承表面和端面之间，并且密封装置以及压力测量单元被轴向地夹紧在支承表面和夹紧装置之间。 密封装置包括脱钩环以及第一和第二环形密封元件。 第一密封元件靠在端面上，第二密封元件位于支承表面上，并且解耦环被轴向夹紧在第一和第二密封元件之间。

公开(公告)号：US20060185435A1

公开(公告)日：2006-08-24

申请号：US10528094

申请日：2003-09-09

申请人： Frank Hegner ,  Igor Getman ,  Ulfert Drewes

发明人： Frank Hegner ,  Igor Getman ,  Ulfert Drewes

IPC分类号： G01L19/04

CPC分类号： G01L9/0075

摘要： For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, with the pressure measuring cell being axially clamped between an elastic sealing ring, which bears against the membrane-bearing end face of the pressure measuring cell, and a support ring, which bears against the rear face of the pressure measuring cell, the dimensions of the support ring are coordinated with the dimensions of the sealing ring and pressure measuring cell such that a radial deformation of the membrane-bearing end face caused by the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor arising from a reduction of the axial clamping force by at least 10% amounts to not more than about 0.02%. Additionally, arranged between the support ring and a clamping ring is a stiff decoupling element, which minimizes the temperature hysteresis of the span. The geometry of the support ring and the decoupling element is determined iteratively by means of FEM.

摘要翻译： 为了最小化具有基本圆柱形平台的压力传感器的跨度误差和连接到平台的端面的测量膜，其中压力测量单元被轴向夹紧在弹性密封环之间，该弹性密封环承载在膜支承端面 的压力测量单元和支撑环，其支撑在压力测量单元的后表面上，支撑环的尺寸与密封环和压力测量单元的尺寸协调，使得膜的径向变形 由压力测量单元的轴向夹紧引起的端面的距离足够小，使得由轴向夹紧力减小至少10％所引起的压力传感器的跨度误差不大于约0.02％。 此外，布置在支撑环和夹紧环之间的是刚性去耦元件，其使跨度的温度滞后最小化。 通过有限元法迭代地确定支撑环和去耦元件的几何形状。

公开(公告)号：US20060096381A1

公开(公告)日：2006-05-11

申请号：US10518546

申请日：2003-07-01

申请人： Frank Hegner ,  Ulfert Drewes ,  Igor Getman

发明人： Frank Hegner ,  Ulfert Drewes ,  Igor Getman

IPC分类号： G01L9/12

CPC分类号： G01L19/02 ,  G01L9/0075

摘要： For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, wherein the pressure measuring cell is axially clamped between an elastic sealing ring, which bears against the membrane-containing, end face of the pressure measuring cell, and a support ring, which supports the measuring cell on the rear side thereof, the dimensions of the support ring are matched to the dimensions of the sealing ring and the pressure measuring cell in such a way that a radial deformation of the membrane-containing end face resulting from the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor because of a reduction of the axial clamping force by a least 10% amounts to not more than 0.02%. The geometry of the support ring is determined iteratively by means of the FEM.

摘要翻译： 为了最小化具有基本圆柱形平台的压力传感器和连接到平台端面的测量膜的压力传感器的跨度误差，其中压力测量单元被轴向夹紧在弹性密封环之间，弹性密封环承载在含膜的末端 压力测量单元的表面和支撑环，支撑环在其后侧支撑测量单元，支撑环的尺寸与密封环和压力测量单元的尺寸匹配，使得径向 由压力测量单元的轴向夹紧导致的含膜端面的变形足够小，由于轴向夹紧力减小至少10％，压力传感器的跨度误差不大于0.02％ 。 通过FEM迭代地确定支撑环的几何形状。

公开(公告)号：US5750899A

公开(公告)日：1998-05-12

申请号：US929030

申请日：1997-09-15

申请人： Frank Hegner ,  Elke Maria Schmidt ,  Ulfert Drewes ,  Rainer Martin

发明人： Frank Hegner ,  Elke Maria Schmidt ,  Ulfert Drewes ,  Rainer Martin

IPC分类号： G01L9/12 ,  G01L9/00 ,  G01L19/04 ,  G01L19/14 ,  G01L7/00 ,  G01L7/08

CPC分类号： G01L19/14 ,  G01L9/0075

摘要： To provide a flush-mounted and corrosion-resistant pressure sensor for measuring the pressure of a medium which, on the one hand, is very rugged and, on the other hand, has a casing (2) mechanically isolated from the sensing element (1) as perfectly as possible, and whose measured values exhibit little temperature dependence and little hysteresis, the casing (2) has an internal space (21) and is preferably pot-shaped for receiving the sensing element (1). An annular, particularly annular-disk-shaped, flexible connecting element (3), disposed between the casing (2) and the sensing element (1), and the sensing element close the interior space (21) toward the medium to be measured, and a liquid (4) fills the enclosed interior space (21).

摘要翻译： 为了提供一种用于测量介质的压力的嵌入式和耐腐蚀的压力传感器，其一方面非常坚固，另一方面具有与传感元件（1）机械隔离的壳体（2） ），并且其测量值显示出很小的温度依赖性和很小的滞后，所以壳体（2）具有内部空间（21），并且优选地是盆形以用于接收感测元件（1）。 设置在壳体（2）和感测元件（1）之间的环形的，特别是环形的盘形的柔性连接元件（3），并且感测元件朝向要测量的介质关闭内部空间（21） 并且液体（4）填充封闭的内部空间（21）。