摘要:
A method for evaluating crystal defects of a silicon wafer comprising: etching a surface of the silicon wafer by immersing the wafer in an etching solution; and observing etch pits formed on the etched surface of the wafer, wherein the silicon wafer of which crystal defects are evaluated has low electrical resistivity of 1 Ω·cm or less, and the etching solution is a mixture of hydrofluoric acid, nitric acid, acetic acid and water further including iodine or iodide, in which a volume ratio of nitric acid in the etching solution is the largest among volume ratios of hydrofluoric acid, nitric acid, acetic acid and water, and the etching solution is adjusted to have an etching rate of 100 nm/min or less for the silicon wafer. Thereby, there is provided a method for evaluating crystal defects of a silicon wafer with low electrical resistivity by using a chromium-free etching solution without toxic chromium with high capability of detecting defects.
摘要:
A magnetic sensor is constituted using magnetic sensor chips mounted on stages supported by interconnecting members and a frame having leads in a lead frame. Herein, the stages are inclined upon plastic deformation of the interconnecting members. When the frame is held in a metal mold and the stages are pressed, the interconnecting members are elastically deformed, so that the magnetic sensor chips are bonded onto the stages placed substantially in the same plane and are then wired with the leads. Thereafter, the stages are released from pressure, so that the interconnecting members are restored from the elastically deformed states thereof. When the magnetic sensor chips are combined together to realize three sensing directions, it is possible to accurately measure three-dimensional bearings of magnetism, and the magnetic sensor can be reduced in dimensions and manufactured with a reduced cost therefor.
摘要:
In an azimuth/inclination-angle detection apparatus, a measurement data obtaining unit obtains first and second measurement data sets g and h from acceleration and magnetic sensors, respectively. A first computation unit calculates an azimuth α0, an elevation angle β0, and a geomagnetism depression angle θ0 from the measurement data sets g and h. An averaging unit accumulates and averages the geomagnetism depression angle θ0 so as to obtain a value to be used as a geomagnetism depression angle θ. A second computation unit calculates an azimuth α and an elevation angle β from the second measurement data set h and the geomagnetism depression angle θ. When a plurality of solutions exist, they are stored as candidates (α1, β1) and (α2, β2). A selection unit selects a detection value (α, β) from the candidates (α1, β1) and (α2, β2) with reference to the above-described values α0 and β0 serving as reference values.
摘要:
A portable phone has a CPU and a magnetic sensor unit including an X-axis magnetic sensor, a Y-axis magnetic sensor, and a temperature sensor. CPU measures at first and second temperatures the influence of a magnetic field of permanent magnets upon an output Sx of the X-axis magnetic sensor and an output Sy of the Y-axis magnetic sensor, and stores the influence data together with the first and second temperature data. CPU estimates at the present temperature the influence upon the output Sx of the X-axis magnetic sensor and the output Sy of the Y-axis magnetic sensor, from the present temperature detected with the temperature sensor and the stored influence data. CPU corrects the outputs Sx and Sy in accordance with the estimated influence and determines the direction of the portable phone from the corrected outputs Sx and Sy.
摘要:
A magnetic sensor comprises magnetoresistive elements and permanent magnet films, which are combined together to form GMR elements formed on a quartz substrate having a square shape, wherein the permanent magnet films are paired and connected to both ends of the magnetoresistive elements, so that an X-axis magnetic sensor and a Y-axis magnetic sensor are realized by adequately arranging the GMR elements relative to the four sides of the quartz substrate. Herein, the magnetization direction of the pinned layer of the magnetoresistive element forms a prescribed angle of 45° relative to the longitudinal direction of the magnetoresistive element or relative to the magnetization direction of the permanent magnet film. Thus, it is possible to reliably suppress offset variations of bridge connections of the GMR elements even when an intense magnetic field is applied; and it is therefore possible to noticeably improve the resistant characteristics to an intense magnetic field.
摘要:
A fixing device includes a heating member disposed with an internal heating source and a pressuring member that presses against the heating member. The fixing device is configured to be attachable to and detachable from an image forming apparatus body, and includes: brackets that retain the heating member; pressuring levers that retain the pressuring member and are movably supported in the brackets; urging means that push the pressuring levers in a direction where the pressuring member presses against the heating member; and cams that are rotatably supported in the brackets, contact the pressuring levers, and adjust the pressuring force of the pressuring member.
摘要:
When apparatuses controllable via a network exist inside and outside a user's visual range, a user remotely controls at least one of the apparatuses via the network using a predetermined control point in a remote control system. The remote control system includes the following: a mechanism that causes the control point to transmit a command for specifying an apparatus to be controlled via the network to an apparatus to be specified in accordance with a user's apparatus specifying operation; and a mechanism that causes the apparatus that has received the command for specifying an apparatus to be controlled to transmit a response via the network to the control point as well as to perform an operation using a device attached to the body of the apparatus in response to the command.
摘要:
A portable terminal apparatus is mounted in a casing and has a magnetic sensor that detects a magnetic field around the casing with an offset and outputs magnetic data representing the detected magnetic field, and a tilt sensor that detects a tilt of the casing and sequentially outputs tilt data representing the detected tilt. In the portable terminal apparatus, a capture part sequentially captures the magnetic data from the magnetic sensor at a given time interval. A calculation part calculates the offset of the magnetic sensor based on a plurality of the magnetic data sequentially captured by the capture part. A detection part detects an orientation variation of the casing based on the tilt data sequentially outputted from the tilt sensor. A change part changes the time interval for sequentially capturing the magnetic data in accordance with the detected orientation variation.
摘要:
A magnetic sensor 10 includes GMR elements 11-18, and heating coils 21-24 serving as heat generating elements. The elements 11-14 and 15-18 are bridge-interconnected to constitute X-axis and Y-axis sensors, respectively. The heating coils 21, 22, 23, and 24 are disposed adjacent to the elements 11 and 12, the elements 13 and 14, the elements 15 and 16, and the elements 17 and 18, respectively. The heating coils 21-24, when electrically energized, heat mainly the adjacent elements. Therefore, the elements can be heated and cooled in a short period of time in which constant geomagnetism can be ensured. Data for compensation of temperature-dependent characteristic (ratio of change in sensor output value to variation in element temperature) is obtained on the basis of the temperatures of the elements before and after the heating, and the magnetic sensor outputs before and after the heating. Subsequently, the temperature characteristics of the elements are compensated on the basis of the data.
摘要:
Data are input from a geomagnetic sensor that detects magnetic fields in three axial directions, and magnetic field data are measured on the basis of the input data. The measured magnetic field data are sequentially stored, and a determination is made as to whether a plurality of the magnetic field data thus stored lie within a same plane in a three-dimensional orientation space. When it has been determined that the plurality of the magnetic field data lie within the same plane in the three-dimensional orientation space, center coordinates of a circular arc where the stored magnetic field data lie are calculated, as provisional offset values, on the basis of the magnetic field data and in accordance with a predetermined algorithm. Magnetic field data measured after the calculation of the provisional offset values is corrected with the provisional offset values, and an arithmetic operation is performed for determining orientation data on the basis of the corrected magnetic field data.