Electron beam apparatus and a device manufacturing method using the same apparatus
    21.
    发明授权
    Electron beam apparatus and a device manufacturing method using the same apparatus 有权
    电子束装置和使用该装置的装置制造方法

    公开(公告)号:US07385197B2

    公开(公告)日:2008-06-10

    申请号:US11175390

    申请日:2005-07-07

    IPC分类号: G01N23/00 G01K7/00

    摘要: Disclosed is an electron beam apparatus, in which a plurality of electron beams is formed from electrons emitted from an electron gun 21 and used to irradiate a sample surface via an objective lens 28, said apparatus comprising: a beam separator 27 for separating a secondary electron beams emanating from respective scanned regions on the sample from the primary electron beams; a magnifying electron lens 31 for extending a beam space between adjacent beams in the separated plurality of secondary electron beams; a fiber optical plate 32 for converting the magnified plurality of secondary electron beams to optical signals by a scintillator and for transmitting the signals; a photoelectric conversion device 35 for converting the optical signal to an electric signal; an optical zoom lens 33 for focusing the optical signal from the scintillator into an image on the photoelectric conversion device; and a rotation mechanism 36 for rotating the photoelectric conversion device 35 around the optical axis.

    摘要翻译: 公开了一种电子束装置,其中从电子枪21发射的电子形成多个电子束,并用于经由物镜28照射样品表面,所述装置包括:用于分离二次电子的光束分离器27 来自一次电子束的样品上的各扫描区域发出的光束; 用于在分离的多个二次电子束中的相邻光束之间延伸光束空间的放大电子透镜31; 用于通过闪烁体将放大的多个二次电子束转换为光信号并用于发送信号的光纤光学板32; 用于将光信号转换为电信号的光电转换装置35; 用于将来自闪烁体的光信号聚焦到光电转换装置上的图像的光学变焦透镜33; 以及用于使光电转换装置35围绕光轴旋转的旋转机构36。

    TDI detecting device, a feed-through equipment, an electron beam apparatus using these device and equipment, and a semiconductor device manufacturing method using the same electron beam apparatus
    23.
    发明申请
    TDI detecting device, a feed-through equipment, an electron beam apparatus using these device and equipment, and a semiconductor device manufacturing method using the same electron beam apparatus 有权
    TDI检测装置,馈通装置,使用这些装置和设备的电子束装置,以及使用该电子束装置的半导体装置的制造方法

    公开(公告)号:US20080023651A1

    公开(公告)日:2008-01-31

    申请号:US11896519

    申请日:2007-09-04

    IPC分类号: G01J1/00

    摘要: An electron beam apparatus comprises a TDI sensor 64 and a feed-through device 50. The feed-through device has a socket contact 54 for interconnecting a pin 52 attached to a flanged 51 for separating different environments and the other pin 53 making a pair with the pin 52, in which the pin 52, the other pin 53 and the socket contact 54 together construct a connecting block, and the socket contact 54 has an elastic member 61. Accordingly, even if a large number of connecting blocks are provided, the connecting force may be kept to such a low level as to prevent the breakage in the sensor. The pin 53 is connected with the TDI sensor 64, in which a pixel array has been adaptively configured based on the optical characteristic of an image projecting optical system. That sensor has a number of integration stages that can reduce the field of view of the image projecting optical system to as small as possible so that a maximal acceptable distortion within the field of view may be set larger. Further, the number of integration stage may be determined such that the data rate of the TDI sensor would not be reduced but the number of pins would not be increased as much as possible. Preferably, the number of line count may be almost equal to the number of integration stages.

    摘要翻译: 电子束装置包括TDI传感器64和馈通装置50.馈通装置具有插座触点54,用于互连连接到凸缘51的引脚52,用于分离不同的环境,而另一个引脚53与 销52,销52,另一销53和插座接触54一起构成连接块,插座触头54具有弹性构件61.因此,即使设置了大量的连接块, 连接力可以保持在如此低的水平,以防止传感器中的破损。 引脚53与TDI传感器64连接,其中像素阵列已经基于图像投影光学系统的光学特性被自适应地配置。 该传感器具有可以将图像投影光学系统的视野尽可能地减小的多个积分级,使得视野内的最大可接受失真可以被设定得更大。 此外,可以确定积分级的数量,使得TDI传感器的数据速率不会降低,但是引脚的数量不会尽可能多地增加。 优选地,行计数的数量可以几乎等于积分级数。

    Shock absorption pad for a vehicle
    27.
    发明授权
    Shock absorption pad for a vehicle 有权
    减震垫用于车辆

    公开(公告)号:US07017978B2

    公开(公告)日:2006-03-28

    申请号:US10507587

    申请日:2003-03-28

    IPC分类号: B60N3/06 B60R21/04

    摘要: The present invention the related to a shock absorption pad for a vehicle for protecting occupant's lower legs. The shock absorption pad according to the present invention on which an occupant's foot is placed is attached on a surface of a toe board. The shock absorption pad includes a first shock absorption layer provided on the occupant's foot-placing side for absorbing an impact generated in a boundary region at which an energy absorption load of a vehicle body becomes different in a deformation process of the vehicle body at a vehicle crash, and a second shock absorption part provided on the toe board's side for absorbing an impact generated in a region in which the energy absorption load is high.

    摘要翻译: 本发明涉及一种用于保护乘客的小腿的车辆用减震垫。 在脚趾板的表面上安装有放置乘员脚部的本发明的减震垫。 减震垫包括设置在乘客脚部放置侧的第一减震层,用于吸收车辆在车辆的变形过程中在车体的能量吸收负载变得不同的边界区域中产生的冲击 以及在脚趾板侧设置的第二减震部,用于吸收能量吸收负荷高的区域产生的冲击。

    Organic electroluminescent device and method for producing the same
    29.
    发明申请
    Organic electroluminescent device and method for producing the same 有权
    有机电致发光器件及其制造方法

    公开(公告)号:US20050287396A1

    公开(公告)日:2005-12-29

    申请号:US11166158

    申请日:2005-06-27

    摘要: An organic electroluminescent device and a method for producing the same, the organic electroluminescent device including a luminescent layer produced by a vapor-deposition method disposed between a pair of electrodes, the luminescent layer containing at least one host material and at least one metal complex including a partial structure represented by formula (I): wherein M represents a metal atom, R1, R2 and R4 to R8 each independently represent a hydrogen atom or a substituent, and R3 represents a group represented by formula (II), an alkoxy group or an aryloxy group: wherein R11 to R13 each independently represent a hydrogen atom or a substituent, provided that at least two of them each independently represent an alkyl group or an aryl group.

    摘要翻译: 一种有机电致发光器件及其制造方法,所述有机电致发光器件包括通过设置在一对电极之间的气相沉积法产生的发光层,所述发光层含有至少一种主体材料和至少一种金属络合物,所述金属络合物包括 由式(I)表示的部分结构:其中M表示金属原子,R 1,R 2和R 4与R SUP > 8 各自独立地表示氢原子或取代基,R 3表示由式(II)表示的基团,烷氧基或芳氧基:其中R 11 R 13各自独立地表示氢原子或取代基,条件是它们中的至少两个各自独立地表示烷基或芳基。

    Objective lens, electron beam system and method of inspecting defect
    30.
    发明申请
    Objective lens, electron beam system and method of inspecting defect 有权
    物镜,电子束系统和检测缺陷的方法

    公开(公告)号:US20050263715A1

    公开(公告)日:2005-12-01

    申请号:US11136668

    申请日:2005-05-25

    IPC分类号: H01J37/141 H01J37/28

    摘要: An electron beam system or a method for manufacturing a device using the electron beam system in which an electron beam can be irradiated at a high current density and a ratio of transmittance of a secondary electron beam of an image projecting optical system can be improved and which can be compact in size. The surface of the sample S is divided into plural stripe regions which in turn are divided into rectangle-shaped main fields. The main field is further divided into plural square-shaped subfields. The irradiation with the electron beams and the formation of a two-dimensional image are repeated in a unit of the subfields. A magnetic gap formed by the inner and outer magnetic poles of the objective lens is formed on the side of the sample, and an outer side surface and an inner side surface of each of the inner magnetic pole and the outer magnetic pole, respectively, forming the magnetic gap have each part of a conical shape with a convex having an angle of 45° or greater with respect to the optical axis.

    摘要翻译: 可以提高电子束系统或使用其中以高电流密度照射电子束并且可以提高图像投影光学系统的二次电子束的透射率的电子束系统的装置的方法,并且哪些 可以紧凑的尺寸。 样品S的表面被分成多个条纹区域,其又分成矩形主场。 主场进一步分为多个方形子场。 以子场为单位重复照射电子束和形成二维图像。 在物体侧形成由物镜的内,外磁极形成的磁隙,分别形成内磁极和外磁极的外侧面和内侧面,形成 磁隙具有相对于光轴具有45°或更大角度的凸起的圆锥形状的每一部分。