Abstract:
The invention set forth in this document discloses an optical amplifying circuit which includes a dielectric multilayer interference filter disposed at an output side or an input side of the optical amplifying element that is a part of the optical amplifying circuit. The dielectric multilayer interference filter suppresses off-band spontaneous emission.
Abstract:
A process for formation of a metal pattern comprising the steps of forming a silicide metal film on an underlying substrate, forming an anti-reflection film on the underlying substrate on which the silicide metal film is formed, forming a resist film on the anti-reflection film, patterning the resist film by photolithography to form a predetermined pattern, and using the thus patterned resist film as a mask and etching the silicide metal film on the underlying substrate, wherein the optical constants and the thickness of the anti-reflection film are determined to give the smallest standing wave effect at the time of photolithography in accordance with the type of the silicide metal film.
Abstract:
A reclaimed joint sheet used as a gasket or packing member for automobiles, ships and the like consists of a first layer of a joint sheet made from a given composition, a second layer of a joint sheet made by mixing finely pulverized pieces of the joint sheet after the punching out of the joint sheet having a given particle size with a composition for the formation of the joint sheet, and a third layer of a joint sheet containing the same components as the first layer.
Abstract:
An apparatus for preparing NC data is used in machining an involute curve on a workpiece by relatively moving a tool and the workpiece along mutually perpendicular first and second axes encompassed within a plane while relatively rotating the tool and the workpiece about a third axis which is perpendicular to the plane. In the apparatus, there is provided involute curve definition devie defines the involute curve based upon input parameters, machining point calculation means calculates a series of machining points on the involute curve, and tangential line calculation device calculates a tangential line which connects the involute curve at each of the machining points. The apparatus further includes angle calculation device calculates a conversion angle through which each of the machining points is to be rotated about the third axis so as to make the tangential line at each of the machining points intersect one of the first and second axes at a right angle, coordinate conversion device converts coordinate values of each of the machining points into modified coordinate values which each of the machining points would have if the same were rotated about the third axis through the conversion angle calculated by the angle calculation device, and data preparation device prepares NC data of numerous data blocks each including the conversion angle and the converted coordinate values of each of the machining points.
Abstract:
A process for producing a tube having a strength imparting tubular body and a tubular lining member covering and bonded to the inner surface of the tubular body comprises the steps of forming mandrel contact portions on a synthetic resin surface of a lining sheet in the form of a strip and noncontact portions in the surface distributedly among the contact portions, helically winding the lining sheet around a mandrel with the synthetic resin surface positioned inside and with the sheet lapping over itself, bonding the lap to the underlying portion of the wound sheet to form the lining member, and moving the tubular lining member axially of the mandrel in a direction to remove the member therefrom. The lining member formed around the mandrel is smoothly movable axially thereof by virtue of the presence of the contact and noncontact portions distributedly formed over the sheet resin surface.
Abstract:
A wiper control device controls a drive section for driving a wiper to operate at a target speed, thereby causing the wiper to perform wiping operation. The wiper control device includes a voltage monitoring section, which monitors a power source voltage supplied to the drive section, and a target speed setting section, which sets the target speed. When the power source voltage is lower than or equal to a threshold voltage, the target speed setting section sets the target speed in accordance with the power source voltage. When the power source voltage is higher than the threshold voltage, the target speed setting section sets the target speed at a constant value.
Abstract:
When using a CCD sensor as a photo-detector in a device for inspecting foreign matters and defects, it has a problem of causing electric noise while converting the signal charge, produced inside by photoelectric conversion, into voltage and reading it. Therefore, the weak detected signal obtained by detecting reflected and scattered light from small foreign matters and defects is buried in the electric noise, which has been an obstacle in detecting small foreign matters and defects. In order to solve the above problem, according to the present invention, an electron multiplying CCD sensor is used as a photo-detector. The electron multiplying CCD sensor is capable of enlarging signals brought about by inputted light relatively to the electric noise by multiplying the electrons produced through photoelectric conversion and reading them. Accordingly, compared to a conventional CCD sensor, it can detect weaker light and, therefore, smaller foreign matters and defects.
Abstract:
A defect inspection device, which inspects defects such as foreign materials existing on a specimen on which a circuit pattern of wiring or the like is formed, is provided with an illumination optical system which illuminates a plurality of different areas the specimen with a plurality of linear shaped beams and an image forming optical system that forms images of the plurality of the illuminated areas on a plurality of detectors, and the detectors are configured to receive a plurality of polarization components substantially at the same time and individually, wherein the polarization components are different from each other and are contained in each of the plurality of the optical images formed by the image forming optical system, thereby detecting a plurality of signals corresponding to the polarization components and carrying out the inspection at high speed under a plurality of optical conditions.
Abstract:
A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.
Abstract:
A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.