Optical signal amplifying circuit
    21.
    发明授权
    Optical signal amplifying circuit 失效
    光信号放大电路

    公开(公告)号:US5864424A

    公开(公告)日:1999-01-26

    申请号:US906296

    申请日:1997-08-05

    Inventor: Hiroyuki Nakano

    CPC classification number: H01S3/10023 H01S2301/02 H01S2301/04 H01S3/06787

    Abstract: The invention set forth in this document discloses an optical amplifying circuit which includes a dielectric multilayer interference filter disposed at an output side or an input side of the optical amplifying element that is a part of the optical amplifying circuit. The dielectric multilayer interference filter suppresses off-band spontaneous emission.

    Abstract translation: 在该文献中提出的发明公开了一种光放大电路,其包括设置在作为光放大电路的一部分的光放大元件的输出侧或输入侧的电介质多层干涉滤光器。 电介质多层干涉滤波器抑制带外自发发射。

    Process for the formation of a metal pattern
    22.
    发明授权
    Process for the formation of a metal pattern 失效
    用于形成金属图案的工艺

    公开(公告)号:US5670297A

    公开(公告)日:1997-09-23

    申请号:US556426

    申请日:1995-11-09

    Abstract: A process for formation of a metal pattern comprising the steps of forming a silicide metal film on an underlying substrate, forming an anti-reflection film on the underlying substrate on which the silicide metal film is formed, forming a resist film on the anti-reflection film, patterning the resist film by photolithography to form a predetermined pattern, and using the thus patterned resist film as a mask and etching the silicide metal film on the underlying substrate, wherein the optical constants and the thickness of the anti-reflection film are determined to give the smallest standing wave effect at the time of photolithography in accordance with the type of the silicide metal film.

    Abstract translation: 一种用于形成金属图案的方法,包括以下步骤:在下面的基底上形成硅化物金属膜,在其上形成硅化金属膜的下面的基底上形成防反射膜,在防反射层上形成抗蚀剂膜 膜,通过光刻法形成抗蚀剂膜以形成预定图案,并使用如此构图的抗蚀剂膜作为掩模,并蚀刻下面的衬底上的硅化金属膜,其中确定抗反射膜的光学常数和厚度 以根据硅化物金属膜的类型在光刻时给出最小的驻波效应。

    Method and apparatus for preparing numerical control data
    24.
    发明授权
    Method and apparatus for preparing numerical control data 失效
    制备数控数据的方法和装置

    公开(公告)号:US5614800A

    公开(公告)日:1997-03-25

    申请号:US314296

    申请日:1994-09-30

    Abstract: An apparatus for preparing NC data is used in machining an involute curve on a workpiece by relatively moving a tool and the workpiece along mutually perpendicular first and second axes encompassed within a plane while relatively rotating the tool and the workpiece about a third axis which is perpendicular to the plane. In the apparatus, there is provided involute curve definition devie defines the involute curve based upon input parameters, machining point calculation means calculates a series of machining points on the involute curve, and tangential line calculation device calculates a tangential line which connects the involute curve at each of the machining points. The apparatus further includes angle calculation device calculates a conversion angle through which each of the machining points is to be rotated about the third axis so as to make the tangential line at each of the machining points intersect one of the first and second axes at a right angle, coordinate conversion device converts coordinate values of each of the machining points into modified coordinate values which each of the machining points would have if the same were rotated about the third axis through the conversion angle calculated by the angle calculation device, and data preparation device prepares NC data of numerous data blocks each including the conversion angle and the converted coordinate values of each of the machining points.

    Abstract translation: 用于制备NC数据的装置用于在工件上加工渐开线曲线,通过相对移动刀具和工件沿着包围在平面内的相互垂直的第一和第二轴线相对移动,同时使工具和工件围绕垂直于第三轴线旋转 到飞机 在该装置中,提供渐开线曲线定义,根据输入参数定义渐开线曲线,加工点计算装置计算渐开线曲线上的一系列加工点,切线计算装置计算连接渐开线曲线的切线 每个加工点。 该装置还包括角度计算装置,计算各加工点围绕第三轴旋转的转换角度,以使每个加工点的切线与右侧的第一轴和第二轴相交, 角度坐标转换装置将每个加工点的坐标值转换成通过由角度计算装置计算出的转换角度而绕第三轴旋转的加工点将具有的修正坐标值,以及数据准备装置 准备多个数据块的NC数据,每个数据块包括转换角度和每个加工点的转换坐标值。

    Process for producing tube
    25.
    发明授权
    Process for producing tube 失效
    生产管的工艺

    公开(公告)号:US4978406A

    公开(公告)日:1990-12-18

    申请号:US342964

    申请日:1989-04-25

    Inventor: Hiroyuki Nakano

    Abstract: A process for producing a tube having a strength imparting tubular body and a tubular lining member covering and bonded to the inner surface of the tubular body comprises the steps of forming mandrel contact portions on a synthetic resin surface of a lining sheet in the form of a strip and noncontact portions in the surface distributedly among the contact portions, helically winding the lining sheet around a mandrel with the synthetic resin surface positioned inside and with the sheet lapping over itself, bonding the lap to the underlying portion of the wound sheet to form the lining member, and moving the tubular lining member axially of the mandrel in a direction to remove the member therefrom. The lining member formed around the mandrel is smoothly movable axially thereof by virtue of the presence of the contact and noncontact portions distributedly formed over the sheet resin surface.

    Abstract translation: 一种制造具有赋予强度的管状体的管子和覆盖并结合到管状体的内表面的管状衬里构件的方法包括以下步骤:在衬垫片的合成树脂表面上形成心轴接触部分,其形式为 在接触部分之间分布的表面上的带状和非接触部分,将合成树脂表面位于内部螺旋地缠绕在心轴上,并且片材在其自身上进行研磨,将衬垫紧固到卷绕片材的下面部分,从而形成 并且使所述管状衬里构件在所述心轴的轴向上沿着从其移除构件的方向移动。 由于在片状树脂表面上分布形成的接触和非接触部分的存在,围绕心轴形成的衬里构件可以在其轴向平滑地移动。

    Wiper control device
    26.
    发明授权
    Wiper control device 有权
    刮水器控制装置

    公开(公告)号:US09216717B2

    公开(公告)日:2015-12-22

    申请号:US13823264

    申请日:2012-08-31

    Inventor: Hiroyuki Nakano

    CPC classification number: B60S1/0896 B60S1/08

    Abstract: A wiper control device controls a drive section for driving a wiper to operate at a target speed, thereby causing the wiper to perform wiping operation. The wiper control device includes a voltage monitoring section, which monitors a power source voltage supplied to the drive section, and a target speed setting section, which sets the target speed. When the power source voltage is lower than or equal to a threshold voltage, the target speed setting section sets the target speed in accordance with the power source voltage. When the power source voltage is higher than the threshold voltage, the target speed setting section sets the target speed at a constant value.

    Abstract translation: 刮水器控制装置控制用于驱动刮水器以驱动目标速度的驱动部分,从而使刮水器执行擦拭操作。 刮水器控制装置包括监视供给驱动部的电源电压的电压监视部和设定目标速度的目标速度设定部。 当电源电压低于或等于阈值电压时,目标速度设定部分根据电源电压来设定目标速度。 当电源电压高于阈值电压时,目标速度设定部将目标速度设定为恒定值。

    Method for inspecting pattern defect and device for realizing the same
    27.
    发明授权
    Method for inspecting pattern defect and device for realizing the same 失效
    检查图案缺陷的方法及其实现方法

    公开(公告)号:US08748795B2

    公开(公告)日:2014-06-10

    申请号:US12329274

    申请日:2008-12-05

    Abstract: When using a CCD sensor as a photo-detector in a device for inspecting foreign matters and defects, it has a problem of causing electric noise while converting the signal charge, produced inside by photoelectric conversion, into voltage and reading it. Therefore, the weak detected signal obtained by detecting reflected and scattered light from small foreign matters and defects is buried in the electric noise, which has been an obstacle in detecting small foreign matters and defects. In order to solve the above problem, according to the present invention, an electron multiplying CCD sensor is used as a photo-detector. The electron multiplying CCD sensor is capable of enlarging signals brought about by inputted light relatively to the electric noise by multiplying the electrons produced through photoelectric conversion and reading them. Accordingly, compared to a conventional CCD sensor, it can detect weaker light and, therefore, smaller foreign matters and defects.

    Abstract translation: 当在用于检查异物和缺陷的装置中使用CCD传感器作为光检测器时,存在在将由光电转换产生的信号电荷转换成电压并读取的同时将电噪声引起的问题。 因此,通过检测来自小异物和缺陷的反射和散射光获得的弱检测信号被埋在电噪声中,这是检测小异物和缺陷的障碍。 为了解决上述问题,根据本发明,使用电子倍增CCD传感器作为光检测器。 电子倍增CCD传感器能够通过将通过光电转换产生的电子与其进行读取而相对于电噪声放大由输入的光产生的信号。 因此,与常规CCD传感器相比,它可以检测较弱的光,因此可以检测较小的异物和缺陷。

    Defect inspection device and defect inspection method
    28.
    发明授权
    Defect inspection device and defect inspection method 有权
    缺陷检查装置和缺陷检查方法

    公开(公告)号:US08634069B2

    公开(公告)日:2014-01-21

    申请号:US12992903

    申请日:2009-05-13

    CPC classification number: G01N21/95607 G01N21/9501 G01N2021/9563

    Abstract: A defect inspection device, which inspects defects such as foreign materials existing on a specimen on which a circuit pattern of wiring or the like is formed, is provided with an illumination optical system which illuminates a plurality of different areas the specimen with a plurality of linear shaped beams and an image forming optical system that forms images of the plurality of the illuminated areas on a plurality of detectors, and the detectors are configured to receive a plurality of polarization components substantially at the same time and individually, wherein the polarization components are different from each other and are contained in each of the plurality of the optical images formed by the image forming optical system, thereby detecting a plurality of signals corresponding to the polarization components and carrying out the inspection at high speed under a plurality of optical conditions.

    Abstract translation: 检查存在于其上形成有布线等的电路图案的样本上存在的异物的缺陷检查装置设置有照明光学系统,该照明光学系统用多个线性照射多个不同的区域 以及形成在多个检测器上的多个照明区域的图像的图像形成光学系统,并且检测器被配置为基本上同时和单独地接收多个偏振分量,其中偏振分量是不同的 并且被包含在由图像形成光学系统形成的多个光学图像的每一个中,从而检测对应于偏振分量的多个信号,并且在多个光学条件下高速执行检查。

    Method of apparatus for detecting particles on a specimen
    29.
    发明授权
    Method of apparatus for detecting particles on a specimen 有权
    用于检测样品上的颗粒的装置的方法

    公开(公告)号:US07952700B2

    公开(公告)日:2011-05-31

    申请号:US12907895

    申请日:2010-10-19

    CPC classification number: G01N21/956

    Abstract: A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.

    Abstract translation: 通过检查其中形成有多个图案的样本的表面的样本来检测缺陷的方法和装置,通过从仰角不同的多个方向之一的细长形状的光束照射, 根据要检测的缺陷的种类从照明光源发射的光束。 通过用安装在不同仰角方向上的多个图像传感器捕获由细长形状光束照射的样本的多个光学图像,通过根据在照射细长的照射区域中在样品上形成的图案的密度来改变放大倍率 形状光通量。 通过处理由多个图像传感器捕获的图像来检测样本上的缺陷。

    Method of apparatus for detecting particles on a specimen
    30.
    发明授权
    Method of apparatus for detecting particles on a specimen 有权
    用于检测样品上的颗粒的装置的方法

    公开(公告)号:US07817261B2

    公开(公告)日:2010-10-19

    申请号:US12114139

    申请日:2008-05-02

    CPC classification number: G01N21/956

    Abstract: A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.

    Abstract translation: 通过检查其中形成有多个图案的样本的表面的样本来检测缺陷的方法和装置,通过从仰角不同的多个方向之一的细长形状的光束照射, 根据要检测的缺陷的种类从照明光源发射的光束。 通过用安装在不同仰角方向上的多个图像传感器捕获由细长形状光束照射的样本的多个光学图像,通过根据在照射细长的照射区域中在样品上形成的图案的密度来改变放大倍率 形状光通量。 通过处理由多个图像传感器捕获的图像来检测样本上的缺陷。

Patent Agency Ranking