公开(公告)号：US09384941B2

公开(公告)日：2016-07-05

申请号：US14601478

申请日：2015-01-21

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Xin Man

IPC: H01J37/26 ,  G21K5/04 ,  H01J37/20 ,  H01J37/28 ,  H01J37/305

CPC classification number: H01J37/20 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/20214 ,  H01J2237/2802 ,  H01J2237/31749

Abstract: A charged particle beam apparatus includes an electron beam column and an FIB column, in which an irradiation axis of the electron beam column and an irradiation axis of the FIB column are disposed to be perpendicular or substantially perpendicular to each other on a sample without interference. In addition, the first sample stage and a second sample stage are independently provided and moved to be tilted centering on an axial direction. The sample is moved by the first sample stage and a sample piece which is cut off from the sample is moved to be fixed to a tip end of a probe which is rotatable centering on the axial direction, thereby manufacturing the sample piece which reduces the influence of a curtaining effect.

Abstract translation: 带电粒子束装置包括电子束柱和FIB柱，其中电子束柱的照射轴和FIB柱的照射轴线在样本上彼此垂直或基本上垂直于无干扰。 此外，第一样品台和第二样品台独立地设置并移动成以轴向为中心倾斜。 样品通过第一样品台移动，并且从样品切下的样品片移动以固定到可以轴向旋转的探针的末端，从而制造减少影响的样品片 的效果。

公开(公告)号：US09368323B2

公开(公告)日：2016-06-14

申请号：US14601497

申请日：2015-01-21

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Atsushi Uemoto ,  Xin Man ,  Tatsuya Asahata

IPC: H01J37/26

CPC classification number: H01J37/265 ,  H01J2237/15 ,  H01J2237/30483

Abstract: A cross-section processing observation apparatus includes an ion beam control unit which controls a charged particle beam generation-focusing portion and a deflector, and a DAC which converts an input digital signal into an analog signal which is to be input to the deflector. A field-of-view setting portion sets a value of a field of view of a charged particle beam where the scanning performed by the deflector is performed on the basis of a set value of a slice amount, and the field-of-view setting portion is configured to set a value of one-nth of the slice amount, where n is a first natural number, as an input digital value “1” of the digital/analog converter and to set a value obtained by multiplying said value set as the input digital value “1” by a second natural number as a value of the field of view.

Abstract translation: 横截面处理观察装置包括控制带电粒子束产生聚焦部分和偏转器的离子束控制单元和将输入数字信号转换为要被输入到偏转器的模拟信号的DAC。 视野设定部设定基于切片量的设定值进行由偏转器执行的扫描的带电粒子束的视场的值，并且视野设定 部分被配置为将数字/模拟转换器的输入数字值“1”作为数字/模拟转换器的输入数字值“1”，将其中n是第一自然数的片数量的十进制值设置为将所设置的值设置为 输入数字值“1”作为视场的值的第二自然数。

公开(公告)号：US09245713B2

公开(公告)日：2016-01-26

申请号：US14470135

申请日：2014-08-27

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Xin Man ,  Tatsuya Asahata ,  Atsushi Uemoto

IPC: G21K5/04 ,  H01J37/317 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/317 ,  H01J37/244 ,  H01J37/28 ,  H01J37/304 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/08 ,  H01J2237/24475 ,  H01J2237/2802 ,  H01J2237/31749

Abstract: A charged particle beam apparatus for processing a tip end portion of a sample into a needle shape, includes an ion beam irradiation unit that irradiates the tip end portion with ion beams, an electron beam irradiation unit that irradiates the tip end portion with electron beams, a secondary electron detection unit that detects secondary electrons generated at the tip end portion by the irradiation with the electron beams, and an EBSD detection unit that detects diffracted electrons generated at the tip end portion by the irradiation with the electron beams.

Abstract translation: 一种用于将样品的尖端处理成针状的带电粒子束装置包括：用离子束照射前端部的离子束照射单元，用电子束照射前端部的电子束照射单元， 二次电子检测单元，其通过照射电子束来检测在前端部分产生的二次电子;以及EBSD检测单元，其通过用电子束的照射检测在前端部分产生的衍射电子。

公开(公告)号：US08853629B2

公开(公告)日：2014-10-07

申请号：US13845608

申请日：2013-03-18

Applicant: Hitachi High-Tech Science Corporation

Inventor： Xin Man

IPC: H01J37/22 ,  H01J37/305 ,  G01N23/22 ,  G01N1/32

CPC classification number: H01J37/3053 ,  G01N1/32 ,  G01N23/2202 ,  H01J2237/226 ,  H01J2237/31745

Abstract: A cross-section processing and observation method including: acquiring a surface image by scanning and irradiating a surface of a sample with ion beam; setting, on the surface image, a first sliced region and a second sliced region for performing the slice processing, the second sliced region being adjacent to the first sliced region and having a longitudinal length obtained by subtracting a slice width of the second sliced region from a longitudinal length of the first sliced region; forming a cross-section by irradiating the first sliced region and the second sliced region with the ion beam; and acquiring a cross-sectional image by irradiating the cross-section with electron beam.

Abstract translation: 一种横截面处理和观察方法，包括：通过用离子束扫描和照射样品的表面来获取表面图像; 在所述表面图像上设置用于执行所述切片处理的第一切片区域和第二切片区域，所述第二切片区域与所述第一切片区域相邻，并且具有通过从所述第二切片区域从所述第二切片区域的切片宽度 所述第一切片区域的纵向长度; 通过用离子束照射第一切片区域和第二切片区域来形成横截面; 以及通过用电子束照射横截面来获取横截面图像。